223 results about "Monochromator" patented technology

Provided are a fault diagnosis apparatus and method based on fluorescence multivariate correction analysis of transformer oil, relating to the field of transformer fault diagnosis technology. Thus, the problem of large volume and weight of the apparatus, high costs, and inconvenience to use caused when in the related art, a fluorescence spectrometer is directly used to acquire the fluorescence spectrum of transformer oil is solved. The monochromatic excitation light of an optimal excitation wavelength generated by a fluorescence excitation source is used to excite the transformer oil in a fluorescence excitation detection apparatus to generate fluorescence. The fluorescence excitation detection apparatus generates the fluorescence according to the input monochromatic excitation light and inputs the fluorescence to a fluorescence signal acquisition and analysis apparatus. Since the fluorescence signal acquisition and analysis apparatus acquires and analyzes the fluorescence signal emitted by the transformer oil by using a multivariate correction filter group, the emission monochromator component of the fluorescence spectrometer is replaced. In this manner, the equipment costs and the equipment volume are reduced, and data processing is rapid. Thus, the cost performance of the fault detection of the transformer oil is improved, thereby implementing the engineering application of the fluorescence monitoring technology in the online diagnosis of the transformer failure.

An X-ray generator is presented comprising: an electron source generating an accelerated electron beam propagating along a first propagation path with a first general propagation direction; a first crystalline structure located in the first propagation path, and defining a first crystal plane oriented at a predetermined non-zero angle with the first propagation path, and configured to transmit the electron beam therethrough and generate parametric x-ray (PXR) emission being first directional emission along a second propagation path tilted with respect to the first general propagation direction; and a second crystalline structure located in the second propagation path and configured as a monochromator with respect to the PXR emission, and defining a second crystal plane oriented at the predetermined non-zero angle with respect to the second propagation path to thereby provide second directionality for the PXR emission.

The invention relates to a soft and hard X-ray confocal wide energy region photoelectron spectroscopy system, which comprises a first undulator, a second undulator and a white light deflection mirror which are arranged in sequence, and is characterized in that the first undulator provides hard X-ray light to form a first light path through which a hard X-ray beam passes; the second undulator provides soft X-ray light, the white light deflecting mirror is used for deflecting the soft X-ray light provided by the second undulator, and a second light path through which a soft X-ray beam passes is formed after deflection; a first slit, a first deflection focus lens, a first monochromator, a second monochromator and a second deflection focus lens are sequentially arranged on the first light path in the transmission direction of the hard X light beam; a second slit, a third monochromator and a third deflection focus lens are sequentially arranged on the second light path in the transmission direction of the soft X light beam; the hard X light beam deflected and focused by the second deflection focusing lens and the soft X light beam deflected and focused by the third deflection focusing lens jointly irradiate a sample, and an electron energy analyzer is arranged behind the sample.

The invention discloses an optical thin film thickness monitoring device and an optical thin film coating system, and belongs to the technical field of vacuum coating. A workpiece disc of the optical film thickness monitoring device is provided with a monitoring hole group, the monitoring hole group comprises a first through hole, a second through hole and an interval shielding area, and a film coating monitoring piece is arranged in the first through hole; the irradiation light source is used for emitting light signals to the monitoring hole group; the receiving assembly comprises a light converging element and at least two grating monochromators. The actual physical or optical thickness of the thin film can be calculated by monitoring the transmission or reflectivity of multiple wavelengths and combining the dispersion of the material, and the precision is higher than the precision of monitoring the thickness of the single-wavelength thin film. A plurality of grating monochromaters respectively and correspondingly monitor one wavelength, each grating monochromator can freely select the wavelength, the wavelength selection range is wide, and the problems that the monitoring wavelength is changed and the positioning precision deviation is large in the same grating monochromator are solved. According to the invention, the optical film thickness measurement precision in the online monitoring film coating process can be improved, and the film coating success rate is improved.

