604 results about "Polarization beam splitter" patented technology

The invention discloses a polarization-state-based optical fiber vibration sensing system and application, and relates to the technical field of optical fiber sensing, and the polarization-state-based optical fiber vibration sensing system mainly comprises a transmitting end and a receiving end. The transmitting end comprises a laser diode, a first erbium-doped optical fiber amplifier, a first circulator, a polarization scrambler, a single-mode optical fiber link, a second circulator and a second erbium-doped optical fiber amplifier which are connected in sequence; and the receiving end comprises a polarization beam splitter, a first shunt module, a second shunt module, an optical mixer, a first balanced photoelectric detector, a second balanced photoelectric detector, a third balanced photoelectric detector and a polarization analysis module. According to the optical fiber vibration sensing system based on the polarization state and the application, the vibration monitoring performance and reliability in a long-distance and high-noise environment can be improved.

The invention relates to the technical field of laser ranging, in particular to a double-optical-comb hybrid ranging device which comprises a signal detection optical path system and a signal demodulation optical path system. Wherein the signal detection optical path system comprises a first optical frequency comb, a first optical isolator, a first optical collimator, a first beam splitter prism, a reference mirror, a Faraday rotator, a convergence mirror and a target reflector; the signal demodulation optical path system comprises a second optical frequency comb, a second optical isolator, a second optical collimator, a half-wave plate, a second beam splitter prism, a third beam splitter prism, a first polarization controller, a first photoelectric detector, a reflector, a polarization beam splitter prism, a second polarization controller and a second photoelectric detector. A third polarization controller; and a third photoelectric detector. According to the invention, three ranging technologies of asynchronous optical sampling ranging, multi-heterodyne interference ranging and synthetic wavelength ranging are fused, and the problem that a large ranging range and high ranging precision cannot be simultaneously considered in the ranging process is solved.

The invention relates to the technical field of optical element surface shape dynamic measurement scheme design, in particular to an element surface shape dynamic measurement system based on a metasurface. According to the scheme, polarized light emitted by a laser is split into reference light and test light, the test light passes through a quarter-wave plate twice to realize polarization orthogonalization, and the test light is combined with the reference light to form elliptically polarized light; synchronously capturing component intensities of left-handed / right-handed circular polarized light and orthogonal line polarized light by using a detector, and resolving a phase difference delta in real time by combining a Stokes parameter; environmental interference is eliminated based on a common-path design, a polarization beam-splitting element is omitted, and the architecture is simplified; accurate dynamic measurement of the surface shape of the measured piece is realized by deducting the inherent surface shape error of the system. The system provided by the invention has the advantages of strong anti-interference performance, high measurement efficiency, remarkable cost reduction and the like, and is suitable for precise optical manufacturing and on-line detection scenes.

A zero-optical-path-difference double-frequency heterodyne grating ruler comprises a light source, a signal detecting and processing system, a polarization splitting prism, a first quarter-wave plate, a rectangular prism, a second quarter-wave plate, a third quarter-wave plate, a total reflection mirror, a long-strip prism, a reference grating and a 45-degree-placed polaroid. The two measuring light paths of the system always keep zero optical path difference, so that the measuring precision can be ensured, and the environmental stability of the system is also remarkably improved. And a high-precision and high-robustness measurement scheme is provided for precision equipment such as a photoetching machine and a precision motion platform.

The invention discloses a pattern wafer multi-parameter synchronous detection system and method based on double optical combs, and belongs to the field of wafer quality detection. The system comprises a signal light path, a reference light path, a detection light path and a synchronous detection module. After interference, the detection light beam and the reference light beam are decomposed into an H path and a V path through the polarization beam splitter, and are synchronously detected by the first camera and the second camera. The invention also provides a method which comprises the following steps: synchronously acquiring two paths of time domain interference data; fourier transform is carried out on each pixel point to obtain a plurality of spectrum pairs; the processing unit decodes in parallel based on the spectrum pair, and synchronously inverts multi-dimensional physical parameters such as three-dimensional morphology, stress and film parameters of the pattern wafer; and finally, comparing and identifying defects. According to the method, the problems of low detection efficiency and single information dimension in the prior art are solved, and wide-field, high-speed, high-precision and multi-parameter synchronous comprehensive characterization is realized.

