3373 results about "Light spot" patented technology

The invention discloses a visual combined infrared precast beam appearance defect detection method, and relates to the technical field of civil engineering structure detection and nondestructive testing, and the method comprises the following steps: establishing an illumination time sequence observation layer, collecting multi-dimensional optical parameters aiming at the surface of a precast beam, and generating a dynamic reflection fingerprint baseline; and performing coherent phase decomposition based on the dynamic reflection fingerprint baseline, separating the specular reflection signal from the material texture signal, and calibrating light spot track and intensity evolution data in the unified baseline. According to the method, an illumination time sequence observation layer is constructed to generate reflection fingerprints, coherent phase decomposition and anti-fact playback are combined, reflection interference is stripped, and crack boundaries are recovered; time coordinates are reconstructed through double-mirror-image anchor points, and crack evolution is accurately recovered; phase conjugate projection and light field traction are combined, a dynamic threshold optical fence is established, the exposure rhythm is controlled in a closed-loop mode, and precise detection of the defects of the precast beam is achieved.

The invention relates to a light spot uniformity optimization method and system for a high-precision VCSEL device, and the method comprises the following steps: carrying out the light field collection of a light-emitting surface of the VCSEL device, obtaining the intensity distribution of original light spots, analyzing the non-uniformity of each light-emitting unit, and extracting the non-uniformity characteristics of the light spots. And carrying out deviation cause analysis based on the characteristics, and identifying device structure deviation parameters. According to the method, an etching process is optimized, a corrected oxidized aperture configuration scheme is obtained, near-field light field simulation is carried out by adopting a finite difference time domain method, and optimized light field distribution is verified and predicted. And finally, adaptive compensation design is carried out on the Bragg reflector structure based on a prediction result, light field regulation and control are realized, target light spot uniformity distribution is finally obtained, and the problem that systematic analysis and feedback control on non-uniformity causes of a light emitting unit layer in a device are lacked in the prior art is solved. And local bright spots or dark areas are caused.

The invention relates to a related light measuring device based on a bevel mirror and a control method, and solves the problem that the existing three-dimensional detection technology is insufficient in comprehensive adaptability and cannot meet the requirements of precision detection for stability, precision and data collaboration, and the related light measuring device comprises a laser emission head, a double-bevel mirror, a light path receiving module, a zoom camera and a circuit processing unit. The first bevel mirror is provided with a through hole for laser to directly irradiate a target; the light path receiving module receives and reflects the laser-to-electric signal; the second bevel mirror reflects the target and the light spot light to the camera to obtain visual information; and the circuit processing unit controls all the components, integrates laser and visual information, and realizes three-dimensional detection of the target. The method has the following effects: through the light path collaborative design of the double-bevel mirror, precise and synchronous acquisition of laser ranging signals and visual contour / light spot information is realized, so that high-precision three-dimensional detection of the distance, the flatness and the segment difference of a target object is efficiently completed.

The invention discloses a laser channel atmospheric turbulence fading real-time compensation device and method based on a galvanometer system, and the method comprises the steps: enabling an incident light beam to irradiate a transparent PCB integrated with a photodiode array after the incident light beam is focused through a convex lens, obtaining the light intensity distribution of a current light spot through the photodiode array, and transmitting the light intensity distribution to a signal processing unit; the signal processing unit coarsely adjusts the deviation direction of the light spots according to the received light intensity distribution data, and aligns the part with the strongest light intensity in the light spots to the end face of the optical fiber; and based on the roughly adjusted light spot deviation direction, the signal processing unit dynamically adjusts the deflection angle of the galvanometer by using a gradient descent method according to the power measurement value of the receiving coupling module, so that the fine adjustment of the light spot deviation direction is realized, and the receiving coupling power is maximized. The objective of receiving optical power maximization is achieved, optical design, electronic control and algorithm optimization are combined, and atmospheric turbulence compensation with high cost performance is achieved.

