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78 results about "Reflectivity measurement" patented technology

Reflectivity is defined as simply "a measure of the of the fraction of radiation reflected by a given surface; expressed as a ratio of the radiant energy reflected to the total amount of energy incident upon that surface".

Microwave link-weather radar combined rainfall inversion method based on Z-R relation adaptive adjustment

The invention discloses a microwave link-weather radar combined rainfall inversion method based on Z-R relation adaptive adjustment, and the method comprises the steps: defining a related parameter set of microwave link rainfall estimation and weather radar reflectivity measurement in observation time, and carrying out the matching and space-time averaging processing, and obtaining rainfall intensity-radar reflectivity characteristics; fitting a radar reflectivity-rainfall intensity relation within observation time by using a least square method based on the rainfall intensity-radar reflectivity characteristics; according to the radar reflectivity-rainfall intensity relation sample of the known position, calculating the spatial distribution of the radar reflectivity-rainfall intensity relation in the research area by using an inverse distance weighted interpolation method; and according to the spatial distribution of the radar reflectivity-rainfall intensity relationship within the observation time and the average reflectivity factor measured by the radar, calculating to obtain a spatial distribution result of the accumulated rainfall within the observation time. According to the invention, the accuracy of regional rainfall monitoring is effectively improved.
Owner:NAT UNIV OF DEFENSE TECH

Spatial position and reflectivity information extraction device and method based on hyperspectral camera

The invention discloses a spatial position and reflectivity information extraction device and method based on a hyperspectral camera, and relates to the field of hyperspectral imaging, and the device comprises an upper computer, a three-dimensional imaging module, a sliding module, a holder and a connecting frame. The three-dimensional imaging module, the connecting frame, the holder and the sliding module are connected in sequence. The three-dimensional imaging module comprises a first line scanning hyperspectral camera and a second line scanning hyperspectral camera; the upper computer is respectively connected with the first line scanning hyperspectral camera and the second line scanning hyperspectral camera; the upper computer determines three-dimensional space position information of the target object based on the characteristic wave band according to the first hyperspectral image and the second hyperspectral image; according to the height value of the target object, determining 100% white board spectral irradiance by using a white board height correction formula; and determining the reflectivity of the target object by using a reflectivity calculation formula. The method can adapt to object reflectivity measurement in different light intensity environments and at different heights, and extra equipment is not needed for data fusion.
Owner:ZHEJIANG UNIV

Optical device and method for measuring flow rate

An optical sensor device configured for use in combination with a fluid flowing through a tubing, the optical sensor device includes a light source configured to emit a light, with at least a portion of the light being exposed to a fluid in the tubing and reflected, an optical sensor configured to receive at least a portion of the reflected light and analyze at least a portion of the received reflected light to determine a reflectance measurement, and a controller configured to correlate the reflectance measurement to an input particulate level and generate an output indicative of the fluid flow rate corresponding to the reflectance measurement. Also disclosed is a method of optically measuring fluid flow rate in a fluid processing system including optically monitoring fluid flow through a transparent portion of a tubing by measuring light reflectance of particles in the fluid.
Owner:FENWAL INC

Mo / Si reflector reflectivity measuring system and method based on acousto-optic monochromator

The invention discloses a Mo / Si reflector reflectivity measurement system and method based on an acousto-optic monochromator, the system comprises an EUV light source, an EUV energy meter, a monochromator and an EUV reflectivity meter, the EUV light source is used as a detection light source, the EUV energy meter is used for monitoring the fluctuation condition of the EUV light source and providing a light source fluctuation calibration coefficient for reflectivity measurement, the monochromator screens light based on the acousto-optic effect of an acousto-optic crystal, and the EUV reflectivity meter is used for measuring the reflectivity of the EUV light source. It is ensured that the EUV reflectivity meter only receives light with the required wavelength; the EUV reflectivity meter serves as a measurement space of a Mo / Si reflector sample, mechanical design is adopted, the size of the EUV reflectivity meter is reduced, meanwhile, a collimation optical system is added, and the accuracy of a measurement result is improved. The invention further provides a measurement method, accurate measurement of the angular spectrum and the reflection spectrum of the Mo / Si reflector is achieved, an effective technology is provided for measurement and development of the Mo / Si reflector, and therefore the EUV photoetching technology is continuously improved.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

