The invention discloses a temperature compensation method of a capacitive force /
torque sensor and a sensor structure of the capacitive force /
torque sensor. The sensor comprises an upper-layer substrate, a middle substrate and a lower-layer substrate, and an
interdigitated electrode is arranged between the upper-layer substrate and the middle substrate and used for
tangential force detection; a strip-shaped
dielectric layer and a
capacitor electrode array are arranged between the middle substrate and the lower substrate and are used for
normal force and torque detection; the lower substrate is provided with a temperature compensation
reference electrode used for collecting the environment temperature. The
system takes a
capacitance digital conversion chip as a core to realize multi-channel
signal sampling and real-time resolving, and establishes a mapping relation between
capacitance variation and five-dimensional force / torque components. In addition, in order to reduce the influence of the environment temperature on the output of the sensor, a temperature compensation method based on a binary
polynomial regression model is used, a
capacitance-temperature characteristic curved surface is established through a temperature and load experiment matrix, temperature compensation parameters are calculated in real time, and dynamic correction is achieved. The method is small in calculation amount, and improves the precision and stability.