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91 results about "Reference measurement" patented technology

A reference standard for a unit of measurement is an artifact that embodies the quantity of interest in a way that ties its value to the reference base.

Self-calibration and drift compensation method for automatic underground water monitoring station

The invention discloses a self-calibration and drift compensation method for an automatic underground water monitoring station, and the method comprises the following steps: 1, transmitting a reference measurement starting instruction to an underground bubble method device by an edge calculation gateway, forming a reference data pair by a bubble method water level reference value and a reference acquisition moment, and writing the reference data pair into a reference data cache region; 2, the edge computing gateway creates a state storage structure and a covariance storage structure; and step 3, the edge computing gateway reads a drift amount estimation value from the state storage structure as a drift compensation amount, and when a drift estimation standard deviation exceeds a set threshold, bubble method hardware reference acquisition is triggered. According to the invention, the problems of high manual calibration cost and lack of independent reference support in pure software estimation in the prior art are solved, so that a monitoring station can stably operate for a long time under an unattended condition and continuously output high-precision underground water level monitoring data.
Owner:山东省国土空间生态修复中心(山东省地质灾害防治技术指导中心山东省土地储备中心)

Laser interference surface shape measurement method based on calibration plate, medium, equipment and system

The invention relates to the technical field of laser measurement, in particular to a laser interference surface shape measurement method based on a calibration plate, a medium, equipment and a system. Comprising the following steps: attaching a reflecting mirror to a reference mirror, and obtaining reflecting surface shape data of the reflecting mirror; the calibration glass plate is tightly clamped between the reflector and the reference mirror, and light facing surface reflection surface shape data and mixed transmission surface shape data of the calibration glass plate are obtained; removing the reflector, moving the calibration glass plate to a preset measurement distance along a laser optical axis, carrying out multi-surface synchronous measurement through a laser interferometer, and respectively obtaining light facing surface mixed reflection surface shape data and to-be-measured surface shape mixed data; and obtaining target surface shape data of the surface to be measured. According to the invention, the movable calibration glass plate is introduced to establish a double-reference measurement system, so that the space calibration of the airflow disturbance error can be realized. The device is simple in structure and low in measurement environment requirement. Interference of air turbulent flow can be eliminated only through single-time measurement, and the measurement time is saved.
Owner:LEADING OPTICS (SHANGHAI) CO LTD

Calibration method and device for detection equipment

The invention discloses a calibration method and device for detection equipment. The calibration method specifically comprises the following steps: acquiring actual data of a target product and product detection data measured by the detection equipment; performing mapping processing on the product detection data based on the reference measurement sheet calibration model, and giving initial product calibration data; giving calibration product calibration data in combination with the initial product calibration data and the primary product calibration model; and completing calibration of the detection equipment according to the actual data of the target product and the calibration data of the calibration product. According to the calibration scheme of the detection equipment provided by the invention, the correlation between the reference measuring sheet and the target product is established, so that the production waste of production materials during product calibration is avoided, and green calibration is realized. Meanwhile, correlation among the multiple detection devices is given, the consistency of calibration results of the multiple detection devices is guaranteed, and the calibration efficiency is improved.
Owner:ZHEJIANG SHUANGYUAN TECH CO LTD

Dispensing calibration method, device and equipment based on machine vision algorithm compensation

The embodiment of the invention provides a dispensing calibration method, device and equipment based on machine vision algorithm compensation, and the dispensing calibration method comprises the steps: continuously obtaining a dispensing finished product diagram on the surface of a module device after calibration processing is completed, and determining a dispensing reference measurement point and an actual dispensing offset position on the dispensing finished product diagram; the actual dispensing distance of the current dispensing finished product diagram is determined according to the dispensing reference measurement points and the actual dispensing offset positions which belong to the same dispensing finished product diagram, and the average dispensing distance is determined according to the actual dispensing distances of all the dispensing finished product diagrams; when the average dispensing distance meets a preset calibration condition, determining a calibration displacement stroke according to the average dispensing distance, and performing calibration treatment again based on the calibration displacement stroke; according to the method provided by the embodiment of the invention, the dispensing yield can be improved.
Owner:DONG GUAN GAO WEI GUANG XUE DIAN ZI YOU XIAN GONG SI

Use of reference measurements to reduce geospatial uncertainty

Systems and methods for minimizing the uncertainty of geospatial location measurements. First and second position data of a first reference marker are received, each including an uncertainty radius centered on a preliminary coordinate. A first translation vector is received that includes the displacement from a second reference marker to the first reference marker. A second uncertainty radius is translated by the first translation vector, and based on the intersection area of the translated second uncertainty radius and the first uncertainty radius, the first uncertainty radius is reduced to the intersection area.
Owner:AUKI LABS LTD