A fitting method for ultra-low reflectivity of optical coatings

The present invention proposes a fitting method for the ultra-low reflectivity of optical coatings to solve the technical problem of large measurement errors in the ultra-low reflectivity of optical coatings. The steps of the present invention are as follows: simulating and calculating the effective refractive index of the waveguide of an uncoated FP laser chip at both ends to obtain the reflectivity of the uncoated FP laser chip and air; performing a P-I test on the uncoated FP laser chip at both ends to obtain a threshold current; performing an ultra-low optical coating on one end of the uncoated FP laser chip to obtain a laser chip with one end coated; applying different current values ​​to the laser chip with one end coated according to the threshold current and testing the corresponding spectral curves; using the spectral curves under different current values, the reflectivity of the ultra-low optical coating is obtained according to the reflectivity fitting. The present invention can accurately estimate the ultra-low reflectivity of the optical coating, playing a decisive role in the optimization of SLD and SOA products.
Owner:HENAN SHIJIA PHOTONS TECH

Soil organic matter content prediction method based on hyperspectrum

The invention provides a soil organic matter content prediction method based on hyperspectrum, and relates to the technical field of hyperspectrum prediction. The method comprises the following steps: firstly, collecting and treating a soil sample, and carrying out SOM content measurement and soil spectral reflectivity measurement; the soil spectral reflectivity data are preprocessed, and spectral noise and redundant information are eliminated; secondly, preliminarily screening characteristic wave bands by adopting an improved spotted serow optimization ISHO algorithm, and then carrying out secondary screening on the characteristic wave bands by utilizing an iterative reserved information variable IRIV algorithm; and finally, establishing a hyperspectral prediction model to predict the SOM content, and evaluating the precision of the model. According to the method, the ISHO algorithm and the IRIV algorithm are adopted to perform characteristic wave band selection on the spectral reflectivity data, and the XGBoost method is adopted to establish the SOM content prediction model, so that the precision of the prediction model is improved, and theoretical and technical support is provided for SOM content monitoring.
Owner:HUZHOU UNIVERSITY

Plant leaf reflectivity detector

The invention discloses a plant leaf reflectivity detector, and aims to accurately measure the reflectivity of a plant leaf so as to evaluate the nitrogen content and guide scientific fertilization. The detector is composed of a main shell, an auxiliary shell, a main control board, a display module, an acquisition mechanism, a handheld shell and the like, an optical system is built through a mechanical structure system, an electrical control system controls AD acquisition, LED start and stop and optical filter wheel rotation, and reflectivity measurement is achieved. The uniquely designed optical filter wheel is made of aluminum alloy, so that the stable operation of the system is ensured; the shell is made of resin materials, so that protection performance is improved, and portability is achieved. The operation process comprises the steps of startup initialization, zero calibration, measurement of a standard whiteboard and plant leaves, and data query and analysis. In addition, the detector has maintenance measures such as regular cleaning, battery maintenance and safe storage, and long-term stable operation is ensured.
Owner:XIAN WEIXING INTELLIGENT TECHNOLOGY CO LTD

Anti-glare film

An anti-glare film is attached on a surface of a display, and includes an anti-glare layer. The anti-glare layer is set to have a sparkle value falling within a range from 6 to 10, which is defined based on a value of a standard deviation of luminance distribution of the display under a state in which the anti-glare film is attached on the surface of the display, a value of specular gloss of 30% or less, which is measured with 60-degree specular gloss, a value of transmission image clarity of 60% or less, which has an optical comb of 0.5 mm, and a haze value of 50% or less. Consequently, satisfactory anti-glare property can be provided while appropriately suppressing sparkle on the display.
Owner:DAICEL CORP

Infrared temperature measurement error compensation method and system in dust environment

