138 results about "Michelson interferometer" patented technology

A push-pull type optical fiber MEMS accelerometer based on a Michelson interferometer comprises a mechanical assembly and two sensing optical fibers, the mechanical assembly is composed of a fixed base and an acceleration sensing chip, the acceleration sensing chip comprises an external frame, a mass block and two sets of spring cantilever beams, the external frame is provided with a thin optical fiber groove, and the thin optical fiber groove is provided with an optical fiber. The mass block is provided with two convex structures serving as reflecting surfaces, and two air cavities are formed between the end face of the sensing optical fiber and the top faces of the convex structures of the mass block and serve as sensing arms of the Michelson interferometer. When the accelerometer is subjected to the action of external acceleration, the mass block moves relative to the external frame to drive the cavity lengths of the two air cavities to change in a push-pull manner, so that the optical path is changed and an interference signal is generated. Interference signals are acquired and demodulated through a photoelectric detector, a data acquisition circuit and a computer, and vibration acceleration signals can be obtained. The invention has the advantages of high sensitivity, strong common-mode noise suppression capability and the like, and is suitable for various dynamic vibration response measurement occasions.

The invention provides a gas refractive index measuring device and method based on a Michelson interferometer, based on the Michelson interference principle, one interference arm of the Michelson interferometer is closed to serve as a gas chamber, and a plane mirror at the tail end is replaced by a grating; when the refractive index of gas in the cavity changes, the diffraction emergence angle of the grating and the propagation optical path of light in the cavity can change, an interferogram is changed, the refractive index can be calculated through inversion of the fringe number of interference fringes or the change of interference phases, and the structure is simple, convenient and rapid.

The invention relates to a full-static interference anemoscope for near space detection and a vector wind field inversion method. The interference anemoscope comprises a Michelson interferometer adopting an annular partition film-coated reflector as a phase modulation device; the annular partition film-coated reflector is formed by coaxially arranging four layers of circular reflecting film systems with the same thickness on a glass substrate; the incident end of the Michelson interferometer is sequentially and coaxially provided with a front conical reflector, a large-aperture doublet lens and a conical prism along the light incident direction; an imaging camera is arranged at the emergent end along the light emergent direction; light of a near space airglow layer passes through the front conical reflector and the conical prism to form annular parallel light, the annular parallel light enters the interferometer to form two groups of coherent light beams, and the two groups of coherent light beams enter the imaging camera to form a circular image for inverting vector wind; according to the interference wind meter, vector wind in an observation view field can be obtained through one-time shooting, and the time resolution of wind field detection is greatly improved.

The invention discloses a non-equilibrium Michelson interferometer electric field sensor capable of automatically calibrating temperature influence, which has the characteristics of wide bandwidth, high measurement precision and small interference of distribution of an electric field to be measured, and can also automatically calibrate temperature influence and prevent a working point of the non-equilibrium Michelson interferometer electric field sensor from deviating. The electric field sensor comprises a lithium niobate substrate, the lithium niobate substrate is provided with a non-equilibrium Michelson interferometer, the non-equilibrium Michelson interferometer comprises an input and output waveguide, the input and output waveguide is connected with a first waveguide arm and a second waveguide arm which are different in length, two sides of the first waveguide arm are provided with electrodes, and the second waveguide arm is provided with electrodes. An antenna is arranged on the electrode, a first metal reflecting mirror is arranged at the tail end of the first waveguide arm, a second metal reflecting mirror is arranged at the tail end of the second waveguide arm, the first metal reflecting mirror and the second metal reflecting mirror are both arranged on the lithium niobate substrate, and the thermal expansion coefficients of the first metal reflecting mirror and the second metal reflecting mirror are different.