The invention belongs to the technical field of ICP spectral analysis, and particularly relates to an angle-adjustable monochromator type concave holographic grating, a spectrometer and a method. A servo motor in the holographic grating is connected with a lead screw mechanism and can drive a lead screw of the lead screw mechanism to rotate, a polished rod bearing is connected to a connecting block, the connecting block is fixed to the movable end of the lead screw mechanism, a monochromator type concave holographic grating body is connected to a movable base, one end of a polished rod makes contact with the monochromator type concave holographic grating body, and the other end of the polished rod makes contact with the movable base. The other end is matched in the polish rod bearing; according to the invention, two DMDs and a monochromator type concave holographic grating are adopted to realize spatial imaging spectral analysis, the first DMD realizes spatial position selection of an ICP plasma torch, the monochromator type holographic grating realizes high-efficiency and simple-structure rotating grating type light splitting, and the second DMD is selected as an exit slit with adjustable width to carry out fine light splitting on a selected wave band, so that the light splitting efficiency of the ICP plasma torch is improved. Therefore, the spatial imaging spectrum analysis of the ICP plasma torch by the system is realized.

The invention relates to the technical field of semiconductor energy material detection, and discloses a table type X-ray spectrometer multifunctional combined integrated in-situ experiment device, which comprises an X-ray source, a light source, an X-ray detector, an X-ray detector, an X-ray detector, an X-ray detector, an X-ray detector and an X-ray detector, the sample table is used for adjusting the position of the sample in the light path; the flight pipeline is used for transmitting X-rays and signals; the detector is used for collecting electronic signals. By adopting the unique design of the X-ray monochromator and the focusing mirror, the measurement and analysis of an X-ray absorption fine structure and a crystal structure can be realized in a conventional laboratory environment without using a synchrotron radiation light source, and X-ray diffraction, scattering and absorption spectrograms comparable to a synchrotron radiation level are obtained with extremely high sensitivity and light source quality; qualitative and quantitative analysis, crystalline state and valence state analysis and long-range structure and short-range coordination structure analysis of elements are achieved, and grazing incidence X-ray diffraction, powder diffraction and XAS research can be conducted in real time.

The invention relates to a spectrum device and a spectrum calibration and detection method. The spectrum device comprises a monochromator module which is used for carrying out light splitting on a broadband optical signal and outputting narrowband monochromatic light; the first detection light path module is used for carrying out light signal detection on the narrowband monochromatic light to obtain a first detection signal; the data acquisition and processing module is used for acquiring photon number information of the first detection signal, acquiring broadband tunable monochromatic light according to the photon number information, and performing spectrum calibration according to the broadband tunable monochromatic light; the monochromator module is also used for splitting the spectral signal of the to-be-measured target and outputting a spectral distribution signal; the second detection light path module is used for carrying out light signal detection on the spectral distribution signal to obtain a second detection signal; and the data acquisition and processing module is also used for acquiring arrival photon information of the spectrum distribution signal and performing spectrum detection on the to-be-detected target according to the arrival photon information. By adopting the device, high-precision broadband tunable monochromatic light output and spectrum detection can be realized.

The invention discloses a monochromator preparation method and a monochromator, and belongs to the technical field of synchrotron radiation. The method comprises a crystal polishing step, a step of calibrating an intersection line of a crystal lattice surface and the crystal surface and cutting to enable the calibrated crystal lattice surface and the crystal surface to be approximately parallel, a step of polishing the crystal surface to enable the crystal surface to be completely parallel to the crystal lattice surface, a bonding step and a detection step, and the monochromator is prepared by using the method. According to the invention, a bonding technology of two crystals with perfect surface polishing and a high-precision polishing method of the crystals are utilized to prepare a bonding type channel-cut monochromator device capable of being used for perfect X-ray imaging, and the problems of stability and non-uniform light beam distribution in an existing monochromator are solved.

