5295 results about "Microscope objective" patented technology

The invention provides a microscope automatic focusing method and device and a computer readable storage medium, and the method comprises the steps: S1, capturing a laser reflection light spot image on a sample through a camera, so as to determine the focusing position of an objective lens; s2, integrating the light spots through threshold processing and morphological operation, analyzing the gradient of a longitudinal gray distribution map to determine the edge and orientation, and finally identifying the maximum contour and framing the maximum contour with a minimum bounding rectangle to determine the width of the light spots; and S3, according to the linear relation between the light spot width and the defocusing distance and by analyzing the semi-circle orientation and width change of the light spot, controlling the focusing motor to reach the focusing position. The distance and the direction between the objective lens and the focal plane are determined by acquiring the reflected light spot image of the laser irradiated on the sample through the microscope objective lens, and the focusing error caused by the nonlinearity of the spot size when the point-semicircle spot approaches the focal plane is avoided according to the linear relation between the spot width and the defocusing distance. And the focusing process is high in efficiency and precision.

The invention discloses a wafer detection scattered light collection objective lens, and relates to the technical field of optical imaging. The scattered light collecting lens is applied to wafer defect detection, the scattered light collecting lens sequentially comprises a first lens group, a second lens group, a third lens group and a fourth lens group from an object plane to an image plane in the optical axis direction of the lens, twelve lenses and an aperture diaphragm, and the twelve lenses and the aperture diaphragm are coaxially arranged; the first lens group is a catadioptric lens group, has positive focal power, and is used for imaging an object plane to an intermediate image plane through two times of reflection. The numerical aperture of the acquisition objective lens provided by the invention is equal to 0.9, the field of view is equal to 2.6 mm, the acquisition objective lens has the characteristics of large field of view, large numerical aperture and small center shielding, the capability of detecting scattered light of defects can be greatly improved, chromatic aberration is corrected by adopting a refraction and reflection mode, and a wider laser bandwidth can be realized compared with a general refraction mode of combining CaF2 and fused quartz.

The invention belongs to the technical field of retina imaging and fundus three-dimensional reconstruction, and particularly relates to a color three-dimensional fundus imager optical system. Comprising a large eye objective lens, a dichroscope, a hollow reflector, a focusing lens, a spectroscope, a retina lens, a retina imaging chip, a fixation lens, a sighting mark lamp, an illumination lens, an annular light source, a pupil lens, a pupil imaging chip, an infrared lens, an infrared dodging lens, an infrared light source, a scanning lens, a three-dimensional galvanometer, a collimator, a coupler, a frequency sweeping light source and a dispersion compensator. A polarization controller, a coupler and a photoelectric detector. The system is mainly composed of a visible light imaging light path, an infrared imaging light path and a laser imaging light path, the visible light imaging light path is used for shooting color fundus two-dimensional images, the infrared imaging light path is used for real-time positioning and focusing of human eye pupils, and the laser imaging light path is used for three-dimensional tomography of retinas. The objective of the invention is to solve the problem that existing medical equipment cannot acquire fundus color three-dimensional images.

Methods include generating a modulated light pattern using a light modulator (108), transmitting the modulated light pattern through an objective lens (104) to a surface of a substrate (150), where the objective lens (104) defines an object plane, obtaining a plurality of images of the modulated light pattern reflected from the surface of a substrate (150), where each modulated light pattern is obtained at a different relative distance between the objective lens (104) and the substrate surface, analyzing the plurality of images to determine a reference location of the substrate surface relative to the objective lens (104) that corresponds to positioning of an image of the modulated light pattern formed by the objective lens (104) at the object plane, and adjusting a position of the substrate (150) relative to the objective lens (104) based on the reference location.

