734 results about "Micro lens array" patented technology

The embodiment of the invention provides an optical detection device which comprises an imaging assembly and a photoelectric detection device, and the imaging assembly is used for forming an image on an image plane of a to-be-detected area of a wafer. And the photoelectric detection device is used for receiving images and is arranged at the image plane. The photoelectric detection device comprises a light beam separation assembly and a sensor assembly, the light beam separation assembly is used for dividing a continuous first light signal in an image into multiple beams of second light signals, and the light beam separation assembly comprises a microlens array. The sensor assembly is used for receiving multiple beams of second optical signals, and each pixel unit of each sensor in the sensor assembly is used for receiving one beam of second optical signal in the multiple beams of second optical signals. The sensor assembly comprises a single-pixel sensor, and the single-pixel sensor corresponds to one micro lens in the micro lens array; and / or, the sensor assembly comprises a multi-pixel sensor, the multi-pixel sensor corresponds to a plurality of microlenses in the microlens array, and spatial segmentation is beneficial to improving the signal-to-noise ratio.

The invention discloses a high-refractive-index nano-composite optical adhesive and a preparation method thereof, and belongs to the technical field of optical transparent adhesives. The optical adhesive is prepared by taking a polyurethane acrylate oligomer with a specific structure as matrix resin, introducing surface-modified barium titanate and zirconium oxide core-shell nanoparticles as a functional filler, and matching with an active diluent, a photoinitiator and a silane coupling agent in a specific proportion. Through the design of the core-shell structure, the core problems that the high-refractive-index nanoparticles are easy to agglomerate in an organic resin matrix, the dispersion stability is poor and the bonding force with a matrix interface is weak are effectively solved. The prepared optical adhesive has a refractive index of more than 1.65, a light transmittance of more than 99% and a haze of less than 0.3% after being cured, has excellent bonding strength, weather resistance and long-term use stability, and is especially suitable for precise lamination of high-end display devices (such as OLEDs (Organic Light Emitting Diodes) and micro-lens arrays).

The invention discloses a photoresist micro-lens array preparation method and system, and relates to the field of micro-nano optical device manufacturing. The preparation method of the photoresist micro-lens array comprises the following steps: carrying out chemical mechanical polishing treatment on a silicon wafer, spin-coating photoresist on a substrate to form a cylindrical array, and eliminating solvent gradient through pre-drying; forming a fluorocarbon nano film on the surface of the photoresist through plasma deposition so as to reduce the surface energy of the photoresist; realizing hot reflux of the photoresist based on gradient annealing, wherein the gradient annealing comprises a preheating section, a main reflux section and a stable section; on the basis of the preheating section, glass transition stress is avoided, fluorine-containing gas and inert gas are synchronously introduced into the main backflow section to act on a plasma sheath layer, so that the flowing direction of photoresist is regulated and controlled, and the edge coffee ring effect is inhibited; the stable section synchronously performs plasma assistance to lock the shape; and the precision and the consistency of the micro-lens array are improved through segmented temperature regulation and control and a plasma auxiliary technology.

A camera module includes an imaging lens assembly module and an image sensor. The image sensor is disposed on an image surface of the imaging lens assembly module and includes a photoelectric converting layer, a micro lens arrays layer, a light filtering layer and an anti-reflecting layer. The photoelectric converting layer is for converting a light signal to an electric signal. The micro lens arrays layer is for converging an energy of the imaging light into the photoelectric converting layer. The light filtering layer is for absorbing a light at a certain wavelength region of the imaging light. The anti-reflecting layer is disposed on a surface of at least one of the light filtering layer and the micro lens arrays layer and includes an irregular nano-crystallite structure layer and an optical connecting layer. The optical connecting layer is connected to the irregular nano-crystallite structure layer.

The invention discloses a Micro-LED chip array integrated with a homogeneous micro-lens array and a preparation method thereof, and the method comprises the steps: carrying out the wafer-level precise bonding of a Micro-LED light-emitting pixel array and a CMOS drive circuit substrate, removing a substrate, integrating a homogeneous pixel-level GaN micro-lens array on a GaN-based pixel array through the photoetching, hot melting backflow and dry etching technologies, and carrying out the precise bonding of the micro-LED light-emitting pixel array and the CMOS drive circuit substrate. And finally, realizing the full-pixel common cathode conduction of the Micro-LED chip by adopting a metal interconnection process. According to the method, the Micro-LED pixel array and the micro-lens array are homogeneously integrated, are made of the same material and have no refractive index difference, so that no Fresnel loss exists on an interface, and the light extraction efficiency of a chip is improved. In addition, the method is simple in manufacturing process, low in cost, good in chip structure reliability, high in stability and suitable for being applied to industrial chip manufacturing.

