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76 results about "Reference measurement" patented technology

A reference standard for a unit of measurement is an artifact that embodies the quantity of interest in a way that ties its value to the reference base.

Self-calibration and drift compensation method for automatic underground water monitoring station

The invention discloses a self-calibration and drift compensation method for an automatic underground water monitoring station, and the method comprises the following steps: 1, transmitting a reference measurement starting instruction to an underground bubble method device by an edge calculation gateway, forming a reference data pair by a bubble method water level reference value and a reference acquisition moment, and writing the reference data pair into a reference data cache region; 2, the edge computing gateway creates a state storage structure and a covariance storage structure; and step 3, the edge computing gateway reads a drift amount estimation value from the state storage structure as a drift compensation amount, and when a drift estimation standard deviation exceeds a set threshold, bubble method hardware reference acquisition is triggered. According to the invention, the problems of high manual calibration cost and lack of independent reference support in pure software estimation in the prior art are solved, so that a monitoring station can stably operate for a long time under an unattended condition and continuously output high-precision underground water level monitoring data.
Owner:山东省国土空间生态修复中心(山东省地质灾害防治技术指导中心山东省土地储备中心)

Laser interference surface shape measurement method based on calibration plate, medium, equipment and system

The invention relates to the technical field of laser measurement, in particular to a laser interference surface shape measurement method based on a calibration plate, a medium, equipment and a system. Comprising the following steps: attaching a reflecting mirror to a reference mirror, and obtaining reflecting surface shape data of the reflecting mirror; the calibration glass plate is tightly clamped between the reflector and the reference mirror, and light facing surface reflection surface shape data and mixed transmission surface shape data of the calibration glass plate are obtained; removing the reflector, moving the calibration glass plate to a preset measurement distance along a laser optical axis, carrying out multi-surface synchronous measurement through a laser interferometer, and respectively obtaining light facing surface mixed reflection surface shape data and to-be-measured surface shape mixed data; and obtaining target surface shape data of the surface to be measured. According to the invention, the movable calibration glass plate is introduced to establish a double-reference measurement system, so that the space calibration of the airflow disturbance error can be realized. The device is simple in structure and low in measurement environment requirement. Interference of air turbulent flow can be eliminated only through single-time measurement, and the measurement time is saved.
Owner:LEADING OPTICS (SHANGHAI) CO LTD

Dispensing calibration method, device and equipment based on machine vision algorithm compensation

The embodiment of the invention provides a dispensing calibration method, device and equipment based on machine vision algorithm compensation, and the dispensing calibration method comprises the steps: continuously obtaining a dispensing finished product diagram on the surface of a module device after calibration processing is completed, and determining a dispensing reference measurement point and an actual dispensing offset position on the dispensing finished product diagram; the actual dispensing distance of the current dispensing finished product diagram is determined according to the dispensing reference measurement points and the actual dispensing offset positions which belong to the same dispensing finished product diagram, and the average dispensing distance is determined according to the actual dispensing distances of all the dispensing finished product diagrams; when the average dispensing distance meets a preset calibration condition, determining a calibration displacement stroke according to the average dispensing distance, and performing calibration treatment again based on the calibration displacement stroke; according to the method provided by the embodiment of the invention, the dispensing yield can be improved.
Owner:DONG GUAN GAO WEI GUANG XUE DIAN ZI YOU XIAN GONG SI

Method for measuring spatial pose of large-length-diameter-ratio unfolding arm

The invention provides a large-length-diameter-ratio expansion arm space pose measurement method, and the method comprises the steps: taking a short-side high-precision cubic mirror as a reference measurement and transmission object; the reference of the driving joints at the two ends of the unfolding arm and the matrix parameter of the cubic mirror are obtained through the automatic detection method of a high-precision space coordinate measuring instrument, the calibrated reference matrix parameter can be transmitted to optical collimation fusion laser tracking measurement, and the requirement for integrated measurement of the driving joints and the arm lever can be met; the reference systems of the driving joints at the two ends of the unfolding arm are obtained in the same global reference state through optical collimation and laser tracking, the spatial pose measurement of the large-length-diameter-ratio unfolding arm is achieved through data fusion analysis, and the detection requirements of measurement objects of different sizes, different diameters and different length-diameter ratios are met.
Owner:BEIJING SATELLITE MFG FACTORY

