203 results about "Pyrometer" patented technology

A method for coating a substrate, in which emissivity values (UE,n) and reflectance values (UR,n) are determined using pyrometers in order to control the temperature of the substrate. Since the wavelengths of the two pyrometers differ slightly, the raw temperature determined from the emissivity value (UE,n) cannot be optimally compensated for using the reflectance value (UR,n). The angular frequencies (ωE, ωR) of the curves of the two values (UE,n) and (UR,n) oscillating over time t differ slightly from one another, leading to an oscillation of the actual temperature value. To counteract this phenomenon, values modified by a numerical time transformation are used rather than the measured values.

The invention provides a multispectral radiation temperature measurement method and system, and belongs to the field of signal acquisition and processing in an infrared radiation temperature measurement technology. The problems of poor inversion precision and applicability of multispectral radiation temperature measurement are solved. The multispectral radiation temperature measurement method comprises the following steps of: measuring radiation information of the surface of a to-be-measured target by using a multi-wavelength pyrometer; the beam splitting system obtains radiation information of different spectrum channels; photoelectric conversion: converting the optical signal into an electric signal; constructing a target equation and a constraint optimization condition according to the brightness temperature model; carrying out multispectral data processing by utilizing an improved multi-population mixed pigeon inspired optimization algorithm; and the final real temperature and emissivity values are obtained. The device is mainly used for multispectral radiation temperature measurement.

A semiconductor processing system includes a chamber body, a substrate support, a pyrometer, and a controller. The substrate support is arranged within an interior of the chamber body and is supported for rotation about a rotation axis. The pyrometer is supported above the chamber body, is radially offset from the rotation axis, and is optically coupled to the interior of the chamber body. The controller is operably connected to the substrate support and is disposed in communication with the pyrometer. The controller is further responsive to instructions recorded on a non-transitory machine-readable memory to seat a substrate on the substrate support, acquire a temperature measurement acquired using electromagnetic radiation emitted by the substrate, and determine decentering of the substrate relative to the rotation axis using the electromagnetic radiation received at the pyrometer. Material layer deposition methods and computer program products are also described.

A physical vapor transport system with improved hot zone package alignment includes a first video pyrometer to view a center of a first hot zone at a first end of the hot zone package to measure a first temperature of the hot zone package and provide a first video feed showing instantaneous positions of the hot zone package as it is rotated. A second video pyrometer views a second hot zone viewport at a second end of the hot zone package to measure a second temperature of the center of the hot zone package and provide a second video feed showing instantaneous positions of the hot zone package as it is rotated. A controller processes the temperature measurements and video feeds and adjusts the system components or settings to correct for mis-alignment of the hot zone package.

The invention relates to the technical field of semiconductor device preparation, and discloses a semiconductor annealing method and system and a storage medium, and the method comprises the steps: dividing a wafer structure into a central region, a transition region and an edge region, and calculating the central transition cooperative gain and the transition edge cooperative gain between the regions; the infrared pyrometers in all the areas are independently calibrated; sequentially setting PID control parameters of the central area, the transition area and the edge area based on the calibration result; and performing cooperative heating control on the wafer based on the set PID parameters until the annealing treatment is completed. According to the invention, the real-time following of the temperature of each region of the wafer is realized through master-slave cooperative gain control, the temperature uniformity among the regions of the wafer in the annealing process is improved, the problem of temperature lag or overheating of the edge region in the annealing treatment process is effectively solved, and the performance consistency of the semiconductor annealing process is ensured.

The invention discloses a temperature control method, an annealing furnace temperature control system, a computer storage medium and a program product, the temperature control method is applied to an annealing furnace, a plurality of process sections are arranged in the annealing furnace, each process section comprises a plurality of control areas, and each control area is provided with a thermocouple; a pyrometer is arranged at the outlet of each process section; the temperature control method comprises the steps that it is determined that the movement speed of strip steel is decreased and exceeds a set speed threshold value within set time; the actual strip steel temperature, measured by each pyrometer, of the outlet of the corresponding process section is obtained; increasing and decreasing the target temperature of each control area according to the actual temperature of the strip steel and the target temperature of the strip steel at the outlet of each process section; acquiring the actual temperature of the control area measured by the thermocouple; and correcting the actual temperature of the control area according to the actual temperature of the control area and the corresponding target temperature of the control area. Abnormal rise of the furnace temperature caused by rapid speed reduction of the strip steel can be avoided, so that the influence on the production quality of the strip steel is reduced.

