An illumination apparatus for using a beam emitted from a light source to illuminate an object area includes a condensing optical system for condensing the beam emitted from the light source, and a reflection type optical integrator located between the condensing optical system and the object area, the optical integrator having an m-gonal (where m is an even number) sectional shape, forming multiple pairs of opposing reflection surfaces, and reflecting the beam between the multiple pairs of opposing reflection surfaces, wherein a length L in an axial direction of the reflection type optical integrator meets the following equations: R=Φ/[tan {sin−1(sin θ/n)}]; and C×(A−0.1)×R≦L≦C×(A+0.1) X R, where n is a refractive index of a medium between the reflection surfaces, Φ is a distance between the reflection surfaces, θ is an angle of divergence when the beam emitted from the condensing optical system enters the reflection type optical integrator, C is a constant determined in relation to the sectional shape of the reflection type optical integrator, and A is a natural number.