Multiple spectrometers with the same structure and their calibration methods

The present invention relates to a method for calibrating a plurality of spectrometers having the same structure for component analysis. First, a plurality of samples are provided and the concentration of components in each sample is measured using a reference measurement method. The spectra of each sample are measured using a spectrometer exemplarily selected from the spectrometers having the same structure in order to determine a provisional regression model. At least one spectrum is selected from the measured spectra and / or the average spectrum formed from the measured spectra. A plurality of error spectra (01) are generated using a mathematical model of the spectrometers having the same structure. Each error spectrum (01) is added to each selected spectrum respectively in order to obtain simulated spectra. Thus, a final regression model is determined, in which the amplitudes of the measured spectra and the amplitude values of the selected simulated spectra form independent variables, and in which the reference measurement values form dependent variables. In addition, the present invention relates to a plurality of spectrometers having the same structure for component analysis.
Owner:CARL ZEISS MICROSCOPY GMBH

Method for detecting leaks in objects to be tested and equipment

The invention relates to a leak detection method (100) comprising: - a learning step (101) during which at least one reference measurement signal representative of the flow or concentration of tracer gas in a reference object (A) to be tested or in an environment surrounding a reference object (A) to be tested is measured during at least one leaktightness monitoring cycle (C), - a plurality of successive test steps (102) during which a leak detector (1) is used to measure a measurement profile representative of the flow or concentration of tracer gas during at least one leaktightness monitoring cycle (C) and the measurement profile is compared against the reference profile in order, depending on the result of the comparison, to provide a similarity indicator from which the presence of an anomaly can be deduced.
Owner:PFEIFFER VACUUM SAS

Method and device for qualifying a mask of a lithography system

A method for qualifying a mask for a lithography system, the mask having measurement points for detecting critical dimensions of the mask, comprising: first detection of critical dimensions of the mask at the measurement points, the first detection taking place sequentially and the duration of the first detection defining a measurement time period; determining reference measurement points from the measurement points, the number of reference measurement points being less than the number of measurement points; second detection of the at least one critical dimension of the mask at the reference measurement points; determining a deviation between the first and the second detected critical dimension at each of the reference measurement points; and applying a determined temporal profile of the correction factor to the at least one critical dimension to obtain a corrected critical dimension of the mask, and also a corresponding device for qualifying a mask for a lithography system.
Owner:CARL ZEISS SMT GMBH

Automatic reference volume method measurement system and method for performance assessment of water electrolysis hydrogen production system

The invention discloses an automatic reference volume method measurement system and method for performance assessment of a water electrolysis hydrogen production system, and relates to the field of gas flow metering and performance testing. Comprising a main gas inlet pipe, a main gas outlet pipe, a plurality of reference measurement units connected between the main gas inlet pipe and the main gas outlet pipe in parallel, an intelligent fluid switching matrix used for controlling on-off and flow direction of gas, and a controller electrically connected with the reference measurement units and the intelligent fluid switching matrix, the reference measurement units are used for collecting temperature-time sequence data and pressure-time sequence data in real time, and the controller is used for controlling the valves in the intelligent fluid switching matrix to act according to a preset time sequence, so that the plurality of reference measurement units carry out cyclic relay type geovolumetric method measurement in an assessment period. And the average flow in the assessment period is calculated according to the temperature-time sequence data and the pressure-time sequence data collected by each reference measurement unit in each cycle. According to the invention, automatic and high-precision measurement of a large-flow scene can be realized.
Owner:EAST CHINA ENGINEERING SCIENCE AND TECHNOLOGY CO LTD

