119 results about "Relay lens" patented technology

The utility model relates to a 4K fluorescent endoscope optical system, which comprises an objective lens system, a relay lens system and an eyepiece system which are sequentially arranged along the light propagation direction, and is characterized in that the objective lens system is of a reverse long-distance structure; the system comprises a sapphire protection lens, a negative focal power lens, a prism or a steering prism, a positive focal power plano-convex cemented lens, a positive focal power triple cemented lens and a first positive focal power double cemented lens which are arranged along a light propagation direction, the relay lens system comprises n relay lens groups, and each relay lens group is of a double telecentric structure. And the eyepiece system is arranged in the light transmission direction and is formed by symmetrically arranging two doublet rod lenses, n is an odd number, the eyepiece system is of an object space telecentric structure, and the eyepiece system comprises a second positive-focal-power doublet lens, a positive-focal-power lens and a sapphire lens which are glued into a whole in the light transmission direction. The structure of an optical system can be simplified, production and processing cost can be reduced, and 4K ultra-high-definition fluorescent laparoscopic imaging can be realized at the same time.

The invention provides an endoscope imaging system and a hard tube type endoscope, and belongs to the technical field of optical imaging, the endoscope imaging system comprises an objective lens, a relay lens and an ocular lens of an object space telecentric structure, the objective lens comprises a first lens, a second lens, a third lens with positive focal power and a bonding lens group with positive focal power, the second lens is a steering prism, the image side surface and the object side surface of the first lens are aspheric surfaces, the balsaming lens group comprises a fourth lens, a fifth lens and a sixth lens, the fourth lens is a doublet lens, the fifth lens is a triplet lens, the sixth lens is a doublet lens, the relay lens comprises an odd number of rod lens groups which are arranged at intervals, and the rod lens groups are arranged at intervals. The eyepiece comprises a seventh lens, an eighth lens and a ninth lens, and the seventh lens, the eighth lens and the ninth lens are all doublet lenses. By optimizing the structural design of the optical system, the defocusing amount is reduced, seamless switching of visible light and near-infrared light dual-mode imaging can be achieved, and meanwhile high-quality imaging is achieved.

The invention relates to the technical field of projection modules, and particularly discloses an LCOS laser projection module, which comprises a laser light source module, a laser speckle eliminator, a reflector, a diffuser, a collimating lens, a fly-eye lens, a relay lens, a first linear polarizer, a polarizing beam splitter, an LCOS chip, a second linear polarizer and a projection lens which are sequentially arranged along a light transmission path, the laser light source module is provided with a light source optical axis and is used for emitting light, and the light is projected by the projection lens after being modulated along a light transmission path to form a projection image. The light emitted by the laser light source has the advantages of narrow divergence angle, small light-emitting area and good light concentration and collimation, the resolution of a projected image can be improved, the projected image is bright in color and high in definition, and the requirements of simple structure and small size are met. Meanwhile, the laser speckle can be eliminated through the matching of the laser speckle eliminator and the diffusion sheet, and the projection image can meet the high contrast through the existence of the first linear polarizer and the second linear polarizer.

The invention provides an infrared target simulator focusing collimation projection optical system and a design method thereof. The optical system is composed of a telescope objective, an intermediate field lens and a relay lens group. A source target and a background image generated by the infrared target simulator are input into the DMD and then are incident to the focusing collimation projection optical system through the DMD, the incident light firstly passes through the relay lens group and the intermediate field lens to generate a primary image of the image on the DMD, and then the primary image surface is collimated and projected to an entrance pupil of a tested photoelectric device through the telescope objective. According to the invention, optical material parameters are finely analyzed and matched, three infrared optical materials are adopted to form a lens group, a field lens is added to compress the aperture of a light beam, and only five lenses are used, so that achromatism and athermalization are realized while high transmittance is ensured. And a focusing lens group and a precise mechanical structure are arranged in the relay lens group, so that the target simulation requirement of photoelectric detection equipment such as a guide head at a wider working temperature range is met, and meanwhile, the requirement of obtaining a clear simulation target scene by matching detected photoelectric equipment with different working distances can be met.

