134 results about "Pyrometer" patented technology

The invention provides a multispectral radiation temperature measurement method and system, and belongs to the field of signal acquisition and processing in an infrared radiation temperature measurement technology. The problems of poor inversion precision and applicability of multispectral radiation temperature measurement are solved. The multispectral radiation temperature measurement method comprises the following steps of: measuring radiation information of the surface of a to-be-measured target by using a multi-wavelength pyrometer; the beam splitting system obtains radiation information of different spectrum channels; photoelectric conversion: converting the optical signal into an electric signal; constructing a target equation and a constraint optimization condition according to the brightness temperature model; carrying out multispectral data processing by utilizing an improved multi-population mixed pigeon inspired optimization algorithm; and the final real temperature and emissivity values are obtained. The device is mainly used for multispectral radiation temperature measurement.

The invention relates to the technical field of semiconductor device preparation, and discloses a semiconductor annealing method and system and a storage medium, and the method comprises the steps: dividing a wafer structure into a central region, a transition region and an edge region, and calculating the central transition cooperative gain and the transition edge cooperative gain between the regions; the infrared pyrometers in all the areas are independently calibrated; sequentially setting PID control parameters of the central area, the transition area and the edge area based on the calibration result; and performing cooperative heating control on the wafer based on the set PID parameters until the annealing treatment is completed. According to the invention, the real-time following of the temperature of each region of the wafer is realized through master-slave cooperative gain control, the temperature uniformity among the regions of the wafer in the annealing process is improved, the problem of temperature lag or overheating of the edge region in the annealing treatment process is effectively solved, and the performance consistency of the semiconductor annealing process is ensured.

The invention relates to the technical field of ferrous metallurgy high-temperature metering, in particular to a converter continuous temperature measuring method, according to the method, temperature measurement is completed through a continuous temperature measuring device, the continuous temperature measuring device comprises a temperature measuring thermocouple, a thermocouple seating brick and a temperature measuring displayer, a temperature measuring calculation program is arranged in the temperature measuring displayer, and the thermocouple seating brick is arranged in the temperature measuring displayer. The method has the advantages that the advantages of non-contact temperature measurement and contact temperature measurement are combined, measurement defects are made up in a theoretical calculation mode, continuous temperature measurement of the converter is achieved, the temperature measurement efficiency is high, the temperature measurement accuracy is high, and the temperature measurement accuracy is high. And the temperature measuring device is long in service life.

The invention relates to the technical field of radiation temperature measurement, and discloses a multispectral radiation temperature measurement temperature inversion method and device and a storage medium, and the method comprises the steps: constructing a radiation equation set according to N spectrum channels of a multi-wavelength pyrometer; substituting the exponential polynomial model into a radiation equation set, constructing an equation set under different wavelength combinations, and introducing a conjugate gradient least square algorithm to solve and obtain multiple groups of temperature predicted values; modeling the probability density distribution of the temperature prediction value by using an adaptive kernel density estimation method, screening the temperature values of which the normalized probability density is greater than or equal to a preset threshold value, and calculating a weighted average value as a temperature prediction result; according to the method, multiple iterations are carried out through cross validation, the temperature value with the minimum prediction error is finally selected as the final temperature prediction result, the normal spectral emissivity of the sample is inversed according to the final temperature prediction result, and the accuracy of the temperature result can be further improved while the calculation efficiency is guaranteed.

A physical vapor transport system with improved hot zone package alignment includes a first video pyrometer to view a center of a first hot zone at a first end of the hot zone package to measure a first temperature of the hot zone package and provide a first video feed showing instantaneous positions of the hot zone package as it is rotated. A second video pyrometer views a second hot zone viewport at a second end of the hot zone package to measure a second temperature of the center of the hot zone package and provide a second video feed showing instantaneous positions of the hot zone package as it is rotated. A controller processes the temperature measurements and video feeds and adjusts the system components or settings to correct for mis-alignment of the hot zone package. Such adjustments can be made prior to or during a process run while PVT growth of SiC bulk material is occurring.