The invention discloses an infrared temperature measurement error compensation method and system in a dust environment, and the method comprises the following steps: collecting an infrared image of power transmission and transformation equipment in the dust environment through a thermal infrared imager, and synchronously recording environment parameters, including environment temperature, humidity, reflectivity / measurement distance and dust particle physical characteristics; preprocessing the infrared image, including graying, noise filtering and dust coverage area segmentation, classifying according to dust interference types, and extracting statistical characteristics of the infrared image; the method has the beneficial effects that the precision advantage is as follows: experimental data shows that when the dust concentration is 500mg / m < 3 >, MAE is reduced to + / -1.5 DEG C from + / -4.5 DEG C of a traditional method and is increased by 66.7%; dynamic adaptability: model online updating and threshold dynamic adjustment ensure stability (error fluctuation is less than + / -0.8 DEG C) under sudden dust or load fluctuation; and the operation and maintenance efficiency is as follows: the defect positioning time is shortened from 15 minutes to 3 minutes by AR assistance, and the inspection efficiency is improved by 80%.
Owner:MAINTENANCE BRANCH OF STATE GRID HEBEI ELECTRIC POWER

Reflectivity Sensing Using a Time-of-Flight Camera

Embodiments of the present disclosure relate to reflectivity sensing using a time-of-flight camera. Techniques for obtaining reflectivity measurements using a time-of-flight (ToF) measurement device. An example method includes: obtaining distance measurements using one or more pixels in a ToF sensor; obtaining intensity measurements corresponding to the distance measurements using one or more pixels; and calculating a reflectivity value based on the distance measurements, the intensity measurements, and a reflectivity calibration factor. In some embodiments, the calibration distance is obtained as follows: by measuring a reference distance to a calibration surface using a reference pixel in the ToF sensor and obtaining the calibration distance from the measured reference distance. In some embodiments, the reflectivity calibration factor is obtained as follows: by obtaining a reference intensity corresponding to the reference distance using the reference pixel and calculating the reflectivity calibration factor as a function of the reference intensity and the viewing angles of one or more pixels.
Owner:INFINEON TECHNOLOGIES AG

A method of measuring reflectivity, a laser radar device, and a storage medium

The application discloses a reflectivity measuring method, a laser radar device and a storage medium, and relates to the technical field of reflectivity measurement. The reflectivity measuring method comprises the following steps: acquiring the distance between a laser radar device and a measured object and the characteristic parameters of a return signal; acquiring a first preset characteristic relationship; and calculating the reflectivity of the measured object according to the first preset characteristic relationship. The first preset characteristic relationship is a corresponding relationship between the characteristic parameters and the reflectivity which is stored in advance. The measured object does not need to be moved multiple times to obtain different distances. According to the acquired first preset characteristic relationship, the reflectivity of the measured object at any distance can be directly calculated according to the characteristic parameters and the distance. The measuring method is simple, the calibration process is simple, and the measuring efficiency of the surface reflectivity of the measured object is improved.
Owner:WUHAN WANJI INFORMATION TECH

Optical film reflectance measurement system and method based on optical interference

The application provides an optical thin film reflectivity measurement system based on optical interference, comprising: a fiber end surface reflectivity test subsystem, which collects multiple sets of interference spectra by changing the cavity length distance between two fiber end surfaces and calculates the corresponding cavity length; fits the multiple sets of interference spectra based on a double-beam interference formula and calculates the measured reflectivity of the fiber end surface; compares the measured reflectivity with the standard reflectivity of the fiber end surface directly measured by a spectrometer, and obtains a relationship formula of the reflectivity compensation coefficient-cavity length through polynomial fitting; a graphene thin film reflectivity test subsystem, which collects multiple sets of interference spectra by changing the distance between the aligned single-mode optical fiber and the optical thin film, fits the interference spectra based on a double-beam interference formula, and thus calculates the measured reflectivity of the optical thin film; and a correction subsystem, which corrects the measured reflectivity of the optical thin film based on the expression of the reflectivity compensation coefficient to obtain the corrected reflectivity of the optical thin film. A corresponding measurement method is also disclosed.
Owner:BEIHANG UNIV

