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57 results about "Mapping system" patented technology

A robot autonomous exploration mapping system and method

The application discloses a kind of robot autonomous exploration mapping system and method, system includes perception module, decision module, planning module and control module, the output of perception module is connected with the input of decision module, and perception module transmits front point candidate set to decision module, the output of decision module is connected with the input of planning module, and decision module transmits optimal target point to planning module, the output of planning module is connected with the input of control module, and planning module transmits motion instruction to control module, and the output of control module is connected with the input of perception module, and control module state information is fed back to perception module, and forms closed loop control system. It can be adapted to diversified industrial scene, with the advantages of efficient completion of autonomous exploration, balancing decision quality and real-time, self-adapting different structure environment, improving decision stability and the like.
Owner:JIANGSU UNIV OF SCI & TECH +1

Embryo development trajectory mapping system and method fusing morphological features

PendingCN122289224AMiscarriageEmbryo
This invention relates to the interdisciplinary field of assisted reproductive technology and artificial intelligence, specifically to a system and method for constructing an embryonic developmental trajectory map that integrates morphological features. By deeply integrating static morphological features with dynamic morphodynamic parameters, a more comprehensive panoramic map of embryonic development with richer information dimensions is constructed, overcoming the one-sidedness of single-dimensional assessment. Automated analysis of the map using an AI model reduces the influence of subjective human factors, enabling the discovery of subtle developmental patterns and potential differences that are difficult to discern with the human eye, significantly improving the accuracy of selecting high-quality embryos. The provided developmental trajectory map allows embryologists to intuitively examine the entire developmental process of the embryo and the performance of each key node, enhancing the interpretability and credibility of the assessment process. Through more scientific embryo selection, it is expected to improve embryo implantation and clinical pregnancy rates, and reduce multiple pregnancy and miscarriage rates.
Owner:HEFEI YOUSHENG TECHNOLOGY CO LTD

A processor-implemented method and system for indoor navigation map generation with accessibility information

A processor-implemented method for indoor navigation map generation with accessibility information is provided. The method includes collecting a plurality of colored point cloud maps by utilizing both mobile and stationary mapping systems. The map can be aligned with an outdoor map if the GNSS or the global coordinate is available. The method also includes performing semantic segmentation based on at least implicit representation and synthetic data- aided training network for generating a plurality of structural elements and a plurality of functional elements. The method also includes performing topology-aided structural modeling by generating a structural building information modeling (BIM) using topology information at a plurality of levels of topology and by automatically applying a plurality of levels of topological constraints associated with the structural elements. The method also includes performing parametric modeling by detecting a plurality of functional objects in the functional elements using one or more simulated datasets including simulations of lighting, and environmental conditions.
Owner:MICRO ENGINEERING TECH INC

In-vivo positioning mapping system based on RFID

The application relates to the field of medical equipment, in particular to an in-vivo positioning and mapping system based on RFID, which comprises an antenna, an RFID positioning target object, an RFID reference tag array, an RFID reader and a data processing device. In the use process, all the antennas receive the radio frequency signals fed back by the RFID positioning target object and the RFID reference tags in real time, the ranging error of the antenna is calculated by taking the RFID reference tags on the RFID reference tag array as the reference, the nearest RFID reference tag is determined by using the feedback signal of the RFID positioning target object, and the coordinates of the RFID positioning target object are calculated by the coordinates of the RFID reference tag and the ranging error. The method can apply the positioning technology based on the RFID radio frequency identification to the in-vivo positioning by using fewer radio frequency devices, can not affect the normal operation of other devices in the operation, and can eliminate the error and ensure the positioning precision.
Owner:SICHUAN JINJIANG ELECTRONICS SCI & TECH CO LTD

Intelligent extraction of large remote sensing images by large model cross-protocol conversion method and system

This application belongs to the field of large-scale model cross-protocol conversion technology, specifically involving a method and system for intelligent extraction and cross-protocol conversion of ultra-large remote sensing images. The method includes the following steps: S1. Standardized interception and preprocessing of heterogeneous requests from different clients; S2. Establishment of a single-request channel based on dynamic client instances; S3. Bidirectional protocol reconstruction and streaming data translation of heterogeneous large models; S4. End-to-end monitoring and resource recovery; S5. Intelligent dynamic tiling and spatiotemporal context reorganization for ultra-large remote sensing images. This application constructs an intelligent protocol identification and conversion mechanism that automatically identifies the original protocol format and maps it uniformly to the target model protocol for ultra-large remote sensing image processing requests initiated by different clients. Throughout the conversion chain, the system ensures the preservation and consistency of the input original image logic and the output parsed result format, improving the compatibility, flexibility, and scalability of intelligent mapping systems when processing ultra-large-scale remote sensing data.
Owner:QINGDAO INST OF SURVEYING & MAPPING SURVEY +1