The invention relates to the technical field of reflecting plates, provides a reflecting plate, a semiconductor processing chamber and semiconductor annealing process equipment, and is used for solving the problem that a temperature measuring through hole and a pyrometer light guide rod are squeezed and collided due to thermal expansion and thermal deviation of the reflecting plate. A first positioning hole and a second positioning hole which are spaced in the direction parallel to the reflecting plate are formed in the reflecting plate; the first positioning hole restrains the translational degree of freedom of the reflecting plate in the first horizontal direction, and the second positioning hole restrains the translational degree of freedom of the reflecting plate in the first horizontal direction and the second horizontal direction; the first positioning hole and the second positioning hole jointly restrain the rotational degree of freedom of the reflecting plate in the vertical direction; at least two temperature measurement through holes are further formed in the reflecting plate, the second positioning hole is formed in a first area which contains the at least two temperature measurement through holes and has the smallest area, the maximum distance between the second positioning hole used for fine positioning and each temperature measurement through hole is minimized, and the thermal offset is remarkably reduced.

An apparatus for thermal ablation testing is provided. The apparatus comprises: a chamber; an optically transparent window in the chamber; a sample holder inside the chamber; a test sample in the sample holder; a number of bare-wire thermocouples connected to the test sample, wherein the thermocouples generate temperature data in the form of voltage; a mass balance inside the chamber, wherein the mass balance is configured to hold the sample holder and dynamically detect changes in mass of the test sample; an external radiant heat source configured to heat the test sample through the window; and a pyrometer directed at the test sample.

The utility model discloses a low temperature segmented temperature control type meat sausage chopping and mixing device, including both sides are equipped with the chopping and mixing cylinder of swing mechanism, rotatable chopping and mixing cutter is equipped with through the pivot in chopping and mixing cylinder, two synchronous telescopic all -round drive mechanism are fixed on pivot respectively, and two all -round drive mechanism all are located in the clearance between chopping and mixing cutter blade, and the output of one all -round drive mechanism is equipped with pyrometer, and the output of another all -round drive mechanism is equipped with the jet end of cold and hot air -jet mechanism, the constant temperature pipe of spiral arrangement is embedded in chopping and mixing cylinder inner wall, and constant temperature pipe is connected with external cold water source, and the top of chopping and mixing cylinder is equipped with controller, can monitor temperature in chopping and mixing process to the formation constant temperature interval chopping and mixing of timely adjustment, improves the uniformity of temperature control.

This invention relates to the field of conductivity measurement technology, and more particularly to a high-temperature conductivity measurement system and method based on the eddy current method. The system includes a stage, a high-temperature eddy current probe, a moving device, a pyrometer, a laser heating subsystem, and a data measurement subsystem. The stage is used to place the sample to be measured. The high-temperature eddy current probe is used to receive an excitation signal and pick up the measurement signal. The moving device is used to move the high-temperature eddy current probe laterally above the sample. The laser heating subsystem emits a continuous laser in the near-infrared band to heat the sample. The data measurement subsystem generates a set of multi-frequency excitation signals to excite the high-temperature eddy current probe, determines the inductance changes corresponding to the multi-frequency excitation signals measured by the high-temperature eddy current probe at the same position above the sample, and calculates the conductivity of the sample based on the inductance changes. This invention enables accurate, non-contact measurement of the conductivity of materials under high-temperature conditions.

The application discloses a kind of multi-wavelength area array CCD pyrometer's calibration and noise analysis method, constructs temperature measurement calibration model, obtains the parameter that each channel R of CCD camera, G, B needs calibration;Solving the unknown parameter of calibration model, analysis calibration error;Construct noise analysis model, find out the unknown parameter of each channel R of CCD camera in noise analysis model, G, B;Quantitative analysis is carried out to the noise of each channel R of CCD camera, G, B by noise analysis model.The influence caused by each channel R of CCD camera, G, B noise is evaluated.The calibration model of pyrometer in the application is an innovative model, the error of each channel of pyrometer is very small when calibration is carried out under this model;The noise analysis method in the application can quantitatively analyze the noise of pyrometer, the gray value fluctuation caused by each noise can be solved by the method, and the temperature error caused by each noise can be analyzed.