The invention discloses a method for calculating the temperature of a rarefied flow field through convective heat flow and the surface temperature of a Gordon meter, and the method is used for measuring the incoming flow temperature of a rarefied fluid wind tunnel, and comprises the steps: installing the Gordon meter and a radiation heat flow meter on a moving motor at a certain interval, and controlling a measurement point through the moving motor, the measuring point is an area covered by the incoming flow direction; after a measuring point is selected, under the same working condition, a moving motor sequentially measures the total heat flow Q (average value) and the pure radiation heat flow qr of the measuring point, the heat flow average value Qc = Q-qr of convective heat transfer is obtained, and an infrared pyrometer is used for measuring the center temperature Tr = 0 of a Gordon meter; and calculating the incoming flow temperature Tf and the convective heat transfer coefficient h of the current measurement point according to the convective heat flow Qc and the constantan foil center temperature Tr = 0 of the Gordon meter. According to the invention, a simple structure is used for replacing a complicated measurement system of a conventional rarefied wind tunnel temperature measurement method, and the problem that in a highly rarefied wind tunnel, the signal of a spectrum temperature measurement method is weak, and the temperature measured by a thermocouple is difficult to reflect the actual temperature of a flow field is solved.

To solve the problem of a radiation pyrometer that its measurable temperature range is limited because the measurable radiance range of a radiation temperature measurement sensor for measuring the radiance of radiant light is limited.MEANS FOR SOLVING THE PROBLEM: Provided is a radiant light temperature measuring device that uses a liquid crystal shutter and / or a rotatable polarizing plate in order to adjust the radiant flux density of radiant light radiated from a temperature measurement object so as to increase or decrease at a discretionary ratio, selects a conversion function held in correspondence to a ratio at which radiant flux density is adjusted, and calculates a temperature on the basis of the selected conversion function and the measured radiance.SELECTED DRAWING: Figure 1

The invention discloses a hot-rolled strip steel coiling temperature control method and related equipment, and relates to the technical field of hot rolling. The method comprises the steps that temperature data of strip steel in the width direction is obtained; performing normalization and polynomial fitting on the temperature data, and calculating a central point temperature value of the strip steel width; and on the basis of the central point temperature value, the opening and closing state of a cooling area valve is adjusted so as to control the coiling temperature of the strip steel. The actual temperature condition of the strip steel can be reflected more accurately, and the problem that a traditional point type pyrometer is prone to being affected by plate shape and surface problems to cause distortion is effectively solved, so that the mechanical property and the structure property of the strip steel are improved, and the product quality is guaranteed.

The invention provides a follow-up electromagnetic induction heating-assisted laser directional energy deposition method, which is characterized in that an induction coil and a laser beam jointly perform laser energy deposition and synchronous induction heating coupling action on a substrate, and a pyrometer monitors the temperature of the substrate under the heating coupling action in real time. Wherein the nozzle arranged below the cylindrical optical system and used for feeding and the induction coil are both arranged in the Z-axis direction, meanwhile, according to real-time temperature data collected by the pyrometer, the temperature feedback circuit controls the lead screw to do reciprocating motion, and then the induction coil is driven to move up and down in the Z direction so as to control the distance between the induction coil and the substrate; the coupling effect of laser energy deposition and synchronous induction heating is controlled, so that accurate control over thermal field distribution in the machining process is guaranteed, the temperature gradient of a molten pool and the periphery and the cooling rate of the periphery of the molten pool are controlled, and then thermal stress in the printing process and residual stress in the cooling process are controlled; and finally, the effect of inhibiting the deformation of the printing component is achieved.