The invention discloses an all-solid-state snapshot full-Stokes parameter measurement and imaging enhancement sensor device. The all-solid-state snapshot full-Stokes parameter measurement and imaging enhancement sensor device comprises a micro-lens array module, a liquid crystal phase modulation module, a polarization wire grating array module and an image sensor module. The micro lens array module is composed of a plurality of micro lenses which are arranged in a two-dimensional mode, and incident light is focused on the photodiode of each pixel. The liquid crystal phase modulation module is composed of two high-speed liquid crystal variable phase delayers, and active phase modulation is carried out on the polarization state of incident light. Polarized light information in four polarization directions can be obtained only through single shooting in the polarization wire grating array module. The image sensor module calculates the full Stokes parametric polarization characteristics of the incident light. According to the invention, full-polarization information measurement of incident light can be realized only through single exposure, and a polarization enhancement mode is switched after measurement is completed, so that the imaging efficiency of the sensor in dark light scenes such as weak contrast target detection is greatly improved.

A light source a backplane including drive circuits formed thereon, an array of micro-light emitting diodes (micro-LEDs) bonded to the backplane, and an array of micro-lenses on the array of micro-LEDs. Each micro-LED of the array of micro-LEDs includes a mesa structure that includes a p-doped semiconductor layer, an n-doped semiconductor layer, an active region between the p-doped semiconductor layer and the n-doped semiconductor layer, and a dielectric layer underneath the p-doped semiconductor layer or the n-doped semiconductor layer and surrounding the active region. In some embodiments, the center of the active region of a micro-LED of the array of micro-LEDs is horizontally offset from the center of the mesa structure of the micro-LED and the center of a corresponding micro-lens of the array of micro-lenses.

The invention provides a microlens array turning motion trail optimization method and device and a medium, and relates to the technical field of microlens array turning motion trail optimizing.The method comprises the steps that a continuous trail curve P (u) is constructed based on discrete tool path points corresponding to the microlens array turning process; dispersing the P (u) into a plurality of track points in a parameter domain to obtain a track point list G; sequentially determining the forward maximum feasible parameter speed of each track point from the forward first track point; starting from the first reverse track point, determining the reverse maximum feasible parameter speed of each track point in sequence; determining the target maximum feasible parameter speed of the corresponding track point; according to the target maximum feasible parameter speed of each track point in the G, generating an optimal track which corresponds to the P (u) and meets kinematics constraints; according to the method, the optimization process of the parameter speed can be simplified, the number of trial and error iterations is reduced, the calculation complexity is reduced, and the calculation efficiency of trajectory optimization is remarkably improved.

A display substrate and a manufacturing method therefor, and a display device, relating to the technical filed of display. The display substrate comprises: a light-emitting substrate (11), comprising a light-emitting area (AA), the light-emitting area comprising a plurality of sub-light-emitting areas (EA); a packaging layer (12), arranged on the light exit side of the light-emitting substrate, the surface of the packaging layer facing away from the light-emitting substrate comprising a plurality of recessed areas (AX), the recessed areas being recessed towards the side close to the light-emitting substrate, the packaging layer comprising a plurality of sub-packaging layers (14) that are stacked, and the recessed areas comprising openings of the plurality of sub-packaging layers; and a micro-lens array (13), located on the side of the packing layer facing away from the light-emitting substrate, the micro-lens array comprising a plurality of micro-lenses (ML), the micro-lenses being located in the recessed areas, and the orthographic projections of the micro-lenses on the light-emitting substrate at least partially overlapping the sub-light-emitting areas so as to change the propagation direction of at least part of emitted light of the sub-light-emitting areas.

