2233 results about "Beam splitter" patented technology

The invention provides an optical measurement method and device, and belongs to the technical field of optical measurement, and the method comprises the steps: starting a light source with the wavelength changing dynamically to generate a sweep frequency optical signal; dividing the light into a measuring beam and a reference beam by using a light splitting component, guiding the measuring beam to irradiate a target to be measured and then return along the same path, and guiding the reference beam to enter an optical component of which the optical path changes along with the wavelength and then return; based on the low-coherence characteristic of the light source, when the optical paths of the two light beams meet the interference condition, detecting an interference signal by using a sensing component; the optical path difference is determined according to time information in the interference signal, and the thickness of each reflection interface is calculated by combining refractive index data of a target to be measured. Different from the traditional low-coherence interference measurement which depends on a motor and the like to control the movement of a reflector, the method avoids the limitation of mechanical driving on the measurement frequency, and achieves the high-speed optical thickness measurement.

The invention discloses a thoracoscope minimally invasive cardiac surgery navigation system based on multi-modal image fusion, and the system comprises the steps: constructing a 5D heart digital twin containing an anatomical structure, a soft tissue boundary, metabolic activity and electrophysiological information through fusing preoperative CT, MRI, PET and intraoperative ultrasonic images; real-time dynamic registration is realized by using an electrocardio gating driven biomechanical model; superposing the multi-color coding navigation information to the visual field of the thoracoscope through a wavelength selection type spectroscope; a dynamic risk scoring model is constructed based on the distance, the speed and the tissue vulnerability, and three-level grading intervention is triggered; a miniature force feedback actuator is integrated to realize closed-loop control; and pre-operation virtual drilling and post-operation federal learning optimization are supported. The system remarkably improves the surgical precision and safety, and is suitable for high-difficulty heart minimally invasive surgeries such as mitral valve repair and atrial fibrillation ablation.

The invention discloses an external cavity tunable laser linewidth compression system for realizing wavelength phase locking based on mutual injection of gain chips. The external cavity tunable laser linewidth compression system comprises a red light semiconductor laser main gain chip, a first collimation optical system, a blazed grating, a tuning rotating mirror, a reflector, a power supply driving system and a double-path feedback amplification system, the double-path feedback amplification system comprises a first secondary gain chip, a second secondary gain chip, a second collimation optical system, a third collimation optical system and a polarization-free beam splitter prism; and the red light semiconductor laser main gain chip, the first secondary gain chip and the second secondary gain chip are all connected with the power supply driving system. Therefore, the technical problems of low output infrared light power, poor stability and narrow mode-hopping-free tuning range in the prior art are solved, and high-power, narrow-linewidth, high-stability and large-range mode-hopping-free continuous tuning red light output can be realized.

The invention discloses a parallel imaging OCT (Optical Coherence Tomography) system based on a metasurface area array, which relates to the technical field of medical instruments, is small in size and can realize intraocular single-shot area array imaging and a three-dimensional position depth perception function by using metasurface and optical coherence tomography imaging information in a sample tissue with a limited size. According to the technical scheme, a light beam emitted by a laser is divided into two paths through a beam splitter, and the two paths enter a sample arm module and a reference arm module respectively; the sample arm module is a probe and comprises a multi-core optical fiber and a first metasurface; the reference arm module comprises a collimator, a motor and a right-angle reflector; the probe enters a sample tissue, a light beam is focused on the sample tissue and then is backscattered, the backscattered light beam reversely passes through the first metasurface, the multi-core optical fiber, the beam splitter, the second metasurface, the third lens, the grating and the focusing lens and then forms a spectral line beam on the CCD sensor, and the computer reads a signal from the CCD sensor and performs three-dimensional reconstruction imaging on the sample tissue.

The invention provides a laser radar ranging method based on parallel detection, which relates to the technical field of laser radar ranging, and comprises the following steps: generating N lasers with different wavelengths, splitting beams by a beam splitter, separating optical channels with N independent wavelengths by a demultiplexer, performing frequency shift processing, combining N paths of optical signals after frequency shift through a beam combiner, and combining the N paths of optical signals after frequency shift through a beam splitter; generating a beam of composite reference light containing N wavelengths, wherein each wavelength has a specific frequency shift; signal light returned from a target and the composite reference light are jointly input into a coupler for frequency mixing so as to generate an optical beat frequency signal, and operation processing is performed to calculate the target distance and the target radial speed corresponding to each wavelength. According to the laser radar ranging method provided by the invention, parallel detection of the laser radar can be realized, beat frequency signals corresponding to a plurality of different wavelengths can be distinguished only by integrating a group of detectors, a cross-group amplifier and an analog-to-digital converter, the cost is greatly reduced, and the complexity of the system is reduced.

