160 results about "Pyrometer" patented technology

A method for coating a substrate, in which emissivity values (UE,n) and reflectance values (UR,n) are determined using pyrometers in order to control the temperature of the substrate. Since the wavelengths of the two pyrometers differ slightly, the raw temperature determined from the emissivity value (UE,n) cannot be optimally compensated for using the reflectance value (UR,n). The angular frequencies (ωE, ωR) of the curves of the two values (UE,n) and (UR,n) oscillating over time t differ slightly from one another, leading to an oscillation of the actual temperature value. To counteract this phenomenon, values modified by a numerical time transformation are used rather than the measured values.

The invention provides a multispectral radiation temperature measurement method and system, and belongs to the field of signal acquisition and processing in an infrared radiation temperature measurement technology. The problems of poor inversion precision and applicability of multispectral radiation temperature measurement are solved. The multispectral radiation temperature measurement method comprises the following steps of: measuring radiation information of the surface of a to-be-measured target by using a multi-wavelength pyrometer; the beam splitting system obtains radiation information of different spectrum channels; photoelectric conversion: converting the optical signal into an electric signal; constructing a target equation and a constraint optimization condition according to the brightness temperature model; carrying out multispectral data processing by utilizing an improved multi-population mixed pigeon inspired optimization algorithm; and the final real temperature and emissivity values are obtained. The device is mainly used for multispectral radiation temperature measurement.

The invention relates to the technical field of semiconductor device preparation, and discloses a semiconductor annealing method and system and a storage medium, and the method comprises the steps: dividing a wafer structure into a central region, a transition region and an edge region, and calculating the central transition cooperative gain and the transition edge cooperative gain between the regions; the infrared pyrometers in all the areas are independently calibrated; sequentially setting PID control parameters of the central area, the transition area and the edge area based on the calibration result; and performing cooperative heating control on the wafer based on the set PID parameters until the annealing treatment is completed. According to the invention, the real-time following of the temperature of each region of the wafer is realized through master-slave cooperative gain control, the temperature uniformity among the regions of the wafer in the annealing process is improved, the problem of temperature lag or overheating of the edge region in the annealing treatment process is effectively solved, and the performance consistency of the semiconductor annealing process is ensured.

The invention discloses a method for calculating the temperature of a rarefied flow field through convective heat flow and the surface temperature of a Gordon meter, and the method is used for measuring the incoming flow temperature of a rarefied fluid wind tunnel, and comprises the steps: installing the Gordon meter and a radiation heat flow meter on a moving motor at a certain interval, and controlling a measurement point through the moving motor, the measuring point is an area covered by the incoming flow direction; after a measuring point is selected, under the same working condition, a moving motor sequentially measures the total heat flow Q (average value) and the pure radiation heat flow qr of the measuring point, the heat flow average value Qc = Q-qr of convective heat transfer is obtained, and an infrared pyrometer is used for measuring the center temperature Tr = 0 of a Gordon meter; and calculating the incoming flow temperature Tf and the convective heat transfer coefficient h of the current measurement point according to the convective heat flow Qc and the constantan foil center temperature Tr = 0 of the Gordon meter. According to the invention, a simple structure is used for replacing a complicated measurement system of a conventional rarefied wind tunnel temperature measurement method, and the problem that in a highly rarefied wind tunnel, the signal of a spectrum temperature measurement method is weak, and the temperature measured by a thermocouple is difficult to reflect the actual temperature of a flow field is solved.

The invention discloses a hot-rolled strip steel coiling temperature control method and related equipment, and relates to the technical field of hot rolling. The method comprises the steps that temperature data of strip steel in the width direction is obtained; performing normalization and polynomial fitting on the temperature data, and calculating a central point temperature value of the strip steel width; and on the basis of the central point temperature value, the opening and closing state of a cooling area valve is adjusted so as to control the coiling temperature of the strip steel. The actual temperature condition of the strip steel can be reflected more accurately, and the problem that a traditional point type pyrometer is prone to being affected by plate shape and surface problems to cause distortion is effectively solved, so that the mechanical property and the structure property of the strip steel are improved, and the product quality is guaranteed.