The invention provides a long-depth-of-field integrated imaging display, a long-depth-of-field integrated imaging method and a long-depth-of-field integrated imaging system. The long-depth-of-field integrated imaging display comprises an image processor, a display, a microlens array and a quartic phase mask, the pupil position of each micro lens of the micro lens array is correspondingly integrated with a quartic phase mask; the image processor is used for acquiring a to-be-displayed image and constructing an element image array; performing inverse convolution processing on each element image in the element image array based on a preset phase mask function, and constructing a preprocessed element image array matrix; performing negative value processing on the preprocessed element image array matrix to obtain a preprocessed element image array; and the display is used for displaying the preprocessed element image array, so that the preprocessed element image array generates a long depth-of-field image through the micro-lens array and the quartic phase mask. According to the invention, defocus blurring is effectively suppressed without introducing an extra complex optical structure, a long depth-of-field image is generated on the premise of ensuring the image contrast, and the integrated imaging display quality is improved.

The invention provides a light field three-dimensional reconstruction method and system based on a microlens array and polarization modulation, and a medium, and the method comprises the steps: carrying out the polarization coding of light rays at different angles at an exposure moment based on a polarization modulator, and obtaining different polarized light information; focusing light to an imaging surface based on an imaging lens, and recording view images of different polarized light information based on a micro-lens array; based on the polarization characteristics of the view angle image, view angle decoding is carried out on the view angle image based on the polarization characteristics, and light field images of multiple view angles are obtained; preprocessing the light field images of the multiple visual angles to obtain preprocessed images of the multiple visual angles; analyzing the light intensity distribution information based on the preprocessed image to obtain light field data, and reconstructing the light field image based on a reflective projection algorithm to obtain a reconstructed image; multi-view image capturing is achieved through multi-state polarization coding, light intensity analysis is conducted on multi-view light field images, three-dimensional reconstruction of a high-speed dynamic scene is achieved, and the image reconstruction precision is improved.

The invention relates to a self-adaptive optical matrix calculation acceleration method based on an ARM framework, and belongs to the field of self-adaptive optical wavefront correction technology and embedded parallel calculation. The method comprises the following steps: analyzing a mathematical mapping relationship between a microlens array and wavefront phase distribution in a Hartmann sensor image, and constructing a wavefront matrix operation model based on an ARM multi-core architecture; designing a Hartmann image data rearrangement strategy, dividing a single-frame Hartmann image into multiple task calculation units, and realizing parallelization processing of wavefront slope calculation; a wavefront matrix operation kernel is optimized according to ARM NEON instruction set characteristics, and vectorization calculation of multi-channel wavefront reconstruction is realized by adopting an SIMD parallelization technology; and computing resource allocation is coordinated through a dynamic thread scheduling algorithm, and the task allocation proportion among multiple cores is adjusted according to the real-time load condition. According to the method, the wavefront calculation efficiency is remarkably improved, so that the overall bandwidth of the adaptive optical system is greatly improved.

The utility model provides an optical path difference regulation structure lens, and relates to the field of optical lenses, the lens comprises a lens body and a lens part, the lens body comprises a convex surface and a concave surface opposite to each other; the lens part is adjacent to the concave surface of the lens body, the lens part comprises a micro-lens array, and the micro-lens array comprises a plurality of micro-lenses which are sequentially arranged to form an ultra-microstructure area; the micro lens is of a nanoscale diffraction structure and has the effective haze not exceeding 15% so as to reduce the spatial frequency and the imaging degree of incident light in the ultra-microstructure area. According to the invention, multiple functions of defocus optimization design, contrast control, spatial frequency modulation and the like are integrated; the effective defocusing amount of the ultrastructure is larger, and the ultra-low disturbance amount is achieved; and the haze of the micro lens is controlled at a nano level, so that a high-fidelity optical effect can be provided.

The invention discloses an LED dimming system and method, and the system comprises a white light LED which is used for emitting a spectrum in a 400-650 nm wave band; at least three red light LEDs of blue light excitation fluorescent powder respectively emit red light with different central wavelengths, the central wavelength of the first red light LED is 660nm + / -2nm, the half-peak width is less than or equal to 15nm, and an I < n > GaA < l > P material vertical cavity surface emission structure is adopted; the central wavelength of the second red light LED is 730nm + / -3nm, the half-peak width is less than or equal to 20nm, and the second red light LED adopts an A < l > GaAs material quantum well structure; the center wavelength of the third red light LED is 780nm + / -5nm, the half-peak width is less than or equal to 25nm, and a GaAsP material gradient refractive index waveguide structure is adopted; the driving control module comprises three independent constant-current driving units which are used for respectively controlling the current and PWM duty ratio of each red light LED; the optical mixing module is composed of a two-stage integral rod and a micro lens array and is used for realizing uniform mixing of spectrums.

