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78 results about "Planar substrate" patented technology

Planar Substrate, Window Board. A substrate for polishing and processing of optical glass with high precision, with increased surface accuracy and parallelism.

COMPACT INDUCTIVE BUILDING ELEMENTS

Compact inductive devices are disclosed herein. According to certain embodiments, a compact inductive device comprises a ferrite core, a ferrite body, and a first conductive column and a second conductive column, each extending from a lower surface of the ferrite body to an upper surface of the ferrite body. Furthermore, the compact inductive device comprises a planar substrate coupled to the upper surface of the ferrite body. The planar substrate includes wiring that electrically connects the first conductive column to the second conductive column.
Owner:ANALOG DEVICES INC

Crystal oscillation chip

A crystal oscillation chip including a casing and a crystal oscillation piece is provided. The crystal oscillation piece is disposed in the casing. The crystal oscillation piece includes a flat substrate, two electrodes and two conductive silver glues, the two electrodes are respectively disposed on two opposite main surfaces of the flat substrate. The flat substrate includes at least one notch. The notch is disposed at a side surface of the flat substrate and is recessed along a direction vertical from the side surface and toward an interior of the flat substrate. A height of the notch is the same as a thickness of the flat substrate, and two conductive silver glues connect the flat substrate and the casing.
Owner:TXC CORP

Roof Repair Apparatus and Method

A method for repairing a roof includes identifying a compromised shingle having a void. The method includes disconnecting at least a portion of the compromised shingle from an overlapping shingle that overlaps at least a portion of the compromised shingle by breaking a length of a bond that connects the compromised shingle to the overlapping shingle that is proximate the void. The method includes inserting at least a portion of a patch between the compromised shingle and the overlapping shingle to cover the void, in which the patch includes a generally planar substrate and a patch adhesive. The method includes applying a generally downward force to a portion of at least one of the patch or the overlapping shingle to urge at least a portion of the patch adhesive into the void to seal the void.
Owner:WIENER GREGORY M MR

A method for preparing composite coatings on small workpieces based on substrate coating and subsequent molding

This invention discloses a method for preparing a composite coating on small workpieces based on substrate plating followed by forming, belonging to the field of material surface treatment technology. The method includes sequentially executed steps of substrate preparation, overall plating, precision forming, and post-processing. The substrate preparation step provides a large-size planar substrate much larger than the target workpiece. The overall plating step prepares a uniform metal-based composite coating containing second-phase reinforcing particles on the substrate surface. The precision forming step processes the plating substrate into multiple target small workpieces. This invention abandons the traditional process of forming first and then plating, fundamentally solving the problems of floating and displacement, uneven particle distribution, low clamping efficiency, and large obstruction by fixtures during the plating of small workpieces. The resulting coating exhibits good uniformity and enables efficient mass production of small workpieces.
Owner:HEBEI HUABEI DIESEL ENGINE

Micro-channel gas-liquid two-phase discharge nitrogen fixation device

The application provides a micro-channel gas-liquid two-phase discharge nitrogen fixation device, which comprises a gas supply system and a liquid supply system, further comprises a micro-fluid chip and a dielectric barrier discharge system, the micro-fluid chip comprises a planar substrate and a transverse channel and a longitudinal channel which are arranged in communication along the planar substrate and are connected with the gas supply system and the liquid supply system respectively, wherein the gas-liquid two-phase forms a two-phase region in the longitudinal channel, and the dielectric barrier discharge system comprises a positive electrode and a negative electrode which are superimposed on the micro-fluid chip along the two-phase region to form an electric field. The micro-channel discharge of the application greatly improves the DBD discharge energy density and promotes the nitrogen dissociation; the micro-channel generates a stable gas-liquid two-phase flow pattern, strengthens the interface reaction and mass transfer between the plasma gas bubble group and the liquid phase, promotes the reaction equilibrium to move to the nitrogen fixation direction, so as to realize the improvement of the plasma nitrogen fixation energy efficiency.
Owner:UNIV OF SCI & TECH OF CHINA

