679 results about "Beam splitting" patented technology

The embodiment of the invention provides an optical detection device which comprises an imaging assembly and a photoelectric detection device, and the imaging assembly is used for forming an image on an image plane of a to-be-detected area of a wafer. And the photoelectric detection device is used for receiving images and is arranged at the image plane. The photoelectric detection device comprises a light beam separation assembly and a sensor assembly, the light beam separation assembly is used for dividing a continuous first light signal in an image into multiple beams of second light signals, and the light beam separation assembly comprises a microlens array. The sensor assembly is used for receiving multiple beams of second optical signals, and each pixel unit of each sensor in the sensor assembly is used for receiving one beam of second optical signal in the multiple beams of second optical signals. The sensor assembly comprises a single-pixel sensor, and the single-pixel sensor corresponds to one micro lens in the micro lens array; and / or, the sensor assembly comprises a multi-pixel sensor, the multi-pixel sensor corresponds to a plurality of microlenses in the microlens array, and spatial segmentation is beneficial to improving the signal-to-noise ratio.

Disclosed in the present invention is a photometric stereo-based device for rapidly detecting surface features of an object, capable of rapidly acquiring a plurality of images meeting the requirements of a photometric stereo algorithm. The device comprises a light emitting assembly, an acquisition assembly located above the light emitting assembly, and a data processing module; the acquisition assembly comprises a light path system and a camera group; the light path system comprises: a beam splitting prism group used for splitting reflected light from the surface of an object into a plurality of beams of light and respectively outputting the plurality of beams of light in different preset directions to form images to be processed, and a plurality of bandpass filters correspondingly arranged on the output sides of the plurality of beams of light used for forming said images, wherein the central wavelengths of the bandpass filters are respectively configured to be different wavebands of the reflected light from the surface of the object; the camera group comprises a plurality of cameras which are arranged behind the bandpass filters in a one-to-one correspondence mode and acquire filtered light beams; and the data processing module receives image information sent by the cameras, and performs compensation and photometric stereo reconstruction on the image information, so as to obtain surface features of the object. Further disclosed is a method implemented on the basis of the device.

The invention provides an atmospheric pollutant traceability analysis method and system. According to the method, a form classification standard is established through particle shape features, and atmospheric particles are divided into naturally raised dust and industrial emission particle swarms. A dual-wavelength laser technology is adopted for natural flying dust, specifically, the first wavelength is matched with the inherent frequency of mineral crystals, amorphous scattering interference is blocked through polarization beam splitting, and a reflection signal sequence is extracted to generate a mineral migration path; and the second wavelength screens heavy metal scattering signals of the industrial particles, and a heavy metal diffusion track is constructed by utilizing spatial intensity gradient. And superposing the two paths and aerosol three-dimensional distribution data to generate a thermal distribution diagram, and when the space density exceeds a threshold value, calculating a migration path deviation value and a trajectory offset, dynamically distributing pollution source contribution weights, and outputting a pollution source analysis result. According to the invention, dynamic and accurate analysis of natural and industrial pollution sources is realized, and the regional pollution traceability and management and control strategy targeting are improved.

The invention discloses an optical waveguide and a preparation method thereof, relates to the technical field of optics, and is used for solving the problems of high processing difficulty, low yield and high cost of the existing array optical waveguide. The optical waveguide comprises a turning waveguide which is provided with a light incident surface, a first surface, a second surface and a plurality of first light splitting surfaces, the first surface and the second surface are arranged in parallel, the first light splitting surfaces are arranged in parallel, the included angle between the first light splitting surfaces and the first surface is smaller than 90 degrees, and the first light splitting surfaces enable light entering the turning waveguide from the light incident surface to be partially reflected; the reflected light is transmitted to the coupling-out waveguide; the coupling-out waveguide and the turning waveguide are spliced, so that light entering the coupling-out waveguide from the turning waveguide is emitted out of the coupling-out waveguide. The first beam splitting surface of the turning waveguide is not perpendicular to the first surface of the turning waveguide, compared with an existing array optical waveguide, the situation that the perpendicularity precision of the beam splitting surface and the surface of the optical waveguide needs to be strictly controlled in the machining process can be avoided, and therefore the machining difficulty can be lowered, the yield can be improved, and cost can be reduced.

