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61 results about "Reference measurement" patented technology

A reference standard for a unit of measurement is an artifact that embodies the quantity of interest in a way that ties its value to the reference base.

Self-calibration and drift compensation method for automatic underground water monitoring station

The invention discloses a self-calibration and drift compensation method for an automatic underground water monitoring station, and the method comprises the following steps: 1, transmitting a reference measurement starting instruction to an underground bubble method device by an edge calculation gateway, forming a reference data pair by a bubble method water level reference value and a reference acquisition moment, and writing the reference data pair into a reference data cache region; 2, the edge computing gateway creates a state storage structure and a covariance storage structure; and step 3, the edge computing gateway reads a drift amount estimation value from the state storage structure as a drift compensation amount, and when a drift estimation standard deviation exceeds a set threshold, bubble method hardware reference acquisition is triggered. According to the invention, the problems of high manual calibration cost and lack of independent reference support in pure software estimation in the prior art are solved, so that a monitoring station can stably operate for a long time under an unattended condition and continuously output high-precision underground water level monitoring data.
Owner:山东省国土空间生态修复中心(山东省地质灾害防治技术指导中心山东省土地储备中心)

Method for measuring spatial pose of large-length-diameter-ratio unfolding arm

The invention provides a large-length-diameter-ratio expansion arm space pose measurement method, and the method comprises the steps: taking a short-side high-precision cubic mirror as a reference measurement and transmission object; the reference of the driving joints at the two ends of the unfolding arm and the matrix parameter of the cubic mirror are obtained through the automatic detection method of a high-precision space coordinate measuring instrument, the calibrated reference matrix parameter can be transmitted to optical collimation fusion laser tracking measurement, and the requirement for integrated measurement of the driving joints and the arm lever can be met; the reference systems of the driving joints at the two ends of the unfolding arm are obtained in the same global reference state through optical collimation and laser tracking, the spatial pose measurement of the large-length-diameter-ratio unfolding arm is achieved through data fusion analysis, and the detection requirements of measurement objects of different sizes, different diameters and different length-diameter ratios are met.
Owner:BEIJING SATELLITE MFG FACTORY

Method for detecting leaks in objects to be tested and equipment

The invention relates to a leak detection method (100) comprising: - a learning step (101) during which at least one reference measurement signal representative of the flow or concentration of tracer gas in a reference object (A) to be tested or in an environment surrounding a reference object (A) to be tested is measured during at least one leaktightness monitoring cycle (C), - a plurality of successive test steps (102) during which a leak detector (1) is used to measure a measurement profile representative of the flow or concentration of tracer gas during at least one leaktightness monitoring cycle (C) and the measurement profile is compared against the reference profile in order, depending on the result of the comparison, to provide a similarity indicator from which the presence of an anomaly can be deduced.
Owner:PFEIFFER VACUUM SAS

Automatic reference volume method measurement system and method for performance assessment of water electrolysis hydrogen production system

The invention discloses an automatic reference volume method measurement system and method for performance assessment of a water electrolysis hydrogen production system, and relates to the field of gas flow metering and performance testing. Comprising a main gas inlet pipe, a main gas outlet pipe, a plurality of reference measurement units connected between the main gas inlet pipe and the main gas outlet pipe in parallel, an intelligent fluid switching matrix used for controlling on-off and flow direction of gas, and a controller electrically connected with the reference measurement units and the intelligent fluid switching matrix, the reference measurement units are used for collecting temperature-time sequence data and pressure-time sequence data in real time, and the controller is used for controlling the valves in the intelligent fluid switching matrix to act according to a preset time sequence, so that the plurality of reference measurement units carry out cyclic relay type geovolumetric method measurement in an assessment period. And the average flow in the assessment period is calculated according to the temperature-time sequence data and the pressure-time sequence data collected by each reference measurement unit in each cycle. According to the invention, automatic and high-precision measurement of a large-flow scene can be realized.
Owner:EAST CHINA ENGINEERING SCIENCE AND TECHNOLOGY CO LTD

Combustible gas non-inductive detection camera system integrated with spectrum sensor