The invention provides a dynamic focusing method and system based on a light spot image and a medium. The method comprises the following steps: focusing to any surface of an object to be measured, and obtaining a calibration image; calculating the center of mass of the focusing surface light spot of the to-be-measured object in the calibration image as a zero point; the method comprises the following steps: processing a light spot image acquired on the surface of a to-be-measured object to acquire a corresponding pixel line-pixel value curve graph; through analyzing peak points and valley points of the pixel line-pixel value curve graph, screening segmentation points of the pixel line-pixel value curve graph, and calculating a corresponding light spot centroid according to the pixel line-pixel value curve graph on the left side and / or the right side of the segmentation points corresponding to the target layer of the object to be measured so as to obtain a defocusing amount; the dynamic focusing is realized by analyzing whether the defocusing amount falls into the control range. The dynamic focusing method provided by the invention is simple and convenient in calculation and convenient for hardware implementation; meanwhile, the invention further provides simplified segmentation point calculation, so that the calculation efficiency is improved; and determining the break point for ensuring the accuracy of dynamic focusing.

The invention relates to the technical field of industrial laser precision measurement, in particular to a laser centering device for a coupler and a using method of the laser centering device for the coupler. Light spot displacement signals and environment vibration signals are synchronously collected through a laser transmitter and an optical sensor array, and a frequency domain feature decoupling module is adopted to separate a shafting displacement component and an interference component; the time domain correlation verification module is used for calculating signal time sequence correlation and generating a deviation vector, and finally the adaptive compensation decision module is used for analyzing the deviation vector and outputting an adjustment instruction. According to the invention, effective separation of real misalignment and transient noise in a dynamic environment is realized, the technical problem of measurement misalignment of an existing laser centering device in a complex industrial environment is solved, and the coupling installation precision and the equipment operation stability are improved.

The invention relates to the technical field of laser processing, in particular to a laser light path rapid switching method and related equipment. The laser light path fast switching method comprises the steps that a single laser emits original laser, the original laser passes through a laser collimator or directly enters a multi-channel reflecting mirror set to adjust a transmission path, a beam expander is selectively started for beam expanding according to the machining requirement, a preliminary shaping light beam is formed, and a basic light path matched with a follow-up optical device is constructed. According to the invention, through the integrated driving mechanism and grating ruler full-closed-loop control rapid switching device, the mobile carrier pre-installed with multiple DOEs is driven to realize accurate cutting-in of a target light spot element in a light path, and the problem of rapid adaptation of multiple light spot patterns in a single laser system is solved.

The invention discloses a high-reflective surface defect detection method based on structured light and phase deflection, which belongs to the technical field of visual inspection, and comprises the following steps: generating a multi-frequency sinusoidal grating pattern by using a structured light module, and projecting the multi-frequency sinusoidal grating pattern to the surface of a detected object; multi-frequency phase shift coding is introduced, an absolute phase is calculated through a pilot frequency unwrapping method, a depth map obtained by the structured light is calculated, and a structured light point cloud is reconstructed; a unit normal vector is calculated, a Poisson reconstruction model is adopted to obtain a depth map obtained by phase deflection, and deflection point cloud is obtained; the structured light point cloud data and the deflection point cloud data are registered through an iterative nearest point algorithm and then fused to form a fused depth map; and determining a defect area by adopting the maximum principal curvature and the minimum principal curvature combined mask. By means of the mode, the limitation of a traditional three-dimensional measurement means in high-reflection and complex-curvature surface defect recognition is solved, and submicron-level three-dimensional deformation detection precision is achieved.

The invention relates to the technical field of automatic control, in particular to a detection equipment attitude real-time correction system which comprises an attitude trajectory extraction module, a trajectory stability evaluation module, an interference area recognition module, a light spot trajectory reconstruction module and an attitude correction control module. According to the invention, through comprehensive extraction of the direction change trend, the angle difference and the trajectory overlapping condition in the light spot image sequence, the trajectory trend of the attitude change between continuous frames is established, so that the identification of the attitude offset evolution process is more detailed, the attitude change stability analysis is realized in the time sequence dimension, and the accuracy of the attitude change is improved. Interference area identification is carried out by means of luminance continuity and spatial distribution consistency of light-emitting pixels, real light spots and lagging residual signals can be effectively distinguished, a light spot track path is reconstructed on the basis of interference removal, and real-time calculation of a track dynamic offset direction and an angle change amplitude is combined with track correction rule setting, so that the accuracy of track correction is improved. And the specific correction action matching of the deviation state is realized.