Combustible gas non-inductive detection camera system integrated with spectrum sensor

The invention discloses a combustible gas non-inductive detection camera system integrated with a spectrum sensor, and relates to the technical field of gas imaging detection, and the combustible gas non-inductive detection camera system comprises the following steps: establishing multi-source observation through a reference measurement frame which shares at least part of an optical link with a main imaging light path, and outputting a fixed reference area statistical abstract, a temperature observation vector and a reference data effective mark; updating the drift state quantity based on the statistical abstract and the temperature observation vector and generating a stability field; performing drift compensation on the infrared image sequence according to the drift state quantity and the stability field, and generating an operation envelope field, a quantization result, a confidence interval and error source decomposition; and finally, executing gating output and writing back scheduling parameters. According to the scheme, continuous connection of reference observation, drift estimation, quantitative judgment and feedback scheduling is achieved, and the output stability, the quantitative credibility and the continuous operation capacity under the fixed online detection condition are improved.
Owner:JIANGSU SPEAR DIGITAL TECHNOLOGY CO LTD

Method for adjusting a measuring instrument against a reference measuring instrument, method for generating additional information about a measuring instrument, and measuring instrument that can be adjusted using the method

Method for adjusting a measuring device (M) measuring a measured variable of a medium (U) dependent on a state of a medium (U) j ), including: Determination of first measured values ​​(x i ) of the measured quantity with the measuring device (M j ); Determining second measured values ​​(y i ) of the measured quantity with a reference measuring instrument (R); Creating data tuples (C j,i ) from the first measured values ​​(x i ) and the second measured values ​​(y i ) collected for the same state of the medium (U); Performing a regression analysis (D) with the data tuples (C j,i ), and with a model function (E) with parameters (F); where, using regression analysis (D), parameter values ​​(H j ) are calculated; where the model function (E) is determined by means of the parameter values ​​(H j ) the first measured values ​​(x i ) to the second measured values ​​(y i) depicts; characterized by that additional predefined parameter tuples (G) are included in the regression analysis (D); and / or that in the regression analysis (D) exclusively by means of the data tuples (C j,i ) calculated parameters (H j ) are compared with the given parameter tuples (G).
Owner:ENDRESS HAUSER FLOWTEC AG

Calibration method for computer vision system and three-dimensional reference object for use in same

A calibration method for performing calibration in a computer vision system using a three-dimensional reference object asymmetric as viewed in any direction and having predetermined dimensions includes calculating, based on three-dimensional shape data about the three-dimensional reference object and three-dimensional measurement data obtained through three-dimensional measurement of the three-dimensional reference object, a position and an orientation of the three-dimensional reference object relative to a measurement unit coordinate system defined for the three-dimensional measurement unit, and calculating a reference-measurement unit transformation matrix representing a coordinate transformation between the measurement unit coordinate system and a reference coordinate system defined for the three-dimensional reference object.
Owner:OMRON CORP

Non-reference initial alignment absolute precision calculation method for strapdown inertial navigation system

The invention relates to a strapdown inertial navigation system reference-free initial alignment absolute precision calculation method, and belongs to the technical field of inertial navigation. According to the method, the initial alignment precision of the strapdown inertial navigation system can be accurately calculated only through a simple two-position rotation method by applying a specific attitude tracking algorithm in an environment without reference measurement equipment. The method effectively solves the problem of excessive dependence of previous precision calculation on a test environment and equipment, and breaks through the limitation of a traditional method. The method can be widely applied to initial alignment precision calculation of the strapdown inertial navigation system in various scenes, the calculation cost is greatly reduced, the calculation efficiency is remarkably improved, and powerful technical support is provided for development and application of the strapdown inertial navigation system.
Owner:XIAN MODERN CONTROL TECH RES INST

A multi-working-condition self-tracing calibration method and system for a pneumoperitoneum machine