The invention discloses a broadband full-Stokes polarization imaging device based on non-orthogonal four-channel polarization beam splitting, which comprises a dielectric substrate, a non-orthogonal polarization beam splitting metasurface and a focal plane detection array, and is characterized in that the non-orthogonal polarization beam splitting metasurface is composed of a plurality of sub-wavelength unit structures; the sub-wavelength unit structure is a single-layer anisotropic medium nano-column array and is configured to perform intrinsic-loss-free non-orthogonal four-channel beam splitting on incident light and form four spatially separated focuses on the same focal plane, and polarization states corresponding to the four channels form a regular tetrahedron measurement base on a Poincare sphere; therefore, full Stokes parameter measurement is completed by four pixels; the sub-wavelength unit structure forms a super-pixel unit, and the super-pixel unit is aligned and integrated with a focal plane detection array in a two-dimensional array form to form a compact polarization camera facing focal plane segmentation. The device is simple in structure, easy to integrate with the CMOS front end, small in device size, low in power consumption and high in mass production feasibility.

The invention discloses a laser-assisted helium arc penetration fusion welding method, and belongs to the technical field of welding. The problems that according to an existing paraxial laser-electric arc composite structure, the welding track is difficult to control, the energy coupling efficiency is low due to laser energy loss, and weld joint partial melting and undercut defects are caused due to uneven distribution of a welding temperature field due to a generated asymmetric heat source are solved. The welding method comprises the steps of 1, pretreatment; 2, after being focused by a focus lens, the laser is divided into three laser beams through a spectroscope, then the three laser beams are converged again through a plurality of reflectors, three fan-shaped light spots are formed on the surface of the to-be-welded plate after convergence, and finally the focal plane position of the laser is adjusted to be located on the surface of the to-be-welded plate; 3, setting welding current and arc voltage; and fourthly, laser is used for assisting helium arc penetration fusion welding. The method is used for laser-assisted helium arc penetration fusion welding.

The invention discloses an all-fiber vortex interference system and a phase variation measurement method, belongs to the field of optical precision instrument design and test, and aims to realize ultrahigh-precision phase variation measurement by using an all-fiber structure. The vortex interference system comprises a light source module, an optical fiber beam splitting module, an optical fiber sensing module, an optical fiber mode conversion module, an optical fiber mode interference module and an imaging module in sequence along an optical path. The phase variation measurement method is a phase variation demodulation method based on angular Fourier transform, which is provided for the all-fiber vortex interference system. The interferometer provided by the invention does not need a complicated light path alignment step of a traditional interferometer, and the sensitivity of the all-fiber vortex interferometer is further improved.

The invention discloses an optical computing array based on micro-ring resonators without a free spectral range, which comprises an on-chip wavelength division multiplexing beam splitting array, an on-chip intensity modulation array, two groups of on-chip wavelength division multiplexing beam combining arrays and an on-chip balance detector, the on-chip wavelength division multiplexing beam splitting array and the on-chip wavelength division multiplexing beam combining array are respectively composed of a group of multiple FSR-free MRRs which share the same bus optical waveguide, each resonator corresponds to an independent wavelength channel, and the on-chip intensity modulator array is composed of a plurality of groups of on-chip MZI modulator arrays. According to the optical calculation array implementation method, independent control and coding calculation of different wavelength channels in a broadband wavelength range are realized by utilizing the single harmonic peak characteristic of the FSR-free MRR array and the wide-spectrum intensity modulation function of the MZI unit, the limitation of a free spectrum range on the optical calculation wavelength channel is eliminated, the higher wavelength parallelism is achieved, and the optical calculation array implementation method has the advantages of being simple in structure and convenient to implement. And therefore, the calculation scale is remarkably improved.

