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453results about How to "Uniform thickness" patented technology

Method of fabricating silicon-doped metal oxide layer using atomic layer deposition technique

There are provided methods of fabricating a silicon-doped metal oxide layer on a semiconductor substrate using an atomic layer deposition technique. The methods include an operation of repeatedly performing a metal oxide layer formation cycle K times and an operation of repeatedly performing a silicon-doped metal oxide layer formation cycle Q times. At least one of the values K and Q is an integer of 2 or more. K and Q are integers ranging from 1 to about 10 respectively. The metal oxide layer formation cycle includes the steps of supplying a metal source gas to a reactor containing the substrate, and then injecting an oxide gas into the reactor. The silicon-doped metal oxide layer formation cycle includes supplying a metal source gas including silicon into a reactor containing the substrate, and then injecting an oxide gas into the reactor. The sequence of operations of repeatedly performing the metal oxide layer formation cycle K times, followed by repeatedly performing the silicon-doped metal oxide layer formation cycle Q times, is performed one or more times until a silicon-doped metal oxide layer with a desired thickness is formed on the substrate. In addition, a method of fabricating a silicon-doped hafnium oxide (Si-doped HfO2) layer according to a similar invention method is also provided.
Owner:SAMSUNG ELECTRONICS CO LTD

Liquid crystal display substrate and preparation method thereof and liquid crystal display device

The invention provides a liquid crystal display substrate and a preparation method thereof and a liquid crystal display device, which belong to the technical field of alignment films and can be used for solving the problem of difficulty in miniaturizing and realizing narrow frame design for a liquid crystal display device due to the presence of a Halo region on the edge part of the conventional alignment film. The liquid crystal display substrate comprises a substrate and an alignment film arranged on the substrate, wherein the substrate is provided with a display region for displaying; the substrate is provided with a retaining wall positioned on the periphery of the display region; the alignment film covers the display region, and the outer edge of the alignment film is contacted with the retaining wall; and the thickness of the alignment film is smaller than or equal to the height of the retaining wall. The liquid crystal display substrate preparation method provided by the invention is used for preparing the liquid crystal display substrate. The liquid crystal display device provided by the invention comprises the liquid crystal display substrate. The liquid crystal display substrate and the preparation method can be applied to a liquid crystal display device, in particular to a thin film transistor array liquid crystal display device.
Owner:BOE TECH GRP CO LTD +1

Method for uniformly and controllably coating conducting carbon layer at surface of LiFePO4 granule surface

The invention relates to a method for coating an even and controllable deposit carbon layer on the surface of LiFePO4 particles serving as lithium ion battery cathode materials for increasing the LiFePO4 conductivity. The method adopts the concrete preparation processes that: LiFePO4 powders are placed in a constant temperature zone of a chemical vapor deposition furnace, then the air in the furnace is fully discharged for inputting inert gases, after the temperature rises to the set level, a carbon source gas is input for covering a conductivity carbon film on the surface of the LiFePO4 particles evenly, the LiFePO4 coated with the carbon film has excellent conductivity which is increased by five orders of magnitude compared with the condition before coating. The chemical vapor deposition temperature ranges from 580 to 720DEG C, the deposition time is from 1 to 10 hours, and the volume percent of the carbon source gas is between 1 and 20 percent, and a sample deposited with carbon is cooled to the room temperature with a natural furnace and is then taken out. The method can cover the conductivity carbon film on the surface of each LiFePO4 particle evenly for increasing the conductivity of LiFePO4, and the thickness of the conductivity carbon film can be accurately controlled in the range of 2 to 50 nanometers through adjusting parameters (deposition temperature, deposition time and carbon source gas volume percent) of the chemical vapor deposition process.
Owner:INST OF METAL RESEARCH - CHINESE ACAD OF SCI

Ionic-electronic conductor composite film and preparation method thereof and lithium battery

The invention discloses an ionic-electronic conductor composite film and a preparation method thereof and a lithium battery. The ionic-electronic conductor composite film comprises a base film rangingfrom 1 micron to 50 microns and a coating material ranging from 0.5 micron to 10 microns, wherein the coating material is spread on the base film or is spread on the base film and permeates into thebase film; the coating material comprises, by mass, ionic conductor materials [1wt%-99.98wt%], electronic conductor materials [0.01wt%-10wt%], coat materials [0wt%-98.98wt%], adhesives [0.01wt%-10wt%], dispersing agents [0wt%-2wt%] and auxiliaries [0wt%-2wt%]; the ionic conductor materials specifically include one or multiple mixtures of an LISCION solid electrolyte material, an NASCION solid electrolyte material, a perovskite solid electrolyte material or a garnet solid electrolyte material and a derivative material; and the electronic conductor materials include one or more of carbon black,conductive graphite, carbon fibers, carbon nano tubes, acetylene black, Ketjenblack, graphene, metallic silver, metallic gold, vapor phase growth carbon fibers VGCF, conductive graphite KS-6 and carbon black SUPER-P.
Owner:LIYANG TIANMU PILOT BATTERY MATERIAL TECH CO LTD
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