Calibration method for active target ball device of mobile robot and related equipment

The invention belongs to the technical field of detection, and discloses a calibration method for an active target ball device of a mobile robot and related equipment, and the method comprises the steps: obtaining a rotation angle measurement value of the active target ball device of the mobile robot at a plurality of preset measurement points; the calculation module is used for calculating the measured value of the rotation angle increment of the reflection target ball at each preset measurement point relative to the reference measurement point, and calculating the reference value of the rotation angle increment of the reflection target ball at each preset measurement point relative to the reference measurement point according to the pre-calibrated center angle of each preset measurement point; the measurement value of the rotation angle increment is compared with the reference value, so that the measurement error of the rotation angle is calculated, and the measurement error of the rotation angle of the active target ball device of the mobile robot can be accurately calibrated.
Owner:佛山市南海区质量技术监督检测所

Calibration method of ultrasonic measuring device

The invention relates to a method for calibrating an ultrasonic measuring device, in particular an ultrasonic bolt testing device, comprising the following steps: a) providing a reference object; b) measuring the reference object via an ultrasonic measuring device to determine reference measurement data representative of an ultrasonic length of the reference object; c) storing the reference measurement data; d) measuring the reference object with the same or another ultrasonic measuring device in order to determine verification measurement data representative of the ultrasonic length of the reference object; e) comparing a reference length of the reference object determined on the basis of the reference measurement data with a verification length of the reference object determined on the basis of the verification measurement data; f) adjusting the ultrasonic measurement device on the basis of the comparison of the reference measurement data and the verification measurement data.
Owner:R&D ENGINEERING AS

Heterodyne laser interferometer rotation tilt error calibration method based on redundancy characteristics

The invention provides a method for calibrating a rotation tilt error of a heterodyne laser interferometer based on redundancy characteristics, which comprises the following steps of: respectively and independently planning a moving path of a workbench in a horizontal direction X or Y direction, selecting a reference measurement point, setting maximum and minimum values of Rx, Ry and Rz at each measurement position, and setting the rest degrees of freedom to be zero; measuring at a reference point according to a set path, calculating Rz and Ry rotation inclination angles of the workpiece table through a six-degree-of-freedom measurement model and obtaining a deviation value between different measurement axes, then establishing a relation equation between the deviation value and an error coupling coefficient deviation value according to a Taylor expansion formula, and finally calculating an error coupling coefficient; substituting the updated and compensated error coupling coefficient into the model to calculate the rotation gradient of the workbench; and therefore, the purpose of calibrating the rotation and inclination postures of the heterodyne laser interferometer with redundant characteristics can be achieved. The method can be used for reducing the rotation tilt error of the heterodyne laser interferometer.
Owner:GUILIN UNIV OF ELECTRONIC TECH

Method for measuring spatial pose of large-length-diameter-ratio unfolding arm

The invention provides a large-length-diameter-ratio expansion arm space pose measurement method, and the method comprises the steps: taking a short-side high-precision cubic mirror as a reference measurement and transmission object; the reference of the driving joints at the two ends of the unfolding arm and the matrix parameter of the cubic mirror are obtained through the automatic detection method of a high-precision space coordinate measuring instrument, the calibrated reference matrix parameter can be transmitted to optical collimation fusion laser tracking measurement, and the requirement for integrated measurement of the driving joints and the arm lever can be met; the reference systems of the driving joints at the two ends of the unfolding arm are obtained in the same global reference state through optical collimation and laser tracking, the spatial pose measurement of the large-length-diameter-ratio unfolding arm is achieved through data fusion analysis, and the detection requirements of measurement objects of different sizes, different diameters and different length-diameter ratios are met.
Owner:BEIJING SATELLITE MFG FACTORY

Multiple spectrometers with the same structure and their calibration methods

The present invention relates to a method for calibrating a plurality of spectrometers having the same structure for component analysis. First, a plurality of samples are provided and the concentration of components in each sample is measured using a reference measurement method. The spectra of each sample are measured using a spectrometer exemplarily selected from the spectrometers having the same structure in order to determine a provisional regression model. At least one spectrum is selected from the measured spectra and / or the average spectrum formed from the measured spectra. A plurality of error spectra (01) are generated using a mathematical model of the spectrometers having the same structure. Each error spectrum (01) is added to each selected spectrum respectively in order to obtain simulated spectra. Thus, a final regression model is determined, in which the amplitudes of the measured spectra and the amplitude values of the selected simulated spectra form independent variables, and in which the reference measurement values form dependent variables. In addition, the present invention relates to a plurality of spectrometers having the same structure for component analysis.
Owner:CARL ZEISS MICROSCOPY GMBH

