1930 results about "Microscope objective" patented technology

The invention relates to the technical field of quantum sensing and ocean detection, and discloses an ocean magnetic field sensor based on an NV color center and an ocean magnetic field measuring method.The sensor comprises a cylindrical pressure-resistant cabin, an optical platform arranged in the pressure-resistant cabin and a main control panel; a laser, a beam shaping unit, a dichroscope, a beam shaping lens group, an objective lens, a diamond NV color center chip, a plano-convex lens I, a band-pass filter and a photoelectric detector are mounted on the optical platform; two microstrip loop antennas are mounted on the outer side of the diamond NV color center chip; an FPGA + ARM dual-core processor, a digital lock-in amplifier and two microwave signal generators are installed on the main control board, and the microwave signal generators are connected with the microstrip loop antenna and achieve electromagnetic coupling with the diamond NV color center chip. The invention has the advantages of high sensitivity, good long-term stability and strong anti-interference capability, and provides a new generation of quantum sensing solution for applications such as ocean geomagnetic monitoring and underwater target identification.

The invention discloses a scanning electron microscope. The scanning electron microscope comprises a scanning electron microscope main body and a sample table located in a sample cavity, the scanning electron microscope main body is fixedly connected with the upper cover of the sample cavity, so that a closed space is formed in the sample cavity; a closed-loop groove is formed in an upper cover of the sample cavity; wherein the groove is located outside the connection position of the upper cover of the sample cavity and the scanning electron microscope main body, and the bottom of the groove is not higher than the supporting surface of the sample table; a magnetic shielding layer is arranged in the groove; wherein the length of the magnetic shielding layer is not less than the distance from the objective lens of the scanning electron microscope main body to the supporting surface of the sample stage.

The invention relates to the technical field of laser shaping, in particular to a light spot shaping method and system based on a spatial light modulator, and the method comprises the steps: providing and expanding an incident laser beam in Gaussian distribution, and obtaining a collimated and expanded beam; irradiating an incident laser beam to a spatial light modulator, loading a preset phase modulation pattern to modulate a wavefront phase, and outputting a phase modulation beam; the phase modulation light beam is input into a 4f imaging system, a spatial light modulator is located on the front focal plane of a first lens, and the light beam forms a light field with target intensity distribution on the rear focal plane of a second lens after passing through the system; and the light field is focused on the surface of a workpiece to be processed through an objective lens to form a flat-topped light spot. According to the scheme, uniform light intensity distribution can be flexibly generated without replacing optical elements, the uniformity and utilization efficiency of laser energy in a machining area are remarkably improved, and the problem of material damage or insufficient edge machining caused by too strong center energy is effectively solved.

The invention relates to the technical field of quantum sensing, and discloses a quantum magnetometer device based on diamond NV color center photoelectric detection magnetic resonance. Wherein the optical path module performs optical excitation and imaging positioning on a diamond sample through a laser and an objective lens. The circuit module integrates a microwave source, a lock-in amplifier, a low-noise current amplifier and a programmable power supply, applies a microwave field and bias voltage to a microwave antenna and an interdigital electrode on the surface of a sample respectively, and collects sample dependency photocurrent signals. And the operation module realizes automatic control and data processing of the system. According to the device, NV color center spin state information is converted into a photocurrent signal through a photoelectric detection magnetic resonance mechanism, an amplitude or frequency modulated signal is demodulated by using a lock-in amplification technology, information of a detection magnetic field is obtained through a high signal-to-noise ratio photoelectric detection magnetic resonance spectrum, and the sensitivity of the magnetic field is evaluated. Magnetic resonance signals are detected in an all-electricity mode, a complex optical system of traditional fluorescence detection is simplified, and the device has the advantages of being compact in structure, easy to integrate, high in measurement sensitivity and the like.