This invention discloses a multi-condition self-traceable calibration method and system for insufflators, relating to the field of insufflator metrology technology. The method includes: constructing a standard loop to apply back pressure and inject a controllable leakage; during a continuous calibration, controlling the insufflator under calibration to sequentially enter pressure stabilization, flow stabilization, and leakage disturbance conditions, synchronously collecting data through collaboratively working traceable pressure and flow references; comparing the reference measurements with the insufflator's readings to calculate pressure coupling error, flow coupling error, and dynamic response characteristics; performing standard state conversion based on preset standard pressure and temperature, fitting and generating calibration coefficients to correct the measured values, and generating a judgment result based on comparison of coupling error and dynamic response characteristics with preset thresholds; generating an automatic report including operating condition type, residual, final calibration measurement results, and uncertainty. This invention improves calibration accuracy and traceability through three-condition linkage calibration and environmental factor compensation.
Owner:CHENGDU METROLOGY TESTING INST

Machine learning-based image generation for model-based alignment

A method for training a machine learning model to produce a predicted measured image includes obtaining (a) an input target image associated with a reference design pattern, and (b) a reference measured image associated with a specified design pattern printed on a substrate, where the input target image and the reference measured image are misaligned images; and training, by a hardware computer system and using the input target image, the machine learning model to produce a predicted measured image.
Owner:ASML NETHERLANDS BV

A multi-dimensional alarm analysis method and system based on an alarm platform

The application relates to a multi-dimensional alarm analysis method and system based on an alarm platform, and relates to the field of water meter detection, which comprises the following steps: collecting water meter measurement values and historical measurement data in response to a water meter detection signal; calling historical measurement values based on the historical measurement data; generating a reference measurement interval based on the historical measurement values and a reference deviation value; collecting current temperature and pressure parameters when the water meter measurement values do not fall into the reference measurement interval; generating a measurement deviation value based on the current temperature and pressure parameters; obtaining a water meter deviation value according to the water meter measurement values and the measurement deviation value; controlling a water meter self-checking device to perform measurement self-checking by a self-checking method and outputting self-checking information when the water meter deviation value does not fall into the reference measurement interval; reporting a water meter abnormality prompt when the self-checking information is consistent with abnormal information, and discarding the water meter measurement values collected this time. The application has the effect of reducing the false alarm rate of a water meter.
Owner:NINGBO DONGHAI DIGITAL TECH CO LTD

Monitoring system

The invention is directed to a monitoring system (1) for moving machine parts (2), in particular of drilling equipment (3), having a sensor device (4) which comprises a plurality of adjacent sensors (12), which at least partially surround the machine part (2) to be monitored; a reference profile (5) which is arranged spaced apart from the sensor device (4), wherein the sensors (12) of the sensor device (4) are each configured to transmit measurement beams (M1, M2, M3, M4, M5, M6) to the reference profile (5); and a control device (7) having an evaluation unit (8) which is configured to compare the measured values (W1, W2, W3, W4, W5, W6) resulting from the measurement beams (M1, M2, M3, M4, M5, M6) with associated reference measured values (R1, R2, R3, R4, R5, R6) and to determine a measurement span (Δ) therefrom.
Owner:STUMATEC AG

Phase ranging method and device, electronic equipment, storage medium and program

The embodiment of the invention discloses a phase distance measurement method and device, electronic equipment, a storage medium and a program, and the method comprises the steps: obtaining the distance between first reference measurement equipment and second reference measurement equipment; wherein the first reference measurement equipment is used for sending a first detection signal to the second reference measurement equipment and the phase distance measurement equipment; the phase distance measurement equipment is used for responding to the first detection signal and sending a second detection signal to the first reference measurement equipment and the second reference measurement equipment; obtaining measurement phases when the phase ranging device, the first reference measurement device and the second reference measurement device receive the detection signals; according to the distance between the first reference measurement device and the second reference measurement device and the measurement phase, the distance between the phase distance measurement device and the first reference measurement device and the distance between the phase distance measurement device and the second reference measurement device are calculated. According to the technical scheme of the embodiment of the invention, the ranging efficiency can be improved.
Owner:SHANGHAI TRUSTKERNEL INFORMATION TECH CO LTD