Chip bottom topology control method and system based on discrete space-time dual mapping

The application discloses a chip bottom layer topology control method and system based on discrete space-time dual mapping, and belongs to the technical field of integrated circuit bottom layer intelligent control. In view of the bottom layer defects of traditional chip hardware and information being split, relying on external driving, architecture being solidified, scheduling being redundant, and lacking self-adaptive evolution capability, the application is based on the original TPS-CCC discrete space-time information-physical dual theory, constructs a three-dimensional topological dual mapping system, establishes hardware native topological evolution driving logic, and realizes chip computing power autonomous scheduling, hardware self-adaptive reconstruction, error self-healing correction and dynamic power consumption optimization. The application overturns the software passive control paradigm of the traditional chip, creates the next-generation chip bottom layer general paradigm of hardware-level autonomous intelligent control, has extremely high bottom layer theoretical barriers and full-coverage protection range, can be adapted to all types of high-end semiconductor chips, and has extremely strong industry monopoly and industrialization value.
Owner:黄宝明

Domain-specific issue identification and mapping

ActiveUS12683990B2A domainData mining
Systems and methods include generation of a set of n-grams of different lengths from each of a plurality of text portions, determination, for each set of n-grams, of matching topic variants of a domain ontology, determination of a topic associated with each of the matching topic variants, wherein a determined topic is associated with the text portion from which n-grams matching an associated topic variant were generated, generation of first n-grams of different lengths from a first text portion, determination, for each of a plurality of the first n-grams, of first matching topic variants of the domain ontology, determination of a first topic associated with each of the first matching topic variants, and determination of mappings between the first text portion and the plurality of text portions based on the topics associated with the plurality of text portions and the determined first topics.
Owner:SAP SE

Communication system, method, and apparatus

A communication system, method, and apparatus are provided. The communication system includes a first edge cloud deploying first group of user service nodes (USNs) that form a hash ring corresponding to the first edge cloud and a second edge cloud deploying a second group of USNs that form a hash ring corresponding to the second edge cloud. A USN is configured to provide a service for a terminal device corresponding to the USN. The communication system may further include a mapping system including one or more distributed mapping nodes that store information about the USNs on the first and second edge cloud. The information about a USN includes identification information of the USN and identification information of the terminal device corresponding to the USN. When the mapping system includes a plurality of distributed mapping nodes, the mapping nodes form one or more hash rings corresponding to the mapping system.
Owner:HUAWEI TECH CO LTD

Ontology mapping system

ActiveUS12689651B2Malware analysisTheoretical computer science
An article of manufacture includes a non-transitory medium including machine-readable instructions. The instructions are to be read and executed by a processor. The instructions, when read and executed by the processor, to cause the processor to receive a malware analysis of a malware from a computer security source and receive other malware analyses. Each other malware analysis is of another malware from another computer security source. The instructions may further cause the processor to perform a fuzzy matching algorithm to quantify a similarity of the malware analyses, determine that the malware is a same malware as other malware based upon results of the fuzzy matching algorithm, and later take a same corrective action for malware based upon a receipt of the malware analysis.
Owner:SECURONIX INC

Hierarchical segment-based map optimization for localization and mapping system

The disclosure provides techniques for map optimization for a localization and mapping system. The map optimization method includes segmenting, based on a preset segmentation condition, a trajectory tracked by the localization and mapping system to obtain a plurality of segments of the trajectory, each segment being partitioned into a head part, an interior part and a tail part; performing a global optimization process based on frames in the head and tail parts of each segment to obtain optimized mapping results for the frames in the head and tail parts of the segment; estimating optimized mapping results for frames in the interior part of each segment based on the optimized mapping results for the frames in the head and tail parts of the segment; and updating a map built by the localization and mapping system according to the optimized mapping results for the frames in each segment.
Owner:INTEL CORP

A strabismus three-dimensional mapping method and system based on a knowledge graph