The invention relates to the technical field of semiconductor detection, in particular to a wafer bright field illumination and imaging system, a wafer defect detection device and a wafer defect detection method, the system comprises an illumination module, a beam combining module, an objective lens module and an acquisition imaging module; wherein the illumination module generates an illumination light beam adaptive to a wafer detection view field; the beam combining module realizes non-interference separated transmission of an illumination light path and an acquisition light path through a reflection area and a transmission area which work independently; the objective lens module converges the light beams reflected by the reflection area to the surface of the wafer, and controls the light beams to form illumination only at the edge of an entrance pupil so as to realize off-axis illumination; meanwhile, the reflected light beams on the surface of the wafer are collimated and then transmitted to the transmission area; and the acquisition imaging module receives the parallel light beams, converts optical signals into electric signals, and generates a wafer surface image. According to the invention, the problems of high energy loss, high cost, low detection rate and insufficient resolution of a traditional bright field detection system are effectively solved.

The invention provides a light source multiplexing diamond NV color center wide field detection system and an illumination detection method. The system comprises a diamond containing an NV color center, an exciting light module, a first double-color sheet, an objective lens, a second double-color sheet, a wide field imaging module, an illumination imaging module and a microwave module, exciting light generated by the exciting light module irradiates the first double-color piece, is guided to the objective lens, and irradiates the diamond after being transmitted by the objective lens so as to excite the NV color center of the diamond to generate fluorescent light; the objective lens is of an infinity type; the exciting light is irradiated to a sample to be detected after being transmitted by the diamond; fluorescent light and exciting light from a sample to be detected are collected by the objective lens, then transmitted to the first double-color piece and guided to the second double-color piece through the first double-color piece, the second double-color piece guides the fluorescent light to the wide-field imaging module for imaging, and the exciting light in the second double-color piece is guided to the illumination imaging module for imaging. Illumination can be achieved in the exciting light working state, exciting light switching operation in the prior art is avoided, and efficiency can be remarkably improved.

The invention belongs to the technical field of telescope manufacturing, and discloses a large-view-field telescope optical system which is characterized in that a first objective lens, a second objective lens, a third objective lens, a focusing lens, a semi-pentaprism, a roof prism, a first eyepiece lens, a second eyepiece lens and a third eyepiece lens are sequentially designed from the object side to the image side in the optical axis direction. According to the optical system, only the ten lenses have diopters, the requirement for the field of view of 6.7 degrees under the 8-fold condition is met, and the exit pupil distance reaches 22.6 mm.

The present invention relates to a microscope comprising a light source, an illumination beam path for guiding excitation light to a sample, a detector for detecting emission light emitted by a sample, a detection beam path with a microscope objective for guiding the emission light to the detector, a mechanical drive for setting a relative lateral position between the sample and the microscope objective, and a control unit.The microscope is characterized in that the control unit is configured to perform a setting step, wherein the mechanical drive is sequentially adjusted to at least three different relative lateral positions; a detection step, wherein measurement data from the detector are acquired for at least a subset of points in the sample within a field of view of the detection beam path, wherein for each point of the subset measurement data are acquired for at least two different lateral positions of the mechanical drive; and an evaluation step, wherein field inhomogeneity in the field of view and microscopic sample information are extracted from the measurement data. In further aspects, the invention relates to a method for determining field inhomogeneity in a field of view of a microscope and to a microscopy method.

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The invention discloses a non-consistency multi-focus unit modification system for laser slicing of transparent materials. The non-consistency multi-focus unit modification system comprises an ultra-short pulse laser, a light beam regulation and control system, a light beam shaping system, a focusing objective lens, a visual positioning system and a high-precision three-dimensional motion platform, a transparent material sample wafer to be sliced is placed on the high-precision three-dimensional motion platform; the ultrashort pulse laser provides picosecond laser beams for the whole system, the laser beams generated by the ultrashort pulse laser are transmitted to the light beam shaping system through the light beam regulation and control system to generate multiple inconsistent laser beams, and the multiple inconsistent laser beams are focused and shrunk through the focusing objective lens to obtain multiple inconsistent focuses. The focus is focused in a transparent material sample wafer on a high-precision three-dimensional motion platform for slicing; wherein the high-precision three-dimensional motion platform realizes the movement of a transparent material sample wafer in x, y and z directions; and the visual positioning system is used for identifying and positioning the transparent material sample. On the premise that the slicing quality is guaranteed, the processing efficiency is remarkably improved.