A method for monitoring the end face reflectivity of a laser chip

The application discloses a laser chip end face reflectivity monitoring method and relates to the technical field of computer processing.The method comprises the following steps: S01, obtaining a chip end face to be monitored and inputting the chip end face to a preset micro area division model to obtain a plurality of micro areas of the laser chip end face and recording preset reflectivity standard values of each micro area; S02, using a high-precision reflectivity measuring device to obtain actual reflectivity measuring values of each micro area; and S03, determining reflectivity deviation conditions of each micro area according to a comparison between the actual reflectivity measuring values and the preset reflectivity standard values of each micro area and integrating micro area information containing the reflectivity deviation conditions into multi-area reflectivity distribution information.The application combines gridded reflectivity space analysis with multi-source data fusion technology and realizes micron-level precision monitoring of a chip patch coverage range.
Owner:杭州泽达半导体有限公司

Radar Coating Material Vertical Reflectivity Measurement Equipment

1. Name of the Design Product: Radar Coating Material Vertical Reflectivity Measuring Device. 2. Use of the Design Product: It is used by grass-roots troops, mainly to achieve in-situ measurement of the vertical reflectivity of radar coating materials, and it is a ground support device for performance inspection under the use conditions of an uncontrolled environment site. 3. Design Key Points of the Design Product: Lies in the shape. 4. Picture or Photograph that Best Illustrates the Design Key Points: Perspective View 1.
Owner:SHAANXI YU CHEN AVIATION EQUIP CO LTD

Method and apparatus for detecting optical anisotropy of coated fuel particles and computing device

The application discloses a coated fuel particle optical anisotropy detection method and device and computing equipment, and the method comprises the following steps: traversing a plurality of first field metallographic section images covering the whole metallographic sample to determine the image position information of each coated fuel particle and perform coordinate splicing to obtain a global coordinate map; based on the global coordinate map, the second field metallographic section image of each coated fuel particle is collected one by one; the second field metallographic section image is coated by a semantic segmentation model to define the coating, and then the coated fuel particle is subjected to measurability analysis to screen a plurality of target coated fuel particles; based on the layer definition image, the dense pyrolysis carbon layer region is extracted from the second field metallographic section image of the target coated fuel particle, and the measured region is selected therefrom to perform reflectivity measurement, so as to determine the optical anisotropy of the target coated fuel particle. The application can realize the automation and intelligentization of the coated fuel particle optical anisotropy detection process.
Owner:CHINA NORTH NUCLEAR FUEL CO LTD +1

Full wafer thickness map reflectivity measurement

A method for measuring the thickness of a semiconductor structure includes illuminating the semiconductor structure with non-coherent and non-parallel light from at least one light source, and acquiring at least one image of the semiconductor structure illuminated by the light source using a camera. The at least one image includes separate images of a first color, a second color, and a third color, where the first, second, and third colors are distinct from each other. A thickness map is generated for at least two layers of the semiconductor structure based on the images of the first, second, and third colors and reference images of a reference silicon wafer in the first, second, and third colors.
Owner:GLOBALWAFERS CO LTD

Full wafer thickness map reflectometry

A method of measuring a thickness of a semiconductor structure includes illuminating the semiconductor structure with the incoherent, uncollimated light from at least one light source, and capturing, using a camera, at least one image of the semiconductor structure illuminated by the light from the light source. The at least one image includes separate first color, second color, and third color images, the first, second, and third colors being different from each other. Thickness maps are produced for at least two layers of the semiconductor structure based on the first color, second color, and third color images and reference first color, second color, and third color images of a reference silicon wafer.
Owner:GLOBALWAFERS CO LTD

Method for measuring specular reflectance of tower type solar photo-thermal heliostat