Method for detecting leaks in objects to be tested and equipment

The invention relates to a leak detection method (100) comprising: - a learning step (101) during which at least one reference measurement signal representative of the flow or concentration of tracer gas in a reference object (A) to be tested or in an environment surrounding a reference object (A) to be tested is measured during at least one leaktightness monitoring cycle (C), - a plurality of successive test steps (102) during which a leak detector (1) is used to measure a measurement profile representative of the flow or concentration of tracer gas during at least one leaktightness monitoring cycle (C) and the measurement profile is compared against the reference profile in order, depending on the result of the comparison, to provide a similarity indicator from which the presence of an anomaly can be deduced.
Owner:PFEIFFER VACUUM SAS

Method and device for qualifying a mask of a lithography system

A method for qualifying a mask for a lithography system, the mask having measurement points for detecting critical dimensions of the mask, comprising: first detection of critical dimensions of the mask at the measurement points, the first detection taking place sequentially and the duration of the first detection defining a measurement time period; determining reference measurement points from the measurement points, the number of reference measurement points being less than the number of measurement points; second detection of the at least one critical dimension of the mask at the reference measurement points; determining a deviation between the first and the second detected critical dimension at each of the reference measurement points; and applying a determined temporal profile of the correction factor to the at least one critical dimension to obtain a corrected critical dimension of the mask, and also a corresponding device for qualifying a mask for a lithography system.
Owner:CARL ZEISS SMT GMBH

Automatic reference volume method measurement system and method for performance assessment of water electrolysis hydrogen production system

The invention discloses an automatic reference volume method measurement system and method for performance assessment of a water electrolysis hydrogen production system, and relates to the field of gas flow metering and performance testing. Comprising a main gas inlet pipe, a main gas outlet pipe, a plurality of reference measurement units connected between the main gas inlet pipe and the main gas outlet pipe in parallel, an intelligent fluid switching matrix used for controlling on-off and flow direction of gas, and a controller electrically connected with the reference measurement units and the intelligent fluid switching matrix, the reference measurement units are used for collecting temperature-time sequence data and pressure-time sequence data in real time, and the controller is used for controlling the valves in the intelligent fluid switching matrix to act according to a preset time sequence, so that the plurality of reference measurement units carry out cyclic relay type geovolumetric method measurement in an assessment period. And the average flow in the assessment period is calculated according to the temperature-time sequence data and the pressure-time sequence data collected by each reference measurement unit in each cycle. According to the invention, automatic and high-precision measurement of a large-flow scene can be realized.
Owner:EAST CHINA ENGINEERING SCIENCE AND TECHNOLOGY CO LTD

Method for determining at least one temperature compensation parameter for compensating for temperature influences on measured values ​​of a sensor system

The invention relates to a method for determining temperature compensation parameters for compensating temperature influences on measured values ​​of a sensor system, the sensor system comprising a sensor unit, a temperature sensor unit, a signal processing unit, determining temperature compensation parameters and compensating temperature influences on measured values ​​of the sensor unit. The method comprises monitoring a measurement situation of the sensor unit and determining whether a current measurement situation corresponds to a reference measurement situation; monitoring the temperature of the sensor unit and determining whether the current temperature is within a predetermined temperature range; detecting at least two different temperature values ​​within the predetermined temperature range and, if the current measurement situation corresponds to the reference measurement situation, detecting the respective associated measurement values ​​of the sensor measurement variable; determining at least one temperature compensation parameter based on at least one reference measurement value of the sensor measurement variable X, at least two different temperature values ​​and the associated measurement value of the sensor measurement variable X. The invention relates to a sensor system.
Owner:ROBERT BOSCH GMBH

Combustible gas non-inductive detection camera system integrated with spectrum sensor

