71703 results about "Surface plate" patented technology

A multi-channel faceplate 200, that in some embodiments is monolithic, is provided as a portion of a gas delivery system to a process chamber 100. At least two sets of gas pathways are disposed through a faceplate and allow for independent delivery of separate gases into a process chamber 100. In one embodiment, a first gas pathway, which includes a first set of vertical channels 226, is formed through the faceplate 200. A second gas pathway includes a second set of vertical channels 228, which is formed through a portion of the faceplate and connected to a set of interconnecting horizontal channels 222 in the faceplate 200, where the second gas pathway maintains fluidic separation from the first gas pathway, prior to the gases entering the process chamber 100.

A faceplate for a showerhead of a semiconductor wafer processing system is provided. The faceplate has a plurality of gas passageways to provide a plurality of gases to the process region without commingling those gases before they reach the processing region within a reaction chamber. The showerhead includes a faceplate and a gas distribution manifold assembly. The faceplate defines a plurality of first gas holes that carry a first gas from the manifold assembly through the faceplate to the process region, and a plurality of channels that couple a plurality of second gas holes to a radial plenum that receives the second gas from the manifold assembly. The faceplate and the manifold assembly are each fabricated from a substantially solid nickel material.

A disclosed substrate position detection apparatus includes an imaging portion configured to take an image of a substrate subject to a position detection; a panel member provided between the imaging portion and the substrate and including a first opening that ensures a field of view for the imaging portion with respect to the substrate, the panel member having a light scattering property; a first illuminating portion configured to illuminate the panel member; and a processing portion capable of determining a position of the substrate in accordance with the image taken through the first opening by the imaging portion.

A plasma processing chamber particularly useful for pre-treating low-k dielectric films and refractory metal films subject to oxidation prior to deposition of other layers. A remote plasma source (RPS) excites a processing gas into a plasma and delivers it through a supply tube to a manifold in back of a showerhead faceplate. The chamber is configured for oxidizing and reducing plasmas in the same or different processes when oxygen and hydrogen are selectively supplied to the RPS. The supply tube and showerhead may be formed of dielectric oxides which may be passivated by a water vapor plasma from the remote plasma source. In one novel process, a protective hydroxide coating is formed on refractory metals by alternating neutral plasmas of hydrogen and oxygen.

A transparent chromogenic assembly in which color changes are selectively effectable over predefined areas comprises a pair of facing transparent substrates (15, 21, 28) each covered with a conductive layer divided into individual energizeable areas each provided with a set of busbars (187, 188). A passive layer may be superimposed over one of the substrates, its color being chosen so that the color and the transmissivity of the passive layer accommodates the range of color change and transmissivity of the electrochromic layer to maintain the transmitted color of the panel in a warm or neutral shade. Various other chromogenic windows, devices and systems are also disclosed.

A shower head for adjusting distribution of a reactant gas in a process region of a semiconductor manufacturing reaction chamber, wherein a top plate has a gas port for introducing the reactant gas into the reaction chamber; a face plate, having through holes, disposed opposite the process region; a first baffle plate, having through holes, disposed between the top plate and the face plate and capable of moving up or down, wherein the first baffle plate has a top surface that defines a first gap for forming a first lateral flow passage; a second baffle plate, having through holes, disposed between the first baffle plate and the face plate and capable of moving up or down, wherein the second baffle plate has a top surface that defines a second gap for forming a second lateral flow passage; and a gap controller for determining widths of the first and second gaps.

A multi-touch sensor panel can be created using a substrate with column and row traces formed on either side. Metal traces running along the border of the substrate can be used to bring the row traces to the same edge as the column traces. A single flex circuit can be fabricated to connect to the rows and columns on directly opposing sides. Flex printed circuits can be bonded to directly opposing attachment areas of a substrate by cooling one side of the substrate while bonding the other. In addition, “coverlay” material extending over right-angled traces on the flex circuit ensure that those traces do not get shorted should conductive bonding material get squeezed out during bonding. Furthermore, a spacer is placed at the distal end of the flex circuit to apply even bonding pressure over the entire flex circuit attachment area during bonding.

A telecommunications cabinet comprising a top, a floor, a pair of opposing sides, a front wall and a rear wall defining an interior, the front including an access door for accessing the interior. Within the interior are mounted a cable management structure, an adapter panel with an adapter configured to optical connector two optical fiber cables terminated with fiber optic connectors, and a fiber optic connector holder mounted in openings of the adapter panel. The connector holder has an opening configured to receive a fiber optic connector with a dust cap, the opening accessible from a front side of the adapter panel. A fiber optic connector including a ferrule with a polished end face holding an end of an optical fiber with a dust cap placed about the ferrule and polished end face is inserted within the opening of a fiber optic connector holder. And a fiber optic connector is inserted within the rear side of one of the adapters.

A cooling solution is provided for a modular data center. The modular data center includes a plurality of racks, each of the racks having a front face and a back face, wherein the plurality of racks is arranged in a first row and a second row, such that the back faces of racks of the first row are facing the second row, and the back faces of the racks of the second row are facing the first row, a first end panel coupled between a first rack of the first row and a first rack of the second row, the first end panel having a bottom edge and a tope edge, a second end panel coupled between a second rack of the first row and a second rack of the second row, the second end panel having a top edge and a bottom edge, and a roof panel coupled between the top edge of the first panel and the top edge of the second panel. Cooling equipment within at least one of the equipment racks draws hot air from between the rows of racks and delivers cooled air out of the front face of one of the racks.