The invention relates to an improved cage type light field imaging system and a debugging method, and belongs to the technical field of light field imaging, and the system comprises a main lens which is used for collecting light spots on an object surface, and enabling the light emitted by the light spots to be imaged on a micro lens; the micro lens is used for separating the light collected by the main lens into light beams in different directions and imaging the light beams on a virtual image plane; the relay lens is used for carrying out secondary imaging on the light beams in different directions to different pixels of a CCD detector of the camera; the relay lens comprises a first lens and a second lens, the focal lengths of the first lens and the second lens are positive, the focal length of the first lens is smaller than that of the second lens, and the magnification of the relay lens is larger than 1: 1. In the debugging process of the system, parallel light beams are arranged in front of the micro lens, and the position of the micro lens is determined in the mode that the parallel light beams vertically enter the micro lens. The system is not influenced by vignetting and distortion generated by the relay lens any more, and the debugging method improves the positioning precision of the micro lens.

The invention discloses a spectral imaging device and a spectral image recombination method. The spectral imaging device comprises a relay lens group, a light filtering module and an imaging module which are sequentially arranged along a light path, the relay lens group is used for transmitting an optical signal emitted by the to-be-tested sample to an imaging plane of the relay lens group to form an image of the to-be-tested sample; the light filtering module is arranged on an imaging plane of the relay lens group and is provided with a linear gradual change filtering area, and the light filtering module and the to-be-detected sample image can relatively move along the working wave band change direction of the linear gradual change filtering area, so that the complete wave band range of the linear gradual change filtering area covers each spatial position of the to-be-detected sample; and the imaging module is used for acquiring the optical signal filtered by the optical filtering module and realizing spatial and spectral imaging of the to-be-detected sample. According to the spectral imaging device, efficient and continuous spectral data acquisition is realized through relative movement between the to-be-detected sample image and the light filtering module.

The invention relates to an LD area array beam shaping and homogenizing system based on a microlens array and a use method thereof. The system comprises an LD area array light source, a fast axis pre-correction unit, a two-dimensional shaping and homogenizing unit, a relay lens group and an output coupling unit which are sequentially arranged along a light path, the fast axis pre-correction unit is a single-row micro-cylindrical lens array composed of a plurality of micro-cylindrical lenses; the two-dimensional shaping and homogenizing unit comprises a first microlens array and a second microlens array which are sequentially arranged along the optical axis, and the first microlens array and the second microlens array are both positive spherical microlens arrays arranged in an N * N matrix. According to the LD area array light beam shaping and homogenizing system, light beam segmentation and superposition are achieved, eventually homogenization of output light spots is achieved, and the light spot uniformity reaches 90% or above.

The invention discloses a laser and thunder all-in-one machine, and relates to the technical field of intelligent perception. The all-in-one machine comprises a common-optical-path optical module, a sensor cooperation unit, a data processing unit and a modular structure which are electrically connected in sequence. The common-optical-path optical module realizes physical common-optical-path integration of the laser radar and the visual sensor through an SWP short-wave-pass coated spectroscope and a relay lens group; the sensor cooperation unit adopts a dynamic power PID closed-loop control and multi-mode trigger synchronization mechanism to ensure the data acquisition precision; and the data processing unit realizes multi-modal feature deep fusion based on a Fusion-Mama framework, and completes target detection, tracking and semantic segmentation in combination with an improved multi-task head. According to the method, the problems of view field deviation, time sequence asynchronization and poor fusion algorithm adaptability of traditional split equipment are solved, the view field overlap ratio reaches 99% or above in the wide-temperature environment of-40 DEG C to 80 DEG C, the complex scene target detection accuracy is greatly improved, and the method can be widely applied to the fields of automatic driving, industrial inspection and the like.

The invention discloses a reflective beam-combining visual field splicing system, a multi-path laser scanning beam-combining system and a laser scanning microscope, and relates to the technical field of microscopic imaging instruments, the reflective beam-combining visual field splicing system comprises at least one reflective beam-combining subunit, and the reflective beam-combining subunit comprises a relay lens group and an adjustable reflector; the relay lens group comprises two 4f systems, pupil conjugate planes of starting points of the 4f systems are different, and a focus conjugate plane exists in an internal optical space between the two 4f systems; the adjustable reflecting mirror is arranged in the internal optical space, receives and reflects the light beam from the first light path, and meanwhile allows the light beam from the second light path to pass through without blocking; wherein the first light path light beam reflected by the adjustable reflecting mirror and the straight-through second light path light beam are subjected to beam combination visual field splicing on a focal point conjugate surface, and are converged on the same pupil conjugate surface. According to the reflection-type beam-combining view splicing system, the light path structure can be simplified, and the transmission loss of laser energy is reduced.

