This invention provides a dynamic beam
quality measurement device based on a fast deflecting mirror and a
microlens group, comprising a first fast deflecting mirror, a second fast deflecting mirror, a
microlens group, a focusing lens, and a charge-coupled device (CCD) camera arranged sequentially along the
optical path. The first fast deflecting mirror reflects the
laser beam to be measured onto the second fast deflecting mirror, and the second fast deflecting mirror reflects the
laser beam modulated by the first fast deflecting mirror to the centers of different microlenses within the
microlens group. The microlens group consists of multiple microlenses. The focusing lens is arranged in the transmission
optical path of the microlens group, and the
CCD camera is arranged at the focal point of the focusing lens in the transmission
optical path of the focusing lens. In this invention, a
single image acquired by the
CCD camera can capture the distribution of four
laser beam spots focused by lenses with different focal lengths. Combined with the high-speed deflection of the two fast reflecting mirrors, dynamic measurement of
laser beam quality can be achieved while ensuring measurement accuracy.