18 results about "Optical metrology" patented technology

A method of characterizing a device under test (DUT) includes illuminating the DUT with a broadband optical beam within an optical field of view (FOV), illuminating the DUT with an X-ray beam within an X-ray FOV overlapping the optical FOV, and concurrently acquiring X-ray metrology information, e.g., one or more X-ray images utilizing various modalities, such as absorption, phase contrast difference, darkfield, small angle X-ray scattering (SAXS) and / or fluorescence, from the X-ray FOV and a plurality of optical images of the optical FOV, each of the optical images corresponding to respective selected wavelengths of the broadband optical beam from each of ultraviolet, visible, and infrared wavelengths, for example including deep ultraviolet, near infrared, or short-wavelength infrared wavelengths. The DUT may be one or more substrates, e.g., stacked, and include electronic devices such as three-dimensional integrated devices.

The invention relates to a method for measuring parameter values of at least one parameter of an optical measuring process that uses an optical metrology system for measuring properties of an object comprising integrated circuit patterns, comprising: acquiring an imaging dataset (22) of the object using the optical metrology system; providing a prior probability distribution (32) for the at least one parameter of the optical measuring process, and providing a likelihood function (40) that evaluates the likelihood of parameter values of the at least one parameter using the acquired imaging dataset (22) of the object; measuring parameter values of the at least one parameter of the optical measuring process by estimating statistical properties of a posterior probability distribution (46) of the at least one parameter. The invention also relates to a corresponding optical metrology system.

Optical metrology is performed using a light source and a normalization channel. A portion of the light is directed to the normalization channel, which detects the intensity of the light while measurements are acquired from the light reflected from a sample. The measurements are normalized based on the detected intensity of the light in the normalization channel. The light detected in the normalization channel may be synchronized with the measurements. Moreover, the acquisition of the intensity of the light in the normalization channel may be aligned with the measurements. The normalization channel measurements may be a single total intensity value that is applied to all wavelengths in the measurements, or may be a function of wavelength that is applied to the corresponding wavelengths in the spectral measurements.

The invention relates to a method for measuring parameter values ​​of at least one parameter of an optical measurement process, which uses an optical metrology system for measuring properties of an object comprising integrated circuit structures, comprising: acquiring an imaging data set (22) of the object using the optical metrology system; providing a prior probability distribution (32) for the at least one parameter of the optical measurement process, and providing a likelihood function (40) that evaluates the likelihood of parameter values ​​of the at least one parameter using the acquired imaging data set (22) of the object; measuring parameter values ​​of the at least one parameter of the optical measurement process by estimating statistical properties of a posterior probability distribution (46) of the at least one parameter.The invention also relates to a corresponding optical metrology system.

The present disclosure relates to metrology measurement systems and related methods. In one or more embodiments a measurement system is provided. The measurement system includes a stage operable to retain an object and a light engine disposed above the stage. The light engine includes a light source directed towards the object, a first lens operable to collimate or focus a light from the light source, a reticle tray disposed between the light source and the first lens, and a reticle coupled to a reticle tray. The reticle includes a pattern and an anti-reflective coating disposed on the reticle. The coating is aligned with the pattern.

Systems and methods of optical metrology and inspection are provided, including shaping a pump pulse to have a concave wavefront that generates, in a sample, an acoustic wave that converges at a focal location. When a subsurface feature is at the focal location, a reflected acoustic wave is generated, with a convex acoustic wavefront. A probe assembly is configured to shape a probe pulse to have a spherical wavefront and to impinge on the surface simultaneously with the return to the surface of a reflected acoustic wave. A detection assembly is configured to receive a reflected probe pulse, reflected from the surface, and, responsively, to determine whether the reflected probe pulse is indicative of surface changes induced by a reflected acoustic wave from a subsurface feature at the focal location.