The invention discloses a light attenuation assembly, an optical module, an optical device and related equipment. The light attenuation assembly comprises a half-wave plate, a first polarization beam splitter and a second polarization beam splitter which are sequentially arranged along a light path. The half-wave plate is used for converting the first linearly polarized light into second linearly polarized light, and the second linearly polarized light can be decomposed into third linearly polarized light and fourth linearly polarized light of which the polarization directions are perpendicular to each other; the first polarization beam splitter is used for dividing incident second linearly polarized light into third linearly polarized light and fourth linearly polarized light, reflecting the third linearly polarized light to the second polarization beam splitter, and transmitting and filtering the fourth linearly polarized light at the same time; and the second polarization beam splitter is used for reflecting and outputting the third linearly polarized light and transmitting and filtering the residual fourth linearly polarized light. Through the light attenuation assembly, the quality of the output laser beam can be improved.

The invention relates to the technical field of atomic frequency standards, in particular to a rubidium cold atom gas chamber-based two-photon transition optical frequency standard device, which comprises a two-photon transition clock laser system, a rubidium cold atom gas chamber, a cooling laser system, a sputtering ion pump and a rubidium source, wherein the two-photon transition clock laser system comprises a laser generation modulation light path, a laser power stabilization light path and a laser frequency control light path; the rubidium cold atom gas chamber is arranged behind the Glan-Taylor prism; the cooling laser system comprises a cooling laser, a second isolator, a second polarization beam splitter, a pumping light path, a re-pumping light path and a detection light path; the sputtering ion pump is connected with the rubidium cold atom gas chamber; and the rubidium source is connected with the rubidium cold atom gas chamber. The two lasers are utilized to obtain the two-photon transition signal, so that the rubidium atom two-photon transition light frequency standard with high stability is obtained, and the intensity of the two-photon transition fluorescence signal is improved.

The application discloses a laser cavity diagnosis device and method based on double-frame delay synchronization phase shift, which comprises an excitation module and a detection module; the excitation module comprises a first laser, a first 1 / 2 wave plate, a polarization beam splitter prism, a beam splitter, an energy meter, a convex lens and a water tank; the detection module comprises a second laser, a beam expander lens group, a second 1 / 2 wave plate, a second polarization beam splitter prism, a third 1 / 2 wave plate, a first reflector, a second reflector, a fourth 1 / 2 wave plate, a third polarization beam splitter prism, a third reflector, a fourth polarization beam splitter prism, a first 1 / 4 wave plate, a first imaging lens, a first micro-polarization camera, a second 1 / 4 wave plate, a second imaging lens and a second micro-polarization camera. The application introduces a double-frame delay method in the traditional synchronous phase shift interference, overcomes the defects of the existing cavity detection technology, and realizes the observation of the instantaneous phase change in a single cavity pulsation period.

The invention discloses a cold atom interference type low-frequency vibration measurement device and a measurement method, and solves the problems that the existing cold atom interference gravimeter measurement equipment is limited by the performance of a vibration sensor, the compensation precision is insufficient, timing calibration is needed, and the measurement precision is low. And measurement errors generated by gravity and ultralow-frequency vibration cannot be effectively separated from a measurement result of the cold atom interference gravimeter, namely, decoupling of two measurement parameters is realized, and cold atom interference measurement of low-frequency vibration is realized. The measuring device comprises a Raman laser output system, a vacuum cavity, a sensitive axis converter and a vibration detection reflecting mirror, the Raman laser output system outputs two pieces of Raman laser which have the same polarization state and are both circular polarization states; the low-frequency vibration is transmitted to the liquid crystal phase modulator through the vacuum cavity for polarization state conversion, and then is reflected to the liquid crystal phase modulator or the vibration detection reflector through the polarization splitting prism, so that the interference type low-frequency vibration of the cold atoms is measured, and decoupling of the two is realized.

The invention relates to a multi-path high-stability narrow-linewidth external cavity semiconductor laser and application thereof, and belongs to the technical field of lasers. The laser comprises two groups of external cavity light paths, Z-block beam combiners, partial reflectors and isolators, the two groups of external cavity light paths are arranged side by side, and the Z-block beam combiners, the partial reflectors and the isolators are sequentially arranged on the light emitting sides of the two groups of external cavity light paths; the external cavity optical path comprises a gain chip, a collimating lens, a polarization analyzer A, a polarization beam splitter, an F-P etalon and a narrow-band-pass filter which are sequentially arranged along the optical path. The polarization analyzer and the polarization beam splitter are arranged in the external cavity light path, main polarized light is kept to resonate in the external cavity light path, the polarization suppression ratio of the external cavity light path is improved, non-dominant mode noise is suppressed, and the line width is reduced; the mode jump risk is reduced, the device life is prolonged, and the power stability is improved; the beam quality is improved; and the polarization dependent loss in a light path is reduced.