The application relates to an improved cage type light field imaging system and a debugging method, and belongs to the technical field of light field imaging. The system comprises a main lens for collecting light spots on an object plane and imaging light emitted by the light spots onto a microlens; the microlens is used for separating the light collected by the main lens into light beams in different directions and imaging the light beams onto a virtual image plane; a relay lens is used for twice imaging the light beams in different directions onto different pixels of a CCD detector of a camera; the relay lens comprises a first lens and a second lens, the focal lengths of the first lens and the second lens are both positive, the focal length of the first lens is smaller than that of the second lens, and the magnification of the relay lens is greater than 1:1. During the debugging process of the system, parallel light beams are arranged in front of the microlens, and the parallel light beams are vertically injected into the microlens to determine the position of the microlens. The system is not affected by the vignetting and distortion generated by the relay lens, and the debugging method improves the positioning accuracy of the microlens.

The invention discloses virtual image detection equipment, which comprises a front diaphragm; the front lens group is arranged on the second side of the front diaphragm along the optical axis; a rear lens group disposed on a second side of the front lens group along the optical axis; the relay lens group sequentially comprises a relay front group and a relay rear group from the first side to the second side along the optical axis, and the relay front group and the relay rear group are coaxially and fixedly arranged; the refraction adjusting group comprises a first moving component arranged between the relay front group and the relay rear group and a second moving component arranged in the relay rear group; the first moving component comprises a cylindrical mirror which is arranged on the optical axis in a switchable and back-and-forth moving manner, and is used for adjusting the astigmatism diopter; the second moving component is arranged on the optical axis in a front-back moving mode and used for adjusting the diopter of the spherical surface. And the light receiving assembly is arranged on the second side of the relay lens group along the optical axis and is used for receiving the light from the relay lens group to carry out virtual image detection.

The application discloses a kind of human eye test conoscopy, comprising: front light barrier, the light aperture of the light barrier is not more than 4mm;Imaging lens group, close to object plane, with positive focal length, can be not less than 120 degree field of view incident light rays converge into, and form approximate telecentric intermediate image in rear;Relay lens group, close to image plane, with less than 1 magnification, for imaging intermediate image at image plane;The focal length GF1 of the imaging lens group is less than 16.2mm, the focal length GF1 of imaging lens group and the focal length GF2 of relay lens group satisfy the following relationship: 0.2<GF1 / GF2<0.3;Imaging circle diameter is D1, and the diameter of diaphragm is D2, satisfy: 8<D1 / D2<10.The above-mentioned human eye test conoscopy can realize similar test effect with direct observation of human eye, suitable for testing near-eye display device, and can meet the imaging effect of large image plane, high resolution and no vignetting.

The utility model relates to the technical field of optics, and discloses a lens focusing system which can meet the focusing operation of different types of lenses. The lens focusing system comprises a lens positioning carrier, a focusing optical relay lens, a backlight plate and an image acquisition device. The lens positioning carrier comprises a positioning carrier plate, and the positioning carrier plate is provided with a positioning groove used for placing a lens product. The positioning groove is provided with a positioning station, and the positioning station is used for positioning one lens module of the lens product. The backlight plate and the lens positioning carrier are arranged at an interval, and a test picture is arranged on one side, facing the lens positioning carrier, of the backlight plate. The focusing optical relay lens is arranged between the lens positioning carrier and the backlight plate. The image acquisition device comprises two image transmission circuit boards, each image transmission circuit board is provided with a second connection port, and the second connection ports are used for being connected with the first connection ports corresponding to the lens modules located at the positioning stations, so that the image acquisition device drives the lens modules to shoot images of the test pictures on the backlight plate.

The application discloses a kind of three-dimensional topography measuring device and method based on digital micromirror device's dual camera, and it belongs to the field of stereo vision imaging.The three-dimensional topography measuring device based on digital micromirror device's dual camera includes parallel light source, first digital micromirror device, projection system, objective, second digital micromirror device, first relay lens, second relay lens, first CCD camera and second CCD camera.The three-dimensional topography measuring method based on digital micromirror device's dual camera includes image acquisition and phase calculation, through time sequence difference and dual camera difference, the topography measurement of measured target is realized, and common-mode noise is eliminated, and measurement precision is improved.