The invention discloses a monitoring device for thermal control automation equipment of a thermal power plant, which comprises a boiler, one end of the boiler is provided with a smoke outlet, a monitoring mechanism is arranged at the upper end of the smoke outlet, a monitoring probe and a dust vibration assembly are arranged in the monitoring mechanism, and the dust vibration assembly is arranged on the monitoring mechanism. According to the technical scheme, dust discharged by the infrared pyrometer in the ascending airflow is guided or intercepted, so that the airflow can bypass the two sides of the mounting plate, and the situation that the dust discharged by the infrared pyrometer moves to one side of the collection end of the infrared pyrometer along with the ascending airflow and is attached to the collection end of the infrared pyrometer, and the accuracy of the detection result of the infrared pyrometer is reduced is avoided. And dust contained in the airflow flowing through the protection plate is intercepted and collected through the dustproof cover, so that the protection effect on the infrared pyrometer is enhanced.

The invention provides an after-rolling cooling method, device and equipment and a medium, and relates to the technical field of hot rolling. The method comprises the following steps: selecting a plurality of sample points on rolled strip steel; determining whether a target sample point passing through a target pyrometer in a target time period exists in the plurality of sample points in the cooling process or not; if the target sample point passes through the target pyrometer in the target time period, determining whether the target sample point needs to be subjected to adaptive calculation or not; if the target sample point needs to be subjected to adaptive calculation, determining a target adaptive coefficient based on the flatness of the target sample point and the attribute of the strip steel; and cooling the strip steel after rolling based on the target adaptive coefficient. According to the post-rolling cooling method, device and equipment and the medium, accurate control over the post-rolling cooling temperature can be achieved.

The application provides a titanium strip coiling temperature control method, and belongs to the technical field of hot rolling method control. The method comprises the following steps: obtaining a target temperature of the titanium strip; after the titanium strip is discharged from a finishing mill, a pyrometer arranged at the outlet of the finishing mill is used to obtain a finishing rolling real-time temperature curve of the titanium strip; the difference between the finishing rolling real-time temperature of the head of the titanium strip and the target temperature of the finishing rolling is used to determine the head allowance length of the titanium strip and the tail allowance length of the titanium strip; a cooling header is started to cool the titanium strip; after the titanium strip reaches a coiling machine, a pyrometer arranged in front of the coiling machine is used to obtain a coiling real-time temperature; and the difference between the coiling real-time temperature and the target temperature of the coiling is used to determine the water pressure of the pressurized water started in front of the coiling machine. The application uses high-temperature rolling to reduce stress concentration in the deformation process; and uses laminar flow cooling control in the continuous rolling mill group to improve the post-rolling cooling speed, and to improve problems such as coarse grains and uneven structure.

The application discloses a hot-rolled strip coiling temperature control method and related equipment, and relates to the technical field of hot rolling. The method comprises the following steps: acquiring temperature data in the width direction of the strip; normalizing and polynomial fitting the temperature data to calculate a center point temperature value of the width of the strip; and adjusting the opening and closing state of a cooling zone valve based on the center point temperature value to control the coiling temperature of the strip. The application can more accurately reflect the actual temperature condition of the strip, effectively overcomes the problem that the traditional point-type pyrometer measurement is easily affected by the shape and surface of the strip and is distorted, and thus improves the mechanical properties and organizational properties of the strip and guarantees the product quality.

The invention discloses a powder metallurgy near-net forming method for a high-purity iron TD4 thin-wall complex component, which belongs to the field of powder metallurgy and comprises the following steps of: 1, activating spherical TD4 iron powder with the Fe content of more than or equal to 99.8 percent and the particle size of 15-45 microns by using low-temperature plasma with the power of 100-300W for 5-15 minutes under the protection of argon; 2, the isostatic pressing graphite die is filled in a vibration mode, a cavity is compensated through the shrinkage rate of 1.2%-2.5%, and a functional gradient punch with a slightly-convex curved surface is arranged; 3, electric field activation pressure auxiliary sintering is conducted, real-time monitoring is conducted through a high-speed camera larger than or equal to 100 fps and a pyrometer, and AI dynamically regulates and controls current and pressure according to curvature variation and the like; and 4, high-purity argon is forcibly cooled at the speed of 50-100 DEG C / min under the pressure maintaining condition, sand blasting and chemical polishing are conducted after demolding, the density and size precision of the component are improved through the method, the thin wall cracking risk is reduced, and the requirement of the high-end field is met.