Three-coordinate measuring machine workpiece auxiliary positioning device

ActiveCN224285868UShorten alignment assistance timeReduce auxiliary work timeMechanical measuring arrangementsLocking mechanismCoordinate-measuring machine
This utility model discloses a workpiece auxiliary positioning device for coordinate measuring machine (CMM) inspection, including a base, the top surface of which serves as a workpiece support surface, a vertically movable front positioning plate mounted on the front end surface of the base, and a vertically movable side positioning plate mounted on the side wall surface of the base. A front positioning plate guide mechanism and a front positioning plate locking mechanism are provided between the front positioning plate and the base, and a side positioning plate guide mechanism and a side positioning plate locking mechanism are provided between the side positioning plates and the base. This utility model, through the base in conjunction with the movable front and side positioning plates, enables relatively accurate positioning of the workpiece in different directions. This eliminates the need to recalibrate the measurement reference after changing the workpiece's placement orientation, effectively shortening the workpiece alignment auxiliary time, saving inspection personnel's auxiliary work time for workpiece alignment and reference measurement, greatly improving inspection efficiency, and reducing labor costs.
Owner:WEIFANG HAOTAI MASCH CO LTD

Three-dimensional measurement device, three-dimensional measurement method, and storage medium storing three-dimensional measurement program

The invention provides a three-dimensional measurement apparatus, a three-dimensional measurement method, and a storage medium storing a three-dimensional measurement program. When acquiring three-dimensional data by a three-dimensional scanner, a user can easily know whether necessary three-dimensional data has been acquired. The three-dimensional coordinate generation unit sequentially generates three-dimensional coordinates of the measurement workpiece on the basis of the image including the pattern light generated by the scanner imaging section. The display control unit sequentially generates display data in which the three-dimensional coordinates of the measurement workpiece sequentially generated by the three-dimensional coordinate generation unit are superimposed on the three-dimensional shape based on the reference three-dimensional shape data registered by the registration unit. The three-dimensional data generation unit generates three-dimensional shape data of the measurement workpiece based on three-dimensional coordinates of the measurement workpiece. The measurement unit performs measurement based on the reference measurement element registered by the registration unit and the three-dimensional shape data of the measurement workpiece.
Owner:KEYENCE CORP

Calibration method, measurement device, and inductor

The invention provides a correction method, a measurement device, and an inductor inspection method. The calibration method includes: an open-circuit reference measurement step of measuring electrical characteristics in an open-circuit state in which the contact does not come into contact with another object and acquiring an open-circuit reference measurement value; a reference measurement step for measuring the electrical characteristics of a reference substance by bringing the contact into contact with the reference substance having known electrical characteristics; and a calculation step for calculating, on the basis of the open-circuit reference measurement value, a reference value that is a known electrical characteristic of the reference object, and a measurement reference value that is a result of measuring the electrical characteristic of the reference object, a transmission parameter indicating a characteristic of a transmission path from the measurement unit to the object. The reference measurement step is performed a plurality of times so as to repeatedly contact and separate the contact and the reference substance, and in the calculation step, representative values of the measurement reference values are acquired from the plurality of measured measurement reference values, and the transmission parameter is calculated on the basis of the representative values of the measurement reference values.
Owner:HIOKI DENKI KK +1