The invention discloses an off-line adjusting device and method for light spot position offset adjustment, and belongs to the technical field of optical precision adjustment. The device comprises a single-beam light-emitting direction adjusting device, a single-beam light-emitting position adjusting device and a multi-beam angle adjusting device which can be formed on the same off-line platform by configuring different detection units. The method comprises the following steps of: calibrating a light source by using the devices in sequence, and constructing an ideal light source assembly with accurate direction, accurate position and multi-beam parallelism; the whole device is installed to a complete machine system to serve as an absolute reference, and a complete machine optical element is adjusted to make a light spot reach a preset position; and finally, replacing with a customized light source and carrying out fine adjustment by taking the calibrated optical element as a reference. According to the method, decoupling of light source calibration and optical element calibration is achieved through the process of establishing the benchmark offline, transmitting the benchmark through the whole machine and customizing light source adaptation, the installation and adjustment precision, efficiency and repeatability are remarkably improved, and dependence on operation experience is reduced.

The invention provides a cavity adjusting method and device for a laser gyroscope resonant cavity, and the method comprises the following steps: building a light beam loop: horizontally placing a resonant cavity substrate on a supporting seat, and forming the light beam loop with two plane reflectors and two spherical reflectors; light beam introduction: starting a sweep frequency laser assembly, and enabling the reference light beam to enter a resonant cavity light path after passing through a light beam collimation system; light spot form monitoring and coarse adjustment: after a light beam emitted by the resonant cavity is collected by an image collector, the main control computer analyzes the light spot form and judges the imbalance state, evaluation information is fed back to the control system, the control system adjusts the inclination amount of the horizontal dimension and the pitching dimension of the light beam in the light beam collimation system according to the feedback information, and the light spot form is obtained. And the light spot is located at the center of the cavity mirror to finish coarse adjustment of the cavity. According to the method, coarse cavity adjustment can be completed without depending on a complex optical cavity technology, the cavity adjustment time is greatly shortened, the overall operation is simple, and the cavity adjustment efficiency is improved.

The invention belongs to the technical field of image processing, and particularly relates to an aluminum bar quality detection method and system based on machine vision, and the method comprises the steps: obtaining a gray image of the surface of an aluminum bar; constructing a structure tensor for describing the distribution of the pixel points in the local gradient direction, and obtaining gradient coherence indexes of the pixel points according to feature values of the structure tensor; according to the gradient coherence index, the gray value of the pixel point and the gray value mean value and the gray value standard deviation in the neighborhood, obtaining coherence weighted saliency of the pixel point; according to the coherence weighted saliency and the coherence weighted saliency of all the pixel points in the pixel point neighborhood, acquiring a defect probability index of the pixel points; and performing aluminum bar surface quality discrimination according to the defect probability index. According to the method, through combination of gradient coherence and local brightness statistical characteristics, interference of specular reflection light spots on the surface of the aluminum bar and wiredrawing texture noise is effectively inhibited, and accuracy of detection of weak defects such as scratches is improved.

The invention discloses a primary and secondary mirror combined detection system and method for a beam shrinking system, and belongs to the technical field of optical detection.The method comprises the steps that a first micro-spherical mirror and a second micro-spherical mirror are arranged, reflection light spots are captured through an interferometer, the position offset is calculated, and a first control instruction for adjusting the pose of a secondary mirror is generated; a dual-band light source is integrated in a detection light path, wavefront data and alignment monitoring data are collected, and temperature drift is corrected to obtain effective combined wavefront; an error separation model is constructed based on the primary mirror compensator parameter and the Zernike aberration coefficient, and a primary mirror surface shape error component and a secondary mirror offset error component are decoupled and separated by using a preset aberration coupling coefficient; feeding the error component back to a polishing process and a displacement table for closed-loop iterative correction until the RMS value and the PV value of the effective combined wavefront meet a preset imaging quality index; through precise positioning, error correction and decoupling separation, the precision and efficiency of primary and secondary mirror combination detection are improved, and targeted correction is realized.

