2498 results about "Micro mirror" patented technology

The invention discloses a data validation, mirroring and error / erasure correction method for the dispersal and protection of one and two-dimensional data at the micro level for computer, communication and storage systems. Each of 256 possible 8-bit data bytes are mirrored with a unique 8-bit ECC byte. The ECC enables 8-bit burst and 4-bit random error detection plus 2-bit random error correction for each encoded data byte. With the data byte and ECC byte configured into a 4 bit×4 bit codeword array and dispersed in either row, column or both dimensions the method can perform dual 4-bit row and column erasure recovery. It is shown that for each codeword there are 12 possible combinations of row and column elements called couplets capable of mirroring the data byte. These byte level micro-mirrors outperform conventional mirroring in that each byte and its ECC mirror can self-detect and self-correct random errors and can recover all dual erasure combinations over four elements. Encoding at the byte quanta level maximizes application flexibility. Also disclosed are fast encode, decode and reconstruction methods via boolean logic, processor instructions and software table look-up with the intent to run at line and application speeds. The new error control method can augment ARQ algorithms and bring resiliency to system fabrics including routers and links previously limited to the recovery of transient errors. Image storage and storage over arrays of static devices can benefit from the two-dimensional capabilities. Applications with critical data integrity requirements can utilize the method for end-to-end protection and validation. An extra ECC byte per codeword extends both the resiliency and dimensionality.

A vertical-cavity surface-emitting laser (VCSEL) comprising a low-loss thin metal contact and current spreading layer within the optical cavity that provides for improved ohmic contact and lateral current distribution, a substrate including a plano-concave optical cavity, a (Ga,In,Al)N multiple quantum well (MQW) active region contained within the optical cavity that generates light when injected by an electrical current, and an integrated micromirror fabricated onto the substrate that provides for optical mode control of the light generated by the active region. A relatively simple process is used to fabricate the VCSEL.

An exposure method and apparatus for use in exposing a photoresist on a semiconductor wafer do not employ an aperture for shaping the exposure light. The exposure apparatus includes a light source unit, a reflecting mirror unit having a micro mirror array (MMA) and a control unit that controls the MMA, and a pattern transfer unit that transfers the pattern of a photomask onto the photoresist. The angles of inclination of the respective mirrors of the MMA are adjusted to reflect incident light in a manner that shapes the incident light. Accordingly, it is possible to form a pattern having the highest degree of resolution and optimum depth of focus (DOF) in the shortest amount of processing time.

Provided is a method and system for developing a lithographic mask layout. The lithographic mask layout is adapted for configuring an array of micro-mirrors in a maskless lithography system. The method includes generating an ideal mask layout representative of image characteristics associated with a desired image. Next, an equivalent mask is produced in accordance with an average intensity of the ideal mask layout.

A WDM add / drop device for use in an optic communications system for adding and dropping optical wavelengths from a multiple-wavelength optical system. The device includes a set of lenses, a planar grating wavelength multiplexer and a micromirror array switchable for individual wavelengths of the multiple-wavelength signal between a transmit mode and a reflect mode. The grating angularly demultiplexes a multiple-wavelength optical signal in a first direction and the individual wavelengths are processed by the micromirror array and directed to the grating in a second direction. The micromirror array will either reflect select wavelengths to a first port or transmit select wavelengths to a second port. In a preferred embodiment, ports on a first multiport circulator input the multiple-wavelength optical signal to the WDM add / drop device and output the multiple-wavelength optical signal from the WDM add / drop device. A second multiport circulator provides to-be-added wavelengths to the WDM add / drop device and removes to-be-dropped wavelengths from the WDM add / drop device.

A method of cleaning and treating a device, including those of the micromechanical (10) and semiconductor type. The surface of a device, such as the landing electrode (22) of a digital micromirror device (10), is first cleaned with a supercritical fluid (SCF) in a chamber (50) to remove soluble chemical compounds, and then maintained in the SCF chamber until and during the subsequent passivation step. Passivants including PFDA and PFPE are suitable for the present invention. By maintaining the device in the SCF chamber, and without exposing the device to, for instance, the ambient of a clean room, organic and inorganic contaminants cannot be deposited upon the cleaned surface prior to the passivation step. The present invention derives technical advantages by providing an improved passivated surface that is suited to extend the useful operation life of devices, including those of the micromechanical type, reducing stiction forces between contacting elements such as a mirror and its landing electrode. The present invention is also suitable for cleaning and passivating other surfaces including a surface of semiconductor wafers, and the surface of a hard disk memory drive.

The present invention provides an imaging system generating a high resolution image using low resolution images taken by a low resolution image sensor. Also, the imaging system generates a wide angle of view image. Enhancement of resolution and enlargement of angle of view are accomplished by optical axis change, utilizing one or more micromirror array lenses without macroscopic mechanical movements of lenses. The imaging system also provides zoom and auto focusing functions using micromirror array lenses.