The invention discloses a method for measuring the specular reflectance of a tower type solar photo-thermal heliostat. The method comprises the following steps of: mounting a certain number of ultrasonic sensors on a heat absorption tower at a specified position below a heat absorber; measuring optical reflectivity and ultrasonic reflectivity by using a handheld optical reflectivity measuring instrument and an ultrasonic sensor, and constructing a data set; establishing a relationship between the ultrasonic reflectivity and the optical reflectivity; establishing a linear regression model of the relationship between the ultrasonic reflectivity and the optical reflectivity by using the measured data set, and solving a fitting coefficient through a least square method so as to obtain a fitted model; and detecting the heliostat to be measured by using an ultrasonic sensor, substituting the obtained ultrasonic reflectivity into the fitted model, and calculating to obtain the optical reflectivity of the heliostat to be measured. The method disclosed by the invention is simple and convenient to operate and high in measurement speed, reduces the measurement cost of the reflectivity of the heliostat, and does not affect the normal work of a heliostat field.
Owner:SEPCOIII ELECTRIC POWER CONSTR CO LTD

Automatic sampling device for measuring plate surface reflectivity of continuous annealing line

The utility model relates to the technical field of sampling devices, and provides an automatic sampling device for measuring the reflectivity of a plate surface of a continuous annealing line, which comprises a movable seat movably arranged on the ground; the sampling piece is movably arranged on the moving seat, the sampling piece is provided with a mounting part, an adhesive tape is mounted on the mounting part, and the sampling piece is configured to be capable of driving the adhesive tape to approach different positions of the steel belt after moving; the push block is slidably arranged on the sampling piece, and the push block is configured to be capable of pushing the adhesive tape to adhere to the steel belt after sliding. By means of the technical scheme, the technical problems that in the prior art, manual pasting sampling consumes manpower, and the labor intensity is increased are solved. And the device can automatically sample different positions of the steel belt due to the moving and adjusting functions of the moving seat and the sampling piece.
Owner:HEBEI JINGYE WIDE BOARD TECH CO LTD

A method and system for measuring reflectivity of a weakly reflecting grating array

A kind of weak reflection grating array reflectivity measurement method, using optical time domain reflectometer OTDR, including direct current light source, modulator, erbium-doped fiber amplifier, circulator, photoelectric detector, data acquisition card, data analysis processing module and display module;1) weak reflection grating array is accessed to above-mentioned measurement system, the weak reflection grating array to be measured is accessed to the second port of circulator;2) the output port of laser is connected with the input port of modulator;Laser output direct current light signal is modulated into probe light pulse by modulator, is amplified after being amplified by erbium-doped fiber amplifier, forms probe signal by entering the weak reflection grating array to be measured through circulator;3) the input port of photoelectric detector is connected with the third port of circulator;The input port of data acquisition card is connected with the output port of photoelectric detector;It is sent to data acquisition card by photoelectric detector output port;4) the output port of data acquisition card is connected with data analysis processing module.
Owner:NANJING XIAOZHUANG UNIV

Temperature variation detection system using reflectometry

A temperature increase detection system (300) for an environment consisting of several distinct zones (Z1-Z10), the system comprising a branched cable network with several branches (CS1-CS10), each intended to be deployed in one of the zones, and at least one reflectometry device (DR1) connected to one end of at least one branch of the network and configured to: Acquire an initial reflectometry measurement corresponding to an initial state of said branched cable network; Acquire a current reflectometry measurement corresponding to a current state of said branched cable network; Compare the current reflectometry measurement to the initial reflectometry measurement to infer a temperature increase on one of the branches of said network. Figure 3
Owner:COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Distance and reflectivity measurement method, apparatus, storage medium and lidar

A distance and reflectivity measurement method, apparatus, storage medium, and lidar are disclosed. The lidar acquires an echo signal from light reflected by a target object. A distance threshold measures the echo signal to determine the target's distance relative to the lidar. A reflectivity threshold, higher than the distance threshold, measures the echo signal to determine the target's reflectivity. Using separate thresholds, with the reflectivity threshold being higher, provides high accuracy for distance measurement and high differentiation for reflectivity measurement, improving the overall accuracy of calculating both distance and reflectivity for the target object.
Owner:SUTENG INNOVATION TECHNOLOGY CO LTD

Distance and reflectivity measurement method, apparatus, storage medium and lidar