The invention belongs to the technical field of hard and brittle crystal material micropore machining, and particularly relates to an ultra-precision micropore multi-energy field coupling machining method and system.The method comprises the steps that the laser pulse frequency and power are set according to the workpiece material type and the micropore depth-diameter ratio, and a laser focus is positioned at the inner hole bottom of a workpiece; a modified structure extending in the axial direction of a hole is formed by controlling matching of a light spot and a hole diameter and the movement track of the light spot, in the machining process, a plasma nozzle and laser coaxially move, a modified area is removed in real time, a heat affected zone and the hole shape taper are restrained, meanwhile, vibration is applied to a workpiece through an axial ultrasonic vibration device, and machining precision is improved. And chip discharge is promoted, and stress and crack generation are reduced. The problems of serious thermal damage, poor hole shape precision, low machining efficiency and high energy consumption in the micropore machining process in the prior art are solved, and high-quality and high-precision machining of the high-depth-diameter-ratio micropore of the hard and brittle transparent crystal material is achieved.

The invention discloses an automatic optical prism optical axis parallelism adjusting method based on image processing, and relates to the technical field of high-end equipment optical detection. According to the scheme, a prism reflection image sequence is collected based on a calibration light source, an optical axis projection coordinate system is established, light spot geometric centroid and boundary parameters are extracted, and an optical axis direction vector matrix is constructed; calculating an optical axis included angle deviation according to the multi-frame image, and establishing an optical axis parallelism parameter model; decomposing the error distribution matrix through an iterative minimum deviation method to obtain attitude bias and system aberration components, and generating a prism attitude adjustment vector to realize closed-loop automatic adjustment; according to the invention, high-precision and self-adaptive adjustment of the optical axis parallelism can be realized under the conditions of complex illumination and device batch fluctuation, and the stability, consistency and automation level of optical system installation and adjustment are improved.

This invention discloses a 2D gaze point estimation method based on the pupil-corneal reflection vector method. It utilizes the star ray method for pupil center localization and adds a classification pupil detection mechanism for error correction. Corneal feature extraction is performed to obtain the center coordinates of the corneal reflected light spot. Step 4: Establish a gaze mapping model, and assign the detected pupil-corneal reflection vector V(V) to each frame of the image. x V y The gaze coordinates G(G) mapped onto the screen x G y This invention enables 2D gaze point estimation based on the pupil-corneal reflection vector method. Compared with existing technologies, this invention can improve the accuracy of 2D gaze point estimation.

The invention relates to the field of heliostat calibration, and discloses a scheduling method for calibrating heliostats through cooperation of artificial light sources and cameras in a large-scale heliostat field, and the method comprises the following steps: determining the heliostat range covered by each camera, determining the heliostat range covered by each artificial light source, and determining the heliostat range covered by each camera; the method comprises the following steps: determining the center and size of a light spot in an image shot by a camera when the heliostats are calibrated, determining the heliostats which can be calibrated in the coverage range of each artificial light source-camera combination, regarding each effective calibration combination as a node to construct an undirected graph, dividing the nodes into a plurality of groups through a graph grouping algorithm, and ensuring that the nodes in the same group are not connected with each other, therefore, all combinations in the same group can execute calibration in parallel. According to the method disclosed by the invention, the problem of affiliation misjudgment caused by light spot interference between heliostats is solved, possible shadow and shielding problems are avoided, dynamic scheduling of the artificial light source and the camera is realized, and invalid operation time is shortened.

Disclosed is a three-dimensional reconstruction method based on kinematic calibration of line structured light point set individualization, and the method includes the following steps: rigidly assembling an area-array camera and a line structured light emitter, and mounting the assembly on a motion platform; calibrating structural parameters of the motion platform of a measuring device by using a reference radius of a standard sphere and line structured light scanned data; registering a spatial position relationship of a line structured light point set by taking a calibrated spherical center position of the standard sphere and the reference radius of the standard sphere as constraints; controlling the five-axis motion platform to move and acquiring scanned data of a measured member under different poses; and completing high-quality three-dimensional model reconstruction of the measured member subjected to multi-pose scanning by using the scanned data and a real-time point cloud registration matrix.