The invention relates to a spectral confocal three-dimensional shape reduction method and system based on a super-surface spectral imaging chip. The method comprises the following steps: a continuous spectrum light source device emits a continuous spectrum light beam to a dispersion objective lens, the continuous spectrum light beam is subjected to spatial separation along an optical axis direction through the dispersion objective lens and then is irradiated to the surface of a to-be-measured three-dimensional topography object, and the continuous spectrum light beam is reflected on the surface of the object; a part of the reflected light beam penetrates through a light hole of the shading plate, then irradiates a focusing lens, is focused by the focusing lens and then enters a super-surface spectral imaging chip, and the super-surface spectral imaging chip collects wavelength information; wavelength information collected by the super-surface spectral imaging chip is converted into height information, and the three-dimensional shape of the surface of the object is fitted according to the height information and the pixel position corresponding to the height information. According to the invention, the reduction of the three-dimensional morphology can be realized through one-time photographing of the simple optical system, the morphology reduction efficiency is high, and the cost is low.

The invention discloses a PINN-based large numerical aperture photoetching objective lens vector diffraction field calculation method, which comprises the following steps: obtaining a three-dimensional vector diffraction light field of a large NA photoetching objective lens through simulation, reconstructing the three-dimensional vector diffraction light field at a sampling point position, and generating corresponding complex electric field distribution matrix data; performing physical purification on the complex electric field distribution matrix data to construct a corresponding data set; constructing a corresponding Helmholtz equation as a constraint equation based on the light field tight focusing characteristic of the large NA photoetching objective lens; constructing an initial model, and training the initial model by using the data set in combination with the constraint equation to obtain a PINN model for predicting complex electric field data; and inputting space coordinates of a to-be-predicted target into the PINN model to obtain complex electric field data. According to the method provided by the invention, the calculation efficiency of the vector diffraction field can be remarkably improved on the premise of keeping relatively high simulation precision, and the method is suitable for rapid modeling and analysis of the three-dimensional vector light field of the large-numerical-aperture photoetching object mirror.

The invention provides an imaging device and method based on a diamond NV color center, and the device comprises a diamond containing the NV color center, an objective lens assembly, an optical detection module, a displacement platform, and a microwave module. The objective lens assembly comprises an objective lens turntable, and an objective lens and a suction tube which are mounted on the objective lens turntable, the objective lens turntable can switch the objective lens or the suction tube to a working position, and the suction tube is used for introducing negative pressure; the displacement platform is located below the objective lens assembly, and the upper surface of the displacement platform is used for placing a to-be-tested piece and can regulate and control the position of the to-be-tested piece; the diamond is used for being placed on a to-be-tested piece and located below the working position of the objective lens assembly, when the suction pipe is switched to the working position, an opening in the lower end of the suction pipe faces the diamond, and the diamond can be adsorbed or released through negative pressure in the control pipe. And the implementation mode is simple and convenient, the use of other auxiliary equipment is reduced, the occupied space is simplified, and accurate and efficient operation of adsorbing and releasing the diamond can be ensured. By using the device, multiple times of imaging scanning of a large-size to-be-measured piece can be realized.