The invention relates to the technical field of X-ray analysis instrument software, in particular to an X-ray synchronous analysis system and method for lithology and physical properties of an oil and gas reservoir, and the system comprises an X-ray source module, a signal acquisition module, an environment control module, a data analysis module, a sample preparation optimization module and a hardware cooperation module. X-ray signals with different energies are generated through time sequence switching of a Cu target material and a Mo target material, fluorescence and diffraction signal acquisition channels are alternately activated in a time-sharing mode, and element characteristic energy spectrums and diffraction angle data are separated by adopting a multi-channel analyzer and a Bragg monochromator; the environment control module adjusts the vacuum degree and the temperature according to the morphological parameters of the sample and optimizes signal acquisition conditions; and the hardware cooperation module realizes time sequence synchronization of target material switching, signal separation and environment regulation and control. According to the invention, collaborative operation of XRF and XRD detection is realized, the problems of low efficiency, data splitting and hardware redundancy of a split instrument are solved, and a high-precision integrated solution is provided for oil and gas reservoir analysis.

The invention provides a high-frequency monochromator and a light splitting method thereof, and is characterized in that the high-frequency monochromator comprises a spectrograph and a scanning emitting mechanism, and the scanning emitting mechanism is loaded after the spectrograph emits a light beam; an entrance slit, a spectrograph, a field diaphragm, a collimation optical assembly, a rotary reflector or a rotary reflector with a grating light splitting function, a convergence imaging assembly and an exit slit are sequentially arranged along a light path, and light is emitted through the field diaphragm and the exit slit to form an L-shaped light path; the entrance slit, the spectrograph, the field diaphragm, the collimation optical assembly, the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function, the convergence imaging assembly and the exit slit are all vertically fixed to the horizontal plane, and the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function is arranged at the switching position of the L-shaped light path; the monochromator is simple in light splitting structure and efficient in light splitting.

The utility model discloses an optical film thickness monitoring system based on an FPGA (Field Programmable Gate Array), which belongs to the field of optical film coating and comprises an optical path and a circuit, the light path comprises a light source, a light chopper, a beam splitter, a monitoring piece and a monochromator, the circuit comprises a photoelectric conversion board and an FPGA development board, the light path part is responsible for generating and modulating light signals, the circuit part is responsible for signal conversion, amplification, demodulation, noise filtering and extreme point interpretation, on the FPGA development board, a digital signal processing technology is utilized, a reference signal is used as a benchmark, and the optical path part and the circuit part are integrated. The main signal is demodulated, in the demodulation process, noise and interference caused by factors such as environment and equipment can be eliminated, some noise and interference still exist in the demodulated main signal, the FPGA development board can further filter out the noise and improve the signal-to-noise ratio of the signal, and the extreme point of the main signal subjected to noise filtering processing corresponds to the change of the thickness of the film. The algorithm on the FPGA development board can accurately interpret the extreme points, so that the change information of the film thickness is obtained, the change of the film thickness can be more accurately identified, and the monitoring precision is improved.

The present invention discloses an application of an X-ray photon selector, wherein the X-ray photon selector of the present invention is used as an energy spectrometer or a monochromator; wherein the X-ray photon selector comprises a substrate, and a selection reflector located on the substrate, and the selection reflector comprises a series of alternating light-transmitting elliptical wave bands and light-impermeable elliptical wave bands; wherein the light-impermeable elliptical wave bands are regions on the substrate where quantum dot reflectors are photoetched, and the quantum dot reflectors are arranged according to a sine function or a cosine function and arranged quasi-randomly. Firstly, the present invention proposes for the first time to use the selector as an energy spectrometer or a monochromator, thereby reducing the optical elements in the spectrometer and the monochromator, promoting the lightweight of the spectrometer and the monochromator, and at the same time reducing the preparation cost of the spectrometer to a certain extent. Secondly, the selector of the present invention avoids the problems of high-order diffraction interference of traditional spectrometers and the high-order harmonic pollution of traditional monochromators; in addition, the X-ray photon selection in the present invention is also applicable to multiple photon energy regions.