The invention relates to the field of optical display and material engineering, in particular to a silica gel integrated optical film with a 3D light splitting function and a manufacturing method of the silica gel integrated optical film. A silica gel integrated optical film with a 3D light splitting function comprises a transparent optical base material and a microstructure layer, and the microstructure layer is combined on the surface of the transparent optical base material in an integrated forming mode. And the microstructure layer is an anhydrous silica gel-resin composite material obtained by combining organic silica gel with low refractive index and resin with high refractive index through an anhydrous chemical reaction system. The optical film obtained in the invention has excellent interface bonding stability and long-term reliability, the overall thickness of the optical film is small, the optical loss is reduced, the light transmittance is higher, and the overall transmittance can reach 93% or above. And the manufacturing process integration degree and the mold repeated utilization rate are high, the industrial batch production requirement can be met, and the excellent industrial application prospect is achieved.

The invention discloses a vortex beam orbital angular momentum detector based on surface plasmon and a detection method, and belongs to the field of micro-nano photonics and photoelectric detection. The detector is based on a plane photoelectric detector of a metal-semiconductor-metal type, a vortex light field beam splitting structure is arranged on a metal electrode on one side of the detector or between two metal electrodes, the vortex light field beam splitting structure comprises an incident coupling grating, an incident light field carrying different orbital angular momentums can be split into plasmons in different directions, and the plasmons in different directions can be split into a vortex light field. The single detector resolution of the orbital angular momentum of the vortex beam is realized through the direction and propagation loss difference of plasmons. The detector is compatible with an existing semiconductor technology, the structure is simple, vortex light beams carrying high-order orbital angular momentum can be detected, and the rotation direction of a vortex light field can be detected.

The invention discloses an ultra-wide thin-wall tunnel roof deformation monitoring device based on laser ranging, and relates to the technical field of laser measurement, the ultra-wide thin-wall tunnel roof deformation monitoring device comprises an industrial camera and a mounting seat, a laser is fixedly mounted on the mounting seat, a mounting bracket is mounted at the bottom of the mounting seat, and a protective shell is fixedly mounted on the mounting seat. A light beam collimator is fixedly installed on the laser device, and a beam splitting assembly is fixedly installed in the protective shell and used for equally dividing a light source emitted by the laser device into two laser beams. The tunnel section deformation monitoring method has the advantages that high-precision and high-efficiency deformation monitoring can be performed on the tunnel section, the problems of time desynchrony and optical distortion existing in a traditional method are effectively solved, and meanwhile, the adaptability and data reliability in a severe environment are remarkably improved; and reliable technical means and equipment support are provided for structural health assessment of the ultra-wide thin-wall tunnel top arch.

The utility model relates to the technical field of super-structure lenses, and particularly discloses a fully-integrated polarization imaging device based on a polarization beam splitting super-lens. The fully-integrated polarization imaging device based on the polarization beam splitting superlens comprises a nanopillar array, a transparent medium substrate and an image sensor, a nanorod array is arranged on one side surface of the transparent medium substrate; the image sensor is arranged on the other side, far away from the nanorod array, of the transparent medium substrate; the image sensor is provided with at least two pixel areas; the light beams output from the nano-pillar array pass through the transparent medium substrate and then are split and focused to the pixel area. According to the utility model, the nanorod array, the transparent medium substrate and the image sensor are integrated together, so that the interference of an external light path is reduced, the imaging stability and reliability are improved, the structure is compact, and the size is small. The nanorod array can accurately control polarization and phase of light, high-resolution imaging is achieved, and the problems that an existing polarization system is low in integration degree, large in size and low in resolution are solved.

The invention discloses a surface topography measurement device and method based on polarization phase shift. The device comprises a laser module, a polarization beam splitting and interference module, a polarization beam combining and imaging module, a polarization image acquisition module and a control and reconstruction module. The laser module comprises a monochromatic tunable laser, an optical fiber collimating amplifier and a polarizer; the polarization beam splitting and interference module comprises a polarization beam splitting prism, a first quarter-wave plate, a plane mirror and a second quarter-wave plate; the polarization beam combining and imaging module comprises a polarization splitting prism, a third quarter-wave plate and a telecentric lens; the polarization image acquisition module comprises a micro-polarization array camera and an image processing unit, and the micro-polarization array camera synchronously acquires four polarization interference images through single exposure; and the control and reconstruction module obtains measurement data of the surface topography of the to-be-measured object through a phase unwrapping algorithm and three-dimensional topography reconstruction. According to the invention, high-precision, large-field-of-view, portable and high-efficiency field detection can be realized.