The invention provides a compact hyperspectral imager optical system and an imaging method thereof, which are used for solving the technical problems that the overall size of a front telescopic assembly in a traditional hyperspectral imager optical system is difficult to compress, the installation and adjustment difficulty is relatively large, or the incident energy is lost and the space coverage capability is insufficient. And the technical problems of low energy utilization rate and difficulty in improving the sensitivity and the signal-to-noise ratio of the hyperspectral imager of the traditional Dyson type dispersion light splitting assembly are solved. The invention provides a compact hyperspectral imager optical system, which comprises an off-axis two-image-reflection telecentric optical path system based on a free-form surface and a Dyson light splitting system based on a curved surface prism, and realizes high regulation and control capability on light through multiple degrees of freedom of a curved surface shape. Compared with the prior art, the high-spectral imaging device has the advantages that the high-spectral imaging device is simple in structure, high image quality, small distortion and good telecentricity are achieved, meanwhile, the curved prism serves as a dispersion light splitting element, the whole spectrum has high light splitting efficiency, and the signal-to-noise ratio and sensitivity of the high-spectral imaging device can be improved.

The invention relates to the technical field of laser radars, in particular to a laser radar near-field saturation suppression method and device based on signal splicing. The method comprises the following steps: transmitting a pulse laser beam and receiving a scattering echo signal, dividing the echo signal into a transmission light signal and a reflection light signal through an intensity beam splitter prism, and respectively obtaining a far-field channel photon profile and a near-field channel photon profile through the transmission light signal and the reflection light signal; fusing and splicing the far-field channel photon profile and the near-field channel photon profile to obtain a corrected distance square signal profile; and performing atmospheric detection by using a laser radar system, and inverting atmospheric parameters by correcting a distance square signal profile. Meanwhile, the invention discloses a device for executing the method, by adopting the laser radar near-field saturation suppression method and device based on signal splicing, the problem of near-field signal saturation of a high-power laser radar can be effectively solved, and the overall performance index of the laser radar is greatly improved while the detection precision is guaranteed.

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The invention relates to the technical field of optical precision measurement, in particular to an ultra-high time resolution camera time characteristic detection device and method, and the device comprises a laser source which is used for generating pulse laser; the polarization modulation element is arranged on an emergent light path of the laser source and is used for modulating the pulse laser into circularly polarized light; the spectroscope is arranged on an emergent light path of the polarization modulation element and is used for decomposing the circularly polarized light into a first linearly polarized light beam and a second linearly polarized light beam; the first optical path unit is used for guiding the first linearly polarized light beam to the cylindrical optical element along a fixed optical path; the second optical path unit is used for adjusting the optical path of the second linearly polarized light beam and guiding the second linearly polarized light beam to the cylindrical optical element; and the cylindrical optical element is used for receiving the first linearly polarized light beam and the second linearly polarized light beam and respectively projecting the first linearly polarized light beam and the second linearly polarized light beam to an imaging surface of a camera to be detected to form two spatially separated light spots. The objective of the invention is to improve camera time characteristic calibration precision and efficiency.

The invention relates to the technical field of light quantum metering, in particular to a multifunctional standard single photon source generation and calibration device and a use method, and the device comprises a pumping laser light source, a nonlinear crystal, a signal optical filter, a beam splitter, a temperature control module, an idler frequency optical filter, a control module, a single photon detector group, a beam splitter, a multi-channel coincidence counter, and an optical switch. The pumping laser light source pumps the nonlinear crystal to generate two paths of single photon output of signal light and idler frequency light, the two paths of single photon output are filtered by the filter and then divided into multiple paths by the beam splitter, and standard single photons are directly output or the paths of the signal light or the idler frequency light are controlled by the optical switch to enter the single photon detector group for detection. External input single photons are controlled by the optical switch to enter the single-photon detector group for detection, and a count value of the single-photon detector group is accessed to the multichannel coincidence counter to record data. A pump light stable power system and a multi-path beam splitting coincidence counting system are introduced into a light path, so that standard single photon output with known brightness and g (2) (0) value can be realized.

