The invention discloses precise
image measurement equipment and method based on
laser measurement, and relates to the field of
laser measurement, and the measurement equipment comprises a multi-axis motion platform, a measurement probe and a
control system. The measuring probe is of a probe-shaped structure capable of penetrating into a measured inner cavity and is installed at the
tail end of the Z axis of the multi-axis motion platform, and a
confocal laser sensor and a lateral microscopic vision
system are integrated in the measuring probe. The lateral microscopic vision
system comprises a miniature
image sensor, a miniature lens module and a
lateral projection light source, and the
optical axis of the lateral microscopic vision
system is turned back through a reflection optical element, so that the effective
sight direction of the lateral microscopic vision system is perpendicular to the axis direction of the measuring probe. According to the invention, through the design of the integrated miniature measuring probe, the shielding and depth-of-field limitation are overcome, and the synchronous and high-precision
data acquisition of the inner side wall and the bottom of the
deep hole with a high depth-
diameter ratio and a step structure is realized, so that the complete three-dimensional shape of the inner cavity is reconstructed, the contour features are completely captured, and the precise measurement requirement is realized.