Embodiments of the disclosure relate to a substrate processing system with improved thermal management. The substrate processing system utilizes a pyrometer for temperature measurement on the outer surface of a chamber body, and a controller to adjust operations based on estimated temperatures at various locations on the inner surface of a chamber body. The system employs a digital twin model, potentially physics-based, data-based, or a hybrid, to simulate process runs and generate temperature mappings inside the chamber body. The chamber structure features a chamber body made from high IR transmission materials and includes a chamber conditioning assembly with variable speed blowers and mechanical flow modulators. The associated method manipulates the system with the digital twin model and the chamber conditioning assembly for enhanced temperature control. Furthermore, an apparatus is presented, equipped with mechanical flow modulators directing air flows for effective thermal regulation, migrating unwanted window coating.

A hot rolling line includes a rougher mill, a finisher mill, an intermediate equipment group, a rougher delivery-side pyrometer, a finisher entry-side pyrometer, and a control device. The intermediate equipment group includes a cooling equipment. The control device includes a set-up calculation device configured to determine a flow amount set-up value of the coolant water in the cooling equipment, a feedforward control device configured to perform feedforward control of a flow amount of the coolant water in the cooling equipment based on the flow amount set-up value, and a learning device configured to calculate a learning value based on a flow amount measured value of the coolant water in the cooling equipment and a finisher entry-side temperature measured value indicating a measured value of the material to be rolled measured by the finisher entry-side pyrometer.

The invention relates to the technical field of ferrous metallurgy high-temperature metering, in particular to a converter continuous temperature measuring method, according to the method, temperature measurement is completed through a continuous temperature measuring device, the continuous temperature measuring device comprises a temperature measuring thermocouple, a thermocouple seating brick and a temperature measuring displayer, a temperature measuring calculation program is arranged in the temperature measuring displayer, and the thermocouple seating brick is arranged in the temperature measuring displayer. The method has the advantages that the advantages of non-contact temperature measurement and contact temperature measurement are combined, measurement defects are made up in a theoretical calculation mode, continuous temperature measurement of the converter is achieved, the temperature measurement efficiency is high, the temperature measurement accuracy is high, and the temperature measurement accuracy is high. And the temperature measuring device is long in service life.

The invention relates to the technical field of radiation temperature measurement, and discloses a multispectral radiation temperature measurement temperature inversion method and device and a storage medium, and the method comprises the steps: constructing a radiation equation set according to N spectrum channels of a multi-wavelength pyrometer; substituting the exponential polynomial model into a radiation equation set, constructing an equation set under different wavelength combinations, and introducing a conjugate gradient least square algorithm to solve and obtain multiple groups of temperature predicted values; modeling the probability density distribution of the temperature prediction value by using an adaptive kernel density estimation method, screening the temperature values of which the normalized probability density is greater than or equal to a preset threshold value, and calculating a weighted average value as a temperature prediction result; according to the method, multiple iterations are carried out through cross validation, the temperature value with the minimum prediction error is finally selected as the final temperature prediction result, the normal spectral emissivity of the sample is inversed according to the final temperature prediction result, and the accuracy of the temperature result can be further improved while the calculation efficiency is guaranteed.

A physical vapor transport system with improved hot zone package alignment includes a first video pyrometer to view a center of a first hot zone at a first end of the hot zone package to measure a first temperature of the hot zone package and provide a first video feed showing instantaneous positions of the hot zone package as it is rotated. A second video pyrometer views a second hot zone viewport at a second end of the hot zone package to measure a second temperature of the center of the hot zone package and provide a second video feed showing instantaneous positions of the hot zone package as it is rotated. A controller processes the temperature measurements and video feeds and adjusts the system components or settings to correct for mis-alignment of the hot zone package. Such adjustments can be made prior to or during a process run while PVT growth of SiC bulk material is occurring.

