To provide a three-dimensional shape measuring device that can match a measured
optical path length and a reference
optical path length with each other with high accuracy at low cost regardless of the temperature of an installation environment, and a
reference surface position adjustment method for the same.SOLUTION: A three-dimensional shape measuring device comprises: a
light source unit that emits measuring light being
white light; an interference unit that divides part of the measuring light emitted by the
light source unit as reference light, emits the measuring light to a surface to be measured and emits the reference light to a
reference surface, and generates interference light between the measuring light returning from the surface to be measured and the reference light returning from the
reference surface; a holder that accommodates the interference unit and the reference surface, the holder formed of a material that is thermally deformed reversibly according to a change in temperature and changing a reference
optical path length that is the
optical path length of the reference light between the interference unit and the reference surface according to the change in temperature; and a temperature adjustment unit that, when the
optical path length between the interference unit and the surface to be measured is a measured
optical path length, adjusts the temperature of the holder to be a target temperature at which the reference optical
path length matches the measured optical
path length.SELECTED DRAWING: Figure 5