The invention provides an inclined plane four-beam lattice light sheet super-resolution microscopic imaging device and method based on spatial spectrum estimation. The device is composed of an input light beam, a cylindrical lens group, an SLM, a reflector, a lambda / 4 wave plate, a PBS, a mask, a relay lens group, a galvanometer, an objective lens, a camera and other optical elements. By utilizing four-beam interference formed by the SLM and a high-reflectivity mirror surface on the opposite side of a sample, a lattice light sheet illumination field is realized, and fluorescence excitation is finely regulated and controlled; the same objective lens with a high numerical aperture and a three-stage infinite correction microscopic system are utilized to realize fluorescence excitation and collection, the loading space limitation of a traditional light sheet microscope is broken through, and distortion caused by high axial magnification and aberration is avoided; in combination with a spatial spectrum estimation algorithm, a measurement matrix is constructed for a low-resolution image sequence, eigenvalue decomposition is carried out, an optimal signal-to-noise ratio threshold is adaptively determined, signal and noise subspaces are divided according to the threshold, spectrum peak search is carried out by using subspace orthogonality, and thus isotropic resolution improvement is realized.

The application belongs to the technical field of laser illumination, and particularly relates to a laser illumination system for an LCOS display platform. The system comprises, in sequence from an LD light source illumination system to a lens, a first diffusion sheet, a collimation module, a uniform light module, a third mirror, a relay lens module, a metal wire grid, a retardation sheet, an LCOS chip and a polariscope. The collimation module comprises, in sequence, a double-face fly eye, a first collimation lens, a first mirror, a second diffusion sheet, a second mirror and a second collimation lens, which are installed between the diffusion sheet and the uniform light module. The laser illumination system provided by the application sets the collimation module and the uniform light module, and further improves the utilization rate of the laser light source and the display effect by optimizing the optical design and the beam shaping technology, so that the display quality and the user experience can be significantly improved.

The present invention proposes a three-band common-aperture real-time polarization imaging optical system, belonging to the technical field of optical lenses. The optical system comprises a front lens group, a long-wave infrared imaging lens group, a relay lens group, a short-wave infrared imaging lens group, a visible light imaging lens group, three detection devices, and two spectroscopic elements. All lenses of the optical system are spherical lenses, without aspherical elements. All light paths are refracted through the lenses without the need for reflection. The three-band common-aperture integrated design of visible light, short-wave infrared, and long-wave infrared effectively solves the field of view deviation, volume redundancy, and data mismatch problems existing in traditional multi-light path systems. The system is lightweight and compact, meeting the deployment requirements of space-sensitive scenarios such as airborne and satellite-borne systems.

The utility model provides a chip bonding wire three-dimensional measurement system based on an inner cavity reflection camera system. The chip bonding wire three-dimensional measurement system comprises a microscope lens, a reflector cavity, a relay lens, an industrial camera and an illumination module. Two parallel plane mirrors are arranged in the reflector cavity and used for separating a first real image imaged by the microscope lens into three independent light paths to form a three-view virtual image, and the three-view virtual image is transmitted to a photosensitive chip of the industrial camera through the relay lens at the amplification factor of 1: 1, so that three-view images are acquired through single exposure. The system is matched with a computer to carry out optical flow calculation, point cloud fusion and three-dimensional reconstruction, a three-dimensional grid model with texture colors is generated, and high-precision and non-contact measurement of the multi-layer lead shielding structure is achieved. The system is compact in structure, easy and convenient to install and adjust and suitable for on-line detection of bonding and packaging of vehicle-gauge-level chips.

The invention provides a test system and a test method, which can be applied to the optical performance test of a projection type optical machine, improve the test efficiency, and achieve unified, miniaturized and efficient test effects. The test system comprises a first relay lens group, a second relay lens group and a measuring device. The equivalent focal length of a combined lens system formed by the optical machine to be measured, the first relay lens group and the second relay lens group is a first fixed value. The first relay lens group is used for generating a relay image based on the image light emitted from the optical machine to be measured, and transmitting the first image light to the second relay lens group. The second relay lens group is used for generating a test image based on the first image light and emitting second image light to the measurement equipment. The measuring device is used for acquiring a test image based on the second image light. The test image is used for determining the optical performance of the to-be-tested optical machine, and the distance between the first relay lens group and the to-be-tested optical machine and the distance between the first relay lens group and the second relay lens group are generated based on a first fixed value.