The invention provides a series of polarization-independent beam splitters, a decoding end, a quantum key distribution system and a communication method, which can be applied to the technical field of quantum communication. The polarization independent beam splitter comprises an input optical channel, an input adiabatic evolution waveguide, a variable-width multimode waveguide, an output adiabatic evolution waveguide and an output optical channel, the variable-width multimode waveguide is in a strip shape and comprises a first end and a second end opposite to the first end, multiple waveguide sections with different width value changes are arranged between the first end and the second end, and the variable-width multimode waveguide is arranged between the first end and the second end. The signal photons are subjected to light field evolution in multiple waveguide sections with variable width values and then are subjected to beam splitting at a second end, and first beam splitting signal photons and second beam splitting signal photons are obtained; the length of the variable-width multimode waveguide is combined with different width values, so that the value of a target function is smaller than a target threshold value, and any beam splitting ratio can be realized on the premise of ensuring polarization independence through the combined asymmetric design.

The invention relates to the technical field of information processing, in particular to the technical field of optical detection, and particularly relates to a two-dimensional material layer number identification method and equipment. A photoelectron chip composed of a semiconductor light source, a 2 * 2 waveguide beam splitter, a grating coupler, an on-chip spectrometer, a super lens and an optical detector is compact in structure and low in cost; a semiconductor light source emits an optical signal, the optical signal sequentially passes through a 2 * 2 waveguide beam splitter, a grating coupler and a super lens and then irradiates a two-dimensional material sample, a displacement table is used for carrying out accurate Z-axis focusing and XY plane scanning, reflection spectrum signals are collected in real time, spectrum characteristics are analyzed through an upper computer to determine layer number information, and finally a layer number distribution diagram is generated. According to the method, rapid, automatic and high-precision identification of the number of layers of the two-dimensional material is realized, and large-range scanning detection is facilitated.

The invention relates to the technical field of optical detection, and particularly provides a mirror surface detection method for a large-aperture spliced telescope, which comprises the following steps of: emitting light from a focus position by using a light source, reflecting the light through a mirror surface of the large-aperture spliced telescope to enter a discrete lens arranged at the rear end, and splitting the light by using a spectroscope to obtain a split light beam; the first light beam enters the camera to obtain interference fringes of the splicing seams, the second light beam enters the optical switch to carry out aperture coding, and the mirror surface precision of the large-aperture spliced telescope can be determined according to the code of each splicing seam and the confocal and co-phase information of the sub-reflectors on the two sides of the splicing seam. According to the invention, splicing seam detection is carried out through focus reverse auto-collimation, the problem that an oversized collimator is needed traditionally is avoided, point-by-point detection is carried out on the sub-reflectors according to the splicing seam, and confocal and co-phase detection of the adjacent sub-reflectors is realized according to interference fringes.

A beamsplitter can include a first surface with a diffractive optical element, a second surface normal to the first surface, and a beam splitting surface arranged at an angle to the second surface that is less than 45 degrees. The beamsplitter may be configured to illuminate the entire second surface in response to an input beam at the first surface.

The invention relates to the technical field of steel wire rope state detection, in particular to a steel wire rope diameter measuring method and system based on event compensation correction. According to the technical scheme, the system comprises an imaging module, a boundary initial extraction module, a dynamic motion estimation module, a dynamic correction compensation module and a diameter calculation module. The imaging module comprises a traditional camera, an event camera, an optical component, a synchronous triggering device and a spectroscope. The traditional camera is used for collecting frame images of the steel wire rope. According to the method, on the basis of complementary advantages of an event camera and a traditional camera, systematic measurement deviation under the dynamic working condition is solved from the mechanism through an event-driven dynamic geometric compensation model, and quasi-static imaging dependence is broken through. The method does not need extra constraint or increase of frame rate, control cost and hardware complexity, avoids the problems of reduction of signal-to-noise ratio and the like, realizes high-precision stable measurement under high-speed and vibration working conditions, adapts to online monitoring of multiple industrial scenes, and is remarkable in practicability and application value.