The invention discloses a combustible gas non-inductive detection camera system integrated with a spectrum sensor, and relates to the technical field of gas imaging detection, and the combustible gas non-inductive detection camera system comprises the following steps: establishing multi-source observation through a reference measurement frame which shares at least part of an optical link with a main imaging light path, and outputting a fixed reference area statistical abstract, a temperature observation vector and a reference data effective mark; updating the drift state quantity based on the statistical abstract and the temperature observation vector and generating a stability field; performing drift compensation on the infrared image sequence according to the drift state quantity and the stability field, and generating an operation envelope field, a quantization result, a confidence interval and error source decomposition; and finally, executing gating output and writing back scheduling parameters. According to the scheme, continuous connection of reference observation, drift estimation, quantitative judgment and feedback scheduling is achieved, and the output stability, the quantitative credibility and the continuous operation capacity under the fixed online detection condition are improved.
Owner:JIANGSU SPEAR DIGITAL TECHNOLOGY CO LTD

Method for adjusting a measuring instrument against a reference measuring instrument, method for generating additional information about a measuring instrument, and measuring instrument that can be adjusted using the method

Method for adjusting a measuring device (M) measuring a measured variable of a medium (U) dependent on a state of a medium (U) j ), including: Determination of first measured values ​​(x i ) of the measured quantity with the measuring device (M j ); Determining second measured values ​​(y i ) of the measured quantity with a reference measuring instrument (R); Creating data tuples (C j,i ) from the first measured values ​​(x i ) and the second measured values ​​(y i ) collected for the same state of the medium (U); Performing a regression analysis (D) with the data tuples (C j,i ), and with a model function (E) with parameters (F); where, using regression analysis (D), parameter values ​​(H j ) are calculated; where the model function (E) is determined by means of the parameter values ​​(H j ) the first measured values ​​(x i ) to the second measured values ​​(y i) depicts; characterized by that additional predefined parameter tuples (G) are included in the regression analysis (D); and / or that in the regression analysis (D) exclusively by means of the data tuples (C j,i ) calculated parameters (H j ) are compared with the given parameter tuples (G).
Owner:ENDRESS HAUSER FLOWTEC AG

Calibration method for computer vision system and three-dimensional reference object for use in same

A calibration method for performing calibration in a computer vision system using a three-dimensional reference object asymmetric as viewed in any direction and having predetermined dimensions includes calculating, based on three-dimensional shape data about the three-dimensional reference object and three-dimensional measurement data obtained through three-dimensional measurement of the three-dimensional reference object, a position and an orientation of the three-dimensional reference object relative to a measurement unit coordinate system defined for the three-dimensional measurement unit, and calculating a reference-measurement unit transformation matrix representing a coordinate transformation between the measurement unit coordinate system and a reference coordinate system defined for the three-dimensional reference object.
Owner:OMRON CORP

Non-reference initial alignment absolute precision calculation method for strapdown inertial navigation system

The invention relates to a strapdown inertial navigation system reference-free initial alignment absolute precision calculation method, and belongs to the technical field of inertial navigation. According to the method, the initial alignment precision of the strapdown inertial navigation system can be accurately calculated only through a simple two-position rotation method by applying a specific attitude tracking algorithm in an environment without reference measurement equipment. The method effectively solves the problem of excessive dependence of previous precision calculation on a test environment and equipment, and breaks through the limitation of a traditional method. The method can be widely applied to initial alignment precision calculation of the strapdown inertial navigation system in various scenes, the calculation cost is greatly reduced, the calculation efficiency is remarkably improved, and powerful technical support is provided for development and application of the strapdown inertial navigation system.
Owner:XIAN MODERN CONTROL TECH RES INST

Method for detecting a relay attack by comparing tbr and pbr at different measurement point sets

The invention relates to a method for detecting and / or preventing relay attacks. The problem is solved by a method for detecting a relay attack, wherein radio signals with different frequencies are transmitted between a first and a second object, and phase and transit-time measurements are performed on these radio signals. The change in the phase measurements when the frequency changes is compared with the signal transit-time measurements or changes therein. A relay attack is assumed if a predetermined deviation, or a deviation determined from measurements on the radio signals, is exceeded. A measurement series is formed based on the phase measurements and / or a reference measurement series is formed based on the signal transit-time measurements. The filtered and / or smoothed measurement series...with which at least one signal transit time measurement or its change and / or the reference measurement series is compared as a reference and / or wherein the measurement series or its change is compared with the filtered and / or averaged reference measurement series.
Owner:LAMBDA 4 ENTWICKLUNGEN GMBH

Improved echo-planar imaging technique segmented in the readout direction for generating measurement data using magnetic resonance.

