3858 results about "Beam splitter" patented technology

The invention relates to a compact polarization rotation beam splitter, which comprises an input waveguide, a mode conversion region, a mode coupling region and an output waveguide, a TM0 mode optical signal in the optical signals is converted into a TE mode high-order optical signal in the mode conversion area; the mode coupling region is used for coupling the TE mode high-order optical signal into a TE0 mode optical signal with the first adiabatic coupling waveguide; and the output waveguide is used for outputting a TE0 mode optical signal which is not subjected to mode conversion in the optical signals, and outputting a TE0 mode optical signal obtained after mode conversion of the mode conversion area and the second adiabatic coupling waveguide. According to the invention, the polarization rotation path can be shortened through high-order mode conversion in the mode conversion area, efficient beam splitting is realized by using the asymmetric adiabatic coupling waveguide in the mode coupling area, the size reduction of a redundant structure is avoided through function integration, the performance of the beam splitter is ensured, and the problems of large size and low cost of the existing polarization rotation beam splitter are solved. And the performance is not good.

The invention relates to the technical field of optics, in particular to a gas concentration regulation and control interference imaging system applied to shape righting of a nozzle handle, a shape righting tool and a nozzle are prepared, the shape righting tool is provided with a downward pressing mechanism, the downward pressing mechanism is provided with a downward pressing telescopic column for correcting the nozzle handle, and a displacement measurement interferometer system is assembled on the shape righting tool; the displacement measurement interferometer system is provided with a reflecting movable mirror and a beam splitter, and the reflecting movable mirror is mounted on the pressing telescopic column; the displacement measurement interferometer system further comprises an interference light path stroke difference fine tuning system. The interference light path stroke difference fine adjustment system comprises a glass container for containing sulfur hexafluoride, the end faces of the two ends of the glass container are flat and transparent, the glass container is arranged on a light path between the beam splitter and the reflective moving mirror, and the end faces of the two ends of the glass container are perpendicular to laser on the light path; the glass container is provided with an air supply port; the air supply port is connected to an air pump, and the air pump is connected with a sulfur hexafluoride air source. And the shape correcting position of the nozzle handle is accurately controlled.

The invention relates to the technical field of satellite laser communication, and discloses a laser communication double-end on-orbit calibration system and method, and the system comprises an A end and a B end which are in communication connection and have the same structure; the end B is a second laser communication terminal; the A end is a first laser communication terminal which comprises a main light path, and a transmitting branch, a receiving branch, a tracking branch and a calibration branch which are connected with the main light path; the main light path is composed of an A-end optical antenna, an A-end reflex reflector, an A-end fine tracking galvanometer, an A-end first spectroscope, an A-end second spectroscope, an A-end third spectroscope and an A-end emission galvanometer which are connected in sequence; the transmitting branch is connected with the A-end transmitting galvanometer; the receiving branch is connected with the A-end third spectroscope; the calibration branch is connected with the A-end second spectroscope; and the tracking branch is connected with the A-end first spectroscope. According to the invention, on-orbit receiving and transmitting coaxial calibration is carried out, calibration is carried out without the help of a ground end, and the efficiency is improved.

The present disclosure relates to an active graded magnetic compensation system and method for an unshielded SERF magnetometer. The system comprises: a detection laser, a half-wave plate, a magnetic field compensation coil, a magnetic field modulation coil, a non-magnetic heating assembly, an alkali-metal atomic vapor cell, a polarizing beam splitter prism, a balanced photodetector, a graded feedback control module, a pump laser, a quarter-wave plate, a focusing lens and a photodetector. By means of the present disclosure, a graded compensation system is used to realize high-precision compensation for a magnetic field within a large dynamic range in a geomagnetic environment, thereby ensuring that an instrument carries out high-sensitivity magnetic field measurement under geomagnetic conditions.

