Arrangement for measuring a measuring object (10), in particular for determining the coordinates of the measuring object (10), wherein the arrangement comprises the following: - a motion device (3, 4; 23, 4; 33, 34) configured to move a sensor (7; 27; 37) held on the arrangement during operation of the arrangement and configured to detect the object being measured (10), relative to the object being measured (10), - an
actuator device (8; 38; 48; 58; 68; 71) via which the sensor (7; 27; 37) is coupled to the motion device (3, 4; 23, 4; 33, 34) during operation of the arrangement and which is designed to at least partially compensate for vibrational movements of the sensor (7; 27; 37), - a vibration measuring device (9) designed to generate information about vibrations of the arrangement and / or the sensor (7; 27; 37) by measuring at least one
measured quantity, - a control device (19) which is connected to the vibration measuring device (9) and the
actuator device (8; 38; 48; 58; 68; 71) and which is configured to control the
actuator device (8; 38; 48; 58; 68; 71) in such a way that the vibration movements of the sensor (7; 27; 37) are at least partially compensated, wherein all
moving parts of the arrangement, which serve to move the entire sensor (7; 27; 37) relative to the object being measured, are coupled to the sensor (7; 27; 37) via the actuator device (8; 38; 48; 58; 68; 71), characterized by the fact that the actuator
assembly (8; 38; 48; 58; 68; 71) has a plurality of motors (41) and wherein each of the motors (41) can be controlled independently of any other motor (41) or motors (41) of the actuator
assembly (8; 38; 48; 58; 68; 71) by the
control unit (19), a plurality of the motors (41) are configured and arranged to each generate a movement with respect to a single linear degree of freedom of the movement and thus along a linear axis of motion of the motor (41), and the linear axes of motion of at least two motors (41) of the actuator
assembly (8; 38; 48; 58; 68; 71) are parallel to each other, wherein each of the motors (41) with parallel axes of motion is coupled to the motion assembly (3, 4; 23, 4; 33, 34) via a first
coupling element (5; 45; 55; 65) and is coupled or can be coupled to the sensor (7; 27; 37) via a second
coupling element (6; 36; 46; 56; 66), and wherein the first
coupling element (5; 45; 55; 65) or the second coupling element (6; 36; 46; 56; 66) each is rotatably coupled to the motors (41) with parallel axes of movement via a joint (4; 42; 62).