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661 results about "Wavefront sensor" patented technology

A wavefront sensor is a device for measuring the aberrations of an optical wavefront. Although an amplitude splitting interferometer such as the Michelson interferometer could be called a wavefront sensor, the term is normally applied to instruments that do not require an unaberrated reference beam to interfere with. They are commonly used in adaptive optics systems, lens testing and increasingly in ophthalmology.

Wave front sensing method and apparatus

A new way of mixing instrumental and digital means is described for the general field of wave front sensing. The present invention describes the use, the definition and the utility of digital operators, called digital wave front operators (DWFO) or digital lenses (DL), specifically designed for the digital processing of wave fronts defined in amplitude and phase. DWFO are of particular interest for correcting undesired wave front deformations induced by instrumental defects or experimental errors. DWFO may be defined using a mathematical model, e.g. a polynomial function, which involves coefficients. The present invention describes automated and semi-automated procedures for calibrating or adjusting the values of these coefficients. These procedures are based on the fitting of mathematical models on reference data extracted from specific regions of a wave front called reference areas, which are characterized by the fact that specimen contributions are a priori known in reference areas. For example, reference areas can be defined in regions where flat surfaces of a specimen produce a constant phase function. The present invention describes also how DWFO can be defined by extracting reference data along one-dimensional (1D) profiles. DWFO can also be defined in order to obtain a flattened representation of non-flat area of a specimen. Several DWFO or DL can be combined, possibly in addition with procedures for calculating numerically the propagation of wave fronts. A DWFO may also be defined experimentally, e.g. by calibration procedures using reference specimens. A method for generating a DWFO by filtering in the Fourier plane is also described. All wave front sensing techniques may benefit from the present invention. The case of a wave front sensor based on digital holography, e.g. a digital holographic microscope (DHM), is described in more details. The use of DWFO improves the performance, in particular speed and precision, and the ease of use of instruments for wave front sensing. The use of DWFO results in instrumental simplifications, costs reductions, and enlarged the field of applications. The present invention defines a new technique for imaging and metrology with a large field of applications in material and life sciences, for research and industrial applications.
Owner:LYNCEE TEC

Lensometers and wavefront sensors and methods of measuring aberration

Wavefront measuring systems and methods are disclosed which may be employed, for example, in detecting phase aberrations in a spectacle lens and in an eye. Various embodiments include disposing a modulation pattern in the path of a return beam from the spectacle lens or the eye, and imaging a diffraction pattern at a self-imaging plane relative to the modulation pattern with a detector. The diffraction pattern is analyzed and the results are used to produce a representation of the wavefront phase characteristics that describe aberrations in the lens or eye being measured. Illumination and processing techniques for improving the measurement results are dislcosed. Various embodiments comprise systems adaptable to both measure aberrations in lenses in spectacles as well as in a patient's eyes.
Owner:ENTERPRISE PARTNERS VI

Ophthalmic instrument with adaptive optic subsystem that measures aberrations (including higher order aberrations) of a human eye and that provides a view of compensation of such aberrations to the human eye

An improved ophthalmic instrument for in-vivo examination of a human eye including a wavefront sensor that estimates aberrations in reflections of the light formed as an image on the retina of the human eye and a phase compensator that spatially modulates the phase of incident light to compensate for the aberrations estimated by the wavefront sensor Optical elements create an image of a fixation target at the phase compensator, which produces a compensated image of the fixation target that compensates for aberrations estimated by the wavefront sensor. The compensated image of the fixation target produced by the phase compensator is recreated at the human eye to thereby provide the human eye with a view of compensation of the aberrations the human eye as estimated by the wavefront sensor. The phase compensator preferably comprises a variable focus lens that compensates for focusing errors and a deformable mirror that compensates for higher order aberrations. The optical elements preferably comprise a plurality of beam splitters and a plurality of lens groups each functioning as an afocal telescope. In addition, instruments and systems are provided that exploit these capabilities to enable efficient prescription and / or dispensing of corrective optics (e.g., contact lens and glasses).
Owner:NORTHROP GRUMMAN SYST CORP +1