The invention discloses a non-microwave electromagnetic field measurement method and device based on an NV color center, and relates to the field of quantum precision measurement, and the device comprises a magnetic field generation structure, a laser excitation structure, a color center selection structure and a fluorescence detection structure. The magnetic field generation structure is used for applying a magnetic field with known direction and size to the diamond; the laser excitation structure generates laser, and the laser irradiates the diamond containing the NV color center; the color center selection structure performs micron-level focusing on an objective lens by using a three-axis displacement table and selects a diamond NV color center corresponding to the size and direction of a magnetic field; the fluorescence detection structure collects fluorescence radiated by the NV color center and converts the fluorescence into an electric signal for measurement. According to the invention, by applying the magnetic field with the size of 1024G along the NV axis and the included angle within 0.1 degree, the detection of the target electromagnetic field is realized by utilizing the sensitivity to the transverse component of the electromagnetic field under the strong magnetic field; the invention discloses a non-microwave electromagnetic field measurement method and device based on an NV color center, and is suitable for magnetic field and electric field measurement of an all-optical device without a microwave assembly.

The invention discloses a high-power microscope intelligent scanning method for a bone marrow smear, which comprises the following steps: S1, automatically dividing a scanning area: acquiring a bone marrow smear image by adopting a front camera, and selecting an optimal scanning area through a multi-dimensional quality evaluation model; s2, intelligent partitioning and focusing point distribution: dividing an optimal scanning area into N * M sub-areas, determining P focusing sampling points by adopting a layered sampling strategy, and establishing a three-dimensional coordinate mapping table; s3, multi-point focusing data acquisition: according to a preset coordinate mapping table, driving an objective table and an objective lens assembly to move to each sampling point in sequence, and constructing an N * M * P-dimensional focusing data matrix; s4, performing focal plane fitting by a least square method: performing three-dimensional plane fitting on the acquired data; and S5, intelligent scanning imaging: calculating the theoretical optimal focal length of each position in the scanning path according to the fitting function, and driving the objective lens assembly to adjust the focal length in real time for scanning imaging. According to the invention, the scanning area identification accuracy and the image definition uniformity are automatically improved in the whole process.

The invention provides a flat-field apochromatic objective lens and an optical microscope, and relates to the technical field of optical imaging. The flat-field apochromatic objective lens comprises a first lens group, a second lens group and a third lens group which are sequentially arranged from an object plane to an image plane, both the first lens group and the second lens group have positive refractive power, the third lens group has positive refractive power or negative refractive power, the first lens group comprises at least two sub-lens groups with positive refractive power, and the second lens group comprises at least two sub-lens groups with negative refractive power. The sub-lens group is a single lens or a balsaming lens formed by gluing at least two single lenses, and the second lens group comprises at least one balsaming lens with positive refractive power and at least one balsaming lens with positive refractive power or negative refractive power. The third lens group includes at least one cemented lens having a positive refractive power and at least one cemented lens having a positive refractive power or a negative refractive power. On the basis, the flat-field apochromatic objective lens has a large field of view, a large numerical aperture and a long working distance.

The invention discloses a rapid automatic focusing module and method suitable for a fluorescence microscope. The automatic focusing module comprises a laser, a diaphragm, a collimating lens group, a reflector, a dichroic mirror, an objective lens, a sample to be measured, a telescope lens group, a CCD2 detector, a control system and a displacement platform which are sequentially arranged along a focusing light path, and the sample to be measured, the objective lens, the dichroic mirror, a tube lens and the CCD2 detector which are sequentially arranged along an imaging light path; the collimated laser beam is emitted to the plane where the sample to be detected is located through the objective lens, and then the laser beam is reflected back to the telephoto lens group and converged to the CCD2 detector. According to the offset of the center of the reflected light beam, the relative distance between the objective lens and the to-be-tested sample is moved through a control system, and automatic focusing of a single view field of the to-be-tested sample is achieved; the to-be-measured sample is moved to the focal planes of different object view fields in the X direction and the Y direction and is quickly focused in real time, so that the large-size to-be-measured sample is always kept at the focal plane position, and the image quality and the working efficiency are improved.