The invention relates to the technical field of reflecting plates, provides a reflecting plate, a semiconductor processing chamber and semiconductor annealing process equipment, and is used for solving the problem that a temperature measuring through hole and a pyrometer light guide rod are squeezed and collided due to thermal expansion and thermal deviation of the reflecting plate. A first positioning hole and a second positioning hole which are spaced in the direction parallel to the reflecting plate are formed in the reflecting plate; the first positioning hole restrains the translational degree of freedom of the reflecting plate in the first horizontal direction, and the second positioning hole restrains the translational degree of freedom of the reflecting plate in the first horizontal direction and the second horizontal direction; the first positioning hole and the second positioning hole jointly restrain the rotational degree of freedom of the reflecting plate in the vertical direction; at least two temperature measurement through holes are further formed in the reflecting plate, the second positioning hole is formed in a first area which contains the at least two temperature measurement through holes and has the smallest area, the maximum distance between the second positioning hole used for fine positioning and each temperature measurement through hole is minimized, and the thermal offset is remarkably reduced.

An apparatus for thermal ablation testing is provided. The apparatus comprises: a chamber; an optically transparent window in the chamber; a sample holder inside the chamber; a test sample in the sample holder; a number of bare-wire thermocouples connected to the test sample, wherein the thermocouples generate temperature data in the form of voltage; a mass balance inside the chamber, wherein the mass balance is configured to hold the sample holder and dynamically detect changes in mass of the test sample; an external radiant heat source configured to heat the test sample through the window; and a pyrometer directed at the test sample.

Embodiments of the present disclosure generally relate to devices and systems for in situ film growth rate monitoring, and include a system for monitoring film growth on a substrate, the system including a light source, a collimator, a dichroic mirror, and an optical filter, all of which are in optical communication along and along a propagation path. The propagation path is split into a first sub-path and a second sub-path at the dichroic mirror. The first sub-path is directed to a pyrometer and the second sub-path is directed to a spectrometer.

The utility model discloses a low temperature segmented temperature control type meat sausage chopping and mixing device, including both sides are equipped with the chopping and mixing cylinder of swing mechanism, rotatable chopping and mixing cutter is equipped with through the pivot in chopping and mixing cylinder, two synchronous telescopic all -round drive mechanism are fixed on pivot respectively, and two all -round drive mechanism all are located in the clearance between chopping and mixing cutter blade, and the output of one all -round drive mechanism is equipped with pyrometer, and the output of another all -round drive mechanism is equipped with the jet end of cold and hot air -jet mechanism, the constant temperature pipe of spiral arrangement is embedded in chopping and mixing cylinder inner wall, and constant temperature pipe is connected with external cold water source, and the top of chopping and mixing cylinder is equipped with controller, can monitor temperature in chopping and mixing process to the formation constant temperature interval chopping and mixing of timely adjustment, improves the uniformity of temperature control.

This invention relates to the field of conductivity measurement technology, and more particularly to a high-temperature conductivity measurement system and method based on the eddy current method. The system includes a stage, a high-temperature eddy current probe, a moving device, a pyrometer, a laser heating subsystem, and a data measurement subsystem. The stage is used to place the sample to be measured. The high-temperature eddy current probe is used to receive an excitation signal and pick up the measurement signal. The moving device is used to move the high-temperature eddy current probe laterally above the sample. The laser heating subsystem emits a continuous laser in the near-infrared band to heat the sample. The data measurement subsystem generates a set of multi-frequency excitation signals to excite the high-temperature eddy current probe, determines the inductance changes corresponding to the multi-frequency excitation signals measured by the high-temperature eddy current probe at the same position above the sample, and calculates the conductivity of the sample based on the inductance changes. This invention enables accurate, non-contact measurement of the conductivity of materials under high-temperature conditions.

A chamber apparatus includes a chamber body having a substrate support disposed therein to position a substrate thereon during deposition of a layer of material onto the substrate; an upper heater element array supported over the chamber body and configured to heat the substrate; and an upper pyrometer supported over the chamber body and operably coupled to the upper array of heater elements to acquire a substrate temperature measurement of the substrate. A lower array of heater elements is supported below the chamber body to heat the substrate support, and a lower pyrometer is supported below the chamber body and configured to acquire a non-contact substrate support temperature measurement. Semiconductor processing systems, material layer deposition methods, and computer program products are also described.