A illumination device sequentially projects a selective set of spatially encoded intensity light pulses toward a scene. The spatially encoded patterns are generated by an array of diffractive optical or holographic elements on a substrate that is rapidly translated in the path of the light beam. Alternatively, addressable micromirror arrays or similar technology are used to manipulate the beam wavefront. Reflected light is collected onto an individual photosensor or a very small set of high performance photodetectors. A data processor collects a complete set of signals associated with the encoded pattern set. The sampled signals are combined by a data processing unit in a prescribed manner to calculate range estimates and imaging features for elements in the scene. The invention may also be used to generate three dimensional reconstructions.

Encoded spatio-spectral information processing is performed using a system having a radiation source, wavelength dispersion device and two-dimensional switching array, such as digital micro-mirror array (DMA). In one aspect, spectral components from a sample are dispersed in space and modulated separately by the switching array, each element of which may operate according to a predetermined encoding pattern. The encoded spectral components can then be detected and analyzed. In a different aspect, the switching array can be used to provide a controllable radiation source for illuminating a sample with radiation patterns that have predetermined characteristics and separately encoded components. Various applications are disclosed.

A digital micro-mirror device (DMD) format conversion system for outputting a stereoscopic encoded optical signal using a DMD and a color wheel is provided. The DMD format conversion system includes a 3D data formatter for receiving an input signal and a DMD data formatter for receiving an output signal having stereoscopic image information and control information from the 3D data formatter and for outputting a DMD output signal having stereoscopic image information and control information. A color wheel control signal and output digital micro-mirror device data are synchronized based on an output frame rate generated by the 3D data formatter independent of the original input frame rate.

A modular three-dimensional (3D) optical switch that is scalable and that provides monitor and control of MEMS mirror arrays. A first switch module includes an array of input channels. Light beams received from the input channels are directed toward a first wavelength selective mirror. The light beams are reflected off of the first wavelength selective mirror and onto a first array of moveable micromirrors. The moveable micromirrors are adjusted so that the light beams reflect therefrom and enter a second switch module where they impinge upon a second array of moveable micromirrors. The light beams reflect off of the second array of moveable micromirrors and impinge upon a second wavelength selective mirror. The light beams reflect off of the second wavelength selective mirror and into an array of output channels. The alignment or misalignment of a data path through the switch is detected by directing two monitor beams through the data path, one in the forward direction and one in the reverse direction. The position of each of the monitor beams is detected after its reflection from the second moveable micromirror that it hits. The position data is used to determine the angles of the moveable micromirrors in the data path.

The present invention provides a system, method and apparatus for improved electrical-to-optical transmitters (100) disposed within printed circuit boards (104). The heat sink (110, 200) is a thermal conductive material disposed within a cavity (102) of the printed circuit board (104) and is thermally coupled to a bottom surface (112) of the electrical-to-optical transmitter (100). A portion of the thermal conductive material extends approximately to an outer surface (120, 122 or 124) of a layer (114, 116 or 118) of the printed circuit board (104). The printed circuit board may comprise a planarized signal communications system or an optoelectronic signal communications system. In addition, the present invention provides a method for fabricating the heat sink wherein the electrical-to-optical transmitter disposed within a cavity of the printed circuit board is fabricated. New methods for flexible waveguides and micro-mirror couplers are also provided.

The Miniature Fourier Transform Spectrophotometer provides the capability, in a miniaturized device, of determining the light absorption / transmission spectra of a collected sample of gas or liquid though Fourier Transform spectroscopy techniques. The device takes an optical input from an optical fiber, manipulates that light through miniature optical components, and launches it into a miniaturized Michelson interferometer with a scanning mirror that acquires the interferogram of the optical input. The interferogram can be processed to retrieve the spectrum of the input light. A novel multi-stepped micro-mirror operates as the optical path length modulator in the miniaturized interferometer. A unique monolithic beamsplitter / mirror combination provides for accurate alignment of the components and greatly simplifies product integration. The device is designed to cover various optical spectra of interest. During operation, the precision and accuracy of the microfabricated components in the device allow operation and resolution even at extremely low wavelengths. In addition, the miniaturized nature of the device allows it to be used in new and extremely space-constrained applications.

Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels, The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.

A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one micromirror, optically coupled to the light source, configured to reflect the light onto a projection medium (projection plane). The optical system also includes at least one actuating component coupled to the at least one micromirror, configured to move the at least one micromirror to enable the at least one micromirror to focus the light on the projection medium. The advantages of the present invention include high speed variable focusing and scanning, large focal length variation, phase compensation, high reliability and optical efficiency, low power consumption and low cost.

A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with a frame, a moving portion having a mirror portion, and a torsion bar connecting the frame to the moving portion. The wiring substrate is provided with a wiring pattern. The electroconductive spacer separates the micro-mirror substrate from the wiring substrate and also electrically connects the frame to the wiring pattern. The wiring substrate has a surface that faces the micro-mirror substrate. A detector is provided on this surface for detecting the pivot angle of the mirror portion.