The embodiment of the invention provides a microscope objective and a microscope. The microscope objective comprises a first lens group, a second lens group and a third lens group which are sequentially arranged from an image space to an object space. The first lens group has negative refractive power and is at least used for correcting coma. The first lens group comprises a first cemented lens, and the first cemented lens comprises a first lens and a second lens which are cemented. The second lens group has positive focal power and is at least used for correcting astigmatism, field curvature and distortion. The second lens group comprises a second balsaming lens, a third balsaming lens and a fourth balsaming lens. The second bonding lens comprises a third lens and a fourth lens, the third bonding lens comprises a fifth lens and a sixth lens, and the fourth bonding lens comprises a seventh lens and an eighth lens. The third lens group has positive focal power and is at least used for correcting spherical aberration. And the third lens group comprises a ninth lens, a fifth bonding lens and a twelfth lens, and the fifth bonding lens comprises a tenth lens and an eleventh lens which are bonded.

The invention provides a three-dimensional automatic focusing method and device based on multi-modal data fusion and Kalman filtering and a readable storage medium, and high-precision real-time focusing is realized through multiple steps: collecting sample three-dimensional phase information and different focal plane image data by using a phase and image sensor, and calculating phase depth and definition; constructing a multi-plane Kalman filtering cluster, modeling the focus state of each focal plane, and predicting the focus by fusing the neighborhood coupling influence; the focus state is updated and corrected in combination with the image definition and the phase gradient, and the optimal three-dimensional focus position is determined by means of a collaborative optimization decision maker; dynamically adjusting the noise matrix and the coupling coefficient, and controlling the objective lens to complete focusing. According to the method, through multi-modal fusion and multi-plane cooperation, the problems of focus drifting and jumping are effectively solved, the focusing precision and stability of an imaging system in a complex sample and a dynamic environment are remarkably improved, and the method is suitable for equipment such as a biomedical full-automatic microscope and a digital pathological section scanner.

The invention provides a microscope objective optimization method and electronic equipment, and relates to the technical field of microscopic imaging. The method comprises the following steps: acquiring initial design parameters of a microscope objective; respectively calculating the imaging quality of the microscope objective and the total ghost image intensity of the microscope objective based on the Kohler illumination system according to the initial design parameters of the microscope objective; according to the imaging quality and the total ghost image intensity of the microscope objective, a preset lens evaluation function is constructed, and the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement are iteratively calculated, so that compared with an existing mode of determining through multiple tests, the optimization efficiency can be improved; and through introduction of the preset lens evaluation function, comprehensive evaluation can be realized, and the optimization effect is ensured.

The invention provides an adjustment method of detection equipment, and the detection equipment sequentially comprises an objective lens, a spectroscope, a barrel lens and a detector from an object space to an image space, and also comprises a Kohler illumination module. The illumination light beam is emitted from the Kohler illumination module and is transmitted to the objective lens through the spectroscope, when the object to be detected is arranged on one side, far away from the spectroscope, of the objective lens, the illumination light beam emitted from the objective lens is reflected to obtain a reflected light beam, and the reflected light beam sequentially passes through the objective lens, the spectroscope and the barrel lens to reach the detector. After an aperture diaphragm is inserted into the Kohler illumination module and an auxiliary lens is arranged between the barrel lens and the detector, obtaining a first light spot position of a light spot formed by the aperture diaphragm at an entrance pupil of the objective lens through the detector; and under the condition that the Kohler illumination module does not provide the illumination light beam and the light source is used as an object to be detected, acquiring a second light spot position of the light spot of the entrance pupil of the objective lens through the detector, adjusting the position of the aperture diaphragm according to the first light spot position and the second light spot position, and aligning the illumination optical axis and the imaging optical axis.

The invention discloses a snapshot type hyperspectral imaging industrial online sorting system which comprises a support assembly, an optical imaging assembly and a motion control assembly. The bracket assembly consists of a bottom plate, and an adjustable bracket and a fixed bracket which are fixed on the bottom plate; the optical imaging assembly comprises a lighting unit, an imaging objective lens and a snapshot type hyperspectral camera, and can synchronously obtain space image information of a measured object and spectral information of a continuous wave band in a single exposure process; the motion control assembly realizes automatic transmission of the measured object through the transmission platform; the data processing module is integrated with an image preprocessing unit, a spectral analysis unit and a spectral database, and is used for end-to-end closed-loop control from original hyperspectral data generation to sorting decision making; the system adopts a metasurface light splitting structure to realize real-time decoding, performs material or category identification by using a pre-trained classification model, and finally automatically generates a sorting decision signal according to an identification result to drive a motion control assembly to complete sorting operation.