The invention discloses a lunar resource in-situ exploration-while-drilling device and method. The lunar resource in-situ exploration-while-drilling device is composed of a spiral drilling tool, an illumination light source module, a polarization spectrum detection module and a dual-channel spectrum measurement module. The drilling tool drill rod is of a hollow structure. Light emitted by the illumination light source module is collimated and depolarized to form unpolarized parallel light to irradiate lunar soil on the side wall of the drill hole, and the polarization spectrum measurement probe collects reflected light of the lunar soil; the reflected light is collimated by a front collimator objective of the probe and then sequentially passes through a spectrum modulation unit consisting of an achromatic 1 / 4 wave plate, a multi-stage wave plate, a beam splitter prism and two polaroids of which the light transmission directions are vertical to each other, and two orthogonal light beams are formed, so that polarization information of the reflected light is modulated in a spectrum dimension; demodulating the modulated spectrum to obtain the spectrum and polarization information of the lunar soil reflected light; and the resource distribution and content and the physical characteristics of the original lunar soil are inversed by using the polarization spectrum characteristics of the lunar soil. According to the invention, in-situ exploration of lunar subsurface depth profile mineral resources can be realized.

The embodiment of the invention provides an eyepiece system and optical equipment. The eyepiece system comprises a first element group and a second element group; the first element group is arranged close to the human eye side and comprises a first lens, the first lens is provided with a first surface close to the display side and a second surface close to the human eye side, the first surface is provided with a light splitting element and a circularly polarized light generation assembly, and the circularly polarized light generation assembly is located on the side, away from the first lens, of the light splitting element; a first phase retarder and a polarization reflection element are sequentially arranged on the second surface; the second element group is arranged close to the display side and comprises at least two lenses, and the Abbe number of at least one lens is less than or equal to 40; the eyepiece system satisfies the following conditions: 0.01 < = (D1max * phi1) / (D2max * phi2) < = 0.3; wherein phi 1 is the focal power of the first element group, phi 2 is the focal power of the second element group, D1 is the maximum effective optical aperture of the first element group, and D2 is the maximum effective optical aperture of the second element group.

The invention discloses a liquid guide laser processing device and method based on double-beam phase adjustment, belongs to the technical field of laser processing, and aims to reduce the width of a laser beam. The device comprises a laser light source, a first polarization state modulator, a beam splitter, a spatial light modulator, a second polarization state modulator, a polarization beam combiner and a coupler. A laser light source emits linearly polarized light, the linearly polarized light is converted into circularly polarized light through a first polarization state modulator, then the circularly polarized light is separated into first linearly polarized light and second linearly polarized light through a light beam separator, and on a second linearly polarized light transmission light path, a spatial light modulator adjusts the marginal region phase of the circularly polarized light to enable the marginal region phase to differ from the marginal region phase of the first linearly polarized light by a half cycle. And the second polarization state modulator adjusts the polarization direction to be the same as that of the first linearly polarized light, the polarization beam combiner combines the two beams of light, the coupler couples the combined laser beams to the liquid jet flow, and the liquid jet flow acts on the workpiece to be machined, so that optimization of the diameter of the laser beams is achieved.

The invention discloses a traceable cavity ring-down spectrometer system with a self-calibration function, and is applied to the technical field of gas concentration detection. The device comprises an optical cavity ring-down main body, a dynamic generation module and a reference analysis module which are connected in sequence, wherein the optical cavity ring-down main body comprises a laser light source, a beam splitter, an optical fiber isolator, a lens, a first reflecting lens, a first aluminum ring, a sample cell, a second aluminum ring, a cross shaft type universal coupling control device and a second reflecting lens which are arranged along a laser light path; the dynamic generation module comprises a high-purity gas inlet, a gas purifier, a dynamic generation device, a standard gas outlet and a three-way electromagnetic valve which are arranged along a gas path; the reference analysis module comprises an instrument standard gas inlet, a reference analyzer and a standard gas storage box which are arranged along the gas path. According to the method, the influence of instrument drift on analysis data caused by the use environment and instrument part loss of the online instrument is avoided, and the accuracy and the quantity value traceability of the instrument analysis data are guaranteed.

