The utility model relates to
photoresist production auxiliary equipment technical field, concretely relates to an insulating
carbon black storage device for
photoresist, including storage box, the top of storage box is connected with feed inlet, the first
solenoid valve is installed in the communication of feed inlet and storage box, the output port department of storage box bottom is provided with the second
solenoid valve, still including fixed mounting on the
turbine molecular pump of storage box outer side wall, the output end of
turbine molecular pump is connected with the air cylinder of fixed mounting in the outer side wall of storage box, the top lift sliding of air cylinder is inserted with
nitrogen tube, the output end of
nitrogen tube is inserted to storage box, and is equipped with one -way
exhaust valve, the utility model discloses
nitrogen tube height is adjusted dynamically through lift cylinder, makes it always close
carbon black material surface, and nitrogen fills the space not being occupied by material directly, and replacement efficiency improves 30% or more, and nitrogen consumption reduces 20%-40%, and
turbine molecular pump provides high -purity nitrogen delivery, prevents the back flow in combination one -way
exhaust valve, ensures the
inert environment of fast establishment.