The utility model relates to an ultra-high-definition endoscope optical imaging system which comprises an objective lens system, a relay lens system and an eyepiece system which are sequentially arranged in the light propagation direction. The system is characterized in that the objective lens system comprises a sapphire protection lens, a negative-focal-power lens, a prism or a steering prism, a positive-focal-power plano-convex cemented lens, a negative-focal-power triple cemented lens, a first positive-focal-power triple cemented lens and a first positive-focal-power double cemented lens which are arranged along the light propagation direction; the relay lens group is formed by symmetrically arranging two four-gluing-rod lenses, the convex surface of the first positive-focal-power double-gluing-lens is located on one side of the n groups of relay lenses, and the eyepiece system comprises a second positive-focal-power triple-gluing-lens, a positive-focal-power lens, a second positive-focal-power double-gluing-lens and a sapphire lens which are arranged in the light propagation direction. According to the utility model, the central angle resolution is 20C / degree, the distortion is less than 15%, the field angle is greater than or equal to 78 degrees, and the ultra-high-definition fluorescence imaging of white light wave band and near-infrared light wave band can be realized at the same time.

The application provides a large-aperture middle-wave infrared continuous zoom optical system capable of realizing electromagnetic shielding, comprising a first front lens, a second front lens, a zoom lens, a compensation lens, a focusing lens, a first relay lens, a second relay lens and a third relay lens arranged in sequence along the optical axis direction from the object side to the image side; the first and second front lenses are meniscus positive lenses with convex surfaces facing the object side, the zoom lens is a double-concave silicon negative lens, the compensation lens is a double-convex silicon positive lens, and the first, second and third relay lenses are a double-convex silicon positive lens, a double-concave germanium negative lens and a double-convex silicon positive lens in sequence. The secondary imaging configuration designed by the application improves the optical axis consistency precision in the full field of view during optical mechanical adjustment, and realizes clear imaging of an infrared dim small target with a large optical aperture. The outer side of the light transmission area of each optical element extends outward with a modified extension structure, a metal electrode is plated on the surface, and an antireflection film is plated on the light transmission area, so that the imaging system is suitable for a strong electromagnetic environment.

The application relates to the field of fluorescent microscopic imaging technology, and particularly provides a functional magnetic resonance compatible imaging large-field high-resolution fluorescent microscopic imaging instrument and application, the imaging instrument comprises an objective lens, a relay lens unit and a tube lens, the objective lens is used for realizing fluorescence collection and collimation, the relay lens unit is used for replacing a traditional optical fiber bundle to perform long-distance relay transmission of light, and the tube lens focuses parallel light transmitted by the relay lens group on an image sensor to perform imaging. The fluorescent microscopic imaging instrument can perform synchronous fluorescence imaging on a target during functional magnetic resonance imaging, can provide single-cell level resolution under the condition of an 8mm*8mm object field, and the imaging quality is close to the diffraction limit.

The application provides a single-objective multi-mode microscopic imaging system, and relates to the technical field of microscopic imaging.The system comprises a laser light source, an excitation light path module, a modulation scanning module, a detection light path module, an imaging camera and a controller.The excitation light path module comprises an expansion-constriction lens group, a shaping unit, a first slit and a first relay lens group.The modulation scanning module comprises a dynamic light splitting unit in a non-fixed position, a first scanning galvanometer, a scanning lens, a barrel lens and an objective lens.The detection light path module comprises a first lens, a second relay lens group, a second slit in a non-fixed state, an electronically adjustable lens, a third relay lens group and a second scanning galvanometer.The modulation scanning module is used for transmitting a laser beam to the back focal plane of the objective lens and relaying sample fluorescence collected by the objective lens to the detection light path module.The controller is used for switching between oblique light sheet imaging mode and confocal imaging mode according to the position of the dynamic light splitting unit and the state of the second slit.

The utility model discloses a relay lens with a light combination effect, which comprises a shell, at least three mutually intersected channels are arranged in the shell, one of the channels is an emitting channel, the other channels are incident channels, a lens assembly is arranged in each channel, a reflector assembly is arranged at the intersection of the plurality of channels, and the reflector assembly is arranged in the shell. A plurality of incident light beams of the reflector assembly are reflected to the emitting channel, the relay lens can combine and output a plurality of light beams with different wavelengths, compared with a traditional mode, the use of the relay lens in the optical system can be reduced, and on the premise that the imaging effect is not changed, the size of the whole optical system can be reduced, and meanwhile the cost can be saved.

The present application relates to a diffraction field printing system and an optical output method, comprising a light source, an illumination optical subsystem, an imaging optical subsystem, a reference light subsystem, a mechanical motion subsystem and a control subsystem, the light emitted by the light source is split into a first illumination light field and a second illumination light field; the imaging optical subsystem comprises a diffractive optical device, a spatial light modulator and a Fourier transform lens, the spatial light modulator is located at the input face of the Fourier transform lens, used for modulating data structure, and forming the sub-wavefront information of the diffraction field on the output face of the Fourier transform lens, the first illumination light field forms a limited band dissipation spot and a Gaussian-removed light field on the input face and the output face of the Fourier transform lens; the reference light subsystem comprises a galvanometer and a relay lens group, the second illumination light field forms a reference light field on the output face of the relay lens group, and the light spot formed by the light field coincides with the output face of the Fourier transform lens or the image face of the output face. The formed diffraction field has high signal-to-noise ratio and strong uniformity.