The invention provides an optical measurement method and device, and belongs to the technical field of optical measurement, and the method comprises the steps: starting a light source with the wavelength changing dynamically to generate a sweep frequency optical signal; dividing the light into a measuring beam and a reference beam by using a light splitting component, guiding the measuring beam to irradiate a target to be measured and then return along the same path, and guiding the reference beam to enter an optical component of which the optical path changes along with the wavelength and then return; based on the low-coherence characteristic of the light source, when the optical paths of the two light beams meet the interference condition, detecting an interference signal by using a sensing component; the optical path difference is determined according to time information in the interference signal, and the thickness of each reflection interface is calculated by combining refractive index data of a target to be measured. Different from the traditional low-coherence interference measurement which depends on a motor and the like to control the movement of a reflector, the method avoids the limitation of mechanical driving on the measurement frequency, and achieves the high-speed optical thickness measurement.

The invention discloses a visible light and short wave infrared common-aperture optical system which is used for solving the technical problem that an existing multi-band common-aperture optical system cannot meet the detection requirements of large view field, high resolution and high sensitivity at the same time. The optical system comprises a visible light optical system and a short-wave infrared optical system, and a primary reflector, a secondary reflector, a beam splitter prism, a visible light relay lens group and a first imaging unit jointly form the visible light optical system; and the primary reflector, the secondary reflector, the beam splitter prism, the short-wave infrared image space telecentric relay lens group, the view field divider and the N second imaging units jointly form a short-wave infrared optical system. The optical system disclosed by the invention shares the primary reflector and the secondary reflector, so that the focal length of the optical system is increased, and the requirement of high resolution is met; and meanwhile, the short-wave infrared optical system adopts the view field divider and N second imaging units, and the large-view-field and high-sensitivity infrared detection requirements of the optical system on a dark and weak target are met through splicing of N paths of view fields.

The invention discloses a double-comb non-cooperative target ranging system based on single photon detection, which is characterized in that an optical pulse output by a first optical frequency comb is divided into two paths of light through a first beam splitter, the first path of light is combined with one of two paths of light divided by a second optical frequency comb through a second beam splitter, and the combined light is transmitted to a first nonlinear frequency up-conversion module; a sum frequency light pulse in the wave band of 780 nm is generated and detected by a base avalanche diode photoelectric detector, and then a time-dependent single photon counter is triggered to start counting; the second path of light is output to a beam expanding collimator through the circulator and irradiates a target to be measured through spatial propagation, the beam expanding collimator collects diffuse reflection light and returns the diffuse reflection light to a third port of the circulator along the original path, and the diffuse reflection light and the other path of light split by the second optical frequency comb through the second beam splitter are combined and transmitted to a second nonlinear frequency up-conversion module; the up-conversion light after sum frequency conversion passes through the optical filter group and then is recorded by a stop end of the single photon counting module, multi-cycle accumulative statistics is carried out by the time correlation single photon counter, and finally a photon counting waveform is reconstructed and the flight time difference of the to-be-measured target is calculated by the computer.

The invention discloses a one-dimensional and two-dimensional simultaneous diagnosis shock wave velocity measurement system, and relates to the technical field of shock wave velocity diagnosis. The system comprises a targeting light receiving unit, a one-dimensional line imaging unit and a two-dimensional velocity field unit which are arranged on the same light path, the target shooting light receiving unit comprises a light receiving module and a target spot; the one-dimensional line imaging unit comprises a probe light injection module, a light splitting module, a first beam splitter, a first reflector, an interference module and a one-dimensional continuous velocity field measurement module; the two-dimensional velocity field unit comprises a two-dimensional dynamic velocity field diagnosis module; the two-dimensional dynamic velocity field diagnosis module comprises an integration branch and a compression coding branch. According to the system provided by the invention, in the process of performing one-dimensional and two-dimensional shock wave velocity field diagnosis, one-dimensional shock wave velocity evolution and two-dimensional velocity field non-uniformity evolution data can be simultaneously obtained in a single-shot experiment, the overall structure is compact, and a foundation is laid for shock wave velocity multi-dimensional diagnosis.