PendingCN122347640AFeature vectorGraph spectra
The application relates to the technical field of knowledge graph, and particularly provides a strabismus three-dimensional mapping method and system based on a knowledge graph, which comprises the following steps: taking a starting point space coordinate, a patient corneal reflection point offset and an eyeball rotation center coordinate as attribute values of an entity node, establishing a directed connection edge between nodes according to a fixed attachment relationship between muscles and eyeballs and between muscles and bone walls in anatomy, and constructing an initial heterogeneous graph by all entity nodes and the directed connection edge; weighting and aggregating attribute values of neighborhood nodes connected by the directed connection edge of each node in the obtained initial heterogeneous graph to obtain an aggregated feature vector of the node; and mapping all node coordinates in each obtained sub-graph to a unified three-dimensional coordinate system, and adjusting the relative positions between the sub-graphs so that all positioning base points are located on a plane. The application realizes systematic mapping and pathological posture analysis of three-dimensional space configurations of eye external muscles of a strabismus patient.

Urban three-dimensional terrain auxiliary surveying and mapping device

The application is suitable for the technical field of surveying and mapping, and provides a kind of urban three-dimensional terrain auxiliary surveying and mapping device, including support mechanism and surveying and mapping instrument on support mechanism, surveying and mapping system is built-in in surveying and mapping instrument, support mechanism includes support seat and support ring rotationally installed on support seat, support ring is used to support and fix surveying and mapping instrument, the bottom of support seat is also provided with multiple groups of support components, and the bottom of support seat is provided with fixing assembly for fixing support component in any working state, the application improves the surveying and mapping precision and efficiency of complex urban terrain, adapts to special scenes such as building-intensive area, low-lying area, etc., can provide accurate data support for urban planning and municipal construction, and has wide engineering application value.
Owner:RIZHAO POLYTECHNIC

Mobile robot laser radar mapping, light-transmitting environment false object identification and map correction method

A method for identifying false objects and correcting maps in a transparent environment generated by a LiDAR mapping system for mobile robots involves dilating obstacle points in the original occupied grid map generated by the LiDAR mapping system to connect discontinuous obstacle points, achieving initial separation between the transparent map and the real map. Then, a region growing method is used to grow from the origin of the original occupied grid map outwards, distinguishing between the unknown map, the transparent map, and the real map. Through the synergistic combination of the above morphological preprocessing and region growing segmentation strategies, this invention can effectively distinguish and eliminate those transparent false regions that are spatially isolated from the main body of the real map, ultimately outputting an environment map with accurate geometric structure and reliable semantic information, providing high-quality environmental representation support for subsequent higher-level tasks such as robot navigation and obstacle avoidance.
Owner:XI AN JIAOTONG UNIV

Industrial competitive power scoring method based on graph neural network and data fusion

The present application relates to the technical field of industrial competitiveness evaluation, and discloses an industrial competitiveness quantitative evaluation method based on a graph neural network and data fusion, comprising: constructing a heterogeneous graph; collecting real-time data and updating it to the heterogeneous graph to obtain a real-time heterogeneous graph, training and feature learning on the real-time heterogeneous graph based on a graph neural network model to obtain a competitiveness feature vector of a target node; constructing an evaluation mapping system, mapping the competitiveness feature vector of the target node to a quantitative evaluation result based on the evaluation mapping system, effectively integrating multi-source heterogeneous data in real time, capturing complex network structures and dynamic relationships within an industry through a graph neural network, and realizing accurate and dynamic quantitative evaluation of industrial competitiveness, thereby providing strong quantitative support for enterprise strategic decision-making and industrial policy formulation.
Owner:BEIJING ZHIYI SHUPU DATA SERVICE CO LTD

A multi-laser radar inertial fusion and anti-light target joint mapping system and method

PendingCN122330909AOdometryPoint cloud
This invention discloses a multi-LiDAR inertial fusion and reflective target joint mapping system and method. The system includes a multi-LiDAR and inertial measurement unit acquisition module, a multi-LiDAR point cloud pre-fusion module, a LiDAR inertial front-end odometry module, a reflective target detection module, a target management module, an adjacent target constraint generation module, a map optimization back-end module, and a stable map and temporary working face map management module. The method includes the following steps: S1, acquiring point cloud data and inertial measurement data; S2, fusing multiple point cloud data; S3, acquiring the pose data and keyframe data of the tunneling machine; S4, acquiring the data information of the reflective target; S5, judging and classifying the state of the reflective target; S6, generating adjacent reflective target constraints; S7, performing map optimization and outputting an optimized and corrected map; S8, outputting the final stable map; S9, upon restarting after a power outage, determining whether to merge the map before the power outage with the newly created map after the restart.
Owner:ZHENGZHOU HENGDA INTELLIGENT CONTROL TECHNOLOGY CO LTD