A method and an apparatus for noninvasively and quantitatively determining spatially resolved absorption and reduced scattering coefficients over a wide field-of-view of a food object, including fruit or produce, uses spatial-frequency-domain imaging (SFDI). A single modulated imaging platform is employed. It includes a broadband light source, a digital micromirror optically coupled to the light source to control a modulated light pattern directed onto the food object at a plurality of selected spatial frequencies, a multispectral camera for taking a spectral image of a reflected modulated light pattern from the food object, a spectrally variable filter optically coupled between the food object and the multispectral camera to select a discrete number of wavelengths for image capture, and a computer coupled to the digital micromirror, camera and variable filter to enable acquisition of the reflected modulated light pattern at the selected spatial frequencies.

A device for recording a geometry of an environment of a device in a detection field with the aid of laser scanning may include a laser beam controlled by an oscillating micromechanical mirror. The detection field is specifiable in the vertical and horizontal directions by adapting an amplitude of oscillation of the micromechanical mirror. Driver-assistance systems are used for tasks both in the near field, such as a parking function, and in the distant field of the vehicle, such as a distance control or the detection of obstacles on the roadway. If the amplitude of the oscillation of the micro-mirror is then reduced in the horizontal direction and / or vertical direction, the spatial resolution for the reduced detection range is improved. Moreover, the higher intensity of the laser radiation impinging on the smaller detection region improves the signal-to-noise ratio of the detected signal.

An optical range finder for determining the distance comprises a focusing optical member that focuses emitted electromagnetic radiation upon a micro-mirror array. A processor controls the micro-mirror array to direct the focused electromagnetic radiation into a defined radiation pattern consistent with a lower resolution scan over a greater area and a higher resolution scan over a lesser area of interest within the greater area. A transmission optical member focuses the defined radiation pattern toward an object. A reception optical member receives electromagnetic radiation reflected from the object. A detector detects the receipt of the reflected electromagnetic radiation. A timer determines an elapsed time, between transmission of the electromagnetic radiation to the object and receipt of the electromagnetic radiation from the object, to facilitate determination of the distance between the object and the range finder.

A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.

The invention provides a wafer-level package for a micromirror array. The wafer-level package includes a substrate including a wafer having a substrate surface with a plurality of actuatable micromirrors coupled to the substrate surface. An optical window is attached to the substrate surface to form at least one sealed cavity between an inner surface of the optical window and the substrate surface. A beam of light transmitted through the optical window is redirected by at least one actuatable micromirror within the sealed cavity.

An optical assembly, and in particular an optical assembly which uses a microlens array or a micromirror array to reduce speckle. It further concerns an optical component which comprises a micromirror array.

A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.

The invention has two main embodiments, a first called column switching and blanking and a second embodiment called doubling. The first embodiment is a projector for displaying a stereoscopic image with projector using one or more digital micromirror devices positioned into a plurality of columns and rows. The projector itself includes a light source, an optical system, a video processing system and a data system for driving the micromirror devices. The data subsystem provides separate data to a plurality of column pairs of the micromirrors. The projector includes a stereoscopic control circuit having a first state of the control circuit for inputting a first eye view of the stereoscopic image and causing the micromirrors of a first column of each column pair to be in various on and off states during said first eye view of said stereoscopic image and for causing all of said micromirrors of a second column of each column pair to be in an off state during said first eye view of said stereoscopic image. A second state of the control circuit is used for inputting a second eye view of the stereoscopic image and causes the micromirrors of the second column of each column pair to be in various on and off states during the second eye view of the stereoscopic image and for causing all of the micromirrors of the first column of each column pair to be in an off state during the second eye view of said stereoscopic image. The second embodiment is a projector for displaying a stereoscopic image with the projector using one or more digital micromirror devices positioned into a plurality of columns and rows. The projector includes a light source, an optical system, a video processing system and a data system for driving said micromirror devices. The data subsystem provides separate data to a plurality of column pairs of the micromirrors. The projector includes a stereoscopic control circuit having a first state for inputting a first eye view of the stereoscopic image and causing each micromirror of each column pair to be in various but identical on and off states during said first eye view of said stereoscopic image. A second state of the control circuit for inputs a second eye view of the stereoscopic image and causes each micromirror of each column pair to be in various but identical on and off states during the second eye view of the stereoscopic image.

An FPGA is readily connectable to a high-speed fiber optic link by snap fitting an external fiber optic cable into an accommodating duplex fiber optic connector of a low-profile packaged FPGA integrated circuit. The low-profile packaged FPGA integrated circuit includes a die-bonded assembly disposed within a co-fired multilayer ceramic integrated circuit package. The die-bonded assembly includes the optoelectronic die, the bottom surface of which is die-bonded and electrically interconnected by micropads to the upper surface of the core of an FPGA integrated circuit die. A first optical fiber communicates light from the connector, through the package, and to a photodetector on the optoelectronic die. A second optical fiber communicates light from a laser diode on the optoelectronic die, through the package, and to the connector. In some embodiments, a micromirror device is disposed within the package to redirect light between the optoelectronic die and the optical fibers.

The present invention relates to laser ablation microlithography. In particular, we disclose a new SLM design and patterning method that uses multiple mirrors per pixel to concentrate energy to an energy density that facilitates laser ablation, while keeping the energy density on the SLM mirror surface at a level that does not damage the mirrors. Multiple micro-mirrors can be reset at a very high frequency, far beyond current DMD devices.