The invention discloses a plate-type optical fiber accelerometer of a multi-layer-turn special-shaped optical fiber ring. The plate-type optical fiber accelerometer comprises a probe, an interference light path and a demodulation system. Wherein the probe part is formed by bonding a plurality of special-shaped optical fiber rings on a rectangular thin plate, the optical fiber rings are arranged in a multi-layer turn closest packing mode, and the shapes of the optical fiber rings include but are not limited to runway shapes, ellipses or rounded rectangles; the interference light path part adopts a Michelson interferometer or a Mach-Zehnder interferometer; and the demodulation system part comprises a photoelectric converter, an acquisition card and a data processing board, and the interfered signal is processed by adopting a phase generated carrier (PGC) method. The beneficial effects of the invention are that the plate-type optical fiber accelerometer composed of the special-shaped optical fiber rings is invented, and a general method for performing performance calculation is provided for the accelerometer; a traditional circular optical fiber ring is replaced by the special-shaped optical fiber ring, so that the sensitivity of the sensor is improved on the premise that the optical fiber length of the sensor is the same and the resonant frequency is kept unchanged; meanwhile, the optical fiber thermal noise levels under the same optical fiber length are roughly the same, and the improvement of the sensitivity means the improvement of the overall signal-to-noise ratio.

The invention provides a dynamic interference focusing method and system based on a Michelson interferometer, and the method comprises the steps: obtaining interference fringes under different defocusing amounts through employing the dynamic interference focusing system based on the Michelson interferometer, carrying out the analysis of the received interference fringes through an upper computer, and obtaining phase information, based on the phase information of the interference fringes corresponding to different defocusing amounts, a mapping relation between the defocusing amounts and the phase information is constructed; in the application, the current interference fringes are obtained through the dynamic interference focus fixing system of the Michelson interferometer, the current interference fringes are analyzed through the upper computer to obtain the current phase information, and the current defocusing amount is obtained by adopting the mapping relation based on the current phase information. And moving the sample to a calibrated focal plane position by controlling a dynamic interference focus fixing system of a Michelson interferometer based on the current defocusing amount to complete automatic focus fixing. The method can achieve the nanoscale focusing sensitivity.

The invention provides a time delay interference ground semi-physical experiment verification scheme, which comprises the following steps of: (1) based on a space gravitational wave detection task and a load configuration scheme, acquiring core measurement of the space gravitational wave detection task, and recording measurement data; (2) constructing an algebraic relationship of a time delay interference scheme for effectively eliminating secondary noise such as laser frequency noise and optical platform jitter, and calculating according to the algebraic relationship to obtain a solution of first-generation time delay interference and a solution of first-generation basic combination; and (3) repeating the step (2) for multiple rounds to compensate the difference of the equivalent interference measurement arm length and further suppress the laser frequency noise. The half-physical simulation platform is reasonable in conception, the half-physical simulation platform of the Michelson interferometer with the unequal arms and equivalent to the million kilometer arm length is built by combining an arm locking frequency stabilization system and an electronic phase time delay system, and effective suppression of laser frequency noise is achieved.

The invention discloses a reflective optical fiber sensing probe, a preparation method thereof and application of the reflective optical fiber sensing probe in a sensor. The reflective optical fiber sensing probe comprises an optical fiber taper, an optical fiber microsphere molten at the conical end of the optical fiber taper, and a PDMS cladding attached to the surface of the optical fiber microsphere. According to the optical fiber sensing probe, the optical fiber microspheres wrapped with the PDMS layers are connected in series with the optical fiber taper, so that an optical fiber Michelson interferometer is formed, finally, simultaneous measurement of temperature and transverse stress can be achieved, temperature crosstalk in stress measurement is effectively avoided, and the optical fiber sensing probe has high mechanical strength.

The invention provides a silicon-based free space type optical MEMS accelerometer and a manufacturing method, the upper layer of the accelerometer is a glass substrate free space optical sensitive structure, the lower layer of the accelerometer is a silicon-based horizontal axis MEMS sensitive structure, and the upper layer structure is fixed on the lower layer structure through a bonding process. Wherein the upper-layer optical sensitive structure consists of a pair of Michelson interferometers, a glass anchor point and a glass mass block; and the lower-layer MEMS sensitive structure consists of four groups of cantilever beams, a silicon anchor point and a silicon mass block. The lower layer MEMS sensitive structure converts the horizontal shaft input acceleration into the displacement of the silicon mass block, the displacement is synchronously transmitted to the glass mass block, and the pair of oppositely arranged Michelson interferometers converts the displacement into the reverse transformation of an interference light phase, so that the high-precision differential detection of the acceleration is realized. The micro-optical accelerometer scheme provided by the invention has the outstanding advantages of high detection sensitivity, strong common-mode error resistance and high integration level.