A receptacle assembly for use in connecting an energy source to an energy delivering device is described herein. The receptacle assembly includes a face plate defining an aperture. The receptacle also includes an adapter assembly including an adapter plate, supporting a terminal that is operatively connected to the energy source. Additionally, the receptacle includes a spacer member interposed between an inner surface of the aperture of the face plate and an outer surface of the adapter plate, wherein the spacer member permits omni-directional movement of the adapter plate and terminal relative to the face plate.

Various implementations of hybrid ceramic faceplates for substrate processing showerheads are provided. The hybrid ceramic showerhead faceplates may include an electrode embedded within the ceramic material of the faceplate, as well as a pattern of through-holes. The electrode may be fully encapsulated within the ceramic material with respect to the through-holes. In some implementations, a heater element may also be embedded within the hybrid ceramic showerhead faceplate. A DC voltage source may be electrically connected with the hybrid ceramic showerhead faceplate during use. The hybrid ceramic faceplates may be easily removable from the substrate processing showerheads for easy cleaning and faceplate replacement.

A protected faceplate structure of a field emission display device is disclosed in one embodiment. Specifically, in one embodiment, the present invention recites a faceplate of a field emission display device wherein the faceplate of the field emission display device is adapted to have phosphor containing areas disposed above one side thereof. The present embodiment is further comprised of a barrier layer which is disposed over the one side of said faceplate which is adapted to have phosphor containing areas disposed thereabove. The barrier layer of the present embodiment is adapted to prevent degradation of the faceplate. Specifically, the barrier layer of the present embodiment is adapted to prevent degradation of the faceplate due to electron bombardment by electrons directed towards the phosphor containing areas.

Flooring panel with two connection members whose sides face each other for attachment to other flooring panels of the same type. A first connection member has an upper projection, a lower projection, and groove between them. A second connecting member features a tongue for insertion in the groove of an adjacent connection member. In order to achieve good assembly as well as economical production of the panels, provision is made for a lower protuberance, lower indentation, lower auxiliary protuberance, and lower auxiliary indentation on the lower projection of the first connection member. The profile thus created is fitted to a corresponding profile on the lower side of the tongue which has an upper indentation, an upper protuberance, an upper auxiliary indentation, and an upper auxiliary protuberance.

A golf club having a hollow golf club head which is filled with a gas under pressure. The interior surface of the golf club head is coated with a solidified layer of plastic material. The pressurized gas permits the use of thinner face plates by compensating for forces generated when the face plate strikes a golf ball. The plastic layer is preferably applied through the process of rotational molding using a thermoplastic material.

Embodiment relate to a structure for supporting a bending portion of a flexible display panel in an unfolded state so that the bending portion does not flex when pressed. The structure also enables the bending portion of the flexible display panel to bend at a predetermined curvature in a folded state. The structure includes two rotating plates rotating about two axes that slide relative to flexible supporting members extending from portions of the flexible display panel that do not bend as the flexible display panel is bent. As the flexible display panel is bent, the distance between ends of the rotating plates are increased so that the bending portion of the flexible display panel would have an increased radius of curvature.

An interlocking photovoltaic module mounting system that provides a one piece, integrated photovoltaic module frame portion that is directly mountable to a support structure and interlocks with separate adjoining photovoltaic module frame portions. The apparatus includes a frame member for enclosing the perimeter of a photovoltaic module, having an inside surface and outside surface, with the inside surface including a recess for capture of the panel. The frame member outside surface includes at least one interlocking means for affixation to the complementary outside surface of an adjacent frame-member. The frame member includes a height-adjustable foot portion for supporting the frame member on a roof, so that adjacent frame members may be interlocked to form an array, and the foot portion may be adjusted to level the formed array on the roof.

A golf club that is preferably made from fiber-reinforced plastic composite by an injection molding process. The preferred golf club head includes a striking face for striking a golf ball, an outer periphery, a cavity formed between the outer periphery and the back of the striking face, a sole enclosing the bottom portion of said cavity, and at least one elongate power bar extending across the cavity from the striking face to the outer periphery. The sole is preferably integrally formed with the face plate and outer periphery. The cavity of the golf club head opens to the top of the club head. Each elongate power bar separates the cavity into receptacles. Inserts may be placed within the receptacles for aesthetic, aerodynamic, acoustic, and other purposes.

A touch sensor panel having co-planar single-layer touch sensors fabricated on a single side of a substrate is disclosed. The drive and sense lines can be fabricated as column-like patterns in a first orientation and patches in a second orientation, where each column-like pattern in the first orientation is connected to a separate metal trace in the border area of the touch sensor panel, and all patches in each of multiple rows in the second orientation are connected together using a separate metal trace in the border area of the touch sensor panel. The metal traces in the border areas can be formed on the same side of the substrate as the patches and columns, but separated from the patches and column-like patterns by a dielectric layer.

A cam-actuated connection device joins rail mounting members of a photovoltaic panel array. The connection device slides within channels of mounting members until the members are in a properly positioned grid. When in position, the connection device is rotated to lock the mounting members in a rigid grid network. The connecting device can be subsequently loosened, repositioned and locked into position. The rail-mounting members create a grid for installation of multiple PV panels. The mounting rail allows the unit to remain relatively compact in nature but still covers a wide range of PV panel thicknesses. The rail system has a hinged connection with the mounting rail that allows an installer to assemble the module in a near perpendicular fashion to the mounting rail, make the required electrical connections and then lower the PV module into its working position. The unit is then locked into its working position.