Provided is an 
actuator formed in a substrate including a 
handle layer, an elastic body layer, and an insulating layer, the 
actuator including a movable portion supported to a support portion by an elastic body, a movable comb 
electrode formed on the movable portion, a fixed comb 
electrode supported by the support portion, and 
electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the 
handle layer, and the elastic body is made up of the elastic body layer; and a 
handle layer separation groove is provided to electrically separate between the handle 
layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.