Broadcast, Unknown Unicast, and Link-Local Multicast Traffic Support Using Locator / Identifier Separation Protocol and Protocol Independent Multicast-Source-Specific Multicast

Systems, devices, and methods support network traffic, for example, Broadcast, unknown Unicast, and link-local Multicast (BUM) traffic, in an overlay by utilizing Protocol Independent Multicast (PIM)-Source-Specific Multicast (SSM) in an underlay, while removing dependency on PIM-Any Source Multicast (ASM). A mapping system receives a mapping registration message and / or a mapping request message of a candidate device configured with a virtual network instance, for example, a Layer 2 Virtual Network Instance (L2VNI) implemented with layer 2 flooding. In response to receiving the mapping registration message, the mapping system transmits a mapping notification message to one or more member devices of an underlay group associated with the L2VNI. The mapping notification message indicates that the candidate device has joined the underlay group. In response to receiving the mapping request message, the mapping system transmits, to the candidate device, a list indicating that the member device(s) intends to transmit the network traffic.
Owner:CISCO TECHNOLOGY INC

Two-dimensional image space to three-dimensional geographic space mapping system based on ai target detection

The application relates to the general image data processing technical field and discloses a two-dimensional image space to three-dimensional geographic space mapping system based on AI target detection, which comprises a double-channel feature decoupling unit used for extracting an image gradient frequency feature tensor and a pixel-level semantic topology tensor from a two-dimensional pixel array; a semantic prior constraint inference unit used for matching a reference three-dimensional topology tensor in a geometric parameterized asset library by using the pixel-level semantic topology tensor to generate a depth scalar matrix; and a geographic space coupling mapping unit used for correcting a pose parameter matrix through coordinate residual errors of a virtual projection node and a measured pixel topology node. The application utilizes geometric prior to establish a scale constraint mechanism, solves a scale ambiguity problem in monocular image mapping, and improves the stability of geographic space reconstruction in a complex environment.
Owner:CHINA DYNAMICS TECH SHENZHEN CO LTD

A high-precision geographic information dynamic surveying and mapping system fusing laser radar and unmanned aerial vehicle

The application discloses a kind of high-precision geographic information dynamic surveying and mapping systems of fusing laser radar and unmanned aerial vehicle, including data acquisition module based on unmanned aerial vehicle platform and the multiple sensor load carried synchronous acquisition multidimensional geographic information data, acquisition pre-processing module is used to carry out space-time synchronization and preliminary purification to multi-source sensor data, real-time data processing module is used to carry out real-time solution and analysis to the data after purification, dynamic modeling analysis module is used to generate high-precision real scene model and carry out time series change analysis by fusing multi-source data, visualization application module is used for the three-dimensional display of achievement, interaction and application integration;The application solves the problems of low efficiency, environmental constraints and inability to update dynamically by multi-sensor collaborative sensing and edge real-time processing, realizes all-weather dynamic geographic information acquisition and processing with centimeter-level precision and minute-level response in complex terrain, and is especially suitable for geological disaster monitoring, smart city management and other scenarios.
Owner:乔彦铭

A knowledge mapping system and analysis method for software reliability requirements

This invention proposes a knowledge mapping system and analysis method for software reliability requirements, belonging to the field of software reliability requirements analysis. This method constructs a standardized requirements modeling system comprising an external cross-linking interface model, a functional logic model, a functional combination model, and a state scenario model to achieve a formal representation of software requirements. It then decomposes and summarizes individual functional requirements, identifies potential failure modes based on a pre-defined classification and comparison system, and establishes a three-layer mapping system of software functional requirements – failure modes – reliability requirements. This completes the forward derivation and transformation of reliability requirements, outputting standardized analysis results. This invention achieves standardized and traceable processing of software reliability requirements analysis, providing prerequisite input and logical basis for the development of highly reliable software, ensuring system stability and task success.
Owner:BEIHANG UNIV