Embodiments of the disclosure relate to a substrate processing system with improved thermal management. The substrate processing system utilizes a pyrometer for temperature measurement on the outer surface of a chamber body, and a controller to adjust operations based on estimated temperatures at various locations on the inner surface of a chamber body. The system employs a digital twin model, potentially physics-based, data-based, or a hybrid, to simulate process runs and generate temperature mappings inside the chamber body. The chamber structure features a chamber body made from high IR transmission materials and includes a chamber conditioning assembly with variable speed blowers and mechanical flow modulators. The associated method manipulates the system with the digital twin model and the chamber conditioning assembly for enhanced temperature control. Furthermore, an apparatus is presented, equipped with mechanical flow modulators directing air flows for effective thermal regulation, migrating unwanted window coating.

A hot rolling line includes a rougher mill, a finisher mill, an intermediate equipment group, a rougher delivery-side pyrometer, a finisher entry-side pyrometer, and a control device. The intermediate equipment group includes a cooling equipment. The control device includes a set-up calculation device configured to determine a flow amount set-up value of the coolant water in the cooling equipment, a feedforward control device configured to perform feedforward control of a flow amount of the coolant water in the cooling equipment based on the flow amount set-up value, and a learning device configured to calculate a learning value based on a flow amount measured value of the coolant water in the cooling equipment and a finisher entry-side temperature measured value indicating a measured value of the material to be rolled measured by the finisher entry-side pyrometer.

The invention relates to the field of crystal preparation, and discloses a silicon carbide furnace lower transmission structure and a silicon carbide furnace. The lower transmission structure of the silicon carbide furnace comprises a bracket, a linear lifting mechanism, a mounting frame, a magnetofluid sealing element, a switching water nozzle, a slip ring structure, a crucible shaft, a rotating mechanism and a pyrometer, the linear lifting mechanism is in transmission connection with the mounting frame; the crucible shaft is rotationally connected with the mounting frame through the magnetic fluid sealing piece; the crucible shaft is provided with a temperature measuring channel and a cooling channel which extend in the axial direction. The crucible shaft comprises a first end and a second end which are opposite to each other, and the temperature measuring channel penetrates through the crucible shaft from the first end to the second end; the crucible shaft penetrates through the adapter water nozzle and the slip ring structure; the rotating mechanism is fixedly arranged on the mounting frame and is in transmission connection with the crucible shaft; the pyrometer is fixedly arranged at the second end, and the collection direction of the pyrometer faces the temperature measurement channel; the slip ring structure is communicated with the cooling channel through the adapter water nozzle; the slip ring structure is further electrically connected with the pyrometer and used for providing power for the pyrometer.

The invention relates to the technical field of ferrous metallurgy high-temperature metering, in particular to a converter continuous temperature measuring method, according to the method, temperature measurement is completed through a continuous temperature measuring device, the continuous temperature measuring device comprises a temperature measuring thermocouple, a thermocouple seating brick and a temperature measuring displayer, a temperature measuring calculation program is arranged in the temperature measuring displayer, and the thermocouple seating brick is arranged in the temperature measuring displayer. The method has the advantages that the advantages of non-contact temperature measurement and contact temperature measurement are combined, measurement defects are made up in a theoretical calculation mode, continuous temperature measurement of the converter is achieved, the temperature measurement efficiency is high, the temperature measurement accuracy is high, and the temperature measurement accuracy is high. And the temperature measuring device is long in service life.

The invention relates to the technical field of radiation temperature measurement, and discloses a multispectral radiation temperature measurement temperature inversion method and device and a storage medium, and the method comprises the steps: constructing a radiation equation set according to N spectrum channels of a multi-wavelength pyrometer; substituting the exponential polynomial model into a radiation equation set, constructing an equation set under different wavelength combinations, and introducing a conjugate gradient least square algorithm to solve and obtain multiple groups of temperature predicted values; modeling the probability density distribution of the temperature prediction value by using an adaptive kernel density estimation method, screening the temperature values of which the normalized probability density is greater than or equal to a preset threshold value, and calculating a weighted average value as a temperature prediction result; according to the method, multiple iterations are carried out through cross validation, the temperature value with the minimum prediction error is finally selected as the final temperature prediction result, the normal spectral emissivity of the sample is inversed according to the final temperature prediction result, and the accuracy of the temperature result can be further improved while the calculation efficiency is guaranteed.