A holographic near-eye display device with multi-angle simultaneous illumination comprises a light source module, a spatial light modulator, a beam splitter, an eyepiece, and a master controller. The light source module emits parallel light at different angles and simultaneously illuminates and covers effective working area of spatial light modulator which, loaded with a hologram, modulates incident parallel light at different angles to form diffracted parallel light at different angles, that is, virtual images at different viewing angles. Parallel light at different angles illuminates spatial light modulator. After modulated and diffracted by calculated hologram on spatial light modulator, the diffracted image light is converged by second lens to form different viewpoints for human eye to view. In multi-angle simultaneous illumination, additional time-sharing control of illumination unit is not needed. When size and position of human eye pupil change, clear virtual image is always seen, achieving expanding the eyebox.

The invention discloses a relay device and method for long-distance few-mode optical fiber communication, and belongs to the field of optical communication. According to the device, firstly, optical signals transmitted in a few-mode optical fiber are separated into a plurality of independent mode channels through a mode decomposition multiplexer; then, an adjustable light delay unit is configured in each channel, and compensation is carried out according to a difference mode group delay difference pre-calculated or actually measured by a few-mode optical fiber parameter; furthermore, a dimmable amplifier is used for amplifying the signal, power monitoring is carried out at the output end of the amplifier through an optical fiber beam splitter and a photoelectric detector, closed-loop feedback control is formed, and gain of each channel is adjusted in a self-adaptive mode to eliminate mode-dependent loss. According to the invention, signal distortion can be effectively suppressed in an optical domain, the complexity of digital signal processing of a receiving end is reduced, and the transmission distance and the transmission capacity of a few-mode optical fiber mode division multiplexing communication system are remarkably improved.

This invention presents a frequency-domain fluorescence lifetime imaging system, enhancing capabilities with a spatial beam attenuator and pinhole beam splitter. The spatial beam attenuator reshapes any beam into a circular Gaussian beam profile, being compact, cost-effective, with low loss and back reflection. Using digital printing technology, a thin optical film is deposited onto an optical substrate for precise local attenuation of the beam in either transmission or reflection mode. The pinhole beam splitter consists of an optical beam splitter with an active region the size of a pinhole, positioned near the beam's focus, which directs focused light into two paths based on acceptance or rejection by the pinhole. This configuration allows for two detectors to collect photons from both paths concurrently, facilitating dual-mode imaging. Consequently, the system can generate both confocal and conventional non-confocal laser scanning fluorescence lifetime images of the sample at the same time.

The invention discloses a coaxial laser confocal processing and measurement integrated system and an in-situ morphology measurement method thereof, and belongs to the technical field of ultrafast laser precision processing and in-situ measurement. The system comprises a laser confocal morphology measurement module, an ultrafast laser scanning processing module, a CCD (Charge Coupled Device) microscopic imaging module, a beam splitter prism, a low-pass dichroscope, a long-working-distance achromatic laser processing objective lens and a combined three-axis precision displacement table, the laser confocal morphology measurement module generates a measurement light beam to realize morphology measurement of a sample; the ultrafast laser scanning processing module generates a processing light beam to scan and process the surface of the sample; the CCD microscopic imaging module generates an illumination light beam to realize illumination of a processing position and acquisition of image information of a sample surface; a measurement light beam, a processing light beam and an illumination light beam form coaxial light beams through a low-pass dichroscope, the coaxial light beams are focused at the same position of the surface of a sample through a long-working-distance achromatic laser processing objective lens, and the coaxial in-situ measurement condition is achieved.

The invention relates to the technical field of projection modules, and particularly discloses an LCOS laser projection module, which comprises a laser light source module, a laser speckle eliminator, a reflector, a diffuser, a collimating lens, a fly-eye lens, a relay lens, a first linear polarizer, a polarizing beam splitter, an LCOS chip, a second linear polarizer and a projection lens which are sequentially arranged along a light transmission path, the laser light source module is provided with a light source optical axis and is used for emitting light, and the light is projected by the projection lens after being modulated along a light transmission path to form a projection image. The light emitted by the laser light source has the advantages of narrow divergence angle, small light-emitting area and good light concentration and collimation, the resolution of a projected image can be improved, the projected image is bright in color and high in definition, and the requirements of simple structure and small size are met. Meanwhile, the laser speckle can be eliminated through the matching of the laser speckle eliminator and the diffusion sheet, and the projection image can meet the high contrast through the existence of the first linear polarizer and the second linear polarizer.