The invention discloses a combustible gas non-inductive detection camera system integrated with a spectrum sensor, and relates to the technical field of gas imaging detection, and the combustible gas non-inductive detection camera system comprises the following steps: establishing multi-source observation through a reference measurement frame which shares at least part of an optical link with a main imaging light path, and outputting a fixed reference area statistical abstract, a temperature observation vector and a reference data effective mark; updating the drift state quantity based on the statistical abstract and the temperature observation vector and generating a stability field; performing drift compensation on the infrared image sequence according to the drift state quantity and the stability field, and generating an operation envelope field, a quantization result, a confidence interval and error source decomposition; and finally, executing gating output and writing back scheduling parameters. According to the scheme, continuous connection of reference observation, drift estimation, quantitative judgment and feedback scheduling is achieved, and the output stability, the quantitative credibility and the continuous operation capacity under the fixed online detection condition are improved.
Owner:JIANGSU SPEAR DIGITAL TECHNOLOGY CO LTD

Non-reference initial alignment absolute precision calculation method for strapdown inertial navigation system

The invention relates to a strapdown inertial navigation system reference-free initial alignment absolute precision calculation method, and belongs to the technical field of inertial navigation. According to the method, the initial alignment precision of the strapdown inertial navigation system can be accurately calculated only through a simple two-position rotation method by applying a specific attitude tracking algorithm in an environment without reference measurement equipment. The method effectively solves the problem of excessive dependence of previous precision calculation on a test environment and equipment, and breaks through the limitation of a traditional method. The method can be widely applied to initial alignment precision calculation of the strapdown inertial navigation system in various scenes, the calculation cost is greatly reduced, the calculation efficiency is remarkably improved, and powerful technical support is provided for development and application of the strapdown inertial navigation system.
Owner:XIAN MODERN CONTROL TECH RES INST

A multi-working-condition self-tracing calibration method and system for a pneumoperitoneum machine

This invention discloses a multi-condition self-traceable calibration method and system for insufflators, relating to the field of insufflator metrology technology. The method includes: constructing a standard loop to apply back pressure and inject a controllable leakage; during a continuous calibration, controlling the insufflator under calibration to sequentially enter pressure stabilization, flow stabilization, and leakage disturbance conditions, synchronously collecting data through collaboratively working traceable pressure and flow references; comparing the reference measurements with the insufflator's readings to calculate pressure coupling error, flow coupling error, and dynamic response characteristics; performing standard state conversion based on preset standard pressure and temperature, fitting and generating calibration coefficients to correct the measured values, and generating a judgment result based on comparison of coupling error and dynamic response characteristics with preset thresholds; generating an automatic report including operating condition type, residual, final calibration measurement results, and uncertainty. This invention improves calibration accuracy and traceability through three-condition linkage calibration and environmental factor compensation.
Owner:CHENGDU METROLOGY TESTING INST

Machine learning-based image generation for model-based alignment

A method for training a machine learning model to produce a predicted measured image includes obtaining (a) an input target image associated with a reference design pattern, and (b) a reference measured image associated with a specified design pattern printed on a substrate, where the input target image and the reference measured image are misaligned images; and training, by a hardware computer system and using the input target image, the machine learning model to produce a predicted measured image.
Owner:ASML NETHERLANDS BV

A multi-dimensional alarm analysis method and system based on an alarm platform

The application relates to a multi-dimensional alarm analysis method and system based on an alarm platform, and relates to the field of water meter detection, which comprises the following steps: collecting water meter measurement values and historical measurement data in response to a water meter detection signal; calling historical measurement values based on the historical measurement data; generating a reference measurement interval based on the historical measurement values and a reference deviation value; collecting current temperature and pressure parameters when the water meter measurement values do not fall into the reference measurement interval; generating a measurement deviation value based on the current temperature and pressure parameters; obtaining a water meter deviation value according to the water meter measurement values and the measurement deviation value; controlling a water meter self-checking device to perform measurement self-checking by a self-checking method and outputting self-checking information when the water meter deviation value does not fall into the reference measurement interval; reporting a water meter abnormality prompt when the self-checking information is consistent with abnormal information, and discarding the water meter measurement values collected this time. The application has the effect of reducing the false alarm rate of a water meter.
Owner:NINGBO DONGHAI DIGITAL TECH CO LTD

Monitoring system

The invention is directed to a monitoring system (1) for moving machine parts (2), in particular of drilling equipment (3), having a sensor device (4) which comprises a plurality of adjacent sensors (12), which at least partially surround the machine part (2) to be monitored; a reference profile (5) which is arranged spaced apart from the sensor device (4), wherein the sensors (12) of the sensor device (4) are each configured to transmit measurement beams (M1, M2, M3, M4, M5, M6) to the reference profile (5); and a control device (7) having an evaluation unit (8) which is configured to compare the measured values (W1, W2, W3, W4, W5, W6) resulting from the measurement beams (M1, M2, M3, M4, M5, M6) with associated reference measured values (R1, R2, R3, R4, R5, R6) and to determine a measurement span (Δ) therefrom.
Owner:STUMATEC AG