The invention relates to a mask defect detection system based on polarization transmission and reflection combination. The system comprises a laser; the first polarization beam splitter is used for carrying out polarization beam splitting on the laser beam to generate P polarized light and S polarized light; the transmission light path is used for performing optical processing and polarization state adjustment on the P polarized light and then projecting the P polarized light to a mask plate; the reflection light path is used for performing optical processing and polarization state adjustment on the S polarized light and then projecting the S polarized light to a mask plate; the imaging light path is used for imaging when the P polarized light is transmitted from the mask plate to obtain a transmission image, and imaging when the S polarized light is reflected from the mask plate to obtain a reflection image; and the storage and operation module is connected with the imaging light path and is used for storing and operating the transmission image and the reflection image so as to analyze whether the mask has defects or not. According to the invention, transmission and reflection dual-polarization light path imaging is adopted, and various mask plate defects can be simultaneously and effectively detected.

The invention discloses a photon-assisted microwave signal time-frequency amplitude-phase measurement system and method, and the system is characterized in that a pulse light source outputs a light pulse which enters an input end dispersive medium to complete pulse broadening, and then the light pulse enters an electro-optical modulation module; meanwhile, the power divider receives the microwave signal and divides the microwave signal into two paths to be input into an upper sub-modulator and a lower sub-modulator of the electro-optical modulation module so as to modulate optical pulses; a modulated optical signal output by the electro-optical modulation module passes through an output end dispersive medium to complete a time convolution process, then the output optical signal is divided into two paths through the optical coupling module, the two paths sequentially pass through the polarization controller, the polarization beam splitter, the photoelectric detector, the analog-to-digital converter and the digital signal processor, position information and amplitude information of an electric pulse are collected, and the position information and the amplitude information of the electric pulse are obtained. And obtaining time, amplitude, frequency and phase information of the microwave signal. The time, frequency, amplitude and phase information of the microwave signals can be measured at the same time, complex back-end processing is not needed, and the processing speed is high.

The invention belongs to the technical field of optical microscopic imaging, and relates to a laser focal depth characteristic-based confocal microscopic imaging system, which comprises a laser emission module, a collimating lens group, a light beam modulation module, a space scanning module and an information receiving module, and is characterized in that the light beam modulation module comprises a polarization beam splitter and a quarter-wave plate; the space scanning module comprises a biaxial galvanometer and a 4f telecentric light path assembly. The laser emission module, the collimating lens group, the polarization beam splitter 4 and the quarter-wave plate are coaxially arranged. The double-shaft galvanometer is obliquely arranged relative to the quarter-wave plate; the 4f telecentric light path assembly is configured to form a preset focal depth range by utilizing the focal depth characteristic of incident laser and scan a sample in the preset focal depth range by utilizing a focused light beam emitted by the 4f telecentric light path assembly; and the information receiving module is arranged beside the polarization beam splitter. According to the invention, the mechanical motion dependence of the optical imaging system is eliminated, the structural complexity of the optical imaging system is reduced, and the resolution and efficiency of laser scanning imaging are improved.

The invention discloses a laser Doppler heterodyne noninvasive blood glucose concentration measuring device and method, and belongs to the technical field of medical detection. Comprising a laser generating module which comprises a laser, and a first 1 / 2 wave plate and a polarization splitting prism which are sequentially connected with the laser; and the interference light path module is connected to the two sides of the polarization splitting prism respectively and comprises a first optical fiber coupler connected with the polarization splitting prism, and a second 1 / 2 wave plate and a second optical fiber coupler which are sequentially connected with the other side of the polarization splitting prism. The device has the advantages that noninvasive detection can be achieved, blood sampling wounds are avoided, and the comfort level of a patient is improved; the measurement precision is high, and the blood glucose value can be quickly and accurately obtained by using heterodyne interference and frequency shift technologies.

The invention belongs to the technical field of quantum security communication, and discloses a quantum random number generator chip which comprises a laser, a polarization rotation module, a polarization beam splitter, two photoelectric detectors, an amplifier, an analog-to-digital conversion module and a data processing module which are integrally packaged. Compared with the prior art, optical signals are subjected to polarization rotation by 45 degrees and polarization beam splitting, so that polarization interference measurement of vacuum quantum fluctuation is realized, and the stability and reliability of interference are improved; balanced beam splitting can be achieved only through one path of polarization control, the complexity and the size of the quantum random number generator are reduced, and the integration level and the stability of a chip are improved.

