The invention relates to a
wavefront measuring method based on a Hartmann
wavefront sensor. According to the method,
light spot array images detected by an array type photoelectric
detector in the Hartmann
wavefront sensor are used for obtaining the intensity distribution information of each
light spot and the
mass center position offset relative to the calibration time, the inclination aberration information of a sub wavefront in the corresponding sub aperture can be obtained according to the
mass center offset, the high order aberration information of defocusing,
astigmatism and the like ofthe sub wavefront in the corresponding sub aperture can be obtained by a
phase inversion algorithm according to the intensity distribution information of the
light spot, the inclination aberration information and the high order aberration information are combined to form sub wavefronts, and finally, all sub wavefronts are reconstructed by a wavefront
reconstruction method or a wave surface split joint method for forming the whole aperture wavefront information. The method has the advantages that the light spot dispersion distribution information which originally puzzles the light spot
mass center calculation is utilized, more
information quantity of the sub wavefronts in the sub aperture is obtained, the wavefront detection precision of the Hartmann
wavefront sensor is favorably improved,or the requirement on the aperture number is favorably reduced.