An EUV microscope apparatus utilizing a source of EUV light. The light is sent to a collector which creates a first focused EUV beam. A monochromator module receives the first focused EUV beam and produces a second focused EUV beam that is passed to an illumination module. The output of the illumination module is reflected off a mask. The reflected beam from the mask is sent to a zone-plate and a detector to produce an image.

The invention relates to an error self-compensation method, device and equipment for rotary filtering and a medium, and belongs to the field of optical instruments. The method comprises the steps that rotary filtering is carried out by regulating and controlling angular displacement of a monochromator, a single-dispersion light beam is obtained, and the single-dispersion light beam covers a single-dispersion wavelength light beam and a multi-dispersion wavelength light beam; the detection wavelength of the single-dispersion light beam is captured, an error self-compensation model is constructed through disturbance wavelengths to carry out error self-compensation, and the disturbance wavelengths cover the thermodynamic disturbance wavelength, the illumination disturbance wavelength, the current disturbance wavelength, the power disturbance wavelength and the mechanical vibration disturbance wavelength. According to the invention, monochromatic light with different wavelengths can be simply, conveniently and efficiently acquired, discontinuous monochromatic light with multiple wavelengths can be acquired, error self-calibration is realized according to multiple factors, and monochromatic light acquisition is more accurate.

The invention is suitable for the field of electrochemical luminescence detection equipment, and provides a dispersion device suitable for electrochemical luminescence detection, which comprises a monochromator body, the monochromator body is composed of a monochromator housing, a reflector assembly, a grating assembly, a collimating mirror assembly, a focus lens assembly, a slit, a flange snap ring and a flange; an M-shaped light path is arranged in the monochromator body, and a slit, a reflector assembly, a collimating mirror M1 in the collimating mirror assembly, a customized blazed grating G1 in the grating assembly and a focusing mirror M2 in the focusing mirror assembly are sequentially arranged in the light propagation direction. The customized blazed grating G1 is designed by adopting specific parameters including the scribed line density, the blazed wavelength, the notch groove depth and the groove width ratio, and primary light energy enhancement and secondary light intensity suppression can be realized; according to the invention, an optical filter is not needed, the diffraction efficiency of a monochromator is improved to 60-86%, the intensity ratio of luminol secondary light to primary light is less than or equal to 1.6%, the detection limit of ruthenium bipyridine is reduced from 100pmol / L to 50pmol / L, and the electrochemical luminescence detection device is suitable for various electrochemical luminescence detection scenes.

The utility model provides a spectral responsivity calibration device, and relates to the technical field of optical metrology. The device comprises a light source module, a light path module, a detection module, a control system and a packaging box, wherein the control system is respectively in communication connection with a light source, a light path and the detection module; the light source module is a direct-current voltage-stabilizing light source combined by a deuterium lamp and a halogen lamp; the light path module comprises an adjustable grating, a monochromator, a reflector and a lock-in amplifier, and the light path module is of a double-light-path design; the detection module comprises a reference detector, a standard detector and a detected detector. The standard detector is composed of a standard silicon detector, a standard indium gallium arsenic detector, a standard germanium detector and a standard lead sulfide detector. The device can be used for calibrating the spectral responsivity of ultraviolet, visible and near infrared detectors, and can be used for measuring and calibrating the spectral responsivity of the detected detector through a comparison method by arranging standard detectors such as silicon, germanium, indium gallium arsenic, lead sulfide and the like.

