The sensor comprises a cuboid integral base made of
metal with good heat
conductivity, through holes are formed in the centers of the three opposite faces of the integral base, and a spectroscope is arranged in the center of the orthogonal holes; a measuring port reflecting mirror, an end reflecting mirror, a
laser device and an interference fringe
detector are inserted into the holes in the periphery respectively and fastened to the overall base, a
Michelson interferometer with the spectroscope as the center and hidden in the overall base is obtained, and the high-precision
laser interference sensor which is uniform, portable, resistant to external interference and capable of being placed at will is constructed. The sensor is small in size and convenient to assemble, ingeniously overcomes the defect that interference measurement has too high environmental requirements, achieves high-precision detection of high-end materials such as
chip wafers and the like, can be expanded to workshop and even
field detection which traditional interference measurement cannot adapt to, can reach the picometer level in
measurement precision, fully shows the unique advantages of
digitization and
standardization, and is suitable for popularization and application. The method has important scientific and technical values and
economic benefits.