The invention provides an infrared polarization beam splitter in a bow-tie-type dual-core photonic crystal fiber plated with a gold film, and the beam splitter comprises a substrate which is made of pure silicon; the first circular air hole is formed in the center of the substrate, and the inner side of the first circular air hole is plated with a gold film; the two fiber cores are symmetrically arranged on the two sides of the first circular air hole; the two elliptical air holes are symmetrically formed in the outer sides of the two fiber cores; the 38 second circular air holes surround the first circular air hole, the two fiber cores and the two elliptical air holes to form a bow tie type arrangement structure; the 72 third circular air holes surround the second circular air holes to form a bow tie type arrangement structure; the aperture of the third circular air hole is larger than that of the second circular air hole; the distance between any two adjacent third circular air holes is equal to the distance between any two adjacent second circular air holes.

The invention relates to a single-objective isotropic three-dimensional super-resolution imaging method, which comprises the following steps of: outputting a linear polarization excitation light beam through a picosecond pulse laser, and outputting a linear polarization loss light beam through a nanosecond pulse laser, adjusting the polarization direction and power of the excitation light beam and the loss light beam by using a half-wave plate and a polarization beam splitter, enabling the loss light beam to enter a spatial light modulator, modulating a light field by loading a preset phase diagram, generating three focuses with different topological charges, axial positions and energy distribution, and outputting the three focuses. The high-order vortex phase retarder is used for carrying out polarization state modulation on the focus and separating loss light beams with different polarization components, the imaging resolution ratio smaller than 100 nm in the transverse direction and the axial direction is achieved, the transverse resolution ratio is similar to the axial resolution ratio, the three-dimensional real structure of an object can be accurately reflected when three-dimensional super-resolution imaging is carried out, and the imaging precision is improved. The imaging resolution is in direct proportion to the loss light intensity, and the higher the loss light intensity is, the higher the three-dimensional imaging resolution is.

A programmable 3D light beam shaping device based on the beamlet printing technology comprises a laser source, the laser source emits initial laser, the polarization state of the initial laser is adjusted through a rotatable half-wave plate, and then the initial laser is separated into an s component light beam and a p component light beam through a first polarization splitting prism, the p-component light beam enters a Dammann grating after being expanded, and a diffracted light beam containing a plurality of diffraction orders is generated; the diffracted light beam sequentially passes through a second polarization splitting prism, a quarter-wave plate and a first focusing element and is introduced into focal shift by a multi-stage phase plate array, and the spatial light modulator is used for adjusting the angle and position offset of subgroups of the light beam of the sub-beam array to generate a working light beam; the working light beam returns to the second polarization splitting prism through the original light path and enters the working area through the second focusing element, and a three-dimensional light field is generated; according to the device, the three-dimensional irradiance distribution in a machining area can be accurately controlled, so that multi-layer and depth-adjustable energy deposition is realized, and the machining quality, efficiency and consistency are remarkably improved.

The invention relates to polymerizable liquid crystal formulations (as a subcategory of liquid crystal material), especially to polymerizable ink formulations for inkjet printing, which are preferably PFAS-free (for enabling the reduction of perfluorocarbons and providing an environment friendly material), and which are comprising one or more polymerizable mesogenic compounds, also known as reactive mesogens (RMs), and one or more organic solvents selected from the group of aromatic ester and aromatic or aliphatic diester solvents, to polymers and polymer films obtained from such formulations, and to the use of the formulations, polymers and polymer films in optical or electrooptical components or devices, especially for digital optics or augmented reality or virtual reality (AR / VR) applications like polarizers, optical compensators, reflective films, diffraction or surface gratings, Bragg polarization gratings (Bragg PG), polarization volume gratings (PVG), polarization volume holograms (PVH), Pancharatnam Berry (PB) gratings, nonmechanical beam steering elements, optical waveguides, optical couplers, optical combiners, polarization beam splitters, partial mirrors, lenses or PB lenses.

