This invention discloses an
extreme ultraviolet (EUV) high-resolution monochromaticization method and
system, relating to the field of spectral technology. The EUV high-resolution monochromaticization method includes: S1, providing an incident
light source; S2, setting an off-axis parabolic mirror as a collecting mirror, which receives the EUV
light beam and collimates it into parallel light; S3, setting a
grating to split the parallel light, the parallel light is incident on the
grating at a preset angle along the
grating's etched lines, forming conical
diffraction. Rotating the grating adjusts the incident
azimuth angle α of the parallel light, causing EUV light of different wavelengths to propagate along different
diffraction azimuth angles β. This EUV high-resolution monochromaticization method, through the use of two off-axis parabolic mirrors, fundamentally avoids
chromatic aberration and
spherical aberration, ensuring high reflection efficiency in the EUV band. The use of conical
diffraction results in high
diffraction efficiency, uniform distribution of the
light spot in the
confocal plane, and ease of spot selection, thereby reducing
linear dispersion and increasing resolution.