Embodiments of the present invention relate to a substrate processing system with improved thermal management. The substrate processing system utilizes a pyrometer to measure temperature on the outer surface of a cavity and a controller to adjust operation based on estimated temperatures at various locations on the inner surface of the cavity. The system employs a digital avatar model, possibly based on physics, data, or a hybrid approach, to simulate process operation and generate a temperature map within the cavity. The cavity structure is characterized by a cavity made of a high IR transmission material and includes a cavity conditioning assembly with a variable-speed bellows and a mechanical airflow modulator. The associated method utilizes the digital avatar model and the cavity conditioning assembly to manipulate the system for enhanced temperature control. Furthermore, a device equipped with a mechanical airflow modulator is also provided to guide airflow for effective thermal conditioning, thereby moving it to undesirable window coatings.

The invention provides a turbine blade thermal fatigue test method and device, and relates to the technical field of turbine blade high-temperature durability tests.The test method comprises the following steps that S1, a test piece is installed, and emissivity test position consistency is adjusted; s2, heating the test piece to a set temperature under a gas working condition, and adjusting the emissivity of the pyrometer to enable the temperature of the pyrometer to be consistent with the set temperature; and S3, installing a turbine blade test piece, and carrying out a fatigue test on the thermal barrier coating of the turbine blade. According to the invention, the gas working conditions of the tester can be rapidly switched, the emissivity of the thermal barrier coating of the turbine blade under the test gas condition can be accurately tested, and the cycle period curve of the thermal fatigue test of the turbine blade can be effectively established.

The present application relates to a kind of acid washing plate oxygen spot defect automatic control method, the control method includes the following steps: step 1: when billet is extracted heating furnace, automatically trigger process computer to identify oxygen spot sensitive steel grade, step 2: when oxygen spot sensitive billet is extracted heating furnace, process control computer automatically calls oxygen spot automatic control rule base, and triggers rough rolling each pass automatic speed reduction, step 3: when oxygen spot sensitive billet is rolled, carry out oxygen spot automatic blocking judgment, step 4: quality inspection personnel according to oxygen spot automatic blocking situation, to corresponding steel coil is carried out oxygen spot degradation disposal, avoid flowing into downstream user;The scheme is identified as oxygen spot sensitive steel from plate billet production, billet is extracted after high pyrometer is collected and extracted temperature, calculates temperature difference value, and rough rolling speed is automatically controlled by finished product thickness and temperature difference to reach control rough rolling outlet temperature, reduce oxygen spot occurrence rate.

The utility model relates to a temperature measuring device, and belongs to the field of semiconductor manufacturing. According to the technical scheme, the temperature measuring device comprises a pyrometer probe and a support assembly, the support assembly comprises a basic part, the basic part is connected with a mounting part through a lifting structure, the mounting part is provided with an adjusting part, at least part of the outer surface of the adjusting part is an outer convex spherical surface, and the mounting part is provided with a first inner concave spherical surface; the outer convex spherical surface is attached to the first inner concave spherical surface, a mounting hole is formed in the adjusting part, and the pyrometer probe is mounted in the mounting hole; and a locking structure is also arranged between the mounting piece and the adjusting piece. According to the scheme, on the basis of manual adjustment, the pyrometer probe is installed through the spherical joint, universal adjustment can be conducted on the detection direction in the plane, meanwhile, the spherical surface is matched with the locking structure in a contact mode, damping of spherical surface rotation can be controlled, repeated loosening and locking are avoided, and lifting adjustment between the basic part and the installation part is matched; the adjusting process of the pyrometer probe is greatly simplified, and the pyrometer is more convenient and practical.

The present invention relates to a high-temporal-spatial-resolution temperature measurement device, its calibration method, and its application. By coupling a single-point photoelectric colorimetric pyrometer with a high-speed image sensor, a measurement device for measuring the combustion temperature of micro- / nano-fuel particles is proposed, and the device is applied to the measurement of the combustion temperature of micro- / nano-fuel particles. To ensure more accurate detection results, a calibration method is proposed. By using the same standard source for offline and online calibration of the single-point photoelectric colorimetric pyrometer and the high-speed image sensor camera, the effect of the coupled optical path on the spectral information of the radiation signal is corrected. After calibration, the specific wavelength radiation signal of the object to be measured can be accurately measured. A colorimetric temperature measurement formula is used to obtain a single-point high-temporal-resolution representation and a two-dimensional spatial distribution representation of the combustion temperature of the object to be measured, effectively solving the scientific problem of multi-dimensional high-temporal-spatial-resolution representation of the combustion temperature of micro- / nano-fuel particles.