The invention relates to the technical field of integrated circuit board manufacturing and packaging, and discloses an integrated circuit board manufacturing and packaging method and system based on laser measurement, and the method comprises the steps: sensing arrangement: employing a focusing lens to focus a laser beam to the surface of a substrate, arranging a reflector and a spectroscope to guide the laser beam to the surface of the substrate, meanwhile, a sensor is arranged in the packaging equipment for monitoring; signal conversion: receiving a reflected light signal by adopting a silicon photodiode, and converting the reflected light signal into an electric signal; data acquisition: acquiring electric signal data, environment data and substrate information data; data calculation: calculating a warping prediction index and an offset prediction index; data evaluation: evaluating the packaging effect index; and comprehensive judgment: according to the packaging result index, judging whether automatic adjustment and compensation need to be carried out, and under the condition that automatic adjustment and compensation need to be carried out, calculating a compensation coefficient to carry out automatic compensation, so that active suppression of the substrate warping offset defect and intelligent improvement of the process efficiency are realized.

The invention discloses a transparent part defect detection method and system based on dual-optical-path phase deflection, and belongs to the technical field of optical detection. The system comprises a camera, a reflection light source, a spectroscope, a backlight light source and a processing unit. The detection method comprises the steps of primary measurement, product overturning, secondary measurement and defect comprehensive analysis and classification. A depth map and a modulation degree map of the surface of a product are obtained through reflective measurement, a phase difference map and a backlight modulation degree map are obtained through transmission-type zero reference surface differential measurement, multi-dimensional data are fused, and accurate detection and classification of concave and convex points, foreign matter, scratches and other defects are achieved according to preset logic. The method can effectively eliminate inherent errors of the system, realizes double-sided full detection without omission, is high in detection precision and accurate in defect classification, and is suitable for defect detection of transparent parts such as multilayer transparent glass.

The invention discloses a thoracoscope minimally invasive cardiac surgery navigation system based on multi-modal image fusion, and the system comprises the steps: constructing a 5D heart digital twin containing an anatomical structure, a soft tissue boundary, metabolic activity and electrophysiological information through fusing preoperative CT, MRI, PET and intraoperative ultrasonic images; real-time dynamic registration is realized by using an electrocardio gating driven biomechanical model; superposing the multi-color coding navigation information to the visual field of the thoracoscope through a wavelength selection type spectroscope; a dynamic risk scoring model is constructed based on the distance, the speed and the tissue vulnerability, and three-level grading intervention is triggered; a miniature force feedback actuator is integrated to realize closed-loop control; and pre-operation virtual drilling and post-operation federal learning optimization are supported. The system remarkably improves the surgical precision and safety, and is suitable for high-difficulty heart minimally invasive surgeries such as mitral valve repair and atrial fibrillation ablation.

The invention provides a detection system of a micro optical fiber coupler based on a bidirectional optical frequency comb vernier effect, which can be applied to the technical field of photoelectric detection. The system comprises: an optical frequency comb light source configured to emit detection light; the beam splitter is arranged to split the detection light into first sub-detection light and second sub-detection light; the reference sensing unit is arranged to guide the first sub detection light to interact with a reference solution through an evanescent field of the first micro optical fiber coupler so as to output first transmission light; the detection sensing unit is arranged to guide the second sub detection light to interact with the solution to be detected through an evanescent field of the second micro optical fiber coupler so as to output second transmission light; the beam combiner is set to combine the first transmission light and the second transmission light to obtain a combined light spectrum; the spectrum analyzer is set to collect the combined light and generate a vernier spectrum; and the processor is set to determine the concentration of the liquid to be detected according to the vernier spectrum.

The present invention discloses a device and method for semiconductor grain double-sided simultaneous fully equal optical path confocal imaging detection based on polarization separation imaging method. The device includes a CMOS or CCD polarization camera, a telecentric imaging lens, a polarization cube beam splitter, a right-angle image rotation prism, a semiconductor grain, and a transparent glass stage for placing the semiconductor grain, which are sequentially arranged in the optical path direction. The advantages of the device and method of the present invention are as follows: It can achieve double-sided simultaneous fully equal optical path confocal polarization imaging detection of the object to be measured, that is, △ = 0, without the need to use a large-depth-of-field telecentric lens to compensate for the optical path difference of double-sided imaging; the double-sided simultaneous polarization imaging detection device has a simple and compact structure and is easy to assemble and debug.