The present disclosure describes an optical system and method of operating the optical system. The optical system includes a substrate and first and second photonic integrated circuits. The first photonic integrated circuit is positioned on the substrate. The second photonic integrated circuit is positioned on the first photonic integrated circuit. The second photonic integrated circuit receives a first optical signal that includes a first mode and a second mode. The second photonic integrated circuit includes a polarization splitter rotator, a first demultiplexer, and a second demultiplexer. The polarization splitter rotator separates the first optical signal into a second optical with the first mode and a third optical signal with the first mode. The first and second demultiplexers separate the second and third optical signals into first and second pluralities of optical signals. The first and second pluralities of optical signals couple into the first photonic integrated circuit.

The invention provides a hollow-core anti-resonance optical fiber and application and a manufacturing method thereof. The hollow-core anti-resonance optical fiber comprises a supporting tube; the multiple first cladding tubes are attached to the inner surface of the supporting tube at intervals in the circumferential direction of the supporting tube, and the first cladding tubes are configured to be of an anti-resonance structure; the middle plate is arranged in the supporting pipe and is configured to be of a resonant structure or an anti-resonant structure; wherein the middle plate and the plurality of first cladding tubes divide the internal space of the supporting tube into two basically symmetrical air fiber core areas. When the intermediate plate is configured to be of a resonant structure, the hollow-core anti-resonant optical fiber can support an LP11 transmission mode and has the characteristic of low limiting loss; when the intermediate plate is configured as an anti-resonance structure, the hollow-core anti-resonance optical fiber can support x polarization odd mode, x polarization even mode, y polarization odd mode and y polarization even mode transmission modes, has the characteristic of high transmission capacity, and can be applied to a polarization beam splitter.

A display device capable of displaying an aerial image by using retroreflection includes a light source, a diffusion plate arranged over the light source, a first polarizing plate arranged over the diffusion plate, a second polarizing plate arranged over the first polarizing plate, a retroreflecting member arranged on the second polarizing plate and having a design for generating an original image by irradiation of the light source, and a polarizing beam splitter arranged to face the retroreflecting member. The first polarizing plate includes a region inclined with respect to a main surface of the second polarizing plate.

The utility model provides a macro-energy laser energy measuring device, which comprises a beam expanding lens, a polarization beam splitter and two wedge-shaped mirrors which are arranged along a light beam propagation path, the polarization beam splitter is matched with the beam expanding lens to divide an expanded light beam into two polarized light beams, and the number of the wedge-shaped mirrors is two. And the two wedge-shaped mirrors are matched with the polarization beam splitter and are used for respectively splitting the two beams of polarized light in proportion and then enabling the two beams of polarized light to enter a light measurement area. According to the utility model, the PBS, namely the polarization beam splitter, is combined with the wedge-shaped mirror, so that the change of the light splitting proportion caused by the thermal depolarization effect of the high-power laser is avoided, and the influence of the polarization state change of the high-power laser under the change of the thermal effect on the measurement is reduced, thereby improving the precision of energy measurement; the light spot area is increased through the beam expanding lens, and the damage threshold is improved; according to the utility model, as the precision of energy measurement is improved, light beams can be prevented from directly hitting on the probe of the energy meter, and after the damage threshold is improved, the damage risk of an instrument is greatly reduced, the service life of the instrument is prolonged, and the measurement cost is reduced.

The invention discloses a photon-assisted measurement system based on sawtooth wave frequency shift, which is characterized in that antenna modules which are arranged at an interval of 1 / 4 microwave signal wavelength receive echo signals of a space, and meanwhile, a laser generates continuous light which enters an electro-optical modulation module; the modulator simultaneously receives an echo signal, a transmitting signal and a low-frequency sawtooth wave frequency shift signal. An optical signal output by the modulator selects a positive first-order sideband through the optical band-pass filter, and two paths of optical signals with mutually orthogonal polarization states are separated through the polarization beam splitter. The optical signals with orthogonal polarization states respectively pass through a low-frequency photoelectric detector and then two paths of low-frequency signals are output, and Doppler frequency shift and arrival angle information of echo signals are obtained by performing digital signal processing on frequencies and phase differences of the two paths of low-frequency signals. The invention can simultaneously measure the angle of arrival and Doppler frequency shift without direction ambiguity, has low structural complexity and is not influenced by microwave signal power.

An optical circulator includes a first polarization beam splitter member having a common optical port, a second polarization beam splitter member having an emittance optical port and at least two receiving optical ports, and a first polarization adjustment member. The two receiving optical ports respectively receive two linearly polarized light beams. The two linearly polarized light beams respectively pass through the second polarization beam splitter member, and sequentially pass through the first polarization adjustment member and the first polarization beam splitter member to be combined into a first combined light beam for being output from the common optical port. The common optical port receives a compound optical signal that passes through the first polarization beam splitter member to be split into another two linearly polarized light beams that are combined into a second combined light beam for being output.