The utility model discloses a self-calibration multi-grating monochromator. The self-calibration multi-grating monochromator comprises a self-calibration assembly, a grating spectrum system assembly and an optical receiver. The self-calibration assembly comprises a focus lens, a standard light source and a single-face reflector. And the standard light source is used for emitting a light beam with a specified wavelength to the single-sided reflector. And the single-sided reflector is used for reflecting the light beam to the focus lens, and the light beam is focused to the incident end of the grating spectrum system assembly through the focus lens. According to the utility model, an automatic calibration structure composed of the standard light source and the single-sided reflector is arranged at the incident end of the grating spectrum system assembly, so that the monochromator can emit a light beam with a specified wavelength through the standard light source when being used for a long time, and automatic calibration of the grating spectrum system assembly is realized in cooperation with the light receiver. Besides, the single-sided reflector is installed on the sliding rotary table, so that the single-sided reflector gives way when the grating spectrum system assembly is normally used, and interference with external light is avoided when the grating spectrum system assembly is normally used.

The invention relates to a broadband continuous testing device and method for diffraction efficiency of a medium-long wave infrared grating. The device comprises a broadband light source, a medium-long wave infrared monochromator, a collimation system, a polarization selection system, a broadband spectrum beam splitting system, a signal enhancement detection system, a sample clamping and multi-dimensional moving system and an automatic control system. According to the testing method, the absolute diffraction efficiency of the grating is tested through double optical paths, measurement errors caused by fluctuation of a light source can be avoided, the measurement errors are further reduced by deducting environmental noise and improving the signal-to-noise ratio through a signal enhancement detection system, an automatic control system is added, and continuous scanning testing in a specified wave band is achieved. The test speed is improved. By means of the device and the method, automatic and rapid measurement of the diffraction efficiency of the medium-long wave echelette grating under the conditions of at least 2.5-14 micron broadband, different wavelengths, any incident angle and dual polarization states can be achieved.

The monochromator crystal adjusting mechanism comprises a base, a flexible hinge wheel, a first driving mechanism and a second driving mechanism, the flexible hinge wheel comprises an inner wheel, an outer wheel and a plurality of flexible hinge joints, the inner wheel is located in the outer wheel, the two ends of each flexible hinge joint are connected with the inner wheel and the outer wheel respectively, and the flexible hinge joints can elastically deform under the action of external force; the inner wheel and the first driving mechanism are both fixed to the base, and the first driving mechanism is connected with the outer wheel and used for applying Z-direction force to the outer wheel so that the outer wheel can rotate around the X axis relative to the inner wheel. A rotating piece is arranged on the outer wheel, is rotationally connected with the outer wheel and can rotate around the Y axis relative to the outer wheel; the second driving mechanism is fixed to the outer wheel, connected with the rotating piece and used for driving the rotating piece to rotate around the Y axis. And a clamping mechanism is fixed on the rotating piece and is used for fixing the monochromator crystal. The adjusting mechanism of the monochromator crystal is more compact in structure, and the space utilization rate in a monochromator can be improved to a great extent.

The invention discloses a differential absorption spectrum detection system and method, and belongs to the technical field of flue gas detection. The differential absorption spectrum detection system comprises a gas absorption cell and a monochromator; the gas absorption cell and the monochromator are designed in a common optical path; the gas absorption tank is a flue gas channel; the monochromator is used for detecting the flue gas entering the gas absorption tank. Light energy of the light source does not need to be coupled for multiple times and transmitted through optical fibers, and the energy utilization rate is increased; the gas absorption cell and the monochromator share the same light path, and light passes through the monochromator and the gas absorption cell at the same time, so that the structure of the ultraviolet differential spectrum detector is simplified, the weight of the detector is reduced, and the size of the detector is reduced.