Phase ranging method and device, electronic equipment, storage medium and program

The embodiment of the invention discloses a phase distance measurement method and device, electronic equipment, a storage medium and a program, and the method comprises the steps: obtaining the distance between first reference measurement equipment and second reference measurement equipment; wherein the first reference measurement equipment is used for sending a first detection signal to the second reference measurement equipment and the phase distance measurement equipment; the phase distance measurement equipment is used for responding to the first detection signal and sending a second detection signal to the first reference measurement equipment and the second reference measurement equipment; obtaining measurement phases when the phase ranging device, the first reference measurement device and the second reference measurement device receive the detection signals; according to the distance between the first reference measurement device and the second reference measurement device and the measurement phase, the distance between the phase distance measurement device and the first reference measurement device and the distance between the phase distance measurement device and the second reference measurement device are calculated. According to the technical scheme of the embodiment of the invention, the ranging efficiency can be improved.
Owner:SHANGHAI TRUSTKERNEL INFORMATION TECH CO LTD

Three-coordinate measuring machine workpiece auxiliary positioning device

ActiveCN224285868UShorten alignment assistance timeReduce auxiliary work timeMechanical measuring arrangementsLocking mechanismCoordinate-measuring machine
This utility model discloses a workpiece auxiliary positioning device for coordinate measuring machine (CMM) inspection, including a base, the top surface of which serves as a workpiece support surface, a vertically movable front positioning plate mounted on the front end surface of the base, and a vertically movable side positioning plate mounted on the side wall surface of the base. A front positioning plate guide mechanism and a front positioning plate locking mechanism are provided between the front positioning plate and the base, and a side positioning plate guide mechanism and a side positioning plate locking mechanism are provided between the side positioning plates and the base. This utility model, through the base in conjunction with the movable front and side positioning plates, enables relatively accurate positioning of the workpiece in different directions. This eliminates the need to recalibrate the measurement reference after changing the workpiece's placement orientation, effectively shortening the workpiece alignment auxiliary time, saving inspection personnel's auxiliary work time for workpiece alignment and reference measurement, greatly improving inspection efficiency, and reducing labor costs.
Owner:WEIFANG HAOTAI MASCH CO LTD

Three-dimensional measurement device, three-dimensional measurement method, and storage medium storing three-dimensional measurement program

The invention provides a three-dimensional measurement apparatus, a three-dimensional measurement method, and a storage medium storing a three-dimensional measurement program. When acquiring three-dimensional data by a three-dimensional scanner, a user can easily know whether necessary three-dimensional data has been acquired. The three-dimensional coordinate generation unit sequentially generates three-dimensional coordinates of the measurement workpiece on the basis of the image including the pattern light generated by the scanner imaging section. The display control unit sequentially generates display data in which the three-dimensional coordinates of the measurement workpiece sequentially generated by the three-dimensional coordinate generation unit are superimposed on the three-dimensional shape based on the reference three-dimensional shape data registered by the registration unit. The three-dimensional data generation unit generates three-dimensional shape data of the measurement workpiece based on three-dimensional coordinates of the measurement workpiece. The measurement unit performs measurement based on the reference measurement element registered by the registration unit and the three-dimensional shape data of the measurement workpiece.
Owner:KEYENCE CORP

Calibration method, measurement device, and inductor

The invention provides a correction method, a measurement device, and an inductor inspection method. The calibration method includes: an open-circuit reference measurement step of measuring electrical characteristics in an open-circuit state in which the contact does not come into contact with another object and acquiring an open-circuit reference measurement value; a reference measurement step for measuring the electrical characteristics of a reference substance by bringing the contact into contact with the reference substance having known electrical characteristics; and a calculation step for calculating, on the basis of the open-circuit reference measurement value, a reference value that is a known electrical characteristic of the reference object, and a measurement reference value that is a result of measuring the electrical characteristic of the reference object, a transmission parameter indicating a characteristic of a transmission path from the measurement unit to the object. The reference measurement step is performed a plurality of times so as to repeatedly contact and separate the contact and the reference substance, and in the calculation step, representative values of the measurement reference values are acquired from the plurality of measured measurement reference values, and the transmission parameter is calculated on the basis of the representative values of the measurement reference values.
Owner:HIOKI DENKI KK +1