Assay device and method of use thereof

An assay device as well as a method of use thereof is described. The assay device includes a planar substrate having a top surface and a bottom surface. The assay device further includes one or more flow channels disposed within the planar substrate and extending along a dimension of the planar substrate between the top surface and the bottom surface. The assay device further includes an inlet fluidly coupled to the one or more flow channels and one or more vents fluidly coupled to the one or more channels which are operable to facilitate flow of a liquid sample, such as whole blood through the one or more channels. The one or more flow channels are configured to receive a liquid sample from the inlet and allow flow of the liquid sample.
Owner:TRUVIAN SCIENCES INC

Interior rearview mirror assembly for vehicle

A vehicular interior rearview mirror assembly includes a mirror head having a mirror casing and a mirror reflective element. The mirror casing includes a sidewall having an outer end region that circumscribes an open portion of the mirror casing. The mirror reflective element is disposed at the outer end region of the sidewall at the open portion of the mirror casing. The mirror reflective element includes at least a first glass substrate having a front surface and a rear surface and a substrate thickness spanning between the front surface of the first glass substrate and the rear surface of the first glass substrate. A circuit element is disposed within the mirror head. The circuit element includes a planar substrate having circuitry thereat. A plane of the planar substrate of the circuit element is non-parallel to a plane of the rear surface of the first glass substrate.
Owner:MAGNA MIRRORS OF AMERICA INC

Preparation method and application of thin-film lithium niobate / lithium tantalate photoelectric device

PendingCN121510694AWaferPlanar substrate
The invention discloses a preparation method and application of a thin-film lithium niobate / lithium tantalate photoelectric device, and belongs to the technical field of manufacturing of photoelectric devices. The preparation method comprises the following steps: providing a wafer, wherein the material of the wafer is selected from lithium niobate and / or lithium tantalate; preparing at least one layer of silicon nitride optical waveguide structure on one surface of the wafer, wherein the silicon nitride optical waveguide structure is formed by a deposited silicon nitride film through micro-nano processing preparation; bonding one surface, with the silicon nitride optical waveguide structure, of the wafer on a planar substrate; and sequentially performing grinding thinning, ion modification and polishing on one surface, deviating from the silicon nitride optical waveguide structure, of the wafer to form a thin film wafer. According to the method, an efficient and high-quality processing mode is provided for manufacturing of related photoelectric devices, ferroelectric material etching and ion implantation processes are avoided, the performance of thin-film lithium niobate and lithium tantalate photoelectric devices can be effectively improved, and the method has the advantages of being simple in process, excellent in performance, economical in manufacturing and wide in application prospect.
Owner:YONGJIANG LAB

A semiconductor device and a method of manufacturing such semiconductor device

The disclosure pertains to a semiconductor device and a method of manufacturing such device, having a layered structure comprising a planar substrate (100) having a first substrate surface (110) and a second substrate surface (120) opposite to the first substrate surface, a first electrode (210) and a second electrode (220) positioned spaced apart from each other on the first substrate surface thereby exposing an exposed part of the first substrate surface. The semiconductor device further comprises a passivation layer (300) positioned on the exposed part of the first substrate surface and at least partially positioned on the first electrode and second electrode and having a planar top surface opposite to the first substrate surface, wherein partially on the passivation layer and on at least one of the first electrode and the second electrode a top metal layer (400) is provided, wherein the passivation layer comprises a first passivation sublayer (310) positioned on the exposed part of the first substrate surface, and a second passivation sublayer (320) positioned on the first passivation sublayer, such that at least a part of the first passivation sublayer is exposed (311) thereby causing an interruption of electrical conductivity between the first electrode and the second electrode.
Owner:NEXPERIA BV +1

Blade antenna system

One embodiment includes a blade antenna system. The system includes a ground plane and a planar substrate material extending orthogonally from the ground plane. The system also includes conductive material coupled to the planar substrate material in a coplanar or parallel manner. The conductive material can correspond to a radiating conductor. A portion of the planar substrate material between an edge of the conductive material and the ground plane can form a notch. The system further includes a magneto-dielectric material (MDM) arranged parallel with the planar substrate material to cover the notch.
Owner:NORTHROP GRUMMAN SYSTEMS CORP