Wave Front Sensing Method and Apparatus

A new way of mixing instrumental and digital means is described for the general field of wave front sensing. The present invention describes the use, the definition and the utility of digital operators, called digital wave front operators (DWFO) or digital lenses (DL), specifically designed for the digital processing of wave fronts defined in amplitude and phase. DWFO are of particular interest for correcting undesired wave front deformations induced by instrumental defects or experimental errors. DWFO may be defined using a mathematical model, e.g. a polynomial function, which involves coefficients. The present invention describes automated and semi-automated procedures for calibrating or adjusting the values of these coefficients. These procedures are based on the fitting of mathematical models on reference data extracted from specific regions of a wave front called reference areas, which are characterized by the fact that specimen contributions are a priori known in reference areas. For example, reference areas can be defined in regions where flat surfaces of a specimen produce a constant phase function. The present invention describes also how DWFO can be defined by extracting reference data along one-dimensional (1D) profiles. DWFO can also be defined in order to obtain a flattened representation of non-flat area of a specimen. Several DWFO or DL can be combined, possibly in addition with procedures for calculating numerically the propagation of wave fronts. A DWFO may also be defined experimentally, e.g. by calibration procedures using reference specimens. A method for generating a DWFO by filtering in the Fourier plane is also described. All wave front sensing techniques may benefit from the present invention. The case of a wave front sensor based on digital holography, e.g. a digital holographic microscope (DHM), is described in more details. The use of DWFO improves the performance, in particular speed and precision, and the ease of use of instruments for wave front sensing. The use of DWFO results in instrumental simplifications, costs reductions, and enlarged the field of applications. The present invention defines a new technique for imaging and metrology with a large field of applications in material and life sciences, for research and industrial applications.
Owner:LYNCEE TEC

Ophthalmic instrument having an integral wavefront sensor and display device that displays a graphical representation of high order aberrations of the human eye measured by the wavefront sensor

An improved ophthalmic instrument including an integral wavefront sensor and display device, wherein the wavefront sensor measures phase aberrations in reflections directed thereto to characterize aberrations of the eye and is operably coupled to the display device, which displays a graphical representation of the aberrations of the eye. Such graphical representation may include: two dimensional contour maps that graphically depict contribution of pre-specified terms (such as spherical aberration, astigmatism and coma) for the aberrations of the eye, coefficients corresponding to such pre-specified terms that characterize the aberrations of the eye, or predefined two-dimensional icons that provide a general graphical depiction of such prespecified terms. Such graphical representations provide the practitioner with valuable information characterizing the high order optical errors of the eye (which is far beyond the diopter information typically provided by current ophthalmic instruments) for use in diagnosis and treatment of abnormalities and disease in the eye.
Owner:ADAPTIVE OPTICS ASSOC

Large diopter range real time sequential wavefront sensor

Example embodiments of a large dynamic range sequential wavefront sensor for vision correction or assessment procedures are disclosed. An example embodiment optically relays a wavefront from an eye pupil or corneal plane to a wavefront sampling plane in such a manner that somewhere in the relaying process, the wavefront beam from the eye within a large eye diopter range is made to reside within a desired physical dimension over a certain axial distance range in a wavefront image space and / or a Fourier transform space. As a result, a wavefront beam shifting device can be disposed there to fully intercept and hence shift the whole beam to transversely shift the relayed wavefront.
Owner:CLARITY MEDICAL SYST

Wavefront sensing system employing active updating of reference positions and subaperture locations on wavefront sensor

A free-space adaptive optical laser communication system having signal transmission and reception channels at all terminals in the communication system, wherein wavefront sensing (WFS) and wavefront correction mechanisms are employed along signal transmission and reception channels of all terminals in the communication system (i.e. adaptive optics) to improve the condition of the laser beam at the receiver (i.e. reduce the size of the spot a the detector plane). in the illustrative embodiment, the WFS mechanisms employ a novel WFS control process, in which active updating of reference positions and subaperture locations on the wavefront sensor. These WFS mechanism can be used in diverse application environments, including but not limited to FSO laser communication systems.
Owner:NORTHROP GRUMAN CORP

Method of treating the human eye with a wavefront sensor-based ophthalmic instrument