The present application relates to the technical field of optical lenses, and discloses a peripheral defocus control lens and a manufacturing method. The peripheral defocus control lens comprises: a substrate, a microlens array, and a freeform surface. The substrate is a main area of the lens and has a spherical surface shape. The microlens array is arranged on the outer side of the substrate and is used for providing myopic defocus. The freeform surface is distributed on the inner side of the substrate and is used for compensating for or screening out refractive deviations in peripheral refraction of human eyes.

The invention discloses a high-flux zebra fish behavior analysis device and method, and aims to solve the problem of compatibility of plate edge distortion and a multi-type pore plate, a telescopic mechanism is arranged in a shell of the device, an isolation cavity is formed in the shell when the telescopic mechanism is retracted, a micro-lens array and a light filter plate are sequentially arranged in the isolation cavity from top to bottom, and the micro-lens array and the light filter plate are arranged in the shell. A stimulation module is arranged at the bottom of the light filter plate, a pore plate placement area is arranged between the stimulation module and the light filter plate, and a universal adaptive bracket for accommodating a standard pore plate and a non-standard pore plate is arranged in the pore plate placement area; a camera module comprising at least one high-frame-rate camera with a fixed focal length is correspondingly arranged above the porous plate placing area, the camera module is connected with a control and analysis module, distortionless track diagrams, heat diagrams and behavior parameters are output online, and the optical mechanical integrated distortion correction and porous plate combined universal adaptation structure is used for correcting the distortion of the porous plate. When the same set of light path is switched between standard plates and non-standard plates of different models, the distortion of the edge view field is automatically compensated.

The invention provides a micro-lens array multi-point alignment focusing method, a storage medium and electronic equipment, and relates to the technical field of lens array detection. According to the algorithm, three unit lens point positions which are far away from each other on an actual array lens sample piece are selected as reference input points, after reference coordinates and actual coordinates are obtained, a vector length scaling coefficient, xy-direction offset and a rotation angle are calculated in sequence, then a conversion matrix is obtained through plane fitting, and the conversion matrix is calculated. And finally, accurate alignment and focusing of any reference point and an actual product point in the xyz three directions are realized. The method does not need to consider the rotation direction and the deviation angle of sample placement, is high in adjacent point test positioning and movement completion speed, has the characteristics of high precision, simplicity in implementation, low cost and the like, and effectively solves the problems of low lens positioning and focusing efficiency, insufficient precision, complex calculation and the like of a traditional micro lens array unit. The micro-lens array is suitable for various application scenes depending on the micro-lens array, such as optical sensing, 3D imaging and the like.

A sensing system may include an illumination projector, an image sensor, and one or more controllers. The illumination projector may project a partial illumination pattern on a target object. The image sensor may sense the partial illumination pattern projected on the target object and may generate signals representative of the sensed illumination pattern. The one or more controllers may control the illumination projector and process the signals generated by the image sensor. The illumination projector may include a microlens array and an emitter array. A spatial relationship of emitters of the emitter array to microlenses of the microlens array may cause the emitter array and the microlens array to project light upon the target object in the partial illumination pattern.

The invention provides a dynamic polarization three-dimensional imaging system, which relates to the technical field of anti-counterfeiting encryption and comprises a light source, a polarization film and a color three-dimensional imaging module which are sequentially arranged along a light path, the light source is used for providing visible band incident light; the polarizing film is configured to transmit TM polarized light when rotating 0 degree and transmit TE polarized light when rotating 90 degrees; the color three-dimensional imaging module comprises a micro lens array, a transparent spacing layer and a micro image-text array which are sequentially arranged along a light path; the micro image-text array comprises a metal coating layer, a grating layer and a glass substrate which are stacked from top to bottom, wherein the grating layer forms a Fabry-Perot-like microcavity resonance structure; the polarization state of the incident light is switched by rotating the polarization film, so that the stereo image of the micro image-text array is dynamically switched among an appearing state, a hiding state or a color changing state. According to the invention, wide-color-gamut and dynamically-adjustable color stereo imaging is realized, and the complexity and the identifiability of anti-counterfeiting encryption are improved.