The invention relates to the technical field of industrial visual inspection, and discloses an asynchronous exposure double-view-field imaging system and method, and the system can achieve the merging of independent view field images collected by two parallel lenses into a single linear array camera through a reflector and a non-polarization beam splitting cube based on the asynchronous exposure double-view-field imaging system. Meanwhile, in cooperation with precise time sequence control, the system drives two independent stroboscopic light sources to be synchronous with line trigger signals of the camera, different view fields are alternately illuminated in odd-even line periods, the camera is made to perform asynchronous exposure, and two paths of image information are collected in a time-sharing mode; and finally, reconstructing two complete, independent and seamlessly spliced detection images from the interleaved data streams through an odd-even line separation algorithm. According to the invention, with the hardware cost of a single camera, the detection visual field is obviously expanded, the detection efficiency and the image geometric precision under the high-line scanning frequency are ensured, and the excellent balance of the performance, the cost and the efficiency is realized.

The invention discloses a lithium niobate electro-optical polarization modulator based on an adiabatic coupling structure and a modulation method thereof. The modulator comprises a first adiabatic coupling polarization beam splitting rotator, an electro-optical phase modulator and a second adiabatic coupling polarization beam splitting rotator, wherein each adiabatic coupling polarization beam splitting rotator comprises an input waveguide, an adiabatic coupler and a separation waveguide. According to the modulation method, transmission is carried out through a straight-through end in a first adiabatic coupling type polarization beam splitting rotator, and TE0 is kept unchanged; when the input light is TM0, the input light is converted into TE0 through the first adiabatic coupling type polarization beam splitting rotator and is transmitted through the cross end. And after phase modulation is carried out by the electro-optic phase modulator and beam combination is carried out by the second adiabatic coupling type polarization beam splitting rotator, output light is remapped into TE0 and TM0, and the polarization state is determined by the relative phase difference, so that dynamic regulation and control of the polarization state are realized.

The invention discloses a self-adaptive three-beam interference super-resolution microscopic imaging system and method, a light source module generates laser which sequentially passes through a polarization beam splitting module and an electro-optic phase modulation module, three beams of laser subjected to phase modulation are output, and the three beams of laser pass through an optical path compensation module to complete optical path compensation; then the laser enters the laser polarization vector modulation module for polarization modulation, the modulated laser enters the aberration correction module through the laser beam combining module, three beams of light irradiate a sample on a displacement table after aberration correction, fluorescence excited by the sample passes through the aberration correction module again to complete aberration correction, and then an image is obtained through the filtering imaging module. And the acquisition control module synchronously controls the electro-optic phase modulation module, the laser polarization vector polarization modulation module and the aberration correction module and receives an image shot by the filtering imaging module, so that high-speed real-time super-resolution microscopic imaging and high-quality aberration correction are finally realized, the three-dimensional resolution of the image, especially the resolution along the axial direction, is improved, and the imaging quality is improved. And artifacts in the image are reduced.

The invention discloses a single-laser self-injection locking resonant optical gyroscope based on light intensity detection and a working method thereof, and belongs to the technical field of optical gyroscopes, a working light source DFB laser is connected with a first port of a circulator, and a second port of the circulator is connected with a beam splitting coupler through an isolator; two output ends of the beam splitting coupler are respectively connected with an input end of the echo wall microcavity and the phase modulator, and the phase modulator is connected with the other input end of the echo wall microcavity; a first port of the output end of the echo wall microcavity is connected with a third port of the circulator, and a second port of the output end of the echo wall microcavity is connected with the frequency locking amplifier through the photoelectric detector. According to the invention, the problems of high cost of double light sources in the self-injection locking resonant optical gyroscope and frequency drift and complex structure of beat frequency detection are solved, so that the measurement precision and economical efficiency of the gyroscope are effectively improved.