An improved method for treating the eye includes the step of providing an ophthalmic instrument including an integral wavefront sensor. The wavefront sensor measures phase aberrations in reflections directed thereto to characterize aberrations of the eye. The wavefront sensor may be operably coupled to a display device, which displays a graphical representation of the aberrations of the eye. Such graphical representation may include: two dimensional contour maps that graphically depict contribution of pre-specified terms (such as spherical aberration, astigmatism and coma) for the aberrations of the eye, coefficients corresponding to such pre-specified terms that characterize the aberrations of the eye, or predefined two-dimensional icons that provide a general graphical depiction of such pre-specified terms. Such graphical representations provide the practitioner with valuable information characterizing the high order optical errors of the eye (which is far beyond the diopter information typically provided by current ophthalmic instruments) for use in diagnosis and treatment of abnormalities and disease in the eye. In addition, the wavefront sensor may be part of an adaptive optical subsystem that compensates for the phase aberrations measured therein to provide phase-aligned images of the eye for capture by an image capture subsystem. Such images may be used by practitioner in diagnosis and treatment of abnormalities and disease in the eye.
Owner:NORTHROP GRUMMAN SYST CORP +1

Optimizing vision correction procedures

In one embodiment, an apparatus for optimizing vision correction procedures comprising: a narrow beam of light directed to a patient's retina; a dynamic defocus and compensation offsetting device configured to offset the defocus of a wavefront from an eye, a wavefront sensor configured to measure the local tilt of a number of subwavefronts sampled around an annular ring (the diameter of which can be dynamically changed) over the wavefront with the defocus offset; and a display device configured to display a two dimensional (2D) data points pattern in real time with each data point location representing a corresponding local tilt of the sampled subwavefronts. A proper defocus offset, not passive compensation, can reveal the predominant feature(s) of other wavefront aberration component(s), thus enabling a refractive surgeon to fine tune the vision correction procedure and minimize the remaining wavefront aberration(s) in real time. Meanwhile, by sampling the wavefront around annular rings and displaying the local tilt of the sampled subwavefronts on a monitor in the form of a 2D data points pattern, a refractive ophthalmic surgeon can easily correlate the measurement result to the two major refractive errors, namely spherical and cylinder refractive errors, including the axis of astigmatism.
Owner:CLARITY MEDICAL SYST

Sequential wavefront sensor

A sequential wavefront sensor comprises a light beam scanning module, a sub-wavefront focusing lens, a detector with more than one photosensitive area and a processor for calculating the sequentially obtained centroids of a number focused light spots from the sub-wavefronts to determine the aberration of the input wavefront. A sequential wavefront sensing method comprises the steps of; sequentially projecting a number of sub-wavefronts onto a sub-wavefront focusing lens and a detector with more than one photosensitive areas, calculating the centroid of the focused light spot from each sub-wavefront, and processing the centroid information to determine the aberration of the wavefront. In particular, a method for auto-focusing and / or auto-astigmatism-correction comprises the steps of sequentially projecting a number of sub-wavefronts around an annular ring of a wavefront to a sub-wavefront focusing lens and a detector, calculating the centroid of focused light spot from each sub-wavefront to figure out the centroid trace and hence the defocus and / or astigmatism, adjusting the focus and / or astigmatism of the optical imaging system before the wavefront sensor so that the measured defocus and / or astigmatism is minimized.
Owner:CLARITY MEDICAL SYST

Sequential wavefront sensor

A sequential wavefront sensor comprises a light beam scanning module, a sub-wavefront focusing lens, a detector with more than one photosensitive area and a processor for calculating the sequentially obtained centroids of a number focused light spots from the sub-wavefronts to determine the aberration of the input wavefront. A sequential wavefront sensing method comprises the steps of; sequentially projecting a number of sub-wavefronts onto a sub-wavefront focusing lens and a detector with more than one photosensitive areas, calculating the centroid of the focused light spot from each sub-wavefront, and processing the centroid information to determine the aberration of the wavefront. In particular, a method for auto-focusing and / or auto-astigmatism-correction comprises the steps of sequentially projecting a number of sub-wavefronts around an annular ring of a wavefront to a sub-wavefront focusing lens and a detector, calculating the centroid of focused light spot from each sub-wavefront to figure out the centroid trace and hence the defocus and / or astigmatism, adjusting the focus and / or astigmatism of the optical imaging system before the wavefront sensor so that the measured defocus and / or astigmatism is minimized.
Owner:CLARITY MEDICAL SYST

Modular adaptive optical subsystem for integration with a fundus camera body and CCD camera unit and improved fundus camera employing same

A modular fundus camera including an adaptive optical module that detachably interfaces to a fundus camera body and image capture subsystem. The fundus camera body directs light produced from a first light source into the human eye and that collects and collimates retinal reflections. The adaptive optical module includes a wavefront sensor, controller and phase-compensating optical element. The wavefront sensor measures phase aberrations in the retinal reflections and operates in a closed-loop fashion with the controller to control the phase-compensating optical element to compensate for such phase aberrations to produce phase-compensated retinal reflections for output to the image capture subsystem.
Owner:ADAPTIVE OPTICS ASSOC