In an embodiment, an apparatus includes a first pyrometer and a second pyrometer configured to monitor thermal radiation from a first point and a second point on a backside of a wafer, respectively, a first heating source in a first region and a second heating source in a second region of an epitaxial growth chamber, respectively, where a first controller adjusts an output of the first heating source and the second heating source based upon the monitored thermal radiation from the first point and the second point, respectively, a third pyrometer and a fourth pyrometer configured to monitor thermal radiation from a third point and a fourth point on a frontside of the wafer, respectively, where a second controller adjusts a flow rate of one or more precursors injected into the epitaxial growth chamber based upon the monitored thermal radiation from the first, second, third, and fourth points.

The invention provides semiconductor heat treatment equipment, a pyrometer and a temperature and emissivity measurement method. The pyrometer comprises an active emissivity measurement module, a temperature measurement module and a logic circuit, the active emissivity measurement module is used for emitting detection light to a wafer and receiving reflected light of the detection light to calculate the emissivity, and the temperature measurement module is used for receiving thermal radiation light of the wafer to calculate the temperature; the logic circuit is used for receiving signals of the active emissivity measurement module and the temperature measurement module and calculating the emissivity and the temperature of the wafer; wherein the active emissivity measurement module and the temperature measurement module share at least part of light path elements. According to the embodiment of the invention, the temperature and the emissivity of the wafer can be measured at the same time, and the emissivity of the wafer can be measured actively and directly from the room temperature, so that accurate temperature monitoring in the whole process temperature range is realized.

A method of operating a reactor system to provide multi-zone substrate temperature control. The method includes, with a first pyrometer, sensing a temperature of a first zone of a substrate supported in the reactor system, and, with a second pyrometer, sensing a temperature of a second zone of the substrate. The method further includes, with a controller, comparing the temperatures of the first and second zones to setpoint temperatures for the first and second zones and, in response, generating control signals to control heating of the substrate. The method also includes controlling, based on the control signals, operations of a heater assembly operating to heat the substrate.

A substrate processing system according to one embodiment includes a processing chamber and an optical pyrometer assembly for measuring thermal radiation emitted from substantially a portion of a target surface. The optical pyrometer includes a light pipe comprising a core and a hollow sheath surrounding the core. The core and the sheath are concentric with each other. The sheath is formed by a chemical vapor deposition process and includes local protrusions within its hollow interior to maintain the position of the core within the sheath. Specifically, the local protrusions are formed to center at least the distal end of the core within the sheath. The temperature of the target surface is determined from the intensity of a portion of the thermal radiation emitted near at least one wavelength.

A reactor system designed to provide accurate monitoring of wafer temperatures during deposition steps. The reactor system includes a pyrometer mounting assembly supporting and positioning three or more pyrometers (e.g., infrared (IR) pyrometers) relative to the reaction chamber to measure a center wafer temperature and an edge wafer temperature as well as reaction chamber temperature. The pyrometer mounting assembly provides a small spot size or temperature sensing area with the edge pyrometer to accurately measure edge wafer temperatures. A jig assembly, and installation method for each tool setup, is provided for use in achieving accurate alignment of the IR pyrometer sensing spot (and the edge pyrometer) relative to the wafer, when the pyrometer mounting assembly is mounted upon a lamp bank in the reactor system or in tool setup. The wafer edge temperature sensing with the reactor system assembled with proper alignment ensures accurate and repeatable measurement of wafer temperatures.