The invention discloses a stray light removing system of a diffractive optical element for beam splitting, which comprises a laser light source, the diffractive optical element for beam splitting, a first focusing element, a diaphragm, a second focusing element and a third focusing element which are sequentially arranged along the direction of a laser light path, and is characterized in that the diffractive optical element is used for splitting incident light into a plurality of sub-beams; a plurality of light through holes used for removing stray light are formed in the diaphragm corresponding to the plurality of sub light beams, the focal lengths of the first focusing element and the second focusing element are the same and are F, the distance between the diaphragm and the first focusing element and the distance between the diaphragm and the second focusing element are the same and are L, and L is equal to F. By forming a 4f filtering system, stray light of each sub light beam is effectively removed, and under the condition that the transmission characteristic of light is not changed, the whole structure is simple, operation is convenient, the yield of machined products is guaranteed, and cost is saved.

The invention relates to a mask defect detection system based on polarization transmission and reflection combination. The system comprises a laser; the first polarization beam splitter is used for carrying out polarization beam splitting on the laser beam to generate P polarized light and S polarized light; the transmission light path is used for performing optical processing and polarization state adjustment on the P polarized light and then projecting the P polarized light to a mask plate; the reflection light path is used for performing optical processing and polarization state adjustment on the S polarized light and then projecting the S polarized light to a mask plate; the imaging light path is used for imaging when the P polarized light is transmitted from the mask plate to obtain a transmission image, and imaging when the S polarized light is reflected from the mask plate to obtain a reflection image; and the storage and operation module is connected with the imaging light path and is used for storing and operating the transmission image and the reflection image so as to analyze whether the mask has defects or not. According to the invention, transmission and reflection dual-polarization light path imaging is adopted, and various mask plate defects can be simultaneously and effectively detected.

The invention provides an automatic focusing device, an automatic focusing method and wafer quantity detection equipment, and belongs to the field of semiconductor optics, and the device comprises a light source, an illumination dimming mirror group, a beam splitting element, a reflector, an objective lens, a distance measurement dimming mirror group, a focal plane measurement unit, a dispersion compensation mirror group and a focusing compensation mirror group; the focal plane measuring unit can measure the focal planes of a plurality of process layers of the wafer and determine the focal length from the target focal plane to the objective lens, thereby realizing automatic focusing. According to the scheme, the dispersion compensation and objective lens measurement combined design is adopted, high precision and a large measurement range are achieved through dispersion curve control, specific quantity detection scanning can be conducted on a specific process layer of a wafer through the focusing compensation lens set, and the measurement precision is improved. And the method is convenient to popularize and apply in equivalent detection scenes of wafer nanoscale key dimensions, defects, overlay alignment and the like and in the photoetching processing field.

The invention belongs to the technical field of quantum security communication, and discloses a quantum random number generator chip which comprises a laser, a polarization rotation module, a polarization beam splitter, two photoelectric detectors, an amplifier, an analog-to-digital conversion module and a data processing module which are integrally packaged. Compared with the prior art, optical signals are subjected to polarization rotation by 45 degrees and polarization beam splitting, so that polarization interference measurement of vacuum quantum fluctuation is realized, and the stability and reliability of interference are improved; balanced beam splitting can be achieved only through one path of polarization control, the complexity and the size of the quantum random number generator are reduced, and the integration level and the stability of a chip are improved.

The invention relates to a broadband continuous testing device and method for diffraction efficiency of a medium-long wave infrared grating. The device comprises a broadband light source, a medium-long wave infrared monochromator, a collimation system, a polarization selection system, a broadband spectrum beam splitting system, a signal enhancement detection system, a sample clamping and multi-dimensional moving system and an automatic control system. According to the testing method, the absolute diffraction efficiency of the grating is tested through double optical paths, measurement errors caused by fluctuation of a light source can be avoided, the measurement errors are further reduced by deducting environmental noise and improving the signal-to-noise ratio through a signal enhancement detection system, an automatic control system is added, and continuous scanning testing in a specified wave band is achieved. The test speed is improved. By means of the device and the method, automatic and rapid measurement of the diffraction efficiency of the medium-long wave echelette grating under the conditions of at least 2.5-14 micron broadband, different wavelengths, any incident angle and dual polarization states can be achieved.