Multi-target-tracking optical sensor-array technology

The multi-target tracking and discrimination system (MOST) fuses with and augments existing BMDS sensor systems. Integrated devices include early warning radars, X-band radars, Lidar, DSP, and MOST which coordinates all the data received from all sources through a command center and deploys the GBI for successful interception of an object detected anywhere in space, for example, warheads. The MOST system integrates the optics for rapid detection and with the optical sensor array delivers high-speed, high accuracy positional information to radar systems and also identifies decoys. MOST incorporates space situational awareness, aero-optics, adaptive optics, and Lidar technologies. The components include telescopes or other optical systems, focal plane arrays including high-speed wavefront sensors or other focal plane detector arrays, wavefront sensor technology developed to mitigate aero-optic effects, distributed network of optical sensors, high-accuracy positional metrics, data fusion, and tracking mounts. Field applications include space monitoring, battlefield artillery, battlefield management, ground defense, air defense, space protection, missile defense, gunfire detection, and the like.
Owner:OCEANIT LAB

Method for depth resolved wavefront sensing, depth resolved wavefront sensors and method and apparatus for optical imaging

ActiveUS20110134436A1Less sensitive to reflectionAll optics layout more compactInterferometersUsing optical meansWavefront sensorConfocal
Methods and devices are disclosed for acquiring depth resolved aberration information using principles of low coherence interferometry and perform coherence gated wavefront sensing (CG-WFS). The wavefront aberrations is collected using spectral domain low coherence interferometry (SD-LCI) or time domain low coherence interferometry (TD-LCI) principles. When using SD-LCI, chromatic aberrations can also be evaluated. Methods and devices are disclosed in using a wavefront corrector to compensate for the aberration information provided by CG-WFS, in a combined imaging system, that can use one or more channels from the class of (i) optical coherence tomography (OCT), (ii) scanning laser ophthalmoscopy, (iii) microscopy, such as confocal or phase microscopy, (iv) multiphoton microscopy, such as harmonic generation and multiphoton absorption. In particular, a swept source (SS) is used that drives both an OCT channel and a coherence gated wavefront sensor, where:a) both channels operate according to SS-OCT principles;b) OCT channel integrates over at least one tuning scan of the swept source to provide a TD-OCT image of the object;c) CG-WFS integrates over at least one tuning scan of the swept source to provide an en-face TD-OCT mapping of the wavefront.For some implementations, simultaneous and dynamic aberration measurements / correction with the imaging process is achieved. The methods and devices for depth resolved aberrations disclosed, will find applications in wavefront sensing and adaptive optics imaging systems that are more tolerant to stray reflections from optical interfaces, such as reflections from the microscope objectives and cover slip in microscopy and when imaging the eye, the reflection from the cornea.
Owner:PODOLEANU ADRIAN +1

Ophthalmic instrument having hartmann wavefront sensor with extended source

An improved ophthalmic instrument including an extended source producing light that is formed as an image on the retina of the human eye and reflected there from to produce retinal reflections derived from the extended source, and a wavefront sensor that estimates aberrations in the retinal reflections. The wavefront sensor includes a plurality of subapertures that form a plurality of images of the extended source from the retinal reflections, an imaging device that captures the plurality of images and outputs image data representing the images, and an image processing computer that generates an estimate of the gradient field of the retinal reflections by applying image correlation techniques in the digital domain to the image data. The image processing computer preferably generates an estimate of the local tilt of the retinal reflections incident on a given subaperture by deriving a correlation product for a given image formed by the given subaperture and identifying a peak correlation point of the correlation product. The dimensions of the image of the extended source formed on the retina of the human eye is preferably larger that a diffraction limited spot yet small enough so that different parts of the image do not experience substantially different aberrations while passing through the eye. In addition, the angular size of the image of the extended source is preferably limited so that the plurality of images formed by the subapertures do not overlap.
Owner:ADAPTIVE OPTICS ASSOC

Ophthalmic Wavefront Sensor Operating in Parallel Sampling and Lock-In Detection Mode