The embodiment of the utility model provides an objective lens damping device which comprises an objective lens damper, a flexible hinge structure is adopted in the objective lens damper, and the flexible hinge structure provides elastic support when external vibration or temperature changes so as to buffer vibration transmission and reduce stress caused by a thermal expansion effect; the upper layer of the objective lens damper is an objective lens contact end; the lower layer is a frame contact end and is provided with an interface connected with a frame; the middle layer is of a flexible hinge structure, necessary flexible supporting is provided, and therefore vibration isolation and thermal stress buffering are achieved. According to the utility model, the objective lens damper is arranged between the objective lens and the frame, so that the objective lens and the frame are flexibly connected through the scalability of the flexible hinge instead of being rigidly connected through a screw, a better protection effect on the objective lens is achieved, and the designed objective lens damper belongs to passive vibration reduction, so that the service life of the objective lens damper is prolonged. Only through mechanical design, the vibration isolator is easy to achieve, and vibration isolation and thermal decoupling are well achieved.

The invention discloses a machine vision-based micro-plastic intelligent identification and measurement method, which comprises the following steps: filtering a water sample containing micro-plastic or not containing micro-plastic, and acquiring images under a uniform amplification factor by using a microscope to obtain a micro-plastic image to be detected and a contrast image; calculating the absolute value of the color centroid value of the contrast image and the color difference value of the micro-plastic image, generating a difference image, and carrying out denoising, graying and binarization processing on the difference image to obtain a binary image with highlighted micro-plastic; extracting pixel coordinates of the micro-plastics, setting a threshold value to carry out connected clustering, and distinguishing the micro-plastics and image impurities in combination with a preset micro-plastic recognition threshold value to realize micro-plastic recognition and quantity statistics; and further shooting a standard objective lens micrometer image, calculating the actual physical size represented by a single pixel, and automatically calculating the area and the length of the micro-plastic by combining each clustering enclosing rectangle and the number of the pixels. The method is accurate in recognition and high in operation automation degree, and can be widely applied to intelligent recognition and analysis of water body micro-plastics.

A device for light field microscopy, comprising: a two-dimensionally spatially resolving detector for detecting light radiated by a sample; a detection beam path having at least one microscope objective lens; and at least one multi-lens array for imaging the light radiated by the sample onto the detector, wherein the multi-lens array is arranged in a plane which is optically conjugated with respect to a rear focal plane of the microscope objective lens, or in the vicinity of such a plane; and a control and evaluation unit for activating the detector and for evaluating the measurement data from the detector. The device also includes an adjustable relay optical system in order to image the rear focal plane of the microscope objective lens into the plane in which the multi-lens array is arranged, or in the vicinity of this plane. A method for light field microscopy is also provided.

The invention discloses a coaxial laser confocal processing and measurement integrated system and an in-situ morphology measurement method thereof, and belongs to the technical field of ultrafast laser precision processing and in-situ measurement. The system comprises a laser confocal morphology measurement module, an ultrafast laser scanning processing module, a CCD (Charge Coupled Device) microscopic imaging module, a beam splitter prism, a low-pass dichroscope, a long-working-distance achromatic laser processing objective lens and a combined three-axis precision displacement table, the laser confocal morphology measurement module generates a measurement light beam to realize morphology measurement of a sample; the ultrafast laser scanning processing module generates a processing light beam to scan and process the surface of the sample; the CCD microscopic imaging module generates an illumination light beam to realize illumination of a processing position and acquisition of image information of a sample surface; a measurement light beam, a processing light beam and an illumination light beam form coaxial light beams through a low-pass dichroscope, the coaxial light beams are focused at the same position of the surface of a sample through a long-working-distance achromatic laser processing objective lens, and the coaxial in-situ measurement condition is achieved.