The application relates to the field of laser micro-nano processing, in particular to a laser micro-nano processing device based on an acousto-optic deflector and a rotating mirror and a use method thereof, which comprises a pulse laser, a mirror group, an acousto-optic deflection module, a signal control unit, a beam splitting module, a rotating mirror and a flat-field focusing lens arranged in sequence; the acousto-optic deflection module comprises a first acousto-optic deflector and a second acousto-optic deflector, the first acousto-optic deflector and the second acousto-optic deflector are orthogonally arranged, the first acousto-optic deflector is arranged in parallel with the rotating shaft of the rotating mirror, the second acousto-optic deflector is arranged in perpendicular to the rotating shaft of the rotating mirror, through the arrangement of the two orthogonally arranged acousto-optic deflectors, the laser beam can be flexibly controlled to be deflected to any position in a rectangular scanning area, and in combination with the polygon rotating mirror, the polygon rotating mirror can be rotated only once along a processing track, the acousto-optic deflector can compensate and fill a processing pattern, and the technical effect that any shape can be realized is achieved.

The invention discloses a beam focusing method and system based on a liquid neural network and meta learning, and belongs to the technical field of wireless communication, and the method comprises the following steps: determining a system model; determining an optimization target; and joint optimization. The LNNM-BF algorithm with high robustness and unsupervised learning is provided, the LNNM-BF algorithm designs a phase shift matrix theta through an index matrix S and a phase compensation matrix phi, then an analog precoding matrix FPS and a digital precoding matrix FBB are designed at a BS end, and the near-field dual-beam splitting effect can be well relieved without introducing an extra true time delayer. Besides, the LNNM-BF algorithm enhances the adaptability of beam focusing to imperfect CSI through a meta-learning framework and improves the robustness of the algorithm, and the embedded LNN dynamically adjusts the topological structure and the connection weight between neurons through the currently input and previously implied iteration information to realize the maximization of SE.

The invention discloses a generation system and method based on a vector light beam of any structure, and the system comprises a laser, a collimating and beam expanding element, a polarizing film, a first half-wave plate, a beam splitting cube, a polarization beam splitting cube, a reflector, a second half-wave plate, a quarter-wave plate, a Fourier lens, a spatial light modulator, a computer, and a camera. Two parallel light beams which are generated by a continuous wave solid laser and a half-wave plate and have an orthogonal polarization state are respectively irradiated on spatial light modulators which are loaded with different topological charge values and are used for customizing light beam holograms with any shapes and structures, are modulated by the spatial light modulators, and are coaxially superposed with a Fourier lens through a quarter-wave plate; and the customized vector light beam with any shape and uniform intensity can be generated. According to the invention, the direct mapping of a real object can be realized, the light beam quality is improved, and the polarization state is flexibly regulated and controlled.

The invention discloses an airborne dynamic imaging-oriented image quality enhancement calculation processing system and a method thereof, and relates to the technical field of calculation optics. The system comprises an illumination module, a collimation module, a confocal module, a beam splitting module, an angle selection filtering module and an imaging module. The angle selection filtering module changes the incident angle of a light beam through physical movement or rotation, so that the angle selection filtering module excites a Berman mode in a near-zero dielectric constant double-layer film, and real-time switching between normal incidence low-pass denoising and oblique incidence high-pass sharpening is achieved. According to the invention, switching of two typical image processing functions can be realized only through incident angle adjustment without introducing an electrical regulation and control element, so that sharpening and denoising function integration is realized in a single optical structure, and the system has millisecond-level angle switching, low power consumption and a compact linear folded optical path, and is suitable for airborne high-speed imaging.