One embodiment of the present invention is an ophthalmic wavefront sensor for use with an ophthalmic microscope to provide continuous measurements of the refractive state of an eye. The wavefront sensor operates in both parallel sampling and lock-in detection mode by synchronizing the pulsing of the light source with a multiple number of position sensing devices / detectors used for detecting the centroid position of the sampled sub-wavefronts. Other embodiments include a beam scanner to sample selected portions of the wavefront and a live image sensor and a tracking deflector.
Owner:CLARITY MEDICAL SYST

Holographic Image Display Systems

We describe a method of determining an aberration correction for a holographic image display system using a spatial light modulator (SLM) to display a hologram. Embodiments of the invention measure the corrections needed for a particular projection system, using the same system SLM as used to generate the images to provide wavefront-sensing holograms. The projector's projection optics are used to provide the wavefront sensor and there is no need for lenslets. Embodiments of the invention use a plurality of successive holograms directing light from differently-located patches on the hologram into the image.
Owner:LIGHT BLUE OPTICS

Scanning laser microscope with wavefront sensor

An enhanced resolution scanned image of an object is produced by a scanning laser microscope which includes an illumination arm for scanning an object with a focused probe beam and a detection arm for receiving light from the object. The detection arm includes a detector which collects and detects light from the object to produce pixel data for a plurality of pixels. In addition, the detection arm includes a wavefront sensor for sensing phase variations of the light from the object to produce wavefront data for scanned pixel locations. From the wavefront shape of the collected light at each pixel location, a high frequency spectrum is determined which corresponds to uncollected scattered light from small scale features of that pixel location. An enhanced resolution image of a region of interest is produced based on the high frequency spectra of the scanned pixel locations.
Owner:3M INNOVATIVE PROPERTIES CO

System and method of measuring and mapping three dimensional structures

A system for mapping a three-dimensional structure includes a projecting optical system adapted to project light onto an object, a correction system adapted to compensate the light for at least one aberration in the object, an imaging system adapted to collect light scattered by the object and a wavefront sensor adapted to receive the light collected by the imaging system and to sense a wavefront of the received light. For highly aberrated structures, a number of wavefront measurements are made which are valid over different portions of the structure, and the valid wavefront data is stitched together to yield a characterization of the total structure.
Owner:AMO DEVMENT

Beam director and control system for a high energy laser within a conformal window

A beam control system and method. The system includes an illuminator for providing a first beam of electromagnetic energy at a first wavelength; a source for providing a second beam of electromagnetic energy at a second wavelength; and an arrangement for compensating wavefront errors in the second beam using a bias representative of a comparison between the first wavelength and the second wavelength. In the illustrative embodiment, the arrangement includes a processor which corrects wavefront errors using a bias representative of a difference between said first wavelength and said second wavelength. In the disclosed application, a target wavefront sensor is included and the laser is a high-energy laser beam. The wavefront errors include a chromatic aberration and the errors are compensated using a deformable mirror and a correction algorithm executed by an adaptive optics processor. In one alternative embodiment, the errors are compensated using an optical aberration corrector. The aberration corrector may be a holographic optical element or other suitable device. In another alternative embodiment, the errors are corrected with the above embodiment in combination with the use of “woofer” and “tweeter” correcting elements with the woofer being a long stroke low frequency element and the tweeter being a short stroke high frequency element.
Owner:RAYTHEON CO

Systems and methods of phase diversity wavefront sensing

A phase diversity wavefront sensor includes an optical system including at least one optical element for receiving a light beam; a diffractive optical element having a diffractive pattern defining a filter function, the diffractive optical element being arranged to produce, in conjunction with the optical system, images from the light beam associated with at least two diffraction orders; and a detector for detecting the images and outputting image data corresponding to the detected images. In one embodiment, the optical system, diffractive optical element, and detector are arranged to provide telecentric, pupil plane images of the light beam. A processor receives the image data from the detector, and executes a Gerchberg-Saxton phase retrieval algorithm to measure the wavefront of the light beam.
Owner:AMO DEVMENT

Signal-to-noise ratio tuned adaptive optics control system

An improved, adaptive optics control system having a signal-to-noise ratio-tuned wavefront corrector is disclosed. The system comprises a wavefront corrector, a wavefront sensor, a wavefront reconstructor and a wavefront controller. The wavefront corrector has a surface controlled by a plurality of actuators. The wavefront slope sensor has a subaperture separation mechanism for defining a plurality of subapertures through which the distorted wavefront can pass, each subaperture corresponding to an actuator of the wavefront corrector. The wavefront slope sensor produces a wavefront sensor output signal for each subaperture indicative of the distortion of the wavefront. The wavefront reconstructor is adapted to receive the wavefront sensor output signals and calculate corresponding phase estimates based thereon, each phase estimate having a signal-to-noise ratio. The wavefront reconstructor generates a plurality of correction signals to be applied to each of the actuators of the wavefront corrector, each correction signal having a bandwidth. The wavefront controller is adapted to selectively adjust the bandwidth of each correction signal based on the signal-to-noise ratio of the corresponding phase estimate of the actuator to which it is to be applied. A method of optical wavefront distortion correction is also disclosed.
Owner:THE BOEING CO