The present disclosure relates to methods, systems, and apparatus for monitoring temperatures at multiple sites within a substrate processing chamber. A system for processing a substrate includes: a processing chamber including a processing volume; a first window at a first periphery of the processing space; a substrate support member, wherein the substrate support member is arranged in the processing space; and a first multi-wavelength pyrometer configured to measure: a first temperature at a first site proximate the first window; and a second temperature at a second site proximate the substrate support.

The invention relates to the technical field of online measurement of steel-making final temperature predicted by steel-making flame, and discloses a method for predicting steel-making final temperature based on steel-making flame, which comprises the following specific steps of: obtaining oxygen cumulant in a converter according to the variable quantity of oxygen cumulant in the converter; according to the oxygen accumulation amount in the converter, the smelting state in the converter is judged in combination with sonar slagging; on the basis of the heat balance principle, basic contour line temperatures under different furnace entering conditions are obtained in combination with an extended increment model; the temperature of the flame at the converter mouth is obtained through the temperature, detected by the infrared pyrometer, of the particulate matter in the flame at the converter mouth; and smooth operation is conducted on the obtained temperature of the flame at the converter mouth, and the temperature of molten steel corresponding to different flame types is obtained. Temperature data in the furnace can be obtained and analyzed in real time in a non-contact mode, parameter adjustment of the steelmaking process can be guided, and therefore the production efficiency of steelmaking and the quality of molten steel are improved, and it is ensured that the final end point temperature accurately reaches the preset standard.

The application discloses a kind of multi-wavelength area array CCD pyrometer's calibration and noise analysis method, constructs temperature measurement calibration model, obtains the parameter that each channel R of CCD camera, G, B needs calibration;Solving the unknown parameter of calibration model, analysis calibration error;Construct noise analysis model, find out the unknown parameter of each channel R of CCD camera in noise analysis model, G, B;Quantitative analysis is carried out to the noise of each channel R of CCD camera, G, B by noise analysis model.The influence caused by each channel R of CCD camera, G, B noise is evaluated.The calibration model of pyrometer in the application is an innovative model, the error of each channel of pyrometer is very small when calibration is carried out under this model;The noise analysis method in the application can quantitatively analyze the noise of pyrometer, the gray value fluctuation caused by each noise can be solved by the method, and the temperature error caused by each noise can be analyzed.

The invention discloses a monitoring device for thermal control automation equipment of a thermal power plant, which comprises a boiler, one end of the boiler is provided with a smoke outlet, a monitoring mechanism is arranged at the upper end of the smoke outlet, a monitoring probe and a dust vibration assembly are arranged in the monitoring mechanism, and the dust vibration assembly is arranged on the monitoring mechanism. According to the technical scheme, dust discharged by the infrared pyrometer in the ascending airflow is guided or intercepted, so that the airflow can bypass the two sides of the mounting plate, and the situation that the dust discharged by the infrared pyrometer moves to one side of the collection end of the infrared pyrometer along with the ascending airflow and is attached to the collection end of the infrared pyrometer, and the accuracy of the detection result of the infrared pyrometer is reduced is avoided. And dust contained in the airflow flowing through the protection plate is intercepted and collected through the dustproof cover, so that the protection effect on the infrared pyrometer is enhanced.

The invention provides an after-rolling cooling method, device and equipment and a medium, and relates to the technical field of hot rolling. The method comprises the following steps: selecting a plurality of sample points on rolled strip steel; determining whether a target sample point passing through a target pyrometer in a target time period exists in the plurality of sample points in the cooling process or not; if the target sample point passes through the target pyrometer in the target time period, determining whether the target sample point needs to be subjected to adaptive calculation or not; if the target sample point needs to be subjected to adaptive calculation, determining a target adaptive coefficient based on the flatness of the target sample point and the attribute of the strip steel; and cooling the strip steel after rolling based on the target adaptive coefficient. According to the post-rolling cooling method, device and equipment and the medium, accurate control over the post-rolling cooling temperature can be achieved.