The invention discloses a one-dimensional ultra-wide field-of-view ultra-high spectral resolution dispersion coherent imaging spectrometer, which belongs to the technical field of spectral imaging, and comprises a first microlens array used for obtaining incident light of a one-dimensional ultra-wide field-of-view in a horizontal plane; the plurality of optical fibers are used for transmitting incident light of a one-dimensional ultra-wide field of view; the second micro lens array is used for collimating incident light from each optical fiber into broadband parallel light beams; the grating beam splitter interferometer is used for dispersing the broadband parallel light beams into a plurality of narrow-band parallel light beams with different propagation directions; the cylindrical lens is used for converging the two paths of coherent light of each narrow-band parallel light beam to a target block of the detector, and converging the narrow-band parallel light beams with different propagation directions to different target blocks respectively; and the detector is used for obtaining a continuous broadband ultra-high resolution spectrum according to the two paths of coherent light received by each target block. According to the invention, a one-dimensional ultra-wide field of view is obtained in a horizontal plane, and ultra-high spectral resolution can be obtained.

The invention provides a semiconductor defect detection method and device based on short-medium wave infrared microscopic imaging, and the method comprises the steps: selecting a short-medium wave infrared band with the wavelength greater than or equal to 2.5 microns as a detection working band, and employing an infrared light source capable of covering the detection working band and a corresponding infrared area array detector; constructing an infrared microscopic imaging light path, and irradiating light emitted by an infrared light source to the surface of a sample through an infrared illumination light path after passing through a beam splitter and an infrared microscopic objective lens; sample reflected light is collected through an infrared microscope objective and is imaged on an infrared area array detector; two-dimensional view field scanning is performed on the sample, imaging is realized through a focusing mechanism, and surface and internal defects are detected; the infrared light source is modulated, so that signal light reflected by the sample is an alternating-current signal, the alternating-current signal is separated from direct-current noise spontaneously radiated by the background, and internal defects of the semiconductor sample are detected after the noise is filtered and the signal-to-noise ratio of an image is improved. The invention provides a high-sensitivity and high-resolution solution for semiconductor defect detection.

The invention discloses an infrared four-waveband composite annular aperture folded imaging optical system, belongs to the technical field of optical catadioptric optical paths, and aims to solve the problem that 1550nm / 1064nm dual-laser and medium-wave / long-wave infrared four-waveband composite detection is difficult to realize at the same time in the conventional annular aperture imaging technology. The system comprises a primary mirror, a secondary mirror, a 1064nm laser spot correction mirror, a 1550nm laser spot correction mirror, a 1064nm laser spectroscope, a 1550nm laser spectroscope, a broadband infrared detector, a 1550nm laser detector and a 1064nm laser detector. And high-performance common-aperture composite detection of 1064nm / 1550nm dual laser and medium-wave / long-wave infrared four wavebands is realized through a multi-stage light splitting mechanism. The limitation that a traditional annular aperture system is single in wave band is broken through, and the all-weather sensing and target recognition capability of the system in a complex environment is remarkably improved.

The present invention relates to the field of communication and sensing, and specifically to a communication and sensing integrated device based on a seven-core optical fiber interferometer and an application method therefor. The application method comprises: a first beam splitter splitting, into reference light and signal light, a light source emitted by a narrow linewidth laser; performing modulation by means of a first coherent optical transmitter and a second coherent optical transmitter; amplifying the light by means of a first amplifier and a second amplifier, and then enabling the light to pass through a multi-core optical fiber from a fan-in end, and to output from a fan-out end; performing beam splitting by means of a second beam splitter and a third beam splitter, and performing demodulation by means of a first coherent receiver and a second coherent receiver; and finally, a phase-locked loop performing interference elimination on preliminarily-demodulated reference light and preliminarily-demodulated signal light to obtain finally-demodulated reference light and finally-demodulated signal light. The present invention uses a phase-locked loop to further eliminate disturbance noise of reference light and signal light. Therefore, noise interference is eliminated in continuous low-frequency detection, thereby improving the communication and sensing effect.

Embodiments described herein relate to an apparatus that includes a light engine with a plurality of light sources. In an embodiment, each of the plurality of light sources is configured to emit a spectral band with different wavelength bandwidth. The apparatus may also include a beam splitter that is optically coupled to the light engine, where the beam splitter splits the spectral bands into a first optical path and a second optical path. In an embodiment, a power monitor is optically coupled to the beam splitter along the first optical path, and a reflective objective lens is optically coupled to the beam splitter along the second optical path. In an embodiment, the reflective objective lens includes a first mirror and a second mirror. In an embodiment, the apparatus further includes an optical sensor configured to measure the spectral bands after the spectral bands have reflected off of a substrate.