The invention belongs to the technical field of telescope manufacturing, and discloses a 20 * 42 telescope system which is characterized in that an objective first lens, an objective second lens, a focusing lens, a semi-pentaprism, a roof prism, a rhombic prism, an eyepiece first lens, an eyepiece second lens, an eyepiece third lens and an eyepiece fourth lens are sequentially arranged in the optical axis direction from the object side to the image side. The visual field of the whole machine is 3.25 degrees, the exit pupil diameter is 2.1 mm, the exit pupil distance is 35 mm, the nearest focusing distance is 8 m, and the image stabilization range is + / -5 degrees.

The invention relates to the technical field of laser processing devices, in particular to a device and method for achieving three-dimensional isotropic processing through a rotating slit. The three-dimensional motion platform is used for placing and driving a transparent material to be processed; the slit is provided with a driver to enable the slit to rotate, laser beams emitted by the laser emitting device are subjected to light path adjustment and then pass through the center of the slit to form elliptical light beams, and the elliptical light beams are focused by an objective lens and then are transmitted to the laser receiving device. The three-dimensional isotropic processing of the transparent material is realized by adjusting the rotating speed of the slit and the direct writing speed of the three-dimensional motion platform; according to the invention, the rotatable slit is arranged, a circular Gaussian beam emitted by the laser emitting device passes through the slit to form an elliptical beam, the elliptical beam is rapidly rotated by rapidly rotating the slit, and after the elliptical beam is focused by the objective lens, spatial three-dimensional spherical symmetrical focal field distribution can be obtained in the transparent material, so that three-dimensional isotropic processing is realized.

The embodiment of the invention discloses a microscope objective optical system, a microscope objective and a wafer detection microscope, and relates to the field of optics. The system is sequentially provided with a first lens group, a second lens group and a third lens group along the same optical axis from an image space to an object space; wherein the third lens group has positive focal power and is used for collecting light beams; the second lens group has negative focal power, the first lens group has positive focal power, the second lens group and the third lens group are used for correcting and compensating the optical system, and the second lens group comprises at least two lenses made of materials with different dispersion coefficients. The second lens group and the third lens group with correction and compensation functions are arranged, so that the optical system can meet the microscopic requirement of an ultra-wide working spectrum range, and the imaging quality is ensured.

The invention discloses a floating algae flow type microimaging sheath fluid focusing micro-fluidic chip device and system, and belongs to the technical field of micro-fluidic control. According to the device, the three-channel sheath fluid flow chip design is adopted, a large-channel inlet structure is combined to avoid algae cell blockage, and a sheath flow focusing technology is utilized to compress a sample flow to the center of a channel and limit the sample flow within the field depth range of a microscope objective to obtain a clear image. The arc-shaped structure of the sample channel reduces laminar flow disturbance, and a four-side transparent observation area supports panoramic depth imaging. The system comprises a microscopic imaging module, a fluid driving module and a sheath liquid flow chip module, a flow rate ratio of sheath liquid flow to sample flow is accurately controlled through a dual-channel liquid flow driving injection pump, and stable imaging within the depth of field of an objective lens is realized by combining a manual focusing platform. Experimental verification shows that the system can effectively compress sample flow to 21m nuclear flow diameter, imaging of floating algae such as chlorella, scenedesmus quadricauda and the like is clear, and the contradiction between flux and imaging quality of a traditional micro-fluidic chip is solved.

