A
laser system (100A, 100B) for modifying a sample (300) to form a modified region at a target location in the sample and a method (400, 500, 700) for
laser modification a sample (300) using the
laser system (100A, 100B) is disclosed. The laser
system (100A, 100B) comprises: a sample receiving area (110) for receiving the sample (300); a
laser light source (130) configured to provide a laser beam (140); a plurality of optical elements (150, 160, 170, 180, 190, 200) configured to direct the laser beam (140) from the
laser light source (130) into the sample (300) when the sample (300) is received in the sample receiving area (120), the plurality of optical elements (150, 160, 170, 180, 190, 200) comprising: an objective lens (190) for focussing the laser beam (140) at the target location (300); one or more scan mirror (180a, 180b), wherein an orientation of the or each scan mirror (180a, 180b) is adjustable for adjusting an angle of the laser beam (140) at a rear
pupil plane of the objective lens (190) to adjust a location of a focus of the laser beam (140) in the sample (300); and an adaptive optical element (160), adjustably configurable to correct for aberrations at the target location; wherein the adaptive optical element (160) is optically conjugate to the rear
pupil plane of the objective lens (190); wherein the or each scan mirror (180a, 180b) is in a respective optical plane which is optically conjugate with the adaptive optical element (160). The method may comprise forming a first modification at a first target location in the sample, adjusting an angle of the or each scan mirror to adjust a location of the focus of the laser beam in the sample from the first target location to a second target location in the sample, and forming a second modification at the second target location.