The invention relates to the technical field of laser shaping, in particular to a light spot shaping method and system based on a spatial light modulator, and the method comprises the steps: providing and expanding an incident laser beam in Gaussian distribution, and obtaining a collimated and expanded beam; irradiating an incident laser beam to a spatial light modulator, loading a preset phase modulation pattern to modulate a wavefront phase, and outputting a phase modulation beam; the phase modulation light beam is input into a 4f imaging system, a spatial light modulator is located on the front focal plane of a first lens, and the light beam forms a light field with target intensity distribution on the rear focal plane of a second lens after passing through the system; and the light field is focused on the surface of a workpiece to be processed through an objective lens to form a flat-topped light spot. According to the scheme, uniform light intensity distribution can be flexibly generated without replacing optical elements, the uniformity and utilization efficiency of laser energy in a machining area are remarkably improved, and the problem of material damage or insufficient edge machining caused by too strong center energy is effectively solved.

The invention discloses a laser-assisted helium arc penetration fusion welding method, and belongs to the technical field of welding. The problems that according to an existing paraxial laser-electric arc composite structure, the welding track is difficult to control, the energy coupling efficiency is low due to laser energy loss, and weld joint partial melting and undercut defects are caused due to uneven distribution of a welding temperature field due to a generated asymmetric heat source are solved. The welding method comprises the steps of 1, pretreatment; 2, after being focused by a focus lens, the laser is divided into three laser beams through a spectroscope, then the three laser beams are converged again through a plurality of reflectors, three fan-shaped light spots are formed on the surface of the to-be-welded plate after convergence, and finally the focal plane position of the laser is adjusted to be located on the surface of the to-be-welded plate; 3, setting welding current and arc voltage; and fourthly, laser is used for assisting helium arc penetration fusion welding. The method is used for laser-assisted helium arc penetration fusion welding.

The utility model discloses a chip defect multi-face detection device which comprises a detection shell, a display mechanism used for chip multi-face display is installed on the detection shell, a camera is installed in the detection shell, and an adjusting mechanism used for driving the camera to adjust the size of a light spot in the detection shell is further installed on the detection shell. According to the utility model, through the cooperation of the rectangular prism module, the surface light source, the beam splitter prism and the mesopore surface light source, the four rectangular prisms are closed together to form a square chamber, and the chip is placed in the square chamber, so that a camera can detect the front surface and four side surfaces of the chip at the same time; through the arranged adjusting mechanism, the product is small, a telecentric lens needs to be used, and the working distance of the telecentric lens is relatively fixed, so that in order to facilitate focusing, the device is provided with the focusing adjusting mechanism, the position of the telecentric lens can be adjusted through a knob, and a shot picture can be clearly displayed.

The invention provides a signal processing method and system for a long-distance follow-up laser seeker, and belongs to the technical field of signal processing. Target surface center coordinates, a light spot image sequence and a synchronous echo pulse waveform sequence of the seeker are obtained; the speckle energy entropy and the centroid drift distance are obtained by calculating the information entropy and the centroid displacement of the target light spot image, and the pulse width parameter is extracted from the echo waveform. And constructing the three parameters into a laser feature vector, and inputting the laser feature vector into a pre-trained reflecting surface classification model so as to identify the surface material type of a laser irradiation point in real time. And determining a group of optimal follow-up control gain sets from the material gain mapping relation according to the surface material type, and dynamically reconstructing a follow-up control loop by using the optimal follow-up control gain sets. And the sight angle error of the light spot mass center and the target center is calculated, and the adjusted control loop is used for calculating the error to generate an accurate driving instruction signal, so that the tracking stability and the tracking precision of the target are improved.