The invention discloses a lunar resource in-situ exploration-while-drilling device and method. The lunar resource in-situ exploration-while-drilling device is composed of a spiral drilling tool, an illumination light source module, a polarization spectrum detection module and a dual-channel spectrum measurement module. The drilling tool drill rod is of a hollow structure. Light emitted by the illumination light source module is collimated and depolarized to form unpolarized parallel light to irradiate lunar soil on the side wall of the drill hole, and the polarization spectrum measurement probe collects reflected light of the lunar soil; the reflected light is collimated by a front collimator objective of the probe and then sequentially passes through a spectrum modulation unit consisting of an achromatic 1 / 4 wave plate, a multi-stage wave plate, a beam splitter prism and two polaroids of which the light transmission directions are vertical to each other, and two orthogonal light beams are formed, so that polarization information of the reflected light is modulated in a spectrum dimension; demodulating the modulated spectrum to obtain the spectrum and polarization information of the lunar soil reflected light; and the resource distribution and content and the physical characteristics of the original lunar soil are inversed by using the polarization spectrum characteristics of the lunar soil. According to the invention, in-situ exploration of lunar subsurface depth profile mineral resources can be realized.

The invention discloses a method for clearly imaging a mask under an optical objective, and relates to the technical field of optical detection and image processing, and the method comprises the following steps: S1, constructing a light intensity distribution model based on the boundary condition of the field of view of the optical objective in combination with the reflection characteristic and incident angle change rule of a metal edge material, and determining the coverage range of metal edge reflection crosstalk, generating a mask boundary interference prediction map; s2, according to the mask boundary interference prediction map, performing region division on the micro-reflectivity image, extracting brightness gradient characteristics of reflectivity lifting in an interference region, and generating a brightness gradient parameter set required by image filtering; the method is based on light intensity modeling, fusion direction filtering, pixel stripping, gradient reconstruction and credibility weighted fusion, realizes closed-loop control from interference prediction to pixel restoration, has high resolution and adaptivity, can accurately strip edge reflection artifacts and restore a real image structure, remarkably reduces misjudgment and rework rate, and is suitable for large-scale popularization and application. And the mask yield and the stability of the detection system are improved.

The invention discloses a peripheral visual area defocused long-distance imaging optical system, and the system comprises a defocus panel which is located right above an observed object, and comprises a flat plate region and a micro-lens array region; the flat plate area is used for directly transmitting light emitted by an observed object; the micro-lens array area is used for carrying out first imaging on the peripheral area of an observed object to form a real image; the objective lens is positioned right above the defocus panel, and is used for performing first imaging on the observed object to form a virtual image of the observed object, receiving a real image of a peripheral area of the observed object, and performing second imaging to form a virtual image of the peripheral area of the observed object; the eyepiece is located right in front of the human eyes and used for conducting secondary imaging on the observed object, forming an amplified long-distance virtual image in front of the human eyes, receiving a virtual image of the peripheral area of the observed object and forming a real image in front of the peripheral retina in the human eyes. And the purpose of preventing and controlling myopia is better achieved.

The invention discloses a deep ultraviolet spherical catadioptric detection objective lens, and relates to the technical field of optics, the deep ultraviolet spherical catadioptric detection objective lens comprises a first lens group, a second lens group and a diaphragm, one side of the first lens group is arranged to be an object plane, the first lens group is located between the second lens group and the object plane, the first lens group is used for converging light and correcting residual aberration of the second lens group, and the diaphragm is arranged between the second lens group and the object plane. The diaphragm is arranged in the middle of the second lens group, and the second lens group and the diaphragm are used for correcting vertical axis aberrations such as coma of the system. The objective lens adopts a spherical catadioptric structure, can realize deep ultraviolet band application, has a large numerical aperture, the numerical aperture can reach 0.8, the smaller wavelength and the larger numerical aperture have higher resolution, so that smaller defects can be detected, the working distance can be greater than 10mm, and the detection precision is improved on the basis of realizing the large NA design. The length of the system is reduced, the number of original parts is reduced, only five lenses are needed, the structure is simple, and installation and detection are convenient.