A physical vapor transport system with improved hot zone package alignment includes a first video pyrometer to view a center of a first hot zone at a first end of the hot zone package to measure a first temperature of the hot zone package and provide a first video feed showing instantaneous positions of the hot zone package as it is rotated. A second video pyrometer views a second hot zone viewport at a second end of the hot zone package to measure a second temperature of the center of the hot zone package and provide a second video feed showing instantaneous positions of the hot zone package as it is rotated. A controller processes the temperature measurements and video feeds and adjusts the system components or settings to correct for mis-alignment of the hot zone package. Such adjustments can be made prior to or during a process run while PVT growth of SiC bulk material is occurring.

The invention relates to the technical field of reflecting plates, provides a reflecting plate, a semiconductor processing chamber and semiconductor annealing process equipment, and is used for solving the problem that a temperature measuring through hole and a pyrometer light guide rod are squeezed and collided due to thermal expansion and thermal deviation of the reflecting plate. A first positioning hole and a second positioning hole which are spaced in the direction parallel to the reflecting plate are formed in the reflecting plate; the first positioning hole restrains the translational degree of freedom of the reflecting plate in the first horizontal direction, and the second positioning hole restrains the translational degree of freedom of the reflecting plate in the first horizontal direction and the second horizontal direction; the first positioning hole and the second positioning hole jointly restrain the rotational degree of freedom of the reflecting plate in the vertical direction; at least two temperature measurement through holes are further formed in the reflecting plate, the second positioning hole is formed in a first area which contains the at least two temperature measurement through holes and has the smallest area, the maximum distance between the second positioning hole used for fine positioning and each temperature measurement through hole is minimized, and the thermal offset is remarkably reduced.

An apparatus for thermal ablation testing is provided. The apparatus comprises: a chamber; an optically transparent window in the chamber; a sample holder inside the chamber; a test sample in the sample holder; a number of bare-wire thermocouples connected to the test sample, wherein the thermocouples generate temperature data in the form of voltage; a mass balance inside the chamber, wherein the mass balance is configured to hold the sample holder and dynamically detect changes in mass of the test sample; an external radiant heat source configured to heat the test sample through the window; and a pyrometer directed at the test sample.

Embodiments of the present disclosure generally relate to devices and systems for in situ film growth rate monitoring, and include a system for monitoring film growth on a substrate, the system including a light source, a collimator, a dichroic mirror, and an optical filter, all of which are in optical communication along and along a propagation path. The propagation path is split into a first sub-path and a second sub-path at the dichroic mirror. The first sub-path is directed to a pyrometer and the second sub-path is directed to a spectrometer.

The utility model discloses a low temperature segmented temperature control type meat sausage chopping and mixing device, including both sides are equipped with the chopping and mixing cylinder of swing mechanism, rotatable chopping and mixing cutter is equipped with through the pivot in chopping and mixing cylinder, two synchronous telescopic all -round drive mechanism are fixed on pivot respectively, and two all -round drive mechanism all are located in the clearance between chopping and mixing cutter blade, and the output of one all -round drive mechanism is equipped with pyrometer, and the output of another all -round drive mechanism is equipped with the jet end of cold and hot air -jet mechanism, the constant temperature pipe of spiral arrangement is embedded in chopping and mixing cylinder inner wall, and constant temperature pipe is connected with external cold water source, and the top of chopping and mixing cylinder is equipped with controller, can monitor temperature in chopping and mixing process to the formation constant temperature interval chopping and mixing of timely adjustment, improves the uniformity of temperature control.