The present disclosure relates to a candela reproduction method and device based on a virtual blackbody equivalent spectrum synthesis light source, belonging to the technical field of optical metrology testing. The method comprises: calculating the spectral radiance distribution of an ideal blackbody based on the freezing point temperature of platinum; constructing a spectral synthesis light source composed of narrowband spectral light sources and homogenizing devices; determining the target spectral radiance distribution of the spectral synthesis light source for a preset human eye spectral light visibility efficiency function, so that the weighted integral value of the target spectral radiance distribution is equal to that of the ideal blackbody; adjusting the power of each narrowband light source in the spectral synthesis light source so that the spectral radiance distribution of the spectral synthesis light source reaches the target spectral radiance distribution p times; when the effective light emitting area of the outlet surface of the spectral synthesis light source is 1 / 60 square centimeters q times, the luminous intensity is determined to be p q candela, thus realizing a candela reproduction scheme consistent with the historical definition, compatible with multiple visual function models, and taking into account both theoretical rigor and engineering feasibility.

This invention belongs to the field of warp optical detection technology, and relates to an online detection device and method for metal solder sheet warp. The online detection device for metal solder sheet warp includes a light source, a collimating optical element, a patterned light modulation element, a light beam splitter, an imaging component, and a processor. Through the coordinated use of these components, rapid online screening of metal solder sheet warp is achieved, with a minimum curvature that can be sensitively identified as low as 0.5 mm. Furthermore, it does not require an independent reference grating to be set near the surface of the metal solder sheet under test. Compared with interferometric or stripe-type optical metrology systems, the online detection device for metal solder sheet warp of this invention has a simpler structure and is easier to integrate.

Optical metrology is performed using a light source and a normalization channel. A portion of the light is directed to the normalization channel, which detects the intensity of the light while measurements are acquired from the light reflected from a sample. The measurements are normalized based on the detected intensity of the light in the normalization channel. The light detected in the normalization channel may be synchronized with the measurements. Moreover, the acquisition of the intensity of the light in the normalization channel may be aligned with the measurements. The normalization channel measurements may be a single total intensity value that is applied to all wavelengths in the measurements, or may be a function of wavelength that is applied to the corresponding wavelengths in the spectral measurements.

The present application belongs to the field of optical measurement and test, and discloses a high-temperature material spectral emissivity measuring device and method based on a temperature-controlled diaphragm. The measuring device is composed of a standard black body, a temperature-controlled diaphragm, an electrically-controlled rotating mirror, a sample heating furnace, a three-dimensional platform, an optical collimation system and a Fourier transform infrared spectrometer. The present application adopts a liquid circulation type temperature-controlled diaphragm, and the surface temperature of the diaphragm is the same as the laboratory environment temperature. In the spectral emissivity measurement, a diffuse reflection plate with a reflectivity of 1 does not need to be introduced, and a vacuum constant temperature system is also not needed. The present application can eliminate the influence of environmental radiation and atmospheric transmittance, and improve the spectral emissivity measurement precision. The present application designs a gradual diaphragm to realize the selection of the effective detection area of the material sample, and realizes the high dynamic range measurement of the infrared radiation signal in a wide temperature range.

The application discloses a wavelength positioning system of a Faraday laser, and belongs to the technical field of optical measurement, which comprises a Faraday laser, laser output by the Faraday laser passes through a 1 / 2 optical fiber coupler, laser output from the 1 / 2 optical fiber coupler is input into a polarization maintaining fiber, the polarization maintaining fiber is coupled with a whispering gallery mode micro-ring core cavity, a laser output end of the polarization maintaining fiber is connected with a photoelectric detector, and an oscilloscope is connected to the photoelectric detector; the central wavelength of the Faraday laser is adjusted, and the wavelength of the Faraday laser is scanned in the process until a Lorentz transmission spectrum generated after laser is coupled with the micro-ring core cavity is obtained on the oscilloscope. The wavelength positioning system utilizes the whispering gallery mode micro-ring core cavity to replace a commercial wavelength meter, and realizes rapid wavelength positioning of the Faraday laser. Compared with a traditional commercial wavelength meter, the whispering gallery mode micro-ring core cavity has a lower manufacturing cost.