Procedure for qualifying a mask of a lithography system

Method (100) for qualifying a mask (13) for a lithography system (1), wherein the mask (13) has a plurality of predetermined measurement points (22) for capturing one or more critical dimensions (20) of the mask (13) at each measurement point (22), comprising: - Initial acquisition (101) of at least one critical dimension (20) of the mask (13) at the measurement points (22), wherein the initial acquisition (101) is sequential and the duration of the initial acquisition (101) defines a measurement period; - Determining (102) a plurality of reference measurement points (24) from the plurality of measurement points (22), wherein the number of reference measurement points (24) is less than the number of measurement points (22); - Second acquisition (103) of at least one critical dimension (20) of the mask (13) at the reference measurement points (24) at a time interval from the first acquisition (101) at the measurement points (22) determined as reference measurement points (24); - Determining (104) a deviation (21) between the first and the second recorded critical dimension (20) at each of the reference measurement points (24); - Determine (105), depending on the determined deviation (21), a time course of a correction factor over the measurement period; and - Applying (106) the determined time course of the correction factor to at least one critical dimension (20) to obtain a corrected critical dimension of the mask (13).
Owner:CARL ZEISS SMT GMBH

An interferometric measurement method, system, device, and medium

The application specifically relates to an interference measurement method, system, device and medium, the method comprising the following steps: S1: defining two interference components as component A and component B; S2: setting component B as a reference measurement component, and marking interference points formed by component A and component B on an interface; S3: marking a maximum interference point position of component A and component B as 5, marking a centroid position of component A as 6, and marking a centroid position of component B as 7; S4: connecting any two interference points, and the connecting line is an interference interface; S5: defining a direction away from the centroid point of component A as an interference direction according to a normal line of the interference interface; S6: picking up and measuring maximum distances of each point on component A to the centroid of component A according to the interference direction, and obtaining the maximum interference point 5; and S7: measuring a shortest distance h of the maximum interference point 5 to the interference interface, wherein h is the sought interference amount. The main beneficial effect is to improve the quality and efficiency of interference checking work.
Owner:CHINA FAW CO LTD

Calibration method, measurement device, and inductor inspection method

To reduce a measurement error of a measurement device.SOLUTION: A calibration method comprises: an open reference measurement step for measuring an electric characteristic in an open state where a contact piece 40 does not contact other article for acquiring an open reference measurement value Rmo; a reference measurement step for bringing the contact piece 40 into contact with a reference object whose electric characteristic is known for measuring an electric characteristic of the reference object; and a calculation step for, on the basis of the open reference measurement value Rmo and a reference value being the known electric characteristic of the reference object, and a measurement reference value being a measurement result of the electric characteristic of the reference object, calculating a transmission parameter expressing a characteristic of a transmission path from the measurement part 20 to a target. The reference measurement step is executed multiple times repeating contact and separation of the contact piece 40 to the reference object. The calculation step acquires a representative value of a measurement reference value is acquired from multiple measurement reference values, and calculates a transmission parameter on the basis of the representative value of the measurement reference value.SELECTED DRAWING: Figure 4
Owner:HIOKI DENKI KK +1

Encoder system, encoder calibration method and encoder

To provide an encoder system, an encoder calibration method and an encoder, capable of eliminating an error similarly to when a plurality of measurement units are used without providing the plurality of measurement units when detecting a state of a measurement object on actual measurement.SOLUTION: An encoder system includes an encoder 110, a reference encoder 120 and an arithmetic unit 140. On adjustment, the encoder 110 measures a state of a measurement object 10 to generate a measurement value, the reference encoder 120 measures a state of the measurement object 10 to generate a reference measurement value, the arithmetic unit 140 calculates a correction value for correcting the measurement value on actual measurement from the measurement value and the reference measurement value, and the encoder 110 is made to store the correction value. On actual measurement, the encoder 110 measures a state of the measurement object 10 to generate the measurement value, and uses the stored correction value to correct the measurement value to output the corrected measurement value.SELECTED DRAWING: Figure 1
Owner:TAMAGAWA SEIKI CO LTD

Information processing device, method for operating information processing device, and program for operating information processing device