The application provides a titanium strip coiling temperature control method, and belongs to the technical field of hot rolling method control. The method comprises the following steps: obtaining a target temperature of the titanium strip; after the titanium strip is discharged from a finishing mill, a pyrometer arranged at the outlet of the finishing mill is used to obtain a finishing rolling real-time temperature curve of the titanium strip; the difference between the finishing rolling real-time temperature of the head of the titanium strip and the target temperature of the finishing rolling is used to determine the head allowance length of the titanium strip and the tail allowance length of the titanium strip; a cooling header is started to cool the titanium strip; after the titanium strip reaches a coiling machine, a pyrometer arranged in front of the coiling machine is used to obtain a coiling real-time temperature; and the difference between the coiling real-time temperature and the target temperature of the coiling is used to determine the water pressure of the pressurized water started in front of the coiling machine. The application uses high-temperature rolling to reduce stress concentration in the deformation process; and uses laminar flow cooling control in the continuous rolling mill group to improve the post-rolling cooling speed, and to improve problems such as coarse grains and uneven structure.

The application discloses a hot-rolled strip coiling temperature control method and related equipment, and relates to the technical field of hot rolling. The method comprises the following steps: acquiring temperature data in the width direction of the strip; normalizing and polynomial fitting the temperature data to calculate a center point temperature value of the width of the strip; and adjusting the opening and closing state of a cooling zone valve based on the center point temperature value to control the coiling temperature of the strip. The application can more accurately reflect the actual temperature condition of the strip, effectively overcomes the problem that the traditional point-type pyrometer measurement is easily affected by the shape and surface of the strip and is distorted, and thus improves the mechanical properties and organizational properties of the strip and guarantees the product quality.

The invention discloses a powder metallurgy near-net forming method for a high-purity iron TD4 thin-wall complex component, which belongs to the field of powder metallurgy and comprises the following steps of: 1, activating spherical TD4 iron powder with the Fe content of more than or equal to 99.8 percent and the particle size of 15-45 microns by using low-temperature plasma with the power of 100-300W for 5-15 minutes under the protection of argon; 2, the isostatic pressing graphite die is filled in a vibration mode, a cavity is compensated through the shrinkage rate of 1.2%-2.5%, and a functional gradient punch with a slightly-convex curved surface is arranged; 3, electric field activation pressure auxiliary sintering is conducted, real-time monitoring is conducted through a high-speed camera larger than or equal to 100 fps and a pyrometer, and AI dynamically regulates and controls current and pressure according to curvature variation and the like; and 4, high-purity argon is forcibly cooled at the speed of 50-100 DEG C / min under the pressure maintaining condition, sand blasting and chemical polishing are conducted after demolding, the density and size precision of the component are improved through the method, the thin wall cracking risk is reduced, and the requirement of the high-end field is met.

Embodiments of the present invention relate to a substrate processing system with improved thermal management. The substrate processing system utilizes a pyrometer to measure temperature on the outer surface of a cavity and a controller to adjust operation based on estimated temperatures at various locations on the inner surface of the cavity. The system employs a digital avatar model, possibly based on physics, data, or a hybrid approach, to simulate process operation and generate a temperature map within the cavity. The cavity structure is characterized by a cavity made of a high IR transmission material and includes a cavity conditioning assembly with a variable-speed bellows and a mechanical airflow modulator. The associated method utilizes the digital avatar model and the cavity conditioning assembly to manipulate the system for enhanced temperature control. Furthermore, a device equipped with a mechanical airflow modulator is also provided to guide airflow for effective thermal conditioning, thereby moving it to undesirable window coatings.

The invention provides a turbine blade thermal fatigue test method and device, and relates to the technical field of turbine blade high-temperature durability tests.The test method comprises the following steps that S1, a test piece is installed, and emissivity test position consistency is adjusted; s2, heating the test piece to a set temperature under a gas working condition, and adjusting the emissivity of the pyrometer to enable the temperature of the pyrometer to be consistent with the set temperature; and S3, installing a turbine blade test piece, and carrying out a fatigue test on the thermal barrier coating of the turbine blade. According to the invention, the gas working conditions of the tester can be rapidly switched, the emissivity of the thermal barrier coating of the turbine blade under the test gas condition can be accurately tested, and the cycle period curve of the thermal fatigue test of the turbine blade can be effectively established.