A visual mapping system

This invention provides a visual mapping system, comprising: a visual mapping reference pad and a processing module, wherein the visual mapping reference pad includes a pad body; a surface layer disposed on the surface of the pad body; the surface layer is a matte coating with a microscopic uneven structure; positioning anchors disposed on the pad body, the positioning anchors being used for positioning and alignment during splicing; visual coding marks disposed on the surface layer; wherein the center of the visual coding marks coincides with the center of the positioning anchors in the vertical projection direction; and a multi-level dimension reference calibration area disposed on the surface layer; the processing module is configured to calculate the homography matrix by recognizing the visual coding marks of the visual mapping reference pad, reconstruct the orthophoto plane coordinate system, establish a mapping model between pixel coordinates and physical dimensions, and output the key geometric parameters of the part to be measured. This invention aims to achieve high-precision automated mapping.
Owner:MCGARVEY PROJECT MANAGEMENT SERVICES LLC

A method and system for soil organic carbon and spectral coupling generation model

The application discloses a kind of soil organic carbon and spectral coupling generation model method and system, belong to soil remote sensing monitoring technical field.The method includes five core steps of data preprocessing, dry soil spectrum fitting, SOC mapping model construction, morphological parameter generation, spectral reconstruction and bidirectional verification.Brightness-shape-humidity (BSM) theoretical framework separates spectral brightness and shape effect, fuses random forest algorithm and double-stage hybrid optimization model, and constructs the bidirectional reversible mapping system between spectral morphological parameter and SOC content.The application breaks through the limitation of traditional technology one-way inversion, can be based on soil spectrum high-precision inversion SOC content, and can also generate high-fidelity soil spectrum according to target SOC content, has physical explainability and data-driven flexibility, solves the technical problems of cross-regional spectral deviation and lack of explainability, and provides reliable tool for soil carbon cycle remote sensing monitoring.
Owner:CHINA AGRI UNIV

An AI-powered intelligent recognition and automated form filling system for manufacturing industries integrating OCR and NLP, and its implementation method.

PendingCN122088466ASemantic analysisText processingTechnology fusionEngineering
This invention discloses an AI-powered intelligent recognition and automated form filling system for the manufacturing industry, integrating OCR and NLP technologies, and its implementation method, belonging to the field of manufacturing digitalization technology. The core of this technology lies in achieving rapid recognition of business scenarios with multiple input types, including voice, text, and documents, through the integration of OCR and NLP technologies. It utilizes a JSON template with a table structure to complete standardized data parsing and automatically links and opens the corresponding business modules to automate form filling. Specifically, it quickly matches input information with business scenarios by constructing a scenario feature library and a JSON mapping system with the table structure; it uses enhanced OCR to extract image / document data and NLP technology to parse voice / text semantics, generating JSON format data conforming to the table structure; finally, it automatically calls and opens the target business module to complete data filling and process triggering. This invention solves the technical pain points of slow scenario recognition, non-standard data parsing, and the need for manual switching of business modules in traditional manufacturing form processing, significantly improving form processing efficiency and business continuity. It can be widely applied to various manufacturing scenarios such as equipment inspection and invoice recognition, and has strong practicality and scalability.
Owner:兰州兰石爱特互联科技有限公司

A multi-robot collaborative mapping system

ActiveCN117606464BImage analysisNavigational calculation instrumentsSimultaneous localization and mappingPoint cloud
The application relates to a multi-robot cooperative mapping system in the field of simultaneous localization and mapping, which comprises a plurality of mobile platforms and a central control center; each mobile platform is loaded with a laser radar, a laser odometer and a computing host; the laser radar is used for acquiring point cloud data of a surrounding environment; the laser odometer is used for acquiring pose data of the mobile platform; the computing host processes the point cloud data and the pose data to obtain key frame point cloud and a key pose graph, and sends the key frame point cloud and the key pose graph to the central control center through a wireless network card; the central control center performs loop detection based on the key frame point cloud and the key pose graph to find a loop candidate pair, performs pose graph aggregation and optimization based on a loop detection result, the key frame point cloud and the key frame point cloud to obtain a global point cloud map of a region to be mapped. The application solves the problems of low mapping efficiency and long mapping time consumption in the prior art.
Owner:ZHONGBING INTELLIGENT INNOVATION RES INST CO LTD