An information processing device that predicts the state of a target component in a suspension in which biomolecules are dispersed as components in a liquid on the basis of spectral data obtained by measuring electromagnetic waves emitted from the suspension, the information processing device being provided with a processor, the processor performs: a process using a state prediction model corrected from reference spectral data obtained from a reference suspension in a reference measurement environment; a target spectroscopic data acquisition unit that acquires target spectroscopic data obtained from a target suspension in which the state of a target component is unknown in a target measurement environment different from the reference measurement environment; acquiring a correction coefficient derived by comparing the reference spectroscopic data corresponding to the target spectroscopic data and reference spectroscopic data obtained from the reference suspension in the target measurement environment; correcting the target spectral data according to the correction coefficient to generate corrected target spectral data; and causing the state prediction model to predict the state of the object component by applying the correction object spectral data to the state prediction model.
Owner:FUJIFILM CORP

Lathe charger control device, lathe charger including the same, and a method for controlling a lathe charger

When the absolute value (|Tt−Tc|) of the difference between the turning time Tt of a log PW and the transport time Tc of the log PW is longer than a reference measurement time Ts, the turning-axis center line measurement time Tm is set to the absolute value (|Tt−Tc|) (Step S120), the rotation speed W of centering spindles 24a and 24b is set to a speed (Ws×Ts / Tm) lower than a reference rotation speed Ws, and also the measurement rotation angle α is set to an angle (αs×Ts / Tm) smaller than a reference measurement rotation angle as (Step S122). When the absolute value (|Tt−Tc|) is equal to or less than the reference measurement time Ts, the turning-axis center line measurement time Tm is set to the reference measurement time Ts (Step S116), the rotation speed W of the centering spindles 24a and 24b is set to the reference rotation speed Ws, and also the measurement rotation angle α is set to the reference measurement rotation angle αs (Step S118).
Owner:MEINAN MASCH WORKS INC

System and method for continuous calibration of x-ray scans

A dual-energy X-ray absorptiometry (“DXA”) system includes an x-ray source assembly comprising a source carriage to move the x-ray source assembly along a scan path, the scan path comprising an active scan portion and a reference measurement portion. A detector assembly including a detector carriage to move the detector assembly with the source assembly and to collect scan data at active scan portions. A support structure supporting the source and detector assemblies. A calibration controller coupled a calibration element having a known x-ray attenuation value and configured position the calibration element between the source and detector assemblies during the reference measurement portion and to remove the calibration element from between the source and detector assemblies during the active scan portion. A processing unit operable to compare the reference measurement against an expected reference value to identify a variance and to selectively trigger an action in response to the variance.
Owner:HOLOGIC INC

Communication method and device

A communication method and device relate to the technical field of communication. In the method, a first reference measurement quantity corresponding to at least one moment based on a plurality of sub-regions contained in a first region and a first measurement result of a terminal in a current region are used for terminal positioning; compared with the prior art that the measurement information of at least three moments (generally, the interval between the at least three moments is long) needs to be acquired for terminal positioning, the method and the device can improve the positioning efficiency. In addition, the positioning precision of the terminal position is related to the granularity of division of the first region, and the first region is divided into the fine-grained sub-regions, so that the positioning accuracy is improved.
Owner:HUAWEI TECH CO LTD

Base Station Predicted Measurement Frequency Range

A method comprises transmitting, by a first node to a second node, a message indicating one or more of: a reference frequency, of a reference signal, for a reference measurement by a third node hosted by the first node, and one or more frequencies for one or more predicted measurements, by the third node, based on the reference measurement. The method further comprises receiving, by the first node from the second node, a response to the message.
Owner:OFINNO LLC

An automated reference volumetric measurement system and method for performance evaluation of water electrolysis hydrogen production systems.

ActiveCN121877129Beasy to acceptEase of AdmissibilityStationary measuring chambersData controlThermodynamics
This invention discloses an automated reference volumetric measurement system and method for performance evaluation of a water electrolysis hydrogen production system, relating to the field of gas flow metering and performance testing. The system includes: a main inlet pipe, a main outlet pipe, multiple reference measurement units connected in parallel between the two, an intelligent fluid switching matrix for controlling gas flow and direction, and a controller electrically connected to the reference measurement units and the intelligent fluid switching matrix. The reference measurement units are used to collect temperature-time series data and pressure-time series data in real time. The controller controls the valves in the intelligent fluid switching matrix to operate according to a predetermined sequence, enabling the multiple reference measurement units to perform cyclic relay volumetric measurements within the evaluation period. The average flow rate within the evaluation period is calculated based on the temperature-time series data and pressure-time series data collected by each reference measurement unit in each cycle. This invention enables automated, high-precision measurement in high-flow-rate scenarios.
Owner:EAST CHINA ENGINEERING SCIENCE AND TECHNOLOGY CO LTD

