The invention relates to a CL imaging
system based on multi-axis
motion control, the CL imaging
system comprises a platform, a side table, a large hollow rotary table, supporting legs and a
control system, the platform is provided with an X
translation table, the X
translation table is located below the large hollow rotary table, the X
translation table is slidably connected with a Z lifting table, the Z lifting table is slidably connected with a
ray source support, and the
ray source support is provided with a
ray source; a hollow double-drive XY translation table is arranged above the large hollow rotary table, and the hollow part of the hollow double-drive XY translation table and the hollow part of the large hollow rotary table are overlapped; the side table is arranged close to the side edge of the platform, the side table is perpendicular to the platform and provided with a
rocker arm driving rotary table, the
rocker arm driving rotary table is connected with a
rocker arm translation table, the rocker arm translation table is slidably connected with a
detector support, and a
detector is fixedly arranged on the
detector support. According to the invention, the relative position of the
radiation source and the detector is adjusted through the high-precision multi-axis
motion control mechanism according to the characteristics of large thickness and
large size of a PCB, and full-angle and local flexible CL
data acquisition is realized.