The invention provides a photon parallel matrix convolution operation chip which can be applied to the technical field of integrated photonics and optical calculation. The chip is integrated by a 1 * N array waveguide grating, a 1 * 2 beam splitter array, an input matrix modulator array, two N * 1 array waveguide gratings, two 1 * N beam splitters, a weight matrix modulator array, an M * M array waveguide grating detector array and a detector array. Main functional devices are integrated in a monolithic mode, the system is compact, the complexity and power consumption of the system can be effectively reduced, and the calculation efficiency is improved.

The invention discloses an external cavity tunable laser linewidth compression system for realizing wavelength phase locking based on mutual injection of gain chips. The external cavity tunable laser linewidth compression system comprises a red light semiconductor laser main gain chip, a first collimation optical system, a blazed grating, a tuning rotating mirror, a reflector, a power supply driving system and a double-path feedback amplification system, the double-path feedback amplification system comprises a first secondary gain chip, a second secondary gain chip, a second collimation optical system, a third collimation optical system and a polarization-free beam splitter prism; and the red light semiconductor laser main gain chip, the first secondary gain chip and the second secondary gain chip are all connected with the power supply driving system. Therefore, the technical problems of low output infrared light power, poor stability and narrow mode-hopping-free tuning range in the prior art are solved, and high-power, narrow-linewidth, high-stability and large-range mode-hopping-free continuous tuning red light output can be realized.

The present invention discloses a position error calibration device and a calibration method for an industrial robot. The position error calibration device in the present invention includes a laser ranging component for measuring the three-dimensional coordinates of the target ball at the end of the robot. The laser ranging component includes a laser interferometer, a beam splitter, a two-dimensional position sensitive detector, and a housing; a two-dimensional moving platform for moving the laser ranging component in the X-axis and Y-axis directions. The two-dimensional moving platform includes a lead screw slider module and a grating scale in the X-axis and Y-axis directions; a supporting device for fixing and supporting the two-dimensional moving platform so that it can work stably in three-dimensional space. Compared with a laser tracker, the present invention does not require transformation between a spherical coordinate system and a rectangular coordinate system, thereby avoiding the amplification effect of the angle error of the inner circle grating in the laser tracker. The present invention can directly measure the three-dimensional coordinate values of the reflecting target ball in the measurement coordinate system, has a good calibration effect, and can meet the calibration requirements of industrial robots.

The invention discloses a parallel imaging OCT (Optical Coherence Tomography) system based on a metasurface area array, which relates to the technical field of medical instruments, is small in size and can realize intraocular single-shot area array imaging and a three-dimensional position depth perception function by using metasurface and optical coherence tomography imaging information in a sample tissue with a limited size. According to the technical scheme, a light beam emitted by a laser is divided into two paths through a beam splitter, and the two paths enter a sample arm module and a reference arm module respectively; the sample arm module is a probe and comprises a multi-core optical fiber and a first metasurface; the reference arm module comprises a collimator, a motor and a right-angle reflector; the probe enters a sample tissue, a light beam is focused on the sample tissue and then is backscattered, the backscattered light beam reversely passes through the first metasurface, the multi-core optical fiber, the beam splitter, the second metasurface, the third lens, the grating and the focusing lens and then forms a spectral line beam on the CCD sensor, and the computer reads a signal from the CCD sensor and performs three-dimensional reconstruction imaging on the sample tissue.