The invention discloses a vacuum cup welding device which comprises a machine table, a vacuum cup welding device and a welding device. The overall position adjusting mechanism is used for vertically and horizontally adjusting the position; the angle adjusting mechanism is arranged on the overall position adjusting mechanism, adjusts the vertical height and the horizontal position through the overall position adjusting mechanism and is used for adjusting the angle; and the welding mechanism is arranged on the angle adjusting mechanism, the angle of the welding mechanism is adjusted through the angle adjusting mechanism, the angle of the welding mechanism can be adjusted under the condition that the distance is not changed, and the welding mechanism can switch the scanning state and the welding state by adjusting the position of a laser convergent point. The position and angle of the welding mechanism are adjusted through the overall position adjusting mechanism and the angle adjusting mechanism, and the welding mechanism adjusts the position of the lens through the dual effects of air pressure and a supporting spring, so that laser beam convergent points are in two modes, one mode is that the laser beams converge at the welding position to generate high temperature to weld the vacuum cup, and the other mode is that the laser beams converge at the welding position to generate high temperature; and according to the other method, light spots are formed to irradiate the welding position to judge the gap condition, if the gap is larger than the error threshold value, welding is stopped, and if the gap is smaller than the error threshold value, the laser irradiation time during welding is adjusted according to the size of the gap, so that the welding quality is improved.

The invention discloses a wafer scanning method and device and a storage medium. The method comprises the steps of obtaining the radius of a to-be-scanned wafer and the preset effective length of a linear light spot of a scanning camera; the wafer is divided into a first area and a second area based on the radius and the effective length of the linear light spot, the first area comprises an annular area with the radius value larger than a first preset radius threshold value, and the second area comprises a circular area with the radius value smaller than the first preset radius threshold value; controlling the scanning camera to perform spiral line scanning on the first area, and then performing back-and-forth scanning on the second area along a straight line until scanning is completed; according to the invention, the surface area of the wafer is divided into the annular first area and the circular second area, the first area is subjected to spiral line scanning to improve the scanning rate of the wafer, and then the second area is subjected to back-and-forth scanning to ensure that the position close to the center of the wafer is accurately scanned.

The invention provides a laser welding method for an unequal-thickness heterogeneous hot-formed steel joint by cooperatively regulating and controlling annular light spots and light beam deflection. The method comprises the following steps: firstly, pretreating, clamping and positioning the PHS1500 and PHS2000 unequal-thickness ultrahigh-strength steel plates; then, the deflection angle of the light beam is adjusted to be within the range of-30 degrees to + 30 degrees; and finally, a galvanometer control system is used for driving a laser beam to conduct swing scanning in a circular track, and welding is completed under the condition that parameters such as laser power, welding speed, swing frequency, the ratio of swing amplitude to core ring energy and the like are set. According to the method, wire filling is not needed, the PHS1500 and PHS2000 butt welding joints can be effectively connected within the light beam deflection angle range of-30 degrees to + 30 degrees, efficient connection can be achieved within the light beam deflection angle range of-20 degrees to + 20 degrees, weld joint forming is effectively improved, weld joint grains are refined, and the problems of stress concentration and welding softening areas caused by different thicknesses and different strengths of plates are solved. And within the light beam deflection angle range of-20 degrees to + 20 degrees, the obtained joint welding seam is well formed, the tensile strength can reach 1400 MPa or above, and the method is suitable for manufacturing the tailor-welded structure of the unequal-thickness plates of the automobile body.

The invention relates to the technical field of optical detection, in particular to a high-precision laser imaging and defect detection system based on line spectrum confocal. A light source module is used for emitting a light source light beam to a to-be-detected target; the beam shaping module is used for shaping the light source beam into a Gaussian spot by using a collimating optical element; the confocal measurement module is used for focusing Gaussian light spots to the surface of a to-be-measured target and forming a dispersion focal region in the Z-axis direction, so that different height positions of the surface of the to-be-measured target correspond to focus points with different wavelengths; the reflected light guiding module is used for collecting reflected light from the surface of a to-be-detected target, separating the reflected light from an incident light path and guiding the reflected light to a detection path; the photoelectric detection module is used for receiving reflected light in the detection path and recording spectral information corresponding to each spatial position; and the defect analysis module is used for calling a defect identification model to carry out defect type identification and area positioning on the to-be-detected target based on the collected spectral information. According to the invention, detection of tiny defects on the surface of a complex material can be realized.