A distance and reflectivity measurement method, apparatus, storage medium, and lidar are disclosed. The lidar acquires an echo signal from light reflected by a target object. A distance threshold measures the echo signal to determine the target's distance relative to the lidar. A reflectivity threshold, higher than the distance threshold, measures the echo signal to determine the target's reflectivity. Using separate thresholds, with the reflectivity threshold being higher, provides high accuracy for distance measurement and high differentiation for reflectivity measurement, improving the overall accuracy of calculating both distance and reflectivity for the target object.
Owner:SUTENG INNOVATION TECHNOLOGY CO LTD

Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method

When measuring a reflectivity of an object for measurement light, initially the object and a reflectivity measurement apparatus are provided. The latter includes a measurement light source, an object holder for holding the object and a spatially resolving detector for capturing measurement light reflected by the object. A measurement light beam impinges on a section of the object within a field of view of the measurement apparatus. The reflected measurement light coming from the impinged-upon section of the object is captured. A surface area of the captured section is at most 50 μm×50 μm. The measurement is performed by the detector. Next, at least one reflectivity parameter of the object is determined on the basis of an intensity of the captured measurement light. The result is a measurement method and a metrology system operating therewith, whereby reflectivities in particular of very finely structured objects, such as lithography masks, can be measured with sufficient precision.
Owner:CARL ZEISS SMT GMBH

System and method for automatically measuring reflectivity of spherical reflector

The invention belongs to the field of large-aperture spherical reflector reflectivity measurement, and discloses a spherical reflector reflectivity automatic measurement system and method. The method comprises the following steps: arranging a tray and a multi-dimensional mobile platform in a black box; a light source and a light intensity detection unit are carried on the multi-dimensional mobile platform; a spherical reflector to be measured is placed on the tray; for each to-be-detected point position on the spherical reflector, the positions of the light source and the light intensity detection unit are adjusted through the multi-dimensional mobile platform, so that a light beam emitted by the light source is incident to the current to-be-detected point position, the light intensity detection unit is used for detecting reflected light of the light beam reflected by the current to-be-detected point position, and the reflected light intensity is obtained; and obtaining the reflectivity of the current point location to be measured according to the incident light intensity and the reflected light intensity. According to the invention, not only can the reflectivity of the spherical reflector be automatically measured with high precision and the measurement efficiency be improved, but also the reflectivity of the spherical reflector can be directly measured and the accuracy is improved.
Owner:INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI +1

Laser chip end face reflectivity monitoring method

The invention discloses a laser chip end face reflectivity monitoring method, and relates to the technical field of computer processing, and the method comprises the following steps: S01, obtaining a to-be-monitored chip end face, and inputting the to-be-monitored chip end face to a preset microscopic region division model to obtain a plurality of microscopic regions related to the laser chip end face, recording a preset reflectivity standard value of each microcosmic area; s02, acquiring an actual reflectivity measurement value of each microscopic area by using high-precision reflectivity measurement equipment; and S03, determining the reflectivity deviation condition of each microscopic area according to the comparison between the actual reflectivity measurement value of each microscopic area and a preset reflectivity standard value, and integrating the information of each microscopic area containing the reflectivity deviation condition into multi-area reflectivity distribution information. According to the method, gridding reflectivity space analysis and a multi-source data fusion technology are combined, and micron-level precision monitoring of the chip patch coverage range is achieved.
Owner:杭州泽达半导体有限公司

A method, apparatus, electronic device, and medium for determining sample deformation information.

This application provides a method, apparatus, electronic device, and medium for determining sample deformation information, relating to the field of photothermal detection technology. The method includes: after the sample surface of the sample to be tested is excited by pump light and a probe light detects any point on the excited sample surface, acquiring the difference signal between the signal light and the reference light determined by the detection device and converted into electrical signals; processing the difference signal using a preset algorithm to determine the change in reflectivity of an SPR element (Surface Plasmon Resonance Optical Element); determining the change in reflection angle corresponding to the change in reflectivity of the SPR element based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample to be tested; and determining the deformation information of the corresponding point on the sample surface of the sample to be tested based on the change in reflection angle. This method utilizes an SPR element to achieve direct conversion between the reflectivity measurement of the sample to be tested and surface deformation information, ensuring the accuracy of deformation information measurement.
Owner:SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY

Measurement method of EUV reflectometer and EUV reflectometer

In a measurement method, the method uses an EUV reflectometer to measure the reflectance of a test object (PR) reflecting EUV radiation as a function of the wavelength of the EUV radiation and of the angle of incidence of the EUV radiation on the reflective surface (OB) of the test object, the reflectance is measured by means of a first partial system (TS1) and by means of a second partial system (TS2) of a beam shaping unit. The present invention relates to a method for measuring a surface (OB) of a test object (PR), comprising a first partial system (TS1) comprising a monochromator (MC) and being part of a beam shaping unit (SFE) for imaging an EUV radiation emission source spot (QF) on an exit gap (SP) of the monochromator, and a second partial system (TS2) for imaging the exit gap on the surface (OB) of the test object (PR), the first partial system (TS1) comprising a monochromator (MC) and being part of a beam shaping unit (SFE) for imaging the EUV radiation emission source spot (QF) on the exit gap (SP) of the monochromator. In this way, a measurement spot (MFL) is generated. According to the invention, the test object (PR) is positioned in a plurality of degrees of freedom with respect to the measurement beam (STR) such that during operation the measurement beam (STR) impinges on the reflective surface (OB) at a specifiable angle of incidence in the region of the measurement spot (MFL). A characteristic of the light beam reflected by the surface of the test object is detected by means of a detector (DET), wherein a detector signal representative of the EUV radiation reflected by the test object is generated. The detector signals are evaluated in order to determine reflectance measurements. In the beam direction control operation, by means of a reflection manipulator (MAN) formed by the first mirror (S1) and at least one second mirror (S2) of the second partial system located downstream thereof in the beam direction, and changing the position of the measurement spot on the surface of the test object by controlled modification of the beam direction of the measurement beam (STR) by means of these mirrors displaced in a mutually coordinated manner in at least one rigid degree of freedom in response to a control signal from the control unit.
Owner:CARL ZEISS SMT GMBH

Detection method for laser radar, detection system of laser radar, and laser radar

A detection method for a LiDAR and a detection system thereof, and a LiDAR are provided. The detection method includes: performing a reflection receiving operation to enable a detector of a channel to be detected to receive multiple echo signals reflected by a target plate, to receive multiple reflectivity measurement values of the channel to be detected for the target plate determined by the LiDAR, where the channel to be detected is a detection channel of the LiDAR; and determining a reflectivity parameter of the channel to be detected based on a result of the reflection receiving operation, where the reflectivity parameter of the channel to be detected includes: at least one of reflectivity accuracy of the channel to be detected or reflectivity precision of the channel to be detected. The detection method can determine consistency of reflectivity measurement of respective channels of the LiDAR and reflectivity measurement accuracy of an entire LiDAR system. The detection method is applicable to any type of LiDAR, to improve accuracy of evaluating reflectivity performance of the LiDAR.
Owner:HESAI TECH CO LTD

A Portable Measuring Device and Method for Measuring the Reflectivity of Absorbing Materials

The present invention provides a portable reflectivity measuring device for absorbing materials, which includes a vector network analyzer, a broadband antenna, an adjustable antenna support, a connecting device and an absorbing window. The vector network analyzer includes a liquid crystal display screen, mechanical keys or touch screen keys, an interface for an external USB storage device and a battery; the broadband antenna is a double-ridge waveguide probe; the adjustable antenna support includes a fixing mechanism, a tripod and a locking screw; the fixing mechanism surrounds the outer contour of the antenna and is fastened by the locking screw; the tripod consists of two П-shaped brackets and is locked by the locking screw; the broadband absorbing window has a rectangular window cut out at its center, which is consistent with the radiation aperture surface of the antenna; the vector network analyzer is connected and fixed to the broadband antenna through the connecting device, and a signal separator and a radio frequency cable are arranged inside the connecting device. The present invention also provides a portable method for measuring the reflectivity of absorbing materials, and the present invention is applicable to operation sites such as construction sites of absorbing materials, repair sites of stealth equipment and storage warehouses, etc.
Owner:3RD GENERAL DESIGN DEPT CHINA AEROSPACE SCI & IND CORP