The invention discloses a one-dimensional ultra-wide field-of-view ultra-high spectral resolution dispersion coherent imaging spectrometer, which belongs to the technical field of spectral imaging, and comprises a first microlens array used for obtaining incident light of a one-dimensional ultra-wide field-of-view in a horizontal plane; the plurality of optical fibers are used for transmitting incident light of a one-dimensional ultra-wide field of view; the second micro lens array is used for collimating incident light from each optical fiber into broadband parallel light beams; the grating beam splitter interferometer is used for dispersing the broadband parallel light beams into a plurality of narrow-band parallel light beams with different propagation directions; the cylindrical lens is used for converging the two paths of coherent light of each narrow-band parallel light beam to a target block of the detector, and converging the narrow-band parallel light beams with different propagation directions to different target blocks respectively; and the detector is used for obtaining a continuous broadband ultra-high resolution spectrum according to the two paths of coherent light received by each target block. According to the invention, a one-dimensional ultra-wide field of view is obtained in a horizontal plane, and ultra-high spectral resolution can be obtained.

Provided are a plenoptic microscope system having a structure in which a microlens array (MLA) is installed between an object and a microscope optical system and a general microscope camera is used as an image sensor, and an image processing apparatus for performing plenoptic imaging with information acquired from the same. In the plenoptic microscope system, an MLA including at least one microlens having a number of apertures (NA) similar to that of an objective lens of a microscope optical system is positioned at the front end of an incidence part of the microscope optical system and the objective lens is positioned at a focal length of the MLA or on an image plane of the MLA. The plenoptic image processing apparatus generates Plenoptic 1.0 and / or 2.0 images.

The invention provides a virtual reality display method and system, a computer and a storage medium. The method comprises the following steps: collecting sight movement data and head movement data of a user; predicting a fixation point area at the next moment based on the historical movement track of the fixation point area; according to the scene depth information, the sight line moving speed and the head motion data of the fixation point area at the next moment, predicting the predicted focal plane depth at the next moment, and dynamically adjusting the configuration of the micro-lens array in the optical assembly to match the predicted focal plane depth. The depth of a focal plane is predicted through fusion data of eye movement tracking and an inertial measurement unit, the configuration of a micro-lens array is dynamically adjusted, meanwhile, a display picture is divided into a fixation point area, a fuzzy display area and an atmosphere rendering area, and based on differentiation rendering processing, the convergence adjustment conflicts of vision are remarkably relieved, the graphic calculation load is reduced, and the display quality is improved. And a self-adaptive high-definition display effect is realized.

The invention relates to the technical field of cigarette package anti-counterfeiting, in particular to a multilayer body with a 3D anti-counterfeiting effect, a preparation method of the multilayer body and an anti-counterfeiting packaging material. The multilayer body comprises a base material layer, a microlens array layer arranged on the front surface of the base material layer and a miniature image-text layer arranged on the rear surface of the base material layer, the base material layer comprises a protruding part and a plane part, the front surface of the base material layer comprises a convex surface and a front plane, and the rear surface of the base material layer comprises a concave surface and a rear plane; the micro lens array layer is arranged on the convex surface, and the miniature image-text layer is arranged on the concave surface. According to the invention, the microlens array layer forms the curved surface structure, so that the optical axis directions of the microlenses in different areas are naturally changed, a wider viewing angle is covered, and an observer can see a clear and distortionless three-dimensional image even if watching the three-dimensional image from a large lateral angle; and meanwhile, the light path change is more complicated, and a larger-amplitude and smoother dynamic effect is provided.

The invention, which belongs to the technical field of spectral imaging, discloses an ultra-wide-band ultra-wide-field-of-view high-spectral-resolution real-time imaging spectrometer comprising a first micro-lens array, a plurality of optical fibers, a plurality of second micro-lens arrays and a plurality of assemblies. First micro lenses in each column of the first micro lens array are arranged on a vertical plane arc, and micro lenses in each row are arranged on a horizontal plane straight line, so that incident light of a one-dimensional ultra-wide view field is obtained in real time; through optical fiber coupling, incident light is transmitted to the second micro lens array to be collimated into parallel light beams; according to the components, light of different wavebands is processed through the optical filter, the plane transmission grating and the detector, first-order diffraction light beams of different wavelengths in the different wavebands are received by the detector after diffraction, and space information and spectral information are obtained in real time according to an irradiated target block. The imaging spectrometer provided by the invention has the advantages of ultra-wide wave band, ultra-wide field of view, high spectral resolution, real-time measurement, compact structure and high stability, and is suitable for a remote sensing photoelectric reconnaissance detection system.