The invention relates to the technical field of ultrafast laser and light quantum, and provides a single-cavity double-optical-comb absolute distance measurement system and method based on repetition frequency scanning. The system comprises a single-cavity double-optical comb system which is used for simultaneously establishing clockwise and anticlockwise propagating mode-locked pulses in an annular cavity through a bidirectional pumping source and outputting a main oscillation optical comb and a local oscillation optical comb through a polarization maintaining optical fiber coupler; a first piezoelectric ceramic and a second piezoelectric ceramic are arranged in the annular cavity, and the first piezoelectric ceramic and the second piezoelectric ceramic are adjusted through a differential driving mode so as to lock and regulate the repetition frequency difference between the main oscillation optical comb and the local oscillation optical comb; the double-optical-comb distance measuring system is used for combining the main oscillation optical comb passing through the Michelson interferometer with the local oscillation optical comb not passing through the Michelson interferometer to generate a radio frequency beat frequency signal; and calculating the real-time absolute distance of the measured target according to the optical path difference of the radio frequency beat frequency signal and the repetition frequency difference of the main oscillation optical comb and the local oscillation optical comb.

The invention discloses a tunnel monitoring method and system based on optical fiber sensing, and belongs to the technical field of tunnel monitoring. Tiny vibration signals of tunnel disasters are collected through a sensing arm and a reference arm of a balanced Michelson interferometer, short-time temperature impact is applied to a light source, phase noise is actively introduced and expanded to enable an interference signal elliptic arc to be larger than or equal to 2 pi, dynamic light intensity calibration is achieved in combination with a light intensity signal I3 (t), and the dynamic calibration precision is improved. Therefore, interference of light source fluctuation on interference signals is eliminated, a complete and closed ellipse fitting curve is generated, and high-precision demodulation of tunnel disaster early warning and dynamic elimination of light source fluctuation interference are achieved. A 64kHz square wave trigger signal TRIG is used as a carrier wave, the digital quantity modulation duty ratio of a time stamp TOD and a pulse per second PPS is coupled, a composite synchronous signal is generated and broadcasted to all nodes, synchronous sampling of all the nodes is achieved, and the accuracy of data acquisition, processing and correlation analysis of all the nodes can be remarkably improved.

The invention provides an ultrafast scanning interferometer. The interferometer comprises an ultrafast laser system, an interference module, a coupling module and a spectral measurement module which are sequentially arranged along a light path. The ultrafast laser system emits a laser beam, the interference module splits the laser beam into a reference beam and a detection beam, and the detection beam carries information of a detected optical element. The coupling module is connected with the spectral measurement module through an optical fiber, the coupling module couples the detection light beam into the optical fiber, and the spectral measurement module demodulates the detection light beam which is output by the optical fiber and carries the information of the detected optical element in real time and calculates the peak-valley value of the detected optical element. The interference module adopts a Michelson interferometer structure, and the spectral measurement module comprises a dispersion module, a high-speed photoelectric detector and a high-speed photoelectric signal acquisition and analysis module. According to the invention, continuous single-frame detection is carried out on the measured optical element in the form of the optical pulse string, and high-precision and high-efficiency measurement of the surface topography of the optical element is realized.