The invention provides an endoscope imaging system and a hard tube type endoscope, and belongs to the technical field of optical imaging, the endoscope imaging system comprises an objective lens, a relay lens and an ocular lens of an object space telecentric structure, the objective lens comprises a first lens, a second lens, a third lens with positive focal power and a bonding lens group with positive focal power, the second lens is a steering prism, the image side surface and the object side surface of the first lens are aspheric surfaces, the balsaming lens group comprises a fourth lens, a fifth lens and a sixth lens, the fourth lens is a doublet lens, the fifth lens is a triplet lens, the sixth lens is a doublet lens, the relay lens comprises an odd number of rod lens groups which are arranged at intervals, and the rod lens groups are arranged at intervals. The eyepiece comprises a seventh lens, an eighth lens and a ninth lens, and the seventh lens, the eighth lens and the ninth lens are all doublet lenses. By optimizing the structural design of the optical system, the defocusing amount is reduced, seamless switching of visible light and near-infrared light dual-mode imaging can be achieved, and meanwhile high-quality imaging is achieved.

The invention relates to the technical field of optical imaging, and discloses a novel reflective dark field imaging method and system based on Fourier conjugate plane modulation, and the method comprises the steps: controlling a first spatial light modulator to load a dynamic annular illumination pattern, and projecting the dynamic annular illumination pattern to a rear focal plane of an objective lens; light field distribution formed by scattering signal light and annular reflected light is separated on a rear focal plane by using an objective lens; relaying the light field distribution to a conjugate plane where a second spatial light modulator is located through a second relay light path; and controlling the second spatial light modulator to load a dynamic blocking pattern, blocking the annular reflected light and enabling the scattered signal light to pass through, and finally imaging. According to the invention, two electronically synchronous spatial light modulators are adopted to construct a dynamic illumination light field and realize adaptive spatial filtering respectively, so that cooperative matching of an illumination pattern and a blocking pattern is realized, active compensation of optical chromatic aberration is facilitated, the problem of background leakage under wide-spectrum illumination is solved, and the illumination quality is improved. And a high-numerical aperture objective lens lacking a dark field channel is compatible.

The invention relates to a method for illuminating a sample plane (17) with wide-field illumination and comprises the steps of providing an illumination beam; guiding the illumination beam along an illumination beam path (3); focusing the illumination beam into an objective pupil (13) of an illumination objective (10) and generating an illumination pattern of wide-field illumination in the sample plane (17), wherein at least one optical element of the illumination beam path is moved in order to repeatedly change the formation of the illumination pattern in the sample plane (17) for the purpose of homogenizing the wide-field illumination.The invention is characterized in that a first scanner (7) is used as an optical element for generating different configurations of the illumination pattern, and the first scanner (7) oscillates in at least one direction around a set position in order to repeatedly change the location or illumination angle of the illumination pattern in the sample plane (17) for the purpose of homogenization. The invention also relates to a device for illuminating a sample plane (17) with wide-field illumination and a microscope (1).

The utility model relates to a double-objective-lens three-pressure-head visual brinell hardness tester which comprises a shell, a turntable housing is arranged at the inner top of the shell, and a rotatable five-functional-position turret mechanism is arranged in the turntable housing. According to the utility model, by adopting the five-functional position turret mechanism, the rapid switching of the objective lens and the pressure head is realized, so that the test efficiency is greatly improved, meanwhile, the design of the double objective lenses enables the hardness tester to observe indentations under different magnification times, the measurement accuracy and flexibility are improved, and the test efficiency is improved. The design of the three detection pressure heads enables the durometer to easily adapt to different test requirements without replacement, the arrangement of the camera mechanism enables the test process to be recorded in real time and facilitates subsequent data analysis and processing, the host is used as the core of the control system and can realize automatic control of the whole test process, and the display is embedded in the face frame, so that the whole test process is more convenient. Therefore, the user can visually see real-time data in the testing process, and the operation is more convenient.