The invention discloses a Mo / Si reflector reflectivity measurement system and method based on an acousto-optic monochromator, the system comprises an EUV light source, an EUV energy meter, a monochromator and an EUV reflectivity meter, the EUV light source is used as a detection light source, the EUV energy meter is used for monitoring the fluctuation condition of the EUV light source and providing a light source fluctuation calibration coefficient for reflectivity measurement, the monochromator screens light based on the acousto-optic effect of an acousto-optic crystal, and the EUV reflectivity meter is used for measuring the reflectivity of the EUV light source. It is ensured that the EUV reflectivity meter only receives light with the required wavelength; the EUV reflectivity meter serves as a measurement space of a Mo / Si reflector sample, mechanical design is adopted, the size of the EUV reflectivity meter is reduced, meanwhile, a collimation optical system is added, and the accuracy of a measurement result is improved. The invention further provides a measurement method, accurate measurement of the angular spectrum and the reflection spectrum of the Mo / Si reflector is achieved, an effective technology is provided for measurement and development of the Mo / Si reflector, and therefore the EUV photoetching technology is continuously improved.

1. The name of the design product: vacuum ultraviolet spectrometer. 2. The use of the design product: the product is used in monochromator for separating the light emitted by the light source into the required monochromatic light. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.

Scanning electron microscope comprising an electron source (1) and a monochromator (20) which makes an electron beam (3) emitted by the electron source monochromatic, wherein: the monochromator comprises a magnetic field generator (21) that deflects the electron beam and an energy selection aperture (23) that allows a portion of the electron beam deflected by the magnetic field generator to pass through; the magnetic field generator is arranged on a trajectory of electrons emitted by a sample (11) and is configured to deflect the electrons emitted by the sample onto different trajectories by means of a magnetic field generated by it when the sample is irradiated with the electron beam that has passed through the monochromator; and A first detector (29) and a first aperture (27) arranged between the magnetic field generator and the corresponding first detector are provided on each of the different trajectories.

The invention discloses an in-situ ultraviolet and visible spectrophotometer with high measurement precision, and relates to the technical field of ultraviolet and visible spectrophotometers, the in-situ ultraviolet and visible spectrophotometer comprises a bottom shell, an optical unit is arranged on the inner wall of the bottom of the bottom shell, and a light source module and a monochromator are arranged in the optical unit; the top of the optical unit is fixedly connected with an operation platform through a supporting rod, the top of the operation platform is provided with a motor mounting frame, the top of the motor mounting frame is provided with a linear motor, the output end of the linear motor is connected with a lifting fixing plate, and the lifting fixing plate is of a Z-shaped structure. The end, away from the linear motor, of the lifting fixing plate is connected with a light shield, and the top of the light shield is provided with an optical fiber clamping frame. According to the method, result deviation caused by dilution multiple estimation errors in a traditional method is avoided, the dilution frequency of the high-concentration sample is reduced, reagent consumption and waste liquid generation are reduced, and the method conforms to the green analytical chemistry concept.

The utility model provides a high-frequency monochromator, which is characterized by comprising a spectrograph and a scanning emitting mechanism, and the scanning emitting mechanism is loaded after the spectrograph emits a light beam. An entrance slit, a spectrograph, a field diaphragm, a collimation optical assembly, a rotary reflector or a rotary reflector with a grating light splitting function, a convergence imaging assembly and an exit slit are sequentially arranged along a light path, and light is emitted through the field diaphragm and the exit slit to form an L-shaped light path; the entrance slit, the spectrograph, the field diaphragm, the collimation optical assembly, the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function, the convergence imaging assembly and the exit slit are all vertically fixed to the horizontal plane, and the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function is arranged at the switching position of the L-shaped light path; the monochromator is simple in light splitting structure and efficient in light splitting.

The invention discloses an automatic monochromator, and belongs to the technical field of optical instruments, the automatic monochromator comprises a monochromator shell, the upper surface of the monochromator shell is in bolted connection with a lamp chamber frame, the surface of the monochromator shell is in bolted connection with an automatic wavelength motor, and the output end of the automatic wavelength motor is fixedly connected with a grating; the outer wall of the lamp chamber frame is in bolted connection with a deuterium lamp holder, and the outer wall of the lamp chamber frame is in bolted connection with a tungsten lamp holder; and the inner wall of the monochromator shell is fixedly connected with a reflecting mirror II. When the automatic monochromator is used, visible light enters the monochromator shell through the first slit piece, passes through the second reflecting mirror and the third reflecting mirror and is gathered on the optical grating, the optical grating divides the visible light into monochromatic light, then the monochromatic light goes out of the monochromator shell through the second slit piece, the operation process is fast and convenient, and the monochromatic light is emitted out of the monochromator shell through the first reflecting mirror and the first reflecting mirror. The device has an automatic light searching structure and is high in working efficiency.