Procedure for qualifying a mask of a lithography system

Method (100) for qualifying a mask (13) for a lithography system (1), wherein the mask (13) has a plurality of predetermined measurement points (22) for capturing one or more critical dimensions (20) of the mask (13) at each measurement point (22), comprising: - Initial acquisition (101) of at least one critical dimension (20) of the mask (13) at the measurement points (22), wherein the initial acquisition (101) is sequential and the duration of the initial acquisition (101) defines a measurement period; - Determining (102) a plurality of reference measurement points (24) from the plurality of measurement points (22), wherein the number of reference measurement points (24) is less than the number of measurement points (22); - Second acquisition (103) of at least one critical dimension (20) of the mask (13) at the reference measurement points (24) at a time interval from the first acquisition (101) at the measurement points (22) determined as reference measurement points (24); - Determining (104) a deviation (21) between the first and the second recorded critical dimension (20) at each of the reference measurement points (24); - Determine (105), depending on the determined deviation (21), a time course of a correction factor over the measurement period; and - Applying (106) the determined time course of the correction factor to at least one critical dimension (20) to obtain a corrected critical dimension of the mask (13).
Owner:CARL ZEISS SMT GMBH

An interferometric measurement method, system, device, and medium

The application specifically relates to an interference measurement method, system, device and medium, the method comprising the following steps: S1: defining two interference components as component A and component B; S2: setting component B as a reference measurement component, and marking interference points formed by component A and component B on an interface; S3: marking a maximum interference point position of component A and component B as 5, marking a centroid position of component A as 6, and marking a centroid position of component B as 7; S4: connecting any two interference points, and the connecting line is an interference interface; S5: defining a direction away from the centroid point of component A as an interference direction according to a normal line of the interference interface; S6: picking up and measuring maximum distances of each point on component A to the centroid of component A according to the interference direction, and obtaining the maximum interference point 5; and S7: measuring a shortest distance h of the maximum interference point 5 to the interference interface, wherein h is the sought interference amount. The main beneficial effect is to improve the quality and efficiency of interference checking work.
Owner:CHINA FAW CO LTD

Calibration method, measurement device, and inductor inspection method

To reduce a measurement error of a measurement device.SOLUTION: A calibration method comprises: an open reference measurement step for measuring an electric characteristic in an open state where a contact piece 40 does not contact other article for acquiring an open reference measurement value Rmo; a reference measurement step for bringing the contact piece 40 into contact with a reference object whose electric characteristic is known for measuring an electric characteristic of the reference object; and a calculation step for, on the basis of the open reference measurement value Rmo and a reference value being the known electric characteristic of the reference object, and a measurement reference value being a measurement result of the electric characteristic of the reference object, calculating a transmission parameter expressing a characteristic of a transmission path from the measurement part 20 to a target. The reference measurement step is executed multiple times repeating contact and separation of the contact piece 40 to the reference object. The calculation step acquires a representative value of a measurement reference value is acquired from multiple measurement reference values, and calculates a transmission parameter on the basis of the representative value of the measurement reference value.SELECTED DRAWING: Figure 4
Owner:HIOKI DENKI KK +1

Encoder system, encoder calibration method and encoder

To provide an encoder system, an encoder calibration method and an encoder, capable of eliminating an error similarly to when a plurality of measurement units are used without providing the plurality of measurement units when detecting a state of a measurement object on actual measurement.SOLUTION: An encoder system includes an encoder 110, a reference encoder 120 and an arithmetic unit 140. On adjustment, the encoder 110 measures a state of a measurement object 10 to generate a measurement value, the reference encoder 120 measures a state of the measurement object 10 to generate a reference measurement value, the arithmetic unit 140 calculates a correction value for correcting the measurement value on actual measurement from the measurement value and the reference measurement value, and the encoder 110 is made to store the correction value. On actual measurement, the encoder 110 measures a state of the measurement object 10 to generate the measurement value, and uses the stored correction value to correct the measurement value to output the corrected measurement value.SELECTED DRAWING: Figure 1
Owner:TAMAGAWA SEIKI CO LTD

Information processing device, method for operating information processing device, and program for operating information processing device