The invention is suitable for the field of imaging, and discloses a micro lens array zoom module zoom method and an imaging system, and the method comprises the steps: obtaining a mapping relation table between a deviation objective lens working distance and a micro lens array state of a micro lens array zoom module; acquiring a laser spot image formed by irradiating the to-be-measured object with laser, and calculating the position of the to-be-measured object to the focal plane of the objective lens; determining an adjustment reference distance of the micro-lens array zoom module based on the position from the object to be measured to the focal plane of the objective lens, and comparing the adjustment reference distance with the mapping relation table to determine the micro-lens array state of the micro-lens array zoom module; and on the basis of the determined state of the microlens array, a focusing instruction is generated so as to realize automatic zooming of the microlens array zooming module, automatic zooming of the microlens array zooming module is realized, and the method has the advantages of extremely high focusing speed and high precision.

The embodiment of the invention discloses an image acquisition system and method of measurement equipment, and the system comprises a first defocus determination module which is used for determining a first defocus amount of a target object; the second defocusing determination module is used for determining a second defocusing amount of the target object; the first movement control module is used for controlling the measuring objective lens and the target object to move relatively in the first direction according to the first defocusing amount so as to focus the target object for the first time, and controlling the measuring objective lens and the target object to move relatively in the first direction according to the second defocusing amount so as to focus the target object for the second time; the image acquisition module is used for carrying out image acquisition on the target object after the first focusing to generate a first image so as to determine whether the target object is located at a preset position or not; the image acquisition module is used for performing image acquisition on the target object after the second focusing after determining that the target object is located at the preset position to generate a second image; the image acquisition duration of the target object can be reduced, the alignment error measurement efficiency of the target object is improved, and the applicability is high.

The invention relates to the technical field of quantum sensing and ocean detection, and discloses an ocean magnetic field sensor based on an NV color center and an ocean magnetic field measuring method.The sensor comprises a cylindrical pressure-resistant cabin, an optical platform arranged in the pressure-resistant cabin and a main control panel; a laser, a beam shaping unit, a dichroscope, a beam shaping lens group, an objective lens, a diamond NV color center chip, a plano-convex lens I, a band-pass filter and a photoelectric detector are mounted on the optical platform; two microstrip loop antennas are mounted on the outer side of the diamond NV color center chip; an FPGA + ARM dual-core processor, a digital lock-in amplifier and two microwave signal generators are installed on the main control board, and the microwave signal generators are connected with the microstrip loop antenna and achieve electromagnetic coupling with the diamond NV color center chip. The invention has the advantages of high sensitivity, good long-term stability and strong anti-interference capability, and provides a new generation of quantum sensing solution for applications such as ocean geomagnetic monitoring and underwater target identification.

The invention relates to a rotary micro-liquid membrane reactor in-situ detection system for monitoring the nucleation behavior of a nano material. The reactor comprises a rotor and a stator, the base angle of the stator is 70-85 degrees, the rotating speed of the stator is 500-5000 rpm, the width of a slit is 10-500 microns, it is guaranteed that fluid does not backmix when passing through the slit, and a strong shear field is formed. A micro-negative pressure sampler is manufactured to capture nucleation particles in a high-speed shear field to enter a visual observation area, and a high-speed camera and a microscope objective lens are connected in situ, so that an instantaneous image of a nucleation process is obtained in a nano-micro scale, and a transient evolution behavior of a crystal nucleus is captured in situ. The construction of the rotary micro-liquid membrane reactor in-situ detection system solves the problems that the large-scale preparation quality is poor due to the fact that a traditional stirred tank reactor is poor in structure and micro-mixing effect and uncontrollable in material nucleation and growth, and the instantaneous phase transformation and nucleation process cannot be observed due to the fact that the reactor is closed. The obtained hydrotalcite nucleation result enriches the non-classical nucleation theory, and provides guidance for large-scale preparation of nano materials.

The invention discloses a device and a method for low-thermal-damage laser stripping and cutting of transparent materials, the device comprises a laser, and a first half-wave plate, a linear polarizer, a beam expander, a second half-wave plate, a vortex wave plate and a processing objective lens which are sequentially arranged along the laser transmission direction, and emergent light of the processing objective lens enters a processing material; a machining material is adsorbed and fixed to the cooling suction cup, and the cooling suction cup is installed on the three-dimensional moving platform. Light subjected to polarization modulation is focused into a material through the objective lens to be modified, a complete modified layer is formed along with movement of the three-dimensional platform, the device and the method have the advantages of low thermal damage and high precision when being used for stripping and cutting, and material loss caused in the laser machining process can be reduced.