The invention discloses an endoscope optical system which is composed of a first lens, a steering prism, a diaphragm, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens and a beam splitter prism from an object plane to an image plane, the focal power of the first lens is negative, the object side is a convex surface, and the image side is a concave surface; the focal power of the second lens is positive, the object side is a plane, and the image side is a convex surface; the object side of the third lens is a convex surface, the focal power of the fourth lens is opposite to that of the third lens, and the image side is a convex surface; the focal power of the fifth lens is positive, and the image side of the fifth lens is a convex surface; the focal power of the sixth lens is negative, the object side is a concave surface, and the image side is a concave surface; the focal power of the seventh lens is positive, the object side is a convex surface, and the image side is a convex surface; the object space numerical aperture NA of the endoscope optical system is more than 0.001 and less than 0.006, and the endoscope optical system has the advantages that lens combinations with different surface shapes and focal powers are used, and the depth of field and the axial resolution capability of an endoscope are improved by reducing the object space numerical aperture.

The invention provides a laser radar ranging method based on parallel detection, which relates to the technical field of laser radar ranging, and comprises the following steps: generating N lasers with different wavelengths, splitting beams by a beam splitter, separating optical channels with N independent wavelengths by a demultiplexer, performing frequency shift processing, combining N paths of optical signals after frequency shift through a beam combiner, and combining the N paths of optical signals after frequency shift through a beam splitter; generating a beam of composite reference light containing N wavelengths, wherein each wavelength has a specific frequency shift; signal light returned from a target and the composite reference light are jointly input into a coupler for frequency mixing so as to generate an optical beat frequency signal, and operation processing is performed to calculate the target distance and the target radial speed corresponding to each wavelength. According to the laser radar ranging method provided by the invention, parallel detection of the laser radar can be realized, beat frequency signals corresponding to a plurality of different wavelengths can be distinguished only by integrating a group of detectors, a cross-group amplifier and an analog-to-digital converter, the cost is greatly reduced, and the complexity of the system is reduced.

The invention provides a compact hyperspectral imager optical system and an imaging method thereof, which are used for solving the technical problems that the overall size of a front telescopic assembly in a traditional hyperspectral imager optical system is difficult to compress, the installation and adjustment difficulty is relatively large, or the incident energy is lost and the space coverage capability is insufficient. And the technical problems of low energy utilization rate and difficulty in improving the sensitivity and the signal-to-noise ratio of the hyperspectral imager of the traditional Dyson type dispersion light splitting assembly are solved. The invention provides a compact hyperspectral imager optical system, which comprises an off-axis two-image-reflection telecentric optical path system based on a free-form surface and a Dyson light splitting system based on a curved surface prism, and realizes high regulation and control capability on light through multiple degrees of freedom of a curved surface shape. Compared with the prior art, the high-spectral imaging device has the advantages that the high-spectral imaging device is simple in structure, high image quality, small distortion and good telecentricity are achieved, meanwhile, the curved prism serves as a dispersion light splitting element, the whole spectrum has high light splitting efficiency, and the signal-to-noise ratio and sensitivity of the high-spectral imaging device can be improved.

The invention discloses a Raman spectrum automatic focusing system and method for detecting a pathological tissue sample, and the system comprises a light source module which is used for generating laser with a preset wavelength so as to irradiate the pathological tissue sample; the automatic focusing module integrates a mechanical structure and an image recognition algorithm, and performs automatic focusing on the surface of the sample through a low-pass spectroscope, an objective lens, a focusing camera, a controller and a focusing execution mechanism; the spectrum analysis module is used for collecting and analyzing Raman scattering light generated by interaction of the focused exciting light and the pathological tissue sample on the basis of a Raman spectrum analyzer, and by integrating the stable light source, the automatic focusing module, the spectrum analysis module and the data processing module, rapid, accurate and automatic detection of the pathological tissue sample is achieved; the method has the advantages of simplicity and convenience in operation, high detection speed, high resolution, high automation degree and the like, is widely applied to the fields of clinical pathological detection, biomedical research and the like, and provides powerful support for disease diagnosis.