The invention discloses a dual-wavelength polarization tuning interference spectrum frequency discrimination device and a synchronous frequency locking method, and the method specifically comprises the steps: enabling a polarization Michelson interferometer to divide incident laser into two beams of linearly polarized light through a plurality of achromatic wave plates and a polarization splitting prism, and enabling the two beams of linearly polarized light to form dual-wavelength circularly polarized light for output after the two beams of linearly polarized light are reflected and combined; the output light is divided into two beams after passing through a light splitting module, and the two beams are respectively collected and processed into a four-quadrant synchronous phase-shifting interferogram by a polarization camera after passing through an achromatic lens, and the wavefront phase difference is calculated in real time; the other beam is compensated by the rotary linear polarizer and then is received by the detector; through the corresponding relation between the wavefront phase difference and the rotation angle, the rotation linear polarizer is driven in real time to carry out phase compensation, so that polarization tuning and frequency locking are realized; meanwhile, a piezoelectric mirror bracket control signal is obtained through calculation, and interferometer parallelism error correction is carried out. According to the invention, synchronous real-time monitoring and active feedback locking of dual-wavelength interference signals can be realized, and the system has the advantages of high tuning resolution and accurate data.

The invention relates to an optical fiber gyroscope, in particular to a method for acquiring the optimal modulation depth of an optical fiber gyroscope nested with a Michelson interferometer, and aims to overcome the defects that in the prior art, when the optimal modulation depth of the optical fiber gyroscope nested with the Michelson interferometer is determined, a large number of debugging tests and data analysis need to be carried out, the operation process is complex, and time is wasted. The method for obtaining the optimal modulation depth of the fiber-optic gyroscope nested with the Michelson interferometer comprises the following steps: measuring the optical power P1 and the superposed optical power P2 of an interference optical signal, controlling the amplitude of a square wave electric signal output by a signal generator arranged at an electrical modulation port of a Y waveguide integrated modulator, taking the superposed optical power P2i corresponding to CT2i = 0dB, calculating to obtain the optimal modulation voltage, and obtaining the optimal modulation depth of the fiber-optic gyroscope nested with the Michelson interferometer. The method disclosed by the invention is convenient and efficient, and is beneficial to batch production and debugging of the fiber-optic gyroscope.

The invention provides a high-precision ghost diffraction encryption method for a dynamic target, and the method comprises the steps: carrying out the observation of the moving number of interference fringes of an object through a Michelson interferometer, carrying out the phase calculation, obtaining a set of observed phase change values, carrying out the conversion of the set of observed phase change values through a conversion function, and carrying out the encryption of the ghost diffraction. And taking the conversion function as a first-level key, establishing a ghost diffraction light path based on the optical element and the first-level ciphertext, and performing ghost diffraction operation on the first-level ciphertext and the four reference quantities respectively to obtain a second-level ciphertext and a second-level key respectively. According to the method, the ghost diffraction technology is introduced into the encryption process, ghost diffraction performs imaging by using the statistical correlation characteristic of the light field, and the image can still be restored through the statistical correlation characteristic under the condition that part of the light path is shielded or is interfered by noise, so that the anti-interference performance of the encryption method provided by the invention is effectively enhanced.

The application provides a grinding liquid film thickness measuring device and a measuring method thereof and relates to the technical field of semiconductor processing processes. The light emitted by the light source forms first light and second light through the setting of the measuring assembly. Since the grinding liquid serves as a medium between the second light, the thickness of the grinding liquid can be obtained in real time by measuring the optical path difference change between the first light and the second light through the principle of the Michelson interferometer.

The invention discloses a precise measurement method for object surface out-of-plane displacement under high-frequency micro-vibration. The method comprises the following steps: exciting an object to generate high-frequency steady-state vibration through a vibration exciter, freezing a surface state at any vibration position of the object by adopting stroboscopic pulse laser with strictly same frequency as the vibration, and forming a shear speckle field by utilizing a Michelson interferometer comprising a piezoelectric ceramic driving phase-shifting mirror. The movement of the phase shift mirror and the acquisition of the high-speed camera as well as the actions of the stroboscopic laser and the vibration exciter are synchronously controlled through the double-signal controller, so that the accurate acquisition of multiple phase shift speckle interference images is realized. The image is processed based on a four-step phase shift algorithm, and the phase difference of the vibration position is calculated, so that the out-of-plane displacement derivative and the out-of-plane displacement in the shearing direction are calculated. According to the invention, the signal-to-noise ratio and the sensitivity of vibration measurement are obviously improved, and the method has full-field, non-contact and micro-nano displacement resolution capabilities, and is suitable for the fields of material nondestructive testing and structure health monitoring.