The invention discloses a method for improving the axial resolution of photoacoustic microscopic imaging obtained based on a single-pixel frequency domain. The method comprises the following steps: 1) creating a Fourier substrate pattern with the spatial frequency of k in the axial direction; 2) respectively irradiating four Fourier substrate patterns with the spatial frequency of k and the initial phases of # imgabs0 #, # imgabs1 #, # imgabs2 # and # imgabs3 # to an imaging object, carrying out photoacoustic microscopic imaging, and acquiring data by using an ultrasonic transducer to obtain a response value of the ultrasonic transducer; 3) according to the obtained response value of the ultrasonic transducer, adopting a four-step phase shift method to obtain a Fourier coefficient corresponding to the spatial frequency k; and 4) gradually increasing the spatial frequency of the Fourier substrate pattern to the cut-off frequency of the objective lens, further obtaining Fourier coefficients corresponding to all spatial frequencies, obtaining a complete Fourier spectrum, and performing inverse Fourier transform to obtain a photoacoustic microscopic image after the axial resolution is increased. The method disclosed by the invention is expected to promote wider application of photoacoustic microscopic imaging in living cell and tissue imaging.

The invention provides an objective lens module and a photoetching imaging system, and relates to the technical field of optical imaging, the objective lens module is configured between an object plane and an image plane of the photoetching imaging system, and the objective lens module comprises a first lens group, a second lens group and a microobjective lens group which are sequentially arranged from the object plane to the image plane, the first lens group and the second lens group are both of a double-Gaussian structure or a double-Gaussian derivative structure, and the focal length of the first lens group is larger than that of the second lens group. The objective lens module can reduce the aperture size of the optical lens in the objective lens module, increase the object space working distance and improve the imaging quality on the premise of ensuring a large field of view.

The invention provides an automatic focusing system, an automatic focusing method and a surface defect detection method, and the method comprises the steps: controlling a plurality of light sources in a light source array to be lightened one by one according to a preset time sequence, and enabling a light beam emitted by each light source to be reflected by a corresponding to-be-detected sub-region on the surface of a to-be-detected device, and one part of the reflected light is detected as a defocus detection light spot by the defocus information acquisition unit, and the other part of the reflected light forms a detection image on the main detection camera. As the position of the defocus detection light spot and the position of the microscope objective have a mapping relation, defocus information corresponding to the defocus detection light spot can be obtained through the mapping relation, and therefore automatic focusing of the microscope objective is achieved. According to the lighting sequence of the light source, automatic focusing and imaging are sequentially carried out on each to-be-detected sub-region, so that the image detection precision can be improved, the light path hardware requirement can be reduced, the height information of the surface of the to-be-detected device can be obtained through defocusing information, surface defect detection on an object with complex three-dimensional morphology characteristics is facilitated, and the detection efficiency is improved. And the detection flexibility and precision are improved.

The invention provides a 40-time infinite conjugate microscope objective, and relates to the field of objective lenses. The 40-time infinite conjugate microscope objective comprises a first lens group, a second lens group and a third lens group which are sequentially arranged along an optical axis from an object space to an image space. The first lens group comprises a first lens and a second lens which are sequentially arranged from the object side to the image side in the optical axis direction. The second lens group comprises a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens and a ninth lens which are sequentially arranged from the object space to the image space in the optical axis direction. The third lens group comprises a tenth lens and an eleventh lens which are sequentially arranged from the object space to the image space in the optical axis direction. The 40-time infinite conjugate microscope objective can realize a high-resolution flat image plane and apochromatic objective, under a short parfocal distance, the numerical aperture is larger, the illumination at the image plane is increased, the imaging is clearer, the on-axis field of view and the off-axis field of view are close to diffraction limits, and the point array radius is close to be within the Airy spot.