The present application relates to a kind of acid washing plate oxygen spot defect automatic control method, the control method includes the following steps: step 1: when billet is extracted heating furnace, automatically trigger process computer to identify oxygen spot sensitive steel grade, step 2: when oxygen spot sensitive billet is extracted heating furnace, process control computer automatically calls oxygen spot automatic control rule base, and triggers rough rolling each pass automatic speed reduction, step 3: when oxygen spot sensitive billet is rolled, carry out oxygen spot automatic blocking judgment, step 4: quality inspection personnel according to oxygen spot automatic blocking situation, to corresponding steel coil is carried out oxygen spot degradation disposal, avoid flowing into downstream user;The scheme is identified as oxygen spot sensitive steel from plate billet production, billet is extracted after high pyrometer is collected and extracted temperature, calculates temperature difference value, and rough rolling speed is automatically controlled by finished product thickness and temperature difference to reach control rough rolling outlet temperature, reduce oxygen spot occurrence rate.

The utility model relates to a temperature measuring device, and belongs to the field of semiconductor manufacturing. According to the technical scheme, the temperature measuring device comprises a pyrometer probe and a support assembly, the support assembly comprises a basic part, the basic part is connected with a mounting part through a lifting structure, the mounting part is provided with an adjusting part, at least part of the outer surface of the adjusting part is an outer convex spherical surface, and the mounting part is provided with a first inner concave spherical surface; the outer convex spherical surface is attached to the first inner concave spherical surface, a mounting hole is formed in the adjusting part, and the pyrometer probe is mounted in the mounting hole; and a locking structure is also arranged between the mounting piece and the adjusting piece. According to the scheme, on the basis of manual adjustment, the pyrometer probe is installed through the spherical joint, universal adjustment can be conducted on the detection direction in the plane, meanwhile, the spherical surface is matched with the locking structure in a contact mode, damping of spherical surface rotation can be controlled, repeated loosening and locking are avoided, and lifting adjustment between the basic part and the installation part is matched; the adjusting process of the pyrometer probe is greatly simplified, and the pyrometer is more convenient and practical.

The present invention relates to a high-temporal-spatial-resolution temperature measurement device, its calibration method, and its application. By coupling a single-point photoelectric colorimetric pyrometer with a high-speed image sensor, a measurement device for measuring the combustion temperature of micro- / nano-fuel particles is proposed, and the device is applied to the measurement of the combustion temperature of micro- / nano-fuel particles. To ensure more accurate detection results, a calibration method is proposed. By using the same standard source for offline and online calibration of the single-point photoelectric colorimetric pyrometer and the high-speed image sensor camera, the effect of the coupled optical path on the spectral information of the radiation signal is corrected. After calibration, the specific wavelength radiation signal of the object to be measured can be accurately measured. A colorimetric temperature measurement formula is used to obtain a single-point high-temporal-resolution representation and a two-dimensional spatial distribution representation of the combustion temperature of the object to be measured, effectively solving the scientific problem of multi-dimensional high-temporal-spatial-resolution representation of the combustion temperature of micro- / nano-fuel particles.

In an embodiment, an apparatus includes a first pyrometer and a second pyrometer configured to monitor thermal radiation from a first point and a second point on a backside of a wafer, respectively, a first heating source in a first region and a second heating source in a second region of an epitaxial growth chamber, respectively, where a first controller adjusts an output of the first heating source and the second heating source based upon the monitored thermal radiation from the first point and the second point, respectively, a third pyrometer and a fourth pyrometer configured to monitor thermal radiation from a third point and a fourth point on a frontside of the wafer, respectively, where a second controller adjusts a flow rate of one or more precursors injected into the epitaxial growth chamber based upon the monitored thermal radiation from the first, second, third, and fourth points.