The utility model provides a laser ablation device which comprises a first laser light source used for emitting treatment laser; the optical splitter is arranged at the output end of the first laser light source and is used for splitting the treatment laser into multiple paths of split laser; wherein the branch lasers are arranged in rows and columns; the optical modulator is arranged at the output end of the optical splitter and is used for performing independent power regulation and control on each branch laser; the optical fiber coupler is arranged at the output end of the optical modulator and is used for coupling the branch lasers into the optical fiber branches of the optical fiber array one by one; the optical fiber array is connected between the optical fiber coupler and the focusing micro-lens array, and each optical fiber branch corresponds to one focusing micro-lens of the focusing micro-lens array; and the focusing microlens array is used for focusing the split laser onto the diseased tissue in space through focusing microlenses for ablation treatment. The technical scheme can be used for ablation treatment of various irregular pathological tissues, and damage to surrounding healthy tissues is avoided.

The invention discloses a polarization imaging system based on a super-structure micro-lens array and a construction method of the super-structure micro-lens array, and relates to the technical field of polarization imaging. The polarization imaging system comprises at least one refraction lens, a metasurface full Stokes polarization micro lens array and a pixel plane, and the pixel plane is formed by arranging four detector pixel arrays; the metasurface full-Stokes polarization micro-lens array is composed of a plurality of single micro-lens arrays, and a polychromatic light source focuses when incident to the refraction lens and then is transmitted to the metasurface full-Stokes polarization micro-lens array. The metasurface full Stokes polarization micro-lens array splits light in different polarization states and focuses the light to a pixel plane, and real-time polarization imaging is carried out on an object. According to the invention, the energy utilization efficiency of a single polarization is improved from 1 / 4 to 1 / 3, which has positive significance for polarization imaging and also has positive significance for function integration and volume miniaturization of an optical imaging system.

A system comprising a plurality of optical fibers and a first microlens array including a plurality of microlenses. Each of the plurality of optical fibers is bonded to one of the plurality of microlenses. The system also includes a prism disposed adjacent the first microlens array, a second microlens array disposed adjacent the prism, and a silicon photonics substrate disposed adjacent the second microlens array and including a plurality of input coupling elements and one or more optical waveguides.

The invention relates to an LD area array beam shaping and homogenizing system based on a microlens array and a use method thereof. The system comprises an LD area array light source, a fast axis pre-correction unit, a two-dimensional shaping and homogenizing unit, a relay lens group and an output coupling unit which are sequentially arranged along a light path, the fast axis pre-correction unit is a single-row micro-cylindrical lens array composed of a plurality of micro-cylindrical lenses; the two-dimensional shaping and homogenizing unit comprises a first microlens array and a second microlens array which are sequentially arranged along the optical axis, and the first microlens array and the second microlens array are both positive spherical microlens arrays arranged in an N * N matrix. According to the LD area array light beam shaping and homogenizing system, light beam segmentation and superposition are achieved, eventually homogenization of output light spots is achieved, and the light spot uniformity reaches 90% or above.

A process for manufacturing microlens arrays includes the following steps. A preform for a microlens array is created. The preform includes an array of first dome shapes corresponding to microlenses in the microlens array. The domes shapes may be different in size and / or shape than the final microlenses to account for subsequent manufacturing steps. Atomic layer deposition is used to deposit a conformal layer on the array of first dome shapes to create an array of second dome shapes. This can be used as a master form for manufacturing the microlens array. For example, the shape of the master may be transferred to a stamp, and the stamp pressed into lens material to create the microlens array.

The invention relates to the technical field of superfinishing, in particular to a tool servo turning method assisted by a translation rotating platform, a medium and equipment. The five-axis lathe and the translation rotating platform are controlled to cut according to the paths of the independent areas to be machined by obtaining the cutting paths of the curved surface microlens array substrate to be machined and the cutting paths of the microlens units respectively. According to the method, the target structure is divided into the substrate area and the independent areas corresponding to the multiple micro-lens units, the independent spiral cutter cutting path is generated, the cutter path continuity is effectively improved, the method adapts to the dynamic characteristics of the machine tool servo shaft, efficient cutting parameters are conveniently selected, and the servo shaft tracking precision and the machining quality are improved. A regional step-by-step machining strategy is adopted, and each micro lens unit adopts an independent spiral cutter cutting path, so that the problems of inconsistent cutter paths and cutting state fluctuation caused by position difference in traditional single-path machining are solved, each micro lens unit is ensured to be machined under the same cutting condition, and the consistency of the machined surface of the micro lens array is remarkably improved.