Vehicle calibration system and vehicular development and debugging system

PendingUS20260184321A1Computer hardwareEngineering
A vehicle calibration system includes a computer device. The computer device includes: a mapping system variable creating module, configured to create corresponding mapping system variables respectively for calibration signals; an assigning module, configured to assign an initial value to the mapping system variables; a calibration database, configured to store calibration signal data and define the calibration signals as an observation variable or a calibration variable or a writable observation variable; and an execution module, configured to write the corresponding calibration signal and / or read the mapping system variable.
Owner:SHANGHAI TOSUN TECH LTD

A power grid seasonal load balance regulation method based on energy storage optimization

ActiveCN121546629BAdaptive learningPower grid
The application discloses a kind of grid seasonal load balancing regulation methods based on energy storage optimization, belong to power system dispatching technical field, obtain energy storage equipment operating parameter, construct multidimensional response characteristic mapping system, determine response boundary by response capability vector space and combination threshold template combination;Through double time scale load variation monitoring, the real-time calculation and trend judgment of grid load variation rate are carried out, generate load surge early warning signal, implement cross-node collaborative scheduling to realize multi-energy storage station distributed energy allocation;According to the correlation analysis of environmental parameters and load characteristics, seasonal adaptability regulation is carried out, and the seasonal switching threshold value in the dispatching instruction is dynamically adjusted;Response deviation detection is carried out by scheduling execution monitoring, identifies scheduling deviation segment and marks, to use scheduling deviation segment as input by adaptive learning to update scheduling parameter set and instruction generation logic, realize scheduling logic closed loop optimization.
Owner:YUNNAN ELECTRIC POWER TESTING & RES INST (GRP) CO LTD +1

A Multifunctional Non-Contact Three-Dimensional Mapping System for Cardiac Electrophysiology Based on ICE

ActiveCN117618028Breduce in quantityreduce medical costsSurgical operationEcg signal
This invention discloses a multifunctional non-contact three-dimensional cardiac electrophysiological mapping system based on intracardiac ultrasound (ICE), comprising an ICE system, an ultrasound host, an ECG signal acquisition system, and a three-dimensional spatial positioning system. By adjusting the position and imaging angle of the ICE probe, it continuously acquires cardiac ultrasound signals, as well as heartbeat and respiratory signals, to synchronously acquire ultrasound signals at different cardiac cycles. Cross-correlation calculations are performed on the continuous ultrasound signals acquired at various spatial locations to obtain the three-dimensional cardiac excitation conduction sequence and maximum amplitude distribution within a cardiac cycle. This system can perform both intracardiac ultrasound imaging and non-contact three-dimensional electrophysiological mapping, reducing the use of catheters and medical costs in traditional contact electrophysiological interventional procedures, simplifying surgical operations, and improving surgical safety. Furthermore, it can simultaneously map the endocardium, intramyocardium, and epicardium, enabling more precise surgical planning and possessing significant clinical value.
Owner:SHENZHEN CARDIOACC LTD

Pipeline internal mapping robot and pipeline mapping system

This utility model discloses a pipeline internal mapping robot and pipeline mapping system, including a robot body, a mapping module, a forward walking support module, a rear walking support module, a diameter adjustment module, a steering module, a sonar detection module, and a self-cleaning module. The mapping module is located in the middle of the robot body; the forward walking support module and the rear walking support module are respectively located at the front and rear of the robot body; the diameter adjustment module is used to adjust the radial dimensions of the forward walking support module and the rear walking support module; two steering modules are respectively located between the robot body and the forward walking support module, and between the robot body and the rear walking support module; the sonar detection module is located at the lower part of the mapping module; and the self-cleaning module is located outside the mapping module. It can adapt to different pipe diameters, has good throughput, and achieves high-precision, complete, and continuous three-dimensional mapping and reconstruction of the pipeline interior, improving the quality and efficiency of pipeline internal mapping.
Owner:ZHUHAI ANYES TECH CO LTD

Systems and methods for absolute sample positioning

A sample mapping system includes a sample chuck including absolute reference marks, an imaging metrology tool to capture sets of alignment images at locations associated with sample marks on a sample on the sample chuck, and a controller. A particular set of alignment images at a particular location may include at least one alignment image associated with a particular sample mark and at least one alignment image associated with a particular portion of the absolute reference marks within a field of view of the imaging metrology tool visible through the sample. The controller may determine absolute coordinates of the sample marks based on the sets of alignment images. Determining the absolute coordinates of the particular sample mark may include determining the absolute coordinates of the particular sample mark based on a position of the particular sample mark relative to the particular portion of the absolute reference marks.
Owner:KLA CORP