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7272results about "Polishing machines" patented technology

Ultra-precise curved surface finishing method based on non-Newtonian fluid shear thickening effect

The invention discloses an ultra-precise curved surface finishing method based on non-Newtonian fluid shear thickening effect. The method includes: adding abrasive particles or micropowder into non-Newtonian fluid with shear thickening effect to prepare non-Newtonian fluid polishing solution, wherein the non-Newtonian fluid accounts for 50%-90% of the mass of the polishing solution, the abrasive particles or the micropowder account for 10%-50% of the mass of the polishing solution, and the particle size of the abrasive particles or the micropowder ranges from 0.05 micrometer to 50 micrometers. Relative motion is generated between a workpiece and the polishing solution during polishing, shear thickening is generated at a contact portion of the polishing solution and the workpiece under shearing action, viscosity of the polishing solution in the contact area is increased to enhance holding force to the abrasive particles or the micropowder, and removal of workpiece surface materials is achieved under the micro cutting or chemical mechanical action of the adding abrasive particles or micropowder with polishing effect in the polishing solution on the workpiece, so that polishing of the workpiece surface is achieved. The ultra-precise curved surface finishing method based on the non-Newtonian fluid shear thickening effect can achieve efficient and high-quality polishing to various curved surfaces, in particular to complex curved surfaces and has great economic and social benefits.
Owner:ZHEJIANG UNIV OF TECH

Method and apparatus for post-polish thickness and uniformity control

A method for polishing wafers includes providing a wafer having a process layer formed thereon; providing a polishing tool having a plurality of control zones and being adapted to polish the process layer based on an operating recipe, the operating recipe having a control variable corresponding to each of the control zones; measuring a pre-polish thickness profile of the process layer; comparing the pre-polish thickness profile to a target thickness profile to determine a desired removal profile; determining values for the control variables associated with the control zones based on the desired removal profile; and modifying the operating recipe of the polishing tool based on the values determined for the control variables. A processing line includes a polishing tool, a metrology tool, and a process controller. The polishing tool is adapted to polish a wafer having a process layer formed thereon based on an operating recipe. The polishing tool includes a plurality of control zones and the operating recipe includes a control variable corresponding to each of the control zones. The metrology tool is adapted to measure a pre-polish thickness profile of the process layer. The process controller is adapted to compare the pre-polish thickness profile to a target thickness profile to determine a desired removal profile, determine values for the control variables associated with the control zones based on the desired removal profile, and modify the operating recipe of the polishing tool based on the values determined for the control variables.
Owner:GLOBALFOUNDRIES INC

Five-axis numerical control polishing machine capable of changing grinding heads automatically

The invention discloses a five-axis numerical control polishing machine capable of changing grinding heads automatically. The five-axis numerical control polishing machine comprises a plurality of semi-axis grinding heads, a machine body frame, a controller, a polishing head, a grinding head supply mechanism, a spindle clamping device, a Z-axis drive mechanism, an X-axis drive mechanism, a Y-axis drive mechanism, an A-axis rotary workbench and a C-axis rotating mechanism. The polishing head, the grinding head supply mechanism, the spindle clamping device, the Z-axis drive mechanism, the X-axis drive mechanism, the Y-axis drive mechanism, the A-axis rotary workbench and the C-axis rotating mechanism are respectively connected with the controlled and controlled by the same. The five-axis numerical control polishing machine capable of changing grinding heads automatically has the advantages that the polishing machine is ingenious and reasonable in structural design, high in automation level, convenient and fast to operate, high in flexibility by the five-axis linkage structure, and widely applicable; multiple polishing procedures such as rough polishing, fine polishing and mirror polishing can be completed at one-step clamping, clamping time is saved, machining efficiency and precision are increased greatly, polishing effect is guaranteed, work efficiency is increased, labor intensity of workers is lowered, enterprise competitiveness is increased effectively, and polishing of surfaces of complex curve shapes can be achieved.
Owner:东莞市钜铧机械有限公司

Efficient hardware kitchen ware grinding and polishing device for hardware manufacturing

The invention relates to a grinding and polishing device, in particular to an efficient hardware kitchen ware grinding and polishing device for hardware manufacturing, and provides the high-working efficiency efficient hardware kitchen ware grinding and polishing device for hardware manufacturing which is aimed at solving the technical problem. The efficient hardware kitchen ware grinding and polishing device for hardware manufacturing provided to solve the technical problem comprises a fixing rack, a wedge block, a sliding block, a slide rail, a bottom plate, a pull wire, a first supporting rod, a fixed pulley, a gear, a second supporting rod, a wire winding wheel, a top plate, a rack, a first fixing block, a first spring, a lifting rod, a contact roller, a placing groove, a grinding device, a sliding sleeve, a screw rod, a nut, and the like, wherein the fixing rack, the slide rail and the first supporting rod are sequentially arranged at the top of the bottom plate from left to right. According to the efficient hardware kitchen ware grinding and polishing device, the grinding device is driven to grind and polish kitchen ware up and down through forward rotation and reverse rotation of a rotating motor, and the effect of high working efficiency is achieved.
Owner:江门市赞兴不锈钢制品有限公司
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