The invention discloses a focusing method of a laser, a focusing control device and laser etching equipment, and the focusing method of the laser comprises the steps: taking a current reference height as a starting point, and determining a plurality of different laser heights of the laser according to a current height adjustment step pitch; at each laser height, a laser device is controlled to form a plurality of light spots through laser etching, and the average diameter of the light spots corresponding to each laser height is determined; determining whether the laser height corresponding to the minimum light spot average diameter meets a preset focusing qualification condition or not; if not, the next reference height and the next height adjustment step pitch are determined according to the size relation of the light spot average diameters corresponding to the multiple different laser heights, and the steps are repeated till the laser height corresponding to the minimum light spot average diameter meets the preset focusing qualification condition. According to the technical scheme provided by the invention, laser focusing is accurately and efficiently completed, and the stability and improvement of the laser etching process quality are ensured.

The invention discloses a high-efficiency low-loss preparation method of a single crystal silicon carbide wafer. The method comprises the following steps: A, grinding the surface of a single crystal silicon carbide ingot; b, the ultrafast pulse laser is modulated into N light spots, the N light spots are focused in the crystal ingot and distributed in the axial direction of the crystal ingot according to preset depth positions, and all the light spots are parallel to the horizontal direction; all the light spots are scanned at the same time, the scanning surface formed by the same light spot covers the cross section of the single crystal silicon carbide crystal ingot in the horizontal direction, and N laser modified layers are formed after scanning; c, carrying out stress-induced separation on the single crystal silicon carbide crystal ingot in the step B; and D, grinding the cutting surface of the single crystal silicon carbide wafer. According to the high-efficiency and low-loss preparation method of the single-crystal silicon carbide wafer, the preparation efficiency of the silicon carbide wafer is improved, meanwhile, the material loss of the single-crystal silicon carbide ingot is reduced, and the yield of the single-crystal silicon carbide ingot is improved.

The application discloses IC chip laser ablation printing equipment and relates to the field of chip letter removing processing. The equipment comprises a top base, the bottom of the top base is installed at the top of a receiving box, and a vibrating disc feeding module is sequentially installed at the top of the top base from left to right. The equipment further comprises a material taking manipulator, a laser ablation module, a cleaning module, an ink jet module, a drying module and a double-track moving and carrying module. The laser ablation module is used for laser ablation operation on the chip, thereby assisting in laser ablation cleaning of the letters on the surface of the chip. The cleaning module is used for assisting in cleaning of the particulate matter generated by ablation on the surface of the chip. The laser ablation replaces manual polishing or chemical corrosion to remove the letters, the uniformity of the letter removal is ensured through the precisely controllable light spot energy distribution of the laser, the laser letter removal is non-contact, the chip is not mechanically damaged, the laser letter removal has become a mainstream selection due to high precision and stability, the self-defined ablation depth can be realized, and no additional damage is caused to the IC chip.

The invention discloses a galvanometer scanning-based curved surface self-adaptive dynamic light spot laser quenching method, which has the following beneficial effects: (1) dynamic regulation and control of a light spot energy field: a traditional uniform light spot is reconstructed into a self-defined light spot with an adjustable energy gradient according to a curvature value of a workpiece, so that the energy of each section of the light spot is dynamically distributed according to the curvature; and the energy density deviation caused by geometric deformation is compensated. And (2) scanning-energy cooperative control: through coupling optimization of a light spot form and a scanning path, galvanometer high-frequency galvanometer micro-swing scanning and laser output energy adjustment are adopted in a curvature sudden change area, so that accurate regulation and control of heat input are realized, a heat accumulation effect is inhibited, and depth uniformity (fluctuation is less than or equal to 10%) of a hardening layer is ensured. And (3) online feedback and closed-loop correction: an infrared thermal imager and a surface topography sensor are integrated, a quenching point temperature field and a hardened layer topography are monitored in real time, a light spot energy ratio and a scanning strategy are dynamically corrected through an AI algorithm, and the dynamic characteristics of material phase change in the machining process are adapted.