This invention relates to the field of conductivity measurement technology, and more particularly to a high-temperature conductivity measurement system and method based on the eddy current method. The system includes a stage, a high-temperature eddy current probe, a moving device, a pyrometer, a laser heating subsystem, and a data measurement subsystem. The stage is used to place the sample to be measured. The high-temperature eddy current probe is used to receive an excitation signal and pick up the measurement signal. The moving device is used to move the high-temperature eddy current probe laterally above the sample. The laser heating subsystem emits a continuous laser in the near-infrared band to heat the sample. The data measurement subsystem generates a set of multi-frequency excitation signals to excite the high-temperature eddy current probe, determines the inductance changes corresponding to the multi-frequency excitation signals measured by the high-temperature eddy current probe at the same position above the sample, and calculates the conductivity of the sample based on the inductance changes. This invention enables accurate, non-contact measurement of the conductivity of materials under high-temperature conditions.

A chamber apparatus includes a chamber body having a substrate support disposed therein to position a substrate thereon during deposition of a layer of material onto the substrate; an upper heater element array supported over the chamber body and configured to heat the substrate; and an upper pyrometer supported over the chamber body and operably coupled to the upper array of heater elements to acquire a substrate temperature measurement of the substrate. A lower array of heater elements is supported below the chamber body to heat the substrate support, and a lower pyrometer is supported below the chamber body and configured to acquire a non-contact substrate support temperature measurement. Semiconductor processing systems, material layer deposition methods, and computer program products are also described.

The present disclosure relates to methods, systems, and apparatus for monitoring temperatures at multiple sites within a substrate processing chamber. A system for processing a substrate includes: a processing chamber including a processing volume; a first window at a first periphery of the processing space; a substrate support member, wherein the substrate support member is arranged in the processing space; and a first multi-wavelength pyrometer configured to measure: a first temperature at a first site proximate the first window; and a second temperature at a second site proximate the substrate support.

The invention relates to the technical field of online measurement of steel-making final temperature predicted by steel-making flame, and discloses a method for predicting steel-making final temperature based on steel-making flame, which comprises the following specific steps of: obtaining oxygen cumulant in a converter according to the variable quantity of oxygen cumulant in the converter; according to the oxygen accumulation amount in the converter, the smelting state in the converter is judged in combination with sonar slagging; on the basis of the heat balance principle, basic contour line temperatures under different furnace entering conditions are obtained in combination with an extended increment model; the temperature of the flame at the converter mouth is obtained through the temperature, detected by the infrared pyrometer, of the particulate matter in the flame at the converter mouth; and smooth operation is conducted on the obtained temperature of the flame at the converter mouth, and the temperature of molten steel corresponding to different flame types is obtained. Temperature data in the furnace can be obtained and analyzed in real time in a non-contact mode, parameter adjustment of the steelmaking process can be guided, and therefore the production efficiency of steelmaking and the quality of molten steel are improved, and it is ensured that the final end point temperature accurately reaches the preset standard.

The application discloses a kind of multi-wavelength area array CCD pyrometer's calibration and noise analysis method, constructs temperature measurement calibration model, obtains the parameter that each channel R of CCD camera, G, B needs calibration;Solving the unknown parameter of calibration model, analysis calibration error;Construct noise analysis model, find out the unknown parameter of each channel R of CCD camera in noise analysis model, G, B;Quantitative analysis is carried out to the noise of each channel R of CCD camera, G, B by noise analysis model.The influence caused by each channel R of CCD camera, G, B noise is evaluated.The calibration model of pyrometer in the application is an innovative model, the error of each channel of pyrometer is very small when calibration is carried out under this model;The noise analysis method in the application can quantitatively analyze the noise of pyrometer, the gray value fluctuation caused by each noise can be solved by the method, and the temperature error caused by each noise can be analyzed.