The invention provides a semiconductor defect detection method and device based on short-medium wave infrared microscopic imaging, and the method comprises the steps: selecting a short-medium wave infrared band with the wavelength greater than or equal to 2.5 microns as a detection working band, and employing an infrared light source capable of covering the detection working band and a corresponding infrared area array detector; constructing an infrared microscopic imaging light path, and irradiating light emitted by an infrared light source to the surface of a sample through an infrared illumination light path after passing through a beam splitter and an infrared microscopic objective lens; sample reflected light is collected through an infrared microscope objective and is imaged on an infrared area array detector; two-dimensional view field scanning is performed on the sample, imaging is realized through a focusing mechanism, and surface and internal defects are detected; the infrared light source is modulated, so that signal light reflected by the sample is an alternating-current signal, the alternating-current signal is separated from direct-current noise spontaneously radiated by the background, and internal defects of the semiconductor sample are detected after the noise is filtered and the signal-to-noise ratio of an image is improved. The invention provides a high-sensitivity and high-resolution solution for semiconductor defect detection.

The invention discloses a full-automatic high-flux space-time resolution fluorescence spectrum imaging system and method, and relates to the field of fluorescence signal spectrum. Comprising a working table, a sample table, an objective lens, a mechanical arm sample injection module used for grabbing the sample table loaded with a sample in advance and placing the sample table on the working table, and a picosecond pulse laser output module used for outputting a laser beam to the objective lens, the fluorescence signal detection module and the control module are used for simultaneously collecting spectral data and dynamic data of a fluorescence signal generated after the sample is focused by the laser beam; the sample table and the objective lens are sequentially arranged on the workbench at intervals in the vertical direction from top to bottom; the mechanical arm sampling module, the picosecond pulse laser output module and the fluorescence signal detection module are respectively in communication connection with the control module. According to the invention, simultaneous acquisition of spectrum data and dynamic data of fluorescence signals can be fully automatically realized.

The invention discloses a CARS-LA-ICP-MS combined multimode analysis system. The CARS-LA-ICP-MS combined multimode analysis system comprises a fusion light path module, a mass spectrometry gas path module, a three-dimensional mobile station, a CARS signal acquisition system and a computer control system, the fusion light path module comprises a laser source, an optical parameter amplifier, a light pulse time delay system, three dichroscopes, a light beam adjusting system, a galvanometer, a movable objective lens and a camera; the mass spectrometry gas circuit module comprises a carrier gas supply device, a multimode analysis sample cell and a mass spectrometry device; the multimode analysis sample cell comprises an upper cover, a lower cover and a side wall shell. On the other hand, the invention discloses an analysis method which comprises initialization setting, CARS analysis, mass spectrum analysis task parameter setting, laser ablation mass spectrum analysis and data synthesis. Through coaxial optical path design and an intelligent algorithm, deep fusion of chemical imaging and elemental analysis is realized, and a brand new research tool is provided for the fields of life science, material science and the like.

An objective system of a medical scope including an optical filter is disclosed. The optical filter includes a light incident side and a light exit side, a central region around an optical axis, and a peripheral region and is designed as an aperture with a single optical axis for white light and fluorescence light. The optical filter includes a first transmission zone for a transmittance of a first wavelength band and a second transmission zone for a transmittance of a second wavelength band at least partially different from the first wavelength band. At least one of the two transmission zones includes a filter coating. As a result, when both white light and fluorescence light pass the optical filter, a light beam cone of the fluorescence light has a larger diameter than a light beam cone of white light or vice versa.

The invention provides a wide-field imaging and confocal integrated system and method for a solid-state spin color center. The system comprises an exciting light module, a wide-field branch, a confocal branch, a first guide element, a first double-color piece, an objective lens, a probe comprising a solid-state spinning color center, a first filter, a second guide element, a photoelectric detection light path, a wide-field imaging light path and a microwave module. The exciting light module outputs two paths of exciting light in a switchable mode, the two paths of exciting light are transmitted to the confocal branch and the wide-field branch respectively so as to obtain light beams meeting confocal and wide-field imaging respectively, and the two paths of light beams are guided to the same laser excitation and fluorescence detection light path through the first guiding element and then are transmitted to the wide-field branch through the second guiding element. And then the collected fluorescence is guided to a photoelectric detection light path or a wide-field imaging light path by a second guide element, so that switching of two detection modes can be realized, integration of wide-field imaging and confocal can be realized, compared with respective reconstruction in the prior art, the method is more convenient, repeated debugging in the switching process is avoided, and real-time switching can be realized.