The application discloses a Stokes parameter encoder, which comprises a fiber optical circulator and an optical path round trip path; a polarization maintaining fiber Faraday rotator is arranged on the optical path round trip path to rotate the polarization of light by 45 degrees; the fiber optical circulator is a polarization maintaining fiber optical circulator; the fiber optical polarization beam splitter is a polarization maintaining fiber optical polarization beam splitter; the delay fiber is a polarization maintaining delay fiber; and the fiber optical phase modulator is a polarization maintaining fiber optical phase modulator. The application further discloses a parameter encoding method of the encoder. The above technical scheme can perfectly offset the rotation angle deviation problem caused by the device, can guarantee the stability of the rotation angle regardless of the angle deviation of the device, is easy to realize the driving circuit, is easy to integrate and small in size due to the pure fiber structure, and can realize the continuous variable quantum key distribution of the complete GG02 protocol based on the Stokes encoder.

This application provides an identification device and method for soybean grain screening equipment in soybean milk production. The device scans and images the soybean surface. A polarization beam splitter in the camera's optical path separates the reflected light from the soybean surface into parallel polarized light and orthogonally polarized light with mutually perpendicular polarization directions, acquiring parallel and orthogonal polarized images. The parallel and orthogonal polarized images are adaptively fused to generate a polarization-fused image that suppresses surface reflection interference and enhances structural information. Texture periodic features characterizing the regularity of the soybean skin texture and distortion energy features characterizing the degree of surface undulation are extracted from the polarization-fused image. The texture periodic features and distortion energy features are input into a pre-constructed feature discrimination model for defect identification. Based on the defect identification results, it is determined whether defects exist on the soybean surface. Using the scheme of this application, polarization-fused imaging can suppress surface reflection interference, thereby improving the accuracy of soybean surface defect detection.

A lightguide-based display system includes a lightguide (82). An image projector (50, 50', 52, 58, 60, 62, 64, 130, 150) is coupled to the lightguide (82) and includes: at least one active¬ pixel array (70); a polarizing beam splitter (PBS) (76); first reflective back-collimating optics (80a); and second reflective back-collimating optics (80b). The PBS (76) splits the unpolarized image light from the active-pixel array (70) and recombines reflected polarized images from the back-collimating optics (80a, 80b) to inject a superposition of the images into the lightguide (82) as a mixed polarization image.

The method comprises the following steps: constructing a xenon density measurement light path by taking laser which is in frequency resonance with xenon molecules as a light source, dividing the laser output by the light source into a beam of horizontal line polarized light and a beam of vertical line polarized light through a half-wave plate HWP1 and a polarization splitting prism PBS1, wherein the horizontal line polarized light continuously passes through the half-wave plate HWP2 and the polarization splitting prism PBS2 to obtain two beams of low-power vertical line polarized light and high-power horizontal line polarized light which are perpendicular to each other in polarization direction, the low-power vertical line polarized light enters the xenon chamber as a detection field, and the high-power horizontal line polarized light enters the xenon chamber as a pumping field; the directions of the detection field and the pumping field entering the xenon chamber are opposite and collinear, and the density of xenon to be measured is indirectly measured by acquiring the xenon absorption spectrum in the xenon chamber, so that the on-orbit xenon residual amount is obtained.

The application discloses a vortex light interference device and method for measuring three-dimensional vibration and sound field rotation characteristics, wherein a helium-neon laser emits laser light, the laser light passes through a half-wave plate and a first polarization beam splitter prism, and is divided into object light and reference light; the object light passes through a first spiral phase plate and becomes vortex object light, the vortex object light passes through a second polarization beam splitter prism, a quarter-wave plate, and a beam expander lens, and is irradiated on a test sample surface, reflected light of the sample surface passes through the beam expander lens, the quarter-wave plate, the second polarization beam splitter prism, a beam splitter prism and a focusing lens, and is irradiated on a photodetector; the reference light passes through an acousto-optic modulator to generate frequency modulation, passes through a mirror and a second spiral phase plate to become frequency-modulated vortex light, and the vortex light passes through a beam splitter prism and a focusing lens and is irradiated on the photodetector; a computer calculates and demodulates frequency-modulated signals of the photodetector and modulation signals of the acousto-optic modulator, and finally obtains three-dimensional vibration information and sound field rotation characteristics of the sample.