The invention discloses a monitoring device for thermal control automation equipment of a thermal power plant, which comprises a boiler, one end of the boiler is provided with a smoke outlet, a monitoring mechanism is arranged at the upper end of the smoke outlet, a monitoring probe and a dust vibration assembly are arranged in the monitoring mechanism, and the dust vibration assembly is arranged on the monitoring mechanism. According to the technical scheme, dust discharged by the infrared pyrometer in the ascending airflow is guided or intercepted, so that the airflow can bypass the two sides of the mounting plate, and the situation that the dust discharged by the infrared pyrometer moves to one side of the collection end of the infrared pyrometer along with the ascending airflow and is attached to the collection end of the infrared pyrometer, and the accuracy of the detection result of the infrared pyrometer is reduced is avoided. And dust contained in the airflow flowing through the protection plate is intercepted and collected through the dustproof cover, so that the protection effect on the infrared pyrometer is enhanced.

The invention provides an after-rolling cooling method, device and equipment and a medium, and relates to the technical field of hot rolling. The method comprises the following steps: selecting a plurality of sample points on rolled strip steel; determining whether a target sample point passing through a target pyrometer in a target time period exists in the plurality of sample points in the cooling process or not; if the target sample point passes through the target pyrometer in the target time period, determining whether the target sample point needs to be subjected to adaptive calculation or not; if the target sample point needs to be subjected to adaptive calculation, determining a target adaptive coefficient based on the flatness of the target sample point and the attribute of the strip steel; and cooling the strip steel after rolling based on the target adaptive coefficient. According to the post-rolling cooling method, device and equipment and the medium, accurate control over the post-rolling cooling temperature can be achieved.

The application provides a titanium strip coiling temperature control method, and belongs to the technical field of hot rolling method control. The method comprises the following steps: obtaining a target temperature of the titanium strip; after the titanium strip is discharged from a finishing mill, a pyrometer arranged at the outlet of the finishing mill is used to obtain a finishing rolling real-time temperature curve of the titanium strip; the difference between the finishing rolling real-time temperature of the head of the titanium strip and the target temperature of the finishing rolling is used to determine the head allowance length of the titanium strip and the tail allowance length of the titanium strip; a cooling header is started to cool the titanium strip; after the titanium strip reaches a coiling machine, a pyrometer arranged in front of the coiling machine is used to obtain a coiling real-time temperature; and the difference between the coiling real-time temperature and the target temperature of the coiling is used to determine the water pressure of the pressurized water started in front of the coiling machine. The application uses high-temperature rolling to reduce stress concentration in the deformation process; and uses laminar flow cooling control in the continuous rolling mill group to improve the post-rolling cooling speed, and to improve problems such as coarse grains and uneven structure.

The application discloses a hot-rolled strip coiling temperature control method and related equipment, and relates to the technical field of hot rolling. The method comprises the following steps: acquiring temperature data in the width direction of the strip; normalizing and polynomial fitting the temperature data to calculate a center point temperature value of the width of the strip; and adjusting the opening and closing state of a cooling zone valve based on the center point temperature value to control the coiling temperature of the strip. The application can more accurately reflect the actual temperature condition of the strip, effectively overcomes the problem that the traditional point-type pyrometer measurement is easily affected by the shape and surface of the strip and is distorted, and thus improves the mechanical properties and organizational properties of the strip and guarantees the product quality.

The invention discloses a powder metallurgy near-net forming method for a high-purity iron TD4 thin-wall complex component, which belongs to the field of powder metallurgy and comprises the following steps of: 1, activating spherical TD4 iron powder with the Fe content of more than or equal to 99.8 percent and the particle size of 15-45 microns by using low-temperature plasma with the power of 100-300W for 5-15 minutes under the protection of argon; 2, the isostatic pressing graphite die is filled in a vibration mode, a cavity is compensated through the shrinkage rate of 1.2%-2.5%, and a functional gradient punch with a slightly-convex curved surface is arranged; 3, electric field activation pressure auxiliary sintering is conducted, real-time monitoring is conducted through a high-speed camera larger than or equal to 100 fps and a pyrometer, and AI dynamically regulates and controls current and pressure according to curvature variation and the like; and 4, high-purity argon is forcibly cooled at the speed of 50-100 DEG C / min under the pressure maintaining condition, sand blasting and chemical polishing are conducted after demolding, the density and size precision of the component are improved through the method, the thin wall cracking risk is reduced, and the requirement of the high-end field is met.