The invention relates to the field of optical fibers, in particular to a D-type optical fiber based on Fe3GaTe2 nanosheets and a preparation method and application of the D-type optical fiber. The invention discloses a D-type optical fiber based on a Fe3GaTe2 nanosheet. The D-type optical fiber comprises a D-type optical fiber and a Fe3GaTe2 layer deposited on a D-type plane of the D-type optical fiber. By utilizing the evanescent field characteristic of the D-type optical fiber, the Fe3GaTe2 nanosheet is deposited on the D-type plane of the D-type optical fiber, and magnetic anisotropy change (such as magnetization direction switching) is generated under the action of an external magnetic field, so that the effective refractive index of the optical fiber is changed; the change is converted into an optical path difference in the Michelson interferometer. Finally, the magnetic field intensity can be inverted by measuring the FSR change of the interference spectrum. The room-temperature MA adjustability of the Fe3GaTe2 nanosheets provides a larger refractive index change range (superior to that of magnetic fluid), and the nanosheets are not easy to degrade, so that the D-type optical fiber has higher sensitivity and temperature performance.

The present disclosure belongs to the field of photoacoustic signal detection, and specifically relates to a quantum-enhanced all-optical photoacoustic signal detection device and method. The problem of low sensitivity of photoacoustic signals based on interference measurement is solved, and high-sensitivity detection of photoacoustic signals generated by living organisms including human bodies can be achieved. A degenerate optical parametric oscillator based on a first-type phase matching crystals is used for preparing a vacuum squeezed state light field, a coherent control technology is used for locking the squeezed angle to obtain the quadrature phase vacuum squeezed state, the prepared quadrature phase vacuum squeezed state light field is injected into the vacuum channel of a Michelson interferometer, and a balanced homodyne detection mode is used for achieving detection of the quantum-enhanced photoacoustic signals.

A push-pull type optical fiber MEMS accelerometer based on Michelson interferometer comprises a mechanical assembly and two sensing optical fibers, the mechanical assembly is composed of a fixed base and an acceleration sensing chip, the acceleration sensing chip comprises an outer frame, a mass block and two groups of spring cantilever beams, the outer frame is provided with a fine optical fiber slot, the mass block is provided with two convex structures as reflecting surfaces, the sensing optical fiber end face and the top surface of the mass block convex structure form two air cavities as sensing arms of the Michelson interferometer. When the accelerometer is subjected to external acceleration, the mass block moves relative to the outer frame, the cavity length of the two air cavities changes in a push-pull manner, thereby changing the optical path and generating an interference signal. The interference signal is collected and demodulated by a photoelectric detector, a data acquisition circuit and a computer, and a vibration acceleration signal can be obtained. The present application has the advantages of high sensitivity, strong noise common mode rejection capability and is suitable for various dynamic vibration response measurement occasions.

The invention belongs to the field of distance measurement, and particularly discloses a pen type optical fiber spectrum interference distance measuring probe and a measuring system. The probe comprises an adjusting unit and a measuring unit, the adjusting unit comprises a bottom shell, a measuring shell, a limiting shell and an elastic piece, the bottom shell is connected with the limiting shell, the measuring shell is arranged between the bottom shell and the limiting shell in an axially movable mode, the bottom shell and the measuring shell are each provided with a distance positioning part, and the elastic piece is used for providing elastic force enabling the measuring shell to be separated from the bottom shell; the measuring unit comprises an optical fiber spectrum interference module and a reflection module, one of the optical fiber spectrum interference module and the reflection module is arranged in the measuring shell, the other of the optical fiber spectrum interference module and the reflection module is arranged in the bottom shell, and the optical fiber spectrum interference module and the reflection module form a Michelson interferometer; the probe has the advantages of being high in measurement precision and reliability, small in size, large in measurement range and easy and convenient to operate, is suitable for precise measurement of various gaps, and is particularly suitable for precise interval measurement of the gaps in a narrow space.