The application discloses a laser cavity diagnosis device and method based on double-frame delay synchronization phase shift, which comprises an excitation module and a detection module; the excitation module comprises a first laser, a first 1 / 2 wave plate, a polarization beam splitter prism, a beam splitter, an energy meter, a convex lens and a water tank; the detection module comprises a second laser, a beam expander lens group, a second 1 / 2 wave plate, a second polarization beam splitter prism, a third 1 / 2 wave plate, a first reflector, a second reflector, a fourth 1 / 2 wave plate, a third polarization beam splitter prism, a third reflector, a fourth polarization beam splitter prism, a first 1 / 4 wave plate, a first imaging lens, a first micro-polarization camera, a second 1 / 4 wave plate, a second imaging lens and a second micro-polarization camera. The application introduces a double-frame delay method in the traditional synchronous phase shift interference, overcomes the defects of the existing cavity detection technology, and realizes the observation of the instantaneous phase change in a single cavity pulsation period.

The invention discloses an optical axis calibration method and device applied to a projection illumination light path, and belongs to the technical field of optics, and the device comprises a laser which is used for transmitting an initial collimated light beam; the forward beam expander is arranged on a light emitting path of the laser and is used for expanding the initial collimated light beam to form large-aperture collimated light; the beam splitter is arranged on an emergent light path of the forward beam expander and is used for splitting the large-aperture collimated light into a reflected light beam and a transmitted light beam; the reflecting mirror is arranged in a transmission light path of the beam splitter and is used for reflecting the transmission light beam back to the beam splitter; and the reverse beam expander is arranged in a reflection light path of the beam splitter and is used for converging the reflection light beams into a point light source. According to the invention, the abstract'optical axis alignment 'problem is converted into visual'light spot superposition' judgment, the principle breakthrough from traditional indirect energy measurement to direct spatial position comparison is realized, and the calibration precision is improved.

The invention discloses a two-degree-of-freedom displacement simultaneous measurement system and method based on an orbital angular momentum beam interferometer. The system comprises a laser; the light field regulation and control module is used for converting the linearly polarized light into a light beam with orbital angular momentum; an optical isolator; a first beam splitter; a second beam splitter; the third beam splitter is used for combining the first reference light beam and the first measurement light beam to generate conjugate interference; a fourth beam splitter; a fifth beam splitter; the sixth beam splitter is used for combining the second reference light beam and the second measurement light beam to generate conjugate interference; a seventh beam splitter; a first reflector; a second reflector; a third reflector; a first Weive prism; a second Weive prism; a reflection grating; and the image acquisition and processing module is used for acquiring a petal-shaped interference pattern formed by conjugate interference. The system is compact in structure and high in demodulation sensitivity, and can realize non-contact and high-resolution synchronous two-degree-of-freedom measurement.

The invention discloses a nanoparticle scattered light confocal imaging device and method. The device comprises a laser unit, a first pinhole, a beam splitter turntable, a scanning focusing unit, an electric objective table, a first detection imaging unit, a second pinhole, a light splitting unit and a second detection imaging unit. The method does not need to mark nano particles, and can synchronously collect unmarked nano particles and fluorescence-labeled biomolecules; in-situ imaging can be realized, and the distribution position and content of nano-particles in living cells can be directly observed; the imaging resolution ratio is high, single nanoparticle imaging can be carried out, and fluorescence imaging can also be carried out at the biomolecule level.

The utility model discloses an object space telecentric imaging optical system and a position alignment device, the object space telecentric imaging optical system comprises an imaging system and an illumination system, the imaging system is provided with an object side and an image side which are oppositely arranged along an optical axis direction; the object space telecentric imaging optical system is composed of a first lens, a second lens, a third lens, a beam splitter prism, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged from the object side to the image side. The illumination system comprises a light source, the light source is arranged corresponding to the beam splitter prism and is used for emitting an illumination light beam, the illumination light beam is reflected by the beam splitter prism and then illuminates the imaging system, through mutual combination of different lenses and reasonable distribution of positive and negative focal power, the magnification factor is increased, distortion is reduced, and high illumination uniformity and low cost are provided.