Optical diagnosis using measurement sequence

Devices, systems, and methods that facilitate optical analysis, particularly for the diagnosis and treatment of refractive errors of the eye. An optical diagnostic method for an eye includes obtaining a sequence of aberration measurements of the eye, identifying an outlier aberration measurement of the sequence of aberration measurements, and excluding the outlier aberration measurement from the sequence of aberration measurements to produce a qualified sequence of aberration measurements. The sequence of aberrations measurements can be obtained by using a wavefront sensor. An optical correction for the eye can be formulated in response to the qualified sequence of aberration measurements.
Owner:AMO DEVMENT

Very fast time resolved imaging in multiparameter measurement space

Plural electronic or optical images are provided in a streak optical system, as for instance by use of plural slits instead of the conventional single slit, to obtain a third, fourth, etc. dimension—rather than only the conventional two, namely range or time and azimuth. Such additional dimension or dimensions are thereby incorporated into the optical information that is to be streaked and thereby time resolved. The added dimensions may take any of an extremely broad range of forms, including wave-length, polarization state, or one or more spatial dimensions—or indeed virtually any optical parameter that can be impressed upon a probe beam. Resulting capabilities remarkably include several new forms of lidar spectroscopy, fluorescence analysis, polarimetry, spectropolarimetry, and combinations of these, as well as a gigahertz wavefront sensor.
Owner:ARETE ASSOCIATES INC

Linear adaptive optics system in low power beam path and method

A system and method for providing a wavefront corrected high-energy beam of electromagnetic energy. In the illustrative embodiment, the system includes a source of a first beam of electromagnetic energy; an amplifier for amplifying said beam to provide a second beam; a sensor for sensing aberration in said second beam and providing an error signal in response thereto; a processor for processing said error signal and providing a correction signal in response thereto; and a spatial light modulator responsive to said correction signal for adjusting said beam to facilitate a correction of said aberration thereof. In more specific embodiments, the source is a laser and the sensor is a laser wavefront sensor. A mirror is disposed between said modulator and said sensor for sampling said beam. The mirror has an optical thin-film dielectric coating on at least one optical surface thereof. The coating is effective to sample said beam and transmit a low power sample thereof to said means for sensing aberration. The processor is an adaptive optics processor. The spatial light modulator may be a micro electro-mechanical system deformable mirror or an optical phased array. In the illustrative embodiment, the source is a master oscillator and the amplifier is a power amplifier beamline. An outcoupler is disposed between the oscillator and the amplifier.
Owner:RAYTHEON CO

Wavefront measuring method based on Hartmann wavefront sensor

ActiveCN102735348AAlleviate the situation where the measurement accuracy is severely limited by the sub-aperture arrangement densityChange structureOptical measurementsPhotovoltaic detectorsWavefront sensor
The invention relates to a wavefront measuring method based on a Hartmann wavefront sensor. According to the method, light spot array images detected by an array type photoelectric detector in the Hartmann wavefront sensor are used for obtaining the intensity distribution information of each light spot and the mass center position offset relative to the calibration time, the inclination aberration information of a sub wavefront in the corresponding sub aperture can be obtained according to the mass center offset, the high order aberration information of defocusing, astigmatism and the like ofthe sub wavefront in the corresponding sub aperture can be obtained by a phase inversion algorithm according to the intensity distribution information of the light spot, the inclination aberration information and the high order aberration information are combined to form sub wavefronts, and finally, all sub wavefronts are reconstructed by a wavefront reconstruction method or a wave surface split joint method for forming the whole aperture wavefront information. The method has the advantages that the light spot dispersion distribution information which originally puzzles the light spot mass center calculation is utilized, more information quantity of the sub wavefronts in the sub aperture is obtained, the wavefront detection precision of the Hartmann wavefront sensor is favorably improved,or the requirement on the aperture number is favorably reduced.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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