The application provides a time delay interferometric ground semi-physical experimental verification scheme, which comprises the following steps: (1) based on a space gravitational wave detection task and a load configuration scheme, acquiring a space gravitational wave detection task core measurement, and recording measurement data; (2) constructing an algebraic relationship of a time delay interferometric scheme capable of effectively eliminating laser frequency noise and secondary noise such as optical platform jitter, and calculating a first generation time delay interference and a first generation basic combination solution according to the algebraic relationship; (3) repeating the above step (2) for multiple rounds, compensating for the difference of the equivalent interference measurement arm length, and further suppressing laser frequency noise. The application has reasonable concept, and a semi-physical simulation platform of an equivalent million kilometer arm length unequal arm Michelson interferometer is built by combining a lock arm frequency stabilization system and an electronic phase delay system, so that effective suppression of laser frequency noise is realized.

The present invention relates to a light-like Michelson interferometer molecular detector, and belongs to the technical field of molecular detectors. The light-like Michelson interferometer molecular detector comprises: an emitting electrode, a graphene substrate, a light-like semi-transparent and semi-reflective mirror, a light-like total reflection mirror, a collecting electrode, an insulating layer and a substrate electrode. The emitting electrode and the collecting electrode are electrically connected to the graphene substrate respectively. The carriers emitted by the emitting electrode are split by the light-like semi-transparent and semi-reflective mirror after passing through the electron-like light momentum selector, and are respectively reflected to the collecting electrode through the light-like detection arm and the light-like comparison arm through the light-like total reflection mirror. Beneficial effect: The wavelength of graphene-like light transport is shorter and more sensitive to potential changes. When molecules are adsorbed on the photoelectron detection arm, the collected electronic current changes greatly, and the size and range of the interaction potential between the molecule and the graphene can be obtained to measure the molecule.

An ultraprecision frequency-domain Light Detection and Ranging (LiDAR) system for remote micro-movement sensing includes a laser diode with a bandpass filter configured to modulate power using RF signals to generate intensity-modulated optical signals. The LiDAR system includes a Michelson interferometer to split generated optical signals via a 50 / 50 directional coupler into two optical paths. A first optical path includes a fiber-optic delay line with a silver-coated end reflecting phase-shifted optical signals towards a photodetector. A second optical path features a semiconductor optical amplifier amplifying the generated optical signals, with an optical collimator and a target beyond a free-space propagation region. A photodetector is connected to the 50 / 50 directional coupler that receives both the phase-shifted and amplified optical signals, converting them to electrical signals. A feedback loop, including a bandpass filter and a frequency-domain analyzer detects frequency shifts caused by micro-movements of the target.

A distributed fiber optic sensing system for measuring temperature and strain based on OCDR-SOCF (Optical Detection and Conversion) technology includes a laser, an isolator, a collimator, a polarization controller, a coupler, an acousto-optic modulator (AOM), a polarization diversity photodetector (PDD), and a signal acquisition and processing module. The laser light generated by the laser passes through the isolator and enters a Michelson interferometer. One path of the laser light is calibrated by the collimator and injected into the optical fiber. The returned Rayleigh backscattered light passes through the polarization controller and is then injected into the coupler. The other path of the laser light passes through the acousto-optic modulator and is then injected into the coupler. The two signals enter the polarization diversity photodetector, where they interfere and generate a current signal, which is then output to the signal acquisition and processing module. The signal acquisition and processing module synthesizes the coherence function to achieve simultaneous fiber temperature and strain sensing. This system facilitates measurement, reduces system complexity, and reduces system cost.