The invention provides a broadband linear frequency modulation microwave source based on ultra-short external cavity modulation light feedback, and relates to the field of microwave photonics. Continuous light generated by the main semiconductor laser is injected into the slave laser after being adjusted, so that the slave laser works in a periodic oscillation state; the slave laser, the electro-absorption modulator and the reflector are integrated to form an ultra-short outer cavity, and the intensity of feedback light is regulated and controlled by an external signal source so as to realize linear scanning of cavity mode frequency. After beam splitting of light output from the laser, one path forms a long external cavity feedback stable signal through the adjustable optical fiber delay line, and the other path outputs a target signal after beat frequency of the photoelectric detector and filtering of the band-pass filter. A high-speed modulator and a high-frequency microwave source are not needed, the broadband advantage of a photonics scheme is reserved, the frequency sweeping bandwidth is further improved to 60 GHz or above, the center frequency and the frequency sweeping range are independently adjustable, the structure is simple, cost is low, integration is easy, and the device is suitable for scenes such as photoelectric radars.

The invention discloses a double-flat-topped light beam diamond polishing device and method based on homogenized optical fibers, and relates to the technical field of semiconductor material laser processing. The light spot homogenizing unit homogenizes the pulse laser to obtain a square flat-topped light spot; the light spot shaping unit collimates the homogenized pulse laser into parallel light and adjusts the beam diameter; the beam splitting and sub-transfer unit splits the parallel light into two sub-light beams, the two sub-light beams are adjusted to be coplanar and parallel to each other, and the center-to-center distance between the two sub-light beams is adjustable; the laser processing head unit focuses the two sub-light beams on the surface of the diamond; and the three-dimensional motion platform is used for bearing the diamond and scanning and polishing the diamond. Multi-focus array parallel scanning increases the coverage area of single-time processing, the processing effect of traditional single-focus multi-time scanning can be achieved through one-time scanning, the scanning frequency is remarkably reduced, the processing time consumption is reduced, and the processing efficiency is improved.

The invention is suitable for the technical field of diffractive optics, and provides a self-adaptive chromatography grating dispersion correction method and system based on deep learning, and the method comprises the following steps: enabling an incident light beam to be diffracted through a chromatography grating, and obtaining a multi-stage chromatography diffraction light beam; dispersion angle compensation is carried out on the multi-stage diffraction beams through the plane straight stripe blazed grating; collimating the corrected light beam by using a double-barrel lens group and forming an image space telecentric light path to obtain an image space telecentric light beam; performing spectral beam splitting and aberration pre-correction on an image space telecentric beam through a micro-lens array, and then performing image acquisition to obtain a pre-corrected multi-spectral image; and based on a deep learning algorithm, carrying out real-time fusion processing on the pre-corrected multispectral image, dynamically adjusting the deflection angle of the microlens array, and outputting a chromatic dispersion corrected tomographic microscopic image. According to the method, the axial color difference and the transverse color difference of the chromatography system can be remarkably reduced, and the method is particularly suitable for application scenes needing wide spectrum coverage and high signal-to-noise ratio.

The invention relates to a quasi-differential wavefront segmentation double-beam interference device with a planar light path structural design, which has the structural characteristic of a non-closed optical path for transmitting a measurement light beam in a one-way manner. Space coherent light of a transverse mode vector filtering mechanism based on the Huygens principle / phased array principle instead of homologous transmission time coherent light is used as each light source, and a non-closed optical path is realized under the cooperation of a one-way transmission mode on a divided measuring light beam. The problem that the sum of the loop wavelength increment or the frequency increment of a closed path interference device is zero is solved, so that the purpose of measuring the first-level effect of anisotropic physical parameters of a measured object in a linear system is achieved, and the device is particularly suitable for immersion type online measurement. The optical elements have stable performance and sound self-adaptive mechanism and self-diagnosis capability through careful layout of the optical elements; and the method also has wide application prospects in basic physical research and novel navigation / positioning systems. The invention also provides a differential wavefront segmentation and semi-transparent and semi-reflective mirror beam combination interferometer device based on the planar light path structure design, and a wavefront segmentation interferometer device based on the planar light path structure design and provided with a pre-crossing area and a bending type one-way-two-way-common mode combination light path structure. The invention relates to a wavefront segmentation interferometer device of a one-way-two-way combined light path structure which is designed based on a planar light path structure and adopts polarization light splitting-beam combination, optical rotation processing of a reference light beam and original path returning, and a use method of an interference device.