This application relates to high-throughput optical metrology. A method for optically metrologically measuring a sample is provided, the method comprising illuminating a region of the sample with multiple sets of pulses of different wavelengths during variable-speed movement of the sample; collecting light reflected from the sample as a result of the illumination to provide multiple sets of frames, each set of frames comprising multiple partially overlapping frames associated with different wavelengths; and processing these frames to provide an optical metrological result indicating one or more evaluation parameters of elements of the sample region; wherein the processing is based on a mapping between the multiple sets of frames and reference measurements obtained through other optical metrological processes that exhibit a higher spectral resolution than that obtained by illumination and collection.

The application discloses a grating structure parameter prediction method based on an adaptive multi-scale and physical constraint convolutional neural network (ASPCNN) model, and belongs to the cross field of optical metrology and deep learning. In view of the problem that the prior art is difficult to consider non-destructive, high-throughput and high-precision, a fast and high-precision measurement scheme is provided by integrating a double optical path scattering measurement and the ASPCNN model. The method comprises the following steps: obtaining and compensating the diffraction efficiency spectrum after light source fluctuation by using a double optical path device; preprocessing the spectrum into a two-dimensional image and inputting the two-dimensional image into the ASPCNN model; the model extracts multi-scale features by using an adaptive receptive field fusion module (ARFF), and performs feature weighting and noise suppression by using a self-calibration residual attention module (SCRA); and the model is trained through a loss function containing a physical boundary constraint, so that the physical rationality of prediction is ensured. The application realizes millisecond, non-destructive and high-precision measurement of grating groove depth and duty cycle, and is suitable for industrial online detection.

Embodiments of the present disclosure generally relate to metrology systems and metrology methods to measure waveguides for image quality standards. In at least one embodiment, an optical device metrology system includes a stage, a body, and a light engine positioned within the body and mounted above the stage. The light engine includes, a light source, a fold mirror angled relative to the light source, the fold mirror is configured to turn a light beam toward the stage, one or more lenses or arrays positioned between the fold mirror and the stage, and a projection lens positioned between the one or more lenses or arrays and the stage. The system further includes, a first detector positioned within the body and mounted above the stage adjacent to the light engine configured to receive the projected light beam projected upwardly from the stage.

This invention relates to a microscale six-degree-of-freedom motion measurement method and device based on a light intensity distribution model, belonging to the field of precision optical metrology and micro / nano manipulation. The device includes a laser diode and laser coupler, a multi-core optical fiber, a light-modulated target, a multi-channel photodetector, a data acquisition card, and a processor. The multi-core optical fiber consists of a single transmitting fiber and multiple uniformly surrounding receiving fibers. The light-field distribution modulation target has a spatial geometric reflection structure to break the spatial symmetry of the reflected light path. A forward mathematical model is established to describe the nonlinear functional relationship between the six-degree-of-freedom pose of the light-modulated target and multiple independent optical power signals. The six-degree-of-freedom pose is calculated based on the measured optical power values. This invention effectively overcomes the measurement blind zone of traditional fiber optic sensors while maintaining a simple system structure, small size, strong anti-interference capability, and low cost, achieving synchronous, high-precision, and robust measurement of microscale spatial six-degree-of-freedom displacement.

A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the relevant portion of the time-domain representation.

This invention discloses a weak light signal calibration device and method based on fluorescent materials, belonging to the field of optical metrology and weak light detection technology. It includes an excitation source module, a light collection and detection module, a power monitoring module, and a data processing module. The excitation source module outputs excitation light of a preset wavelength to excite a standard sample. The light collection and detection module collects and detects the fluorescence signal of the excited standard sample. The data processing module is electrically connected to an illuminometer and a power detector. The data processing module calibrates the detected light signal. This weak light signal calibration device and method based on fluorescent materials, by combining the inherent attenuation characteristics of fluorescent materials, real-time power monitoring, and optimal attenuation window selection, solves the technical pain points of traditional weak light calibration systems, such as insufficient stability, long traceability chains, narrow dynamic range, and limited calibration accuracy. It possesses significant technical advantages and engineering application value.