In an inventive method for acquiring measurement data of a test object using a magnetic resonance imaging system with an echo-planar imaging technique segmented into at least two segments in the readout direction, in particular a RESOLVE imaging technique which also acquires navigator data for each of its segments, the scanning patterns are modified during different acquisitions of navigator data. This allows the navigator data to be acquired in such a way that reference data can be generated from it to determine further information for improving the acquired measurement data. The navigator phases of the echo-planar imaging technique, which would have to be performed anyway in the readout direction, are thus used efficiently to determine further information. The scanning patterns can be modified accordingly, depending on the type of information desired and the associated reference data.In this way, separate measurements for reference measurements that would otherwise be necessary to determine the desired information can be eliminated, thereby reducing the time required for the entire measurement including all reference measurements.
Owner:SIEMENS HEALTHINEERS AG

A multi-working-condition self-tracing calibration method and system for a pneumoperitoneum machine

This invention discloses a multi-condition self-traceable calibration method and system for insufflators, relating to the field of insufflator metrology technology. The method includes: constructing a standard loop to apply back pressure and inject a controllable leakage; during a continuous calibration, controlling the insufflator under calibration to sequentially enter pressure stabilization, flow stabilization, and leakage disturbance conditions, synchronously collecting data through collaboratively working traceable pressure and flow references; comparing the reference measurements with the insufflator's readings to calculate pressure coupling error, flow coupling error, and dynamic response characteristics; performing standard state conversion based on preset standard pressure and temperature, fitting and generating calibration coefficients to correct the measured values, and generating a judgment result based on comparison of coupling error and dynamic response characteristics with preset thresholds; generating an automatic report including operating condition type, residual, final calibration measurement results, and uncertainty. This invention improves calibration accuracy and traceability through three-condition linkage calibration and environmental factor compensation.
Owner:CHENGDU METROLOGY TESTING INST

Machine learning-based image generation for model-based alignment

A method for training a machine learning model to produce a predicted measured image includes obtaining (a) an input target image associated with a reference design pattern, and (b) a reference measured image associated with a specified design pattern printed on a substrate, where the input target image and the reference measured image are misaligned images; and training, by a hardware computer system and using the input target image, the machine learning model to produce a predicted measured image.
Owner:ASML NETHERLANDS BV

Slice Multiplexing Method

Measurement data of an examination object is recorded as collapsed from a plurality of slices of the examination object simultaneously while using an in-plane acceleration technique with an undersampled sampling pattern of the k-space. The measurement data is separated into single-slice measurement data by recording reference measurement data in at least two segments such that a complete set of reference measurement data is recorded. A sampling pattern is used within a segment during the recording of the reference measurement data that corresponds to an acceleration factor to which the sampling pattern of the collapsed measurement data corresponds. The collapsed measurement data is recorded, and the separation of the data is performed based upon on the reference measurement data recorded in at least one of the at least two segments. The separation of the collapsed measurement data is recorded into single-slice measurement data while using the created separation data.
Owner:SIEMENS HEALTHINEERS AG

A multi-dimensional alarm analysis method and system based on an alarm platform

The application relates to a multi-dimensional alarm analysis method and system based on an alarm platform, and relates to the field of water meter detection, which comprises the following steps: collecting water meter measurement values and historical measurement data in response to a water meter detection signal; calling historical measurement values based on the historical measurement data; generating a reference measurement interval based on the historical measurement values and a reference deviation value; collecting current temperature and pressure parameters when the water meter measurement values do not fall into the reference measurement interval; generating a measurement deviation value based on the current temperature and pressure parameters; obtaining a water meter deviation value according to the water meter measurement values and the measurement deviation value; controlling a water meter self-checking device to perform measurement self-checking by a self-checking method and outputting self-checking information when the water meter deviation value does not fall into the reference measurement interval; reporting a water meter abnormality prompt when the self-checking information is consistent with abnormal information, and discarding the water meter measurement values collected this time. The application has the effect of reducing the false alarm rate of a water meter.
Owner:NINGBO DONGHAI DIGITAL TECH CO LTD

Monitoring system

The invention is directed to a monitoring system (1) for moving machine parts (2), in particular of drilling equipment (3), having a sensor device (4) which comprises a plurality of adjacent sensors (12), which at least partially surround the machine part (2) to be monitored; a reference profile (5) which is arranged spaced apart from the sensor device (4), wherein the sensors (12) of the sensor device (4) are each configured to transmit measurement beams (M1, M2, M3, M4, M5, M6) to the reference profile (5); and a control device (7) having an evaluation unit (8) which is configured to compare the measured values (W1, W2, W3, W4, W5, W6) resulting from the measurement beams (M1, M2, M3, M4, M5, M6) with associated reference measured values (R1, R2, R3, R4, R5, R6) and to determine a measurement span (Δ) therefrom.
Owner:STUMATEC AG