The monochromator comprises a base, a supporting seat, a grating assembly, a posture adjusting mechanism and a sine mechanism, the supporting seat is movably arranged on the base, the grating assembly comprises a grating, the grating is arranged on the supporting seat, the posture adjusting mechanism is arranged on the supporting seat and connected with the grating, and the sine mechanism is arranged on the supporting seat and connected with the grating. The posture adjusting mechanism is used for adjusting the posture of the grating, and the sine mechanism is arranged on the base, connected with the grating and used for controlling the grating assembly to rotate relative to the supporting base. According to the monochromator provided by the embodiment of the invention, the movable supporting seat, the posture adjusting mechanism and the sine mechanism are arranged, so that the grating posture and grating scanning can be accurately and quickly collimated, the efficiency and precision of the grating posture and grating scanning can be improved to a certain extent, and data collected by the monochromator in a subsequent test is more accurate.

An X-ray diffractometer system analyzes objects including biological tissue samples and physical and chemical samples. The diffractometer system includes an X-ray beam projector that projects an incident micro-beam of X-ray at an analysis target, an X-ray receiver including an X-ray detector array to detect the transmitted X-rays passed through the object and X-rays that the target diffracts, and a computer workstation for system control and data analysis. The X-ray beam projector may include a radiation source, a beam forming system including at least one of a monochromator, a collimator, and focusing device. The computer workstation may control the X-ray devices and positioning mechanisms and motors, may acquire, process, store, or display data received from diffractometric examination, and may also calculate parameters of the three-dimensional reciprocal lattice of the analyzed target.

The present application relates to the technical fields of spectral analysis and substance detection, and discloses a deuterium lamp device and an atomic absorption spectral analysis method and system using the deuterium lamp. The system comprises a hollow cathode lamp unit, a built-in hollow cathode lamp emitting a first light beam after preheating under power supply; a first lens, a second lens and a third lens, a deuterium lamp device for emitting a second light beam at a first frequency under the driving of a pulse power supply; a sample cell for internally placing a sample to be measured in a combustion state; a monochromator for performing spectral processing on the incoming first light beam and / or the second light beam, and outputting the spectrally processed light signal to a photoelectric detector; the photoelectric detector for photoelectrically converting the light signal output by the monochromator to obtain an electric signal; and a data processing unit for analyzing and processing the electric signal of the photoelectric detector to obtain an analysis result. The present application can realize more accurate background deduction and improve the accuracy and reliability of atomic absorption spectral measurement.

The invention discloses a high-precision calibration method of a hyperspectral laser radar for photon counting, which belongs to the technical field of laser radars and comprises a spectrum calibration stage and a radiation calibration stage. Spectral calibration is used for extracting spectral response parameters of each channel based on wavelength-by-wavelength scanning of a monochromator and synchronous measurement of a beam splitter; a detection link is strictly decoupled through radiometric calibration, the effective attenuation coefficient of a water body is extracted in situ through a slope method, full-link radiation correction is carried out in combination with an air whiteboard reference and window transmittance, and the target intrinsic spectral reflectivity without interference is inverted. The method can be used for data correction, target accurate classification and identification and high-fidelity quantitative detection of the hyperspectral laser radar for photon counting, and solves the problem of serious spectral distortion of an original signal caused by non-uniform light source energy of the hyperspectral laser radar and complex scattering absorption of a water body.