The invention relates to an automatic focusing method and device and computer equipment. The method is applied to a microscope, and comprises the following steps: in response to an automatic focusing instruction, controlling an objective lens to move according to a first stepping value corresponding to an imaging parameter of the microscope, and acquiring at least two first reference images at different positions of the objective lens; determining a first objective lens position according to an objective lens position and ambiguity features corresponding to the first reference image; controlling the objective lens to move according to the first objective lens position and a preset second stepping value, and acquiring at least two second reference images at different objective lens positions; and according to the objective lens position and the definition characteristic corresponding to the second reference image, determining a target focal plane position and completing focusing. By adopting the method, the focusing efficiency can be improved and the calculated amount can be reduced on the premise of ensuring the focusing accuracy.

The invention relates to a crystal orientation detection system, which comprises an LED surface type array, an illumination lens, a reflector, a microscope objective, a sample stage, a tube lens, an image sensor and a computer, and is characterized in that the LED surface type array comprises m * n LED light sources which are uniformly distributed along the radial direction and the annular direction and are independently controlled by the computer; the illumination lens, the reflector and the microscope objective form an illumination light path, the microscope objective and the tube lens form a microscopic imaging light path, the reflector refracts an illumination light beam to the microscope objective at an inclination angle of 45 degrees, and the computer synchronously controls gating of the LED face type array and image acquisition of the image sensor. According to the technical scheme, the LED light source is long in service life and low in energy consumption, a complex vacuum environment and high-voltage equipment are not needed, optical assemblies such as a reflecting mirror, a microobjective and a tube mirror are mature and easy to obtain, and the overall manufacturing cost of the system is only 10%-20% of that of an electron backscatter diffractometer (EBSD) which is the most commonly used crystal orientation detection device at present.

The invention relates to the technical field of optical elements, in particular to a microscope lens for an ultra-long working distance. The microscope lens comprises a lens cone, and a first lens group, a diaphragm and a second lens group which are coaxially arranged in the lens cone. The first lens group is used for collecting and pre-collimating incident light, the diaphragm is used for limiting the angle and light flux of incident light entering the second lens group, and the second lens group is used for performing residual aberration correction on light passing through the first lens group and the diaphragm; the first lens group comprises six lenses which are a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens in sequence from the object side to the image side; the lens II is an asymmetric biconvex positive lens; the lenses 3 to 6 are meniscus lenses; the second lens group comprises two lenses which are a seventh lens and an eighth lens in sequence from the object side to the image side, and the seventh lens and the eighth lens are both biconcave lenses. According to the microscope lens provided by the invention, high-quality imaging of the lens is also realized on the premise of realizing super-long working distance (600mm) microscopy.

The invention provides a measurement system, method, device and equipment, a medium and a product, and belongs to the technical field of optics. The system comprises a beam expander used for generating a first transmission light beam and a first reflection light beam when a light beam after beam expansion reaches a tested sample at a first preset position; a beam compressor; the receiver is positioned at a first position and is used for receiving the first transmission light beam to generate a first interferogram of the detected sample; the receiver is positioned at a second position and is used for receiving the first reflected light beam to generate a second interferogram of the detected sample; the first microscope objective is used for generating a second transmission light beam and a second reflection light beam by enabling the focused light beam to reach a detected sample at a second preset position; a second microscope objective; the receiver is positioned at a third position and is used for receiving the second transmission light beam to generate a third interference pattern of the detected sample; and the receiver at the second position is also used for receiving the second reflected light beam to generate a fourth interferogram of the tested sample.