Light path structure and electronic equipment

The invention provides an optical path structure and electronic equipment, and relates to the technical field of optical signal communication. The optical path structure comprises an optical chip, a circuit base plate and a substrate. The circuit base plate is provided with a window area; the active surface of the optical chip is welded at the edge of the window area on the circuit bottom plate, and the optical chip is electrically connected with the circuit bottom plate; in the arrangement direction perpendicular to the plane of the circuit base plate, part of the optical waveguide on the end face of the optical chip is located in the projection area of the window area. Wherein the signal transmission direction of the optical chip is parallel to the plane of the circuit base plate; the target surface of the substrate is bonded and fixed on the bottom surface of the optical chip. According to the invention, the optical chip is inversely welded on the edge of the window area of the windowing on the circuit base plate, so that part of the optical waveguide can perform signal transmission in the window area in the plane direction of the circuit base plate, thereby reducing the space size required in the setting direction when the grating coupler is used for coupling, effectively improving the integration level of the device, and improving the reliability of the device. And the integration difficulty of the device is reduced.
Owner:XPHOR LTD

Electrode device for electric discharge machining and electric discharge machining device

The present application relates to an electrode device for electric discharge machining and an electric discharge machining device. The electrode device for electric discharge machining comprises a planar substrate, a first electrode plate attached to one of two opposite sides of the planar substrate, the first plate shape having at least one edge, a first electrode provided on a radially outer side of the at least one edge facing the first electrode plate, the first electrode having a first electrode shape matching a shape of a first machining feature of a workpiece to be electric discharge machined, and a second electrode plate attached to the other of the two opposite sides of the planar substrate, the second plate shape having at least one edge, a second electrode provided on a radially outer side of the at least one edge facing the second electrode plate, the second electrode having a second electrode shape matching a shape of a second machining feature of the workpiece. The technical solution improves the electrode structure and allows simultaneous machining of multiple workpieces.
Owner:SIEMENS GAS TURBINE COMPONENTS (JIANGSU) CO LTD

Passive measurement type magnetic navigation system and method based on magnetic source imaging

The invention discloses a passive measurement type magnetic navigation system and method based on magnetic source imaging, and belongs to the technical field of medical equipment. The system comprises a sensor array for detecting and feeding back magnetic field changes in an environment; the magnetic sensor array adopts a modular expansion design, a detection curved surface is formed by a plurality of magnetic sensing units, and each magnetic sensing unit comprises a planar substrate, a magnetic sensor chip and a slave MCU assembly; the adjacent magnetic sensing units are connected through the adjustable connecting mechanisms, and the included angle between the adjustable connecting mechanisms can be flexibly adjusted and locked within a certain range, so that the whole magnetic sensor array is adaptive to detection surfaces with different curvatures; the overall structure supports modular expansion, the number of the magnetic sensing units is increased or decreased according to actual detection requirements, and detection arrays of different scales and shapes are flexibly constructed; according to the invention, an accurate magnetic dipole model and a high-robustness pose resolving method are established, and millimeter-level and real-time three-dimensional tracking of the surgical instrument is realized.
Owner:BEIHANG UNIV

Planar optical metalens and optical connector comprising same

An optical metalens includes a planar substrate, a plurality of nanostructures extending from a surface of the planar substrate, and a cladding extending from the surface of the planar substrate and encompassing the plurality of nanostructures. A cladding thickness is greater than the nanostructure height of each nanostructure of the plurality of nanostructures and a planar cladding surface opposite the planar substrate. The cladding thickness and at least one of a nanostructure dimension and a nanostructure height of each nanostructure of the plurality of nanostructures are configured such that the optical metalens imparts a target phase to light passing through the optical metalens and the optical metalens includes a transmittance greater than or equal to 80% at a wavelength of the light greater than or equal to 800 nm and less than or equal to 1600 nm.
Owner:CORNING INC

Method of manufacturing thin film devices

A method of concomitantly manufacturing at least two thin-film devices is provided, the method comprising: applying a solution on a first surface of a first planar substrate; positioning a second surface of a second planar substrate proximate to the first surface of the first planar substrate to provide parallelly disposed adjacent substrates, such that the first surface and the second surface are in contact with the solution; sliding the parallelly disposed adjacent substrates over one another such that the solution is drawn over the first surface and the second surface, which when the parallelly disposed adjacent substrates slide passed one another, provide a first coating on a first surface and a second coating on the second surface; and drying the first coating and the second coating, thereby concomitantly manufacturing at least two thin-film devices.
Owner:SOLAIRES ENTREPRISES INC +1

Dimensionally stable, wipe-on, semi-crystalline-polyester-based adhesive compound