An information processing device that predicts the state of a target component in a suspension in which biomolecules are dispersed as components in a liquid on the basis of spectral data obtained by measuring electromagnetic waves emitted from the suspension, the information processing device being provided with a processor, the processor performs: a process using a state prediction model corrected from reference spectral data obtained from a reference suspension in a reference measurement environment; a target spectroscopic data acquisition unit that acquires target spectroscopic data obtained from a target suspension in which the state of a target component is unknown in a target measurement environment different from the reference measurement environment; acquiring a correction coefficient derived by comparing the reference spectroscopic data corresponding to the target spectroscopic data and reference spectroscopic data obtained from the reference suspension in the target measurement environment; correcting the target spectral data according to the correction coefficient to generate corrected target spectral data; and causing the state prediction model to predict the state of the object component by applying the correction object spectral data to the state prediction model.
Owner:FUJIFILM CORP

Joint portion evaluating method and joint portion evaluating device

A joint portion evaluating method for measuring and evaluating a joint state of a joint portion at which a first joint body and a second joint body are joined together, the joint portion evaluating method including the steps of: acquiring as a reference value a capacitance value of the joint portion in a reference measurement state serving as a reference for measurement conditions; changing a measurement state from the reference measurement state and acquiring as a measured value a capacitance value of the joint portion in a changed measurement state arising after the change of the measurement state; deriving as a measurement evaluation value a value obtained by referencing the measured value with the reference value; and performing an evaluation based on the derived measurement evaluation value.
Owner:MITSUBISHI HEAVY IND LTD +1

Lathe charger control device, lathe charger including the same, and a method for controlling a lathe charger

When the absolute value (|Tt−Tc|) of the difference between the turning time Tt of a log PW and the transport time Tc of the log PW is longer than a reference measurement time Ts, the turning-axis center line measurement time Tm is set to the absolute value (|Tt−Tc|) (Step S120), the rotation speed W of centering spindles 24a and 24b is set to a speed (Ws×Ts / Tm) lower than a reference rotation speed Ws, and also the measurement rotation angle α is set to an angle (αs×Ts / Tm) smaller than a reference measurement rotation angle as (Step S122). When the absolute value (|Tt−Tc|) is equal to or less than the reference measurement time Ts, the turning-axis center line measurement time Tm is set to the reference measurement time Ts (Step S116), the rotation speed W of the centering spindles 24a and 24b is set to the reference rotation speed Ws, and also the measurement rotation angle α is set to the reference measurement rotation angle αs (Step S118).
Owner:MEINAN MASCH WORKS INC

Measurements Of Semiconductor Structures Based On Data Collected At Prior Process Steps

Methods and systems for using pre-process measurement data to train post-process, machine learning (ML) based measurement models are described herein. In one aspect, a post-process, ML based measurement model is trained using reference data derived from actual reference measurements and estimated reference data generated by a trained mapping model. The trained mapping model maps measured values of parameters of interest at a pre-process state to estimated reference values at the post-process state. In this manner, the reference data employed to train a ML based measurement model is augmented based on pre-process measurement data. In another aspect, measurements of complex semiconductor structures are based on a combined measurement model including trained pre-process and post-process measurement models. Pre-process measurement data is employed directly as part of a combined ML based measurement and indirectly as part of the training data set for the combined ML based measurement model.
Owner:KLA CORP

System and method for continuous calibration of x-ray scans

A dual-energy X-ray absorptiometry (“DXA”) system includes an x-ray source assembly comprising a source carriage to move the x-ray source assembly along a scan path, the scan path comprising an active scan portion and a reference measurement portion. A detector assembly including a detector carriage to move the detector assembly with the source assembly and to collect scan data at active scan portions. A support structure supporting the source and detector assemblies. A calibration controller coupled a calibration element having a known x-ray attenuation value and configured position the calibration element between the source and detector assemblies during the reference measurement portion and to remove the calibration element from between the source and detector assemblies during the active scan portion. A processing unit operable to compare the reference measurement against an expected reference value to identify a variance and to selectively trigger an action in response to the variance.
Owner:HOLOGIC INC