The application discloses a moving mirror system of a Michelson interferometer based on magnetic suspension positioning technology, which comprises a moving mirror main body and three electromagnet groups. The moving mirror main body comprises a lens base, a metal mirror, connecting rods and magnetic pole balls. The number of the connecting rods is three, and the three connecting rods are arranged on the side edges of the lens base. The number of the magnetic pole balls is three, and the three magnetic pole balls are arranged on the other ends of the three connecting rods respectively. The electromagnet group comprises an electromagnet support, coils and magnetic pole heads. The electromagnet support is composed of three wedge-shaped bodies. The number of the coils is three, and the three coils are fixed on the three wedge-shaped bodies by electromagnet bolts respectively. The application has the advantages of no abrasion, simple realization, easy control and easy manufacturing. Meanwhile, the precision is not lost due to the increase of the use frequency and use time. Since only electromagnets are adopted as the core parts, the machining and manufacturing are very simple and easy, and the technical threshold of production design and manufacturing is lowered.

The invention discloses a laser Michelson interferometer for observing and interfering three-dimensional space distribution of a light field by using a photoluminescence effect. The laser Michelson interferometer comprises a laser, a lens, a beam splitter prism, two reflectors and a photoluminescence medium, laser emitted by the laser device is shaped by the lens, then enters the beam splitter prism and is divided into a transmission light beam and a reflection light beam, and the transmission light beam and the reflection light beam are reflected by the two reflectors respectively, return along the same path, then are reflected / transmitted by the beam splitter prism and enter the photoluminescence medium to form an interference light field; and complete three-dimensional space light field distribution can be observed through fluorescence.

The invention provides a high-temperature and high-pressure sensor based on an optical fiber interferometer of a cascade structure of a Michelson interferometer (MI) and a Fabry-Perot interferometer (FPI) and a preparation method of the high-temperature and high-pressure sensor. According to the sensor, the conical single-mode fiber and the coreless fiber are welded to form an MI structure, the MI structure is sealed in the quartz capillary to form an FPI cascade structure, and due to the fact that the sensor adopts an arc discharge non-adhesive packaging technology, high temperature and high pressure can be measured at the same time. Wherein temperature sensing can be realized by monitoring MI characteristic spectrum change, and pressure measurement can be realized by monitoring FPI cavity length change caused by pressure. The sensor has the advantages of strong anti-interference capability, high stability and the like, and is suitable for temperature and pressure measurement under complicated working conditions of petrochemical engineering, aerospace and the like.

The application provides a silicon-based free-space optical MEMS accelerometer and a manufacturing method, the upper layer of the accelerometer is a glass substrate free-space optical sensitive structure, the lower layer is a silicon-based horizontal axis MEMS sensitive structure, and the upper layer structure is fixed on the lower layer structure through a bonding process. The upper layer optical sensitive structure is composed of a pair of Michelson interferometers, a glass anchor point and a glass mass; the lower layer MEMS sensitive structure is composed of four groups of cantilever beams, a silicon anchor point and a silicon mass. The lower layer MEMS sensitive structure converts the horizontal axis input acceleration into the displacement of the silicon mass, the displacement is synchronously transmitted to the glass mass, and a pair of reversely arranged Michelson interferometers convert the displacement into the reverse transformation of the phase of the interference light, so that the high-precision differential detection of the acceleration is realized. The micro-optical accelerometer scheme provided by the application has the outstanding advantages of high detection sensitivity, strong anti-common-mode error capability and high integration.

The invention discloses an infinitesimal displacement automatic measuring device and method based on a Michelson interferometer, and belongs to the technical field of infinitesimal displacement measurement. The system comprises an optical amplification and display system and a Michelson interference system, wherein the optical amplification and display system comprises a microscope, a high-definition camera and a display screen; wherein the high-definition camera is used for recording the moving process of an object to be measured; the display screen is used for displaying and playing pictures shot by the high-definition camera; indication marks are arranged on a movable mirror of the Michelson interference system and used for indicating the starting point and the ending point of an object to be detected on the display screen. According to the invention, through mutual cooperation of the optical amplification and display system and the Michelson interference system, a moving path of an object to be measured can be amplified firstly, then measurement is carried out, and compared with a traditional Michelson interferometer, the measurement precision is greatly improved. And meanwhile, a rigid linkage structure of the movable mirror and the indication mark is adopted, so that the purpose of inhibiting dynamic errors is achieved, and the accuracy of a measurement result is further improved.