Method for detecting leaks in objects to be tested and equipment

A leak detection method (100) comprising: - a learning step (101) during which at least one reference measurement signal representative of the flow or concentration of tracer gas in a reference test object (A) or in an environment surrounding a reference test object (A) is measured during at least one leak test cycle (C), - a plurality of successive test steps (102) during which a measurement profile representative of the flow or concentration of tracer gas is measured using the leak detector (1) during at least one leak test cycle (C) and compared with the reference profile to provide, based on the result of the comparison, a similarity indicator allowing the presence of an anomaly to be deduced. Figure 1
Owner:PFEIFFER VACUUM SAS

Wafer thickness measurement device and method for same

A wafer thickness measurement device of the present invention obtains, based on: first and second interferometer reference measurement results obtained by measuring, with an A-surface optical interferometer and a B-surface optical interferometer, a reference measurement point on a reference piece having the reference measurement point at which the reference piece has a known thickness; first and second distance meter reference measurement results obtained by measuring the reference measurement point with an A-surface distance meter and a B-surface distance meter; first and second interferometer measurement results obtained by measuring a measurement point of the wafer with the A-surface optical interferometer and the B-surface optical interferometer; and first and second distance meter measurement results obtained by measuring the measurement point with the A-surface distance meter and the B-surface distance meter, and obtains a thickness, of the wafer, at the measurement point.
Owner:KOBELCO RES INST INC

A method for realizing reference measurement and conversion based on a single theodolite

ActiveCN118857340BSurveying instrumentsTheodolitesPhototestingTheodolite
The application discloses a method for realizing reference measurement and conversion based on a single theodolite, and is applied to the technical field of photoelectric testing. The method comprises the following steps: acquiring normal vectors of a plane mirror, reference vectors and to-be-measured vectors at first and second observation points respectively; obtaining two groups of coefficient arrays through conversion of the first reference vector and the first to-be-measured vector in a first coordinate system; similarly, obtaining another two groups of coefficient arrays through conversion of the second reference vector and the second to-be-measured vector in a second coordinate system; obtaining a conversion relationship of the to-be-measured vector in a reference coordinate system based on the four groups of coefficient arrays, and then determining a conversion relationship between a to-be-measured coordinate system and the reference coordinate system; and precise space vector measurement and coordinate system conversion are realized by using the single theodolite.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Method for reducing artifacts in image data reconstructed from measurement data of an object under examination captured using an echo-planar acquisition technique (EPI)

Techniques are described for complex preprocessing steps to ensure consistency of sorted sets of reference measurement data, which have conventionally been required when sorting reference measurement data sets for DPG algorithms captured using an EPI technique, to be omitted because items of reference measurement data captured via the described techniques are already consistent in themselves. Therefore, for each polarity of the read-out gradients, a set of fully sampled reference measurement data is available, which is already suitable for carrying out a dual-polarity (DP) algorithm without any further measures.
Owner:SIEMENS HEALTHINEERS AG

High-precision full-field tilt deformation calibration system and method for shearing speckle interference system

The invention discloses a high-precision full-field inclination calibration system and method for shearing speckle interference. The system comprises an integrated composite calibration target mirror, a two-dimensional piezoelectric deflection driving module, a photoelectric auto-collimation measurement module and a control and data processing unit, the measuring surface of the composite calibration target mirror is divided into a central rough scattering surface and an annular smooth reflecting surface. In the calibration process, the piezoelectric deflection driving module is used for inducing the target mirror to generate high-precision two-dimensional inclination deformation, the photoelectric auto-collimation measurement module is used for obtaining the absolute inclination angle of the target mirror in real time through the smooth reflecting surface to serve as a reference, and meanwhile the shearing speckle interferometer to be calibrated is used for collecting interference data of the rough scattering surface. And the control unit is used for carrying out full-field comparison and calculation on the two data to realize error correction. Physical space alignment of benchmark measurement and speckle measurement is achieved through the double-function area target mirror, the problems that traditional calibration precision is low, and full-field coverage cannot be achieved are solved, and the device has the advantages of being compact in structure, high in repeatability and high in adaptability.
Owner:SHANGHAI UNIV