An optical detection device, comprising an objective lens, a bright field illumination unit and a dark field illumination unit. The objective lens is provided with a bright field light channel and a dark field light channel. The bright field illumination unit comprises a bright field beam splitting unit and a bright field light source for providing a bright field incident light beam, wherein the bright field incident light beam is reflected by the bright field beam splitting unit and then enters the bright field light channel. The dark field illumination unit comprises a dark field light source for emitting a dark field incident light beam, a prism module and a dark field beam splitting unit; the prism module and the dark field beam splitting unit are sequentially arranged in the transmission direction of the dark field incident light beam; the prism module is used for converting the dark field incident light beam into a circular light beam, wherein the circular light beam is reflected by the dark field beam splitting unit and then enters the dark field light channel; and the dark field beam splitting unit comprises a circular beam splitter and an aperture formed at the center of the circular beam splitter, wherein the aperture is located on the transmission path of the bright field incident light beam. The present invention more conveniently realizes switching between bright field detection and dark field detection, thereby improving the detection efficiency.

The invention relates to a construction method of a photon neural network, an image processing method, equipment and a medium, and the construction method comprises the steps: forming a silicon waveguide on a silicon-based substrate, periodically arranging phase change units on the surface of the silicon waveguide to form a two-dimensional array, and constructing a phase change metasurface with a beam splitting function by regulating and controlling the state of the phase change units. An input port and an output port are connected through a tapered waveguide to form an optical power beam splitter; output optical signals pass through a crossed waveguide and a directional coupler and are arranged according to a convolution kernel matrix structure, and a photon convolution kernel is constructed. A multi-wavelength laser source, an optical modulator and a photoelectric detector are integrated, the state of a phase change unit is dynamically regulated and controlled, and a photon neural network is established. And after matrix operation, the optical signal is converted into an electric signal by the photoelectric detector and is output to the processing module, so that the network performance is remarkably improved, and an efficient and low-energy-consumption scheme is provided for deep learning.

2.1. The simultaneous acquisition of multiple images in the microscope should be made possible with greater flexibility. Furthermore, simultaneous acquisition should be made possible with less effort. 2.2. In a microscope (1) with a main beam splitter (22) and an adjustable beam deflection unit (21) for moving the illuminating light through the sample space (P), the beam deflection unit (21) is arranged optically between the light source (12) and the main beam splitter (22) for this purpose, so that the sample light reaches the sensor (28) away from the beam deflection unit (21), wherein both the illuminating light and the sample light pass through the same intermediate image (ZB).

The invention provides an optical element laser thermal effect and light beam quality integrated measurement device and method, and the device combines key assemblies, such as a pump laser, a real-time power monitoring module, an energy transmission optical fiber, a multi-surface reflector, a beam splitter, a monochromatic optical filter, a CCD camera, an infrared thermal imager, a blackbody radiation calibration module, a Fizeau interferometer and the like. And the thermal effect of the transflective element can be measured at a specific angle. The device combines pump light and test light into one beam through the beam combiner and irradiates the surface of a sample at the same time, after transmission, the beam splitter divides the laser into two paths, one path is used for collecting far-field light spots to calculate the quality of the light beams, the other path forms an interference image to calculate thermal distortion, and meanwhile, the thermal infrared imager monitors the temperature of the sample. According to the invention, non-contact lossless integrated synchronous measurement is realized with high integration level and high flexibility, the device is suitable for temperature, thermal distortion and light beam quality measurement of an optical element under continuous or pulse laser, and thermal response characteristics of a sample are comprehensively and accurately evaluated.

The multi-channel synchronous scanning optical detection system comprises a DIC light path, a PL light path, a DF light path, a bright field light source and a dark field light source. The DIC light path sequentially comprises a first camera, a polarizing beam splitter, a total reflective mirror, a DIC lens unit, a first dichroscope and a second dichroscope; the PL light path sequentially comprises a second dichroscope, a first dichroscope and a second camera; the DF light path sequentially comprises a second dichroscope and a third camera; the bright field light source irradiates the sample through part of the DIC light path; the dark-field light source directly irradiates the sample; in the working state, the sample reflects the light of the bright field light source, the reflected light returns along the DIC light path to form a first defect image, the sample receives the light of the dark field light source and excites fluorescent light, the fluorescent light forms a second defect image along the PL light path, and the light, reflected by the sample, of the dark field light source forms a third defect image along the DF light path. The multi-channel synchronous scanning optical detection system can simultaneously scan sample defects by multiple optical paths.