The invention provides optical observation equipment which comprises an objective lens system, a relay lens system and a magnifying lens system which are sequentially arranged on the same optical axis from the object side, and parallel optical paths are formed among the objective lens system, the relay lens system and the magnifying lens system. The objective lens system comprises a first doublet lens, a first biconvex lens, a first biconcave lens and a second biconvex lens which are sequentially arranged on the same optical axis from the object side; the relay lens system comprises at least one relay lens group, wherein the relay lens group comprises two triplet rod-shaped lenses which are symmetrically arranged according to optical characteristics; the magnifying lens system comprises a second doublet lens, a second biconcave lens and a fourth double meniscus lens which are sequentially arranged on the same optical axis from the object side. According to the invention, the installation and adjustment difficulty is reduced, and under the condition that the overall size is not changed, the view field is larger, the vignetting is smaller, the number of lenses is smaller, and the cost performance is higher.

The invention relates to a defect detection device with micro-nano precision based on Fourier leaf surface detection. The defect detection device comprises a light source, a linear gradient filter, a polaroid, a relay lens group, a plane spectroscope, a microscope objective, a rear-end lens group, a frequency spectrum surface and a camera, the linear gradient filter, the polaroid and the relay lens group are sequentially and coaxially arranged according to a horizontal light path from left to right, the plane spectroscope is arranged behind the relay lens group, a 45-degree angle is formed between the mirror surface of the plane spectroscope and the horizontal direction, the microscope objective is arranged below the plane spectroscope and is aligned with a sample to be detected, and the microscope objective is arranged on the plane spectroscope. The rear-end lens group and the spectrum surface are sequentially arranged above the plane spectroscope from bottom to top, and the camera is installed above the spectrum surface and used for detecting spectrum surface light information of the object to be detected. According to the invention, optical information including continuous measurement wave bands and continuous measurement angles can be collected simultaneously.

The utility model discloses a relay lens center correction tool, which belongs to the technical field of optical product correction, debugging supports of a plurality of test stations utilize the same relay lens center correction tool as a debugging target, and the relay lens center correction tool is directly connected with a relay lens module. And the deviation directions of the plurality of relay lens modules in the tolerance range are kept consistent, so that the consistency of optical inclination of the plurality of test stations can be improved.

The present application relates to the field of optical telescope technology, and proposes a kind of spectroscopic popular science telescope, including frame body, field lens ocular lens, cemented ocular lens, display screen and ridge prism are connected from top to bottom on frame body respectively;Half house cemented prism is fixedly connected between one side of ridge prism and frame body, and the inside of frame body is connected with light splitting focusing module, and light splitting focusing module includes relay lens large lens, relay lens middle lens and relay lens small lens;Light splitting focusing module is composed of three relay lenses of relay lens large lens, relay lens middle lens and relay lens small lens, and light splitting focusing module is arranged on original observation light path, and original observation light path is divided into the following two ways: one way is observation light path, directly conducted to field lens ocular lens for user naked eye observation;Another way is imaging acquisition light path.Through the above technical scheme, the problem that the existing telescope exists prism observation and imaging light path coincides, sometimes there will be shielding interference, which will affect the user's judgment.

The invention discloses an intelligent wafer defect detection system and method and a readable storage medium, and the system comprises an EUV light source illumination module, an aspheric high-numerical aperture composite optical lens group, a super-resolution image collection and reconstruction module, a defect recognition and classification module and an illumination uniformity adjustment feedback module. The EUV light source illumination module comprises a light source, a relay lens group, an adjustable reflector array and a uniformity adjustment algorithm, and is used for providing high-intensity and uniform EUV illumination; the aspheric high-numerical aperture composite optical lens group is used for realizing high-precision imaging of submicron defects; the super-resolution image acquisition and reconstruction module is used for improving the resolution of an original image to a submicron level. According to the invention, the system resolution is effectively improved to be less than 0.1 mu m, real-time online detection of defects such as submicron scratches, particle pollution and crystal edge breakage is realized, light intensity distribution is optimized through a self-adaptive illumination uniformity adjustment algorithm, and the detection signal-to-noise ratio is improved.