The invention provides a rolled piece cooling uniformity detection method and device, and relates to the technical field of rolled piece cooling detection.The method comprises the steps that rolled piece information, the rolling speed, signals collected by a hot metal detector and temperature data collected by a plurality of pyrometers are obtained; extracting the temperature distribution characteristics of the rolled piece to obtain a plurality of temperature distribution characteristics; determining an initial value of a dynamic threshold, a historical dynamic threshold, a pre-alarm threshold and a maximum threshold; whether the rolled piece is rolled for the first time or not is judged, if not, the historical dynamic threshold value is determined as a target dynamic threshold value, and if yes, the initial value after secondary updating is determined as the target dynamic threshold value; according to the target dynamic threshold value, the pre-alarm threshold value, the maximum threshold value and the multiple temperature distribution characteristics, the rolled piece cooling uniformity is analyzed, a rolled piece cooling uniformity detection result is generated, and the accuracy and efficiency of rolled piece cooling uniformity detection can be improved.

The invention discloses a cooling device for automobile casting machining, and belongs to the technical field of casting machining, the cooling device for automobile casting machining comprises a point cooling machine and a plurality of cast copper rotors, a display screen and a controller are arranged on the side wall of the point cooling machine, and an electric drive rotating disc is rotationally arranged in the point cooling machine; a plurality of clamping blocks are fixedly arranged on the electric drive rotating disc, a cast copper rotor is clamped in each clamping block, a point cooling pipe is further arranged in the point cooling machine, the point cooling pipe is arranged in an inclined mode and right faces one cast copper rotor, an optical pyrometer is fixedly arranged on the upper portion in the point cooling machine, and the optical pyrometer is arranged on the lower portion of the point cooling machine. And the optical pyrometer is also opposite to the position of the cast copper rotor pointed by the point cooling pipe. According to the point cooling machine, the rotatable electric drive turntable is arranged in the point cooling machine, and the clamping blocks capable of flexibly driving the cast copper rotor are arranged, so that the point cooling pipe can more accurately carry out targeted cooling work on parts with serious hot spots on the cast copper rotor.

The utility model relates to the technical field of heat treatment process, in particular to an adjustable heat treatment equipment base assembly which comprises a main base and two sleeves arranged at the lower end of the main base, connecting pipes are mounted in the sleeves, mounting parts are mounted at one ends of the sleeves, and a plurality of inserting rods are mounted on the upper surfaces of the mounting parts. A sealing ring is arranged on the outer side of the connecting pipe, a first fixing seat is arranged on one side of the sleeve, a second fixing seat is arranged on one side of the first fixing seat, a lifting plate limiting groove is formed in the lower surface of the main base, a plurality of pyrometer mounting grooves are formed in the lower surface of the main base, and a bottom quartz plate is arranged on the upper surface of the main base. According to the heat treatment equipment base, the assembled combined type base design is adopted, the mounting groove bodies are formed in the main base and used for clamping different electrical equipment, and through the sleeve, the pyrometer mounting groove, the lifting plate limiting groove, the gas sealing bolt and the gas injector, the production quality of a heat treatment workpiece is improved, and meanwhile the heat treatment equipment base is higher in functional applicability.

In one implementation, a method of monitoring film thickness on a substrate, comprises: generating light from a light source; collimating the light from the light source to form a collimated beam; reflecting the collimated beam off of a surface to be measured to produce a reflected beam; splitting the reflected beam with a dichroic mirror, wherein the reflected beam splits into a first beam and a second beam; receiving, by a pyrometer, the first beam from the dichroic mirror; receiving, by a spectrometer, the second beam from the dichroic mirror; and analyzing data derived from the pyrometer and the spectrometer to determine one or more characteristics of the surface to be measured.

The invention provides a semiconductor equipment temperature measurement data processing method, which specifically comprises the following steps of S1, acquiring all temperature data in a fixed time interval from the current processing moment to the front as to-be-processed temperature data, and transferring the to-be-processed temperature data to an array; s2, performing size sorting on the temperature data in the array to obtain a temperature data sequence; s3, selecting a preset number of continuous multiple pieces of temperature data located in the middle section of the temperature data sequence; and S4, calculating an arithmetic mean value of the plurality of continuous temperature data, and taking the arithmetic mean value as the temperature control temperature of the current processing moment. The problem that the measured temperature data is abnormal due to the fact that the supporting arm shields the pyrometer can be solved, the smoothness and accuracy of a temperature measurement curve are improved, the stability of a temperature control system is improved, and process deviation or equipment faults caused by abnormal temperature feedback are effectively prevented.