Phase ranging method and device, electronic equipment, storage medium and program

The embodiment of the invention discloses a phase distance measurement method and device, electronic equipment, a storage medium and a program, and the method comprises the steps: obtaining the distance between first reference measurement equipment and second reference measurement equipment; wherein the first reference measurement equipment is used for sending a first detection signal to the second reference measurement equipment and the phase distance measurement equipment; the phase distance measurement equipment is used for responding to the first detection signal and sending a second detection signal to the first reference measurement equipment and the second reference measurement equipment; obtaining measurement phases when the phase ranging device, the first reference measurement device and the second reference measurement device receive the detection signals; according to the distance between the first reference measurement device and the second reference measurement device and the measurement phase, the distance between the phase distance measurement device and the first reference measurement device and the distance between the phase distance measurement device and the second reference measurement device are calculated. According to the technical scheme of the embodiment of the invention, the ranging efficiency can be improved.
Owner:SHANGHAI TRUSTKERNEL INFORMATION TECH CO LTD

Three-coordinate measuring machine workpiece auxiliary positioning device

ActiveCN224285868UShorten alignment assistance timeReduce auxiliary work timeMechanical measuring arrangementsLocking mechanismCoordinate-measuring machine
This utility model discloses a workpiece auxiliary positioning device for coordinate measuring machine (CMM) inspection, including a base, the top surface of which serves as a workpiece support surface, a vertically movable front positioning plate mounted on the front end surface of the base, and a vertically movable side positioning plate mounted on the side wall surface of the base. A front positioning plate guide mechanism and a front positioning plate locking mechanism are provided between the front positioning plate and the base, and a side positioning plate guide mechanism and a side positioning plate locking mechanism are provided between the side positioning plates and the base. This utility model, through the base in conjunction with the movable front and side positioning plates, enables relatively accurate positioning of the workpiece in different directions. This eliminates the need to recalibrate the measurement reference after changing the workpiece's placement orientation, effectively shortening the workpiece alignment auxiliary time, saving inspection personnel's auxiliary work time for workpiece alignment and reference measurement, greatly improving inspection efficiency, and reducing labor costs.
Owner:WEIFANG HAOTAI MASCH CO LTD

Three-dimensional measurement device, three-dimensional measurement method, and storage medium storing three-dimensional measurement program

The invention provides a three-dimensional measurement apparatus, a three-dimensional measurement method, and a storage medium storing a three-dimensional measurement program. When acquiring three-dimensional data by a three-dimensional scanner, a user can easily know whether necessary three-dimensional data has been acquired. The three-dimensional coordinate generation unit sequentially generates three-dimensional coordinates of the measurement workpiece on the basis of the image including the pattern light generated by the scanner imaging section. The display control unit sequentially generates display data in which the three-dimensional coordinates of the measurement workpiece sequentially generated by the three-dimensional coordinate generation unit are superimposed on the three-dimensional shape based on the reference three-dimensional shape data registered by the registration unit. The three-dimensional data generation unit generates three-dimensional shape data of the measurement workpiece based on three-dimensional coordinates of the measurement workpiece. The measurement unit performs measurement based on the reference measurement element registered by the registration unit and the three-dimensional shape data of the measurement workpiece.
Owner:KEYENCE CORP

Calibration method, measurement device, and inductor

The invention provides a correction method, a measurement device, and an inductor inspection method. The calibration method includes: an open-circuit reference measurement step of measuring electrical characteristics in an open-circuit state in which the contact does not come into contact with another object and acquiring an open-circuit reference measurement value; a reference measurement step for measuring the electrical characteristics of a reference substance by bringing the contact into contact with the reference substance having known electrical characteristics; and a calculation step for calculating, on the basis of the open-circuit reference measurement value, a reference value that is a known electrical characteristic of the reference object, and a measurement reference value that is a result of measuring the electrical characteristic of the reference object, a transmission parameter indicating a characteristic of a transmission path from the measurement unit to the object. The reference measurement step is performed a plurality of times so as to repeatedly contact and separate the contact and the reference substance, and in the calculation step, representative values of the measurement reference values are acquired from the plurality of measured measurement reference values, and the transmission parameter is calculated on the basis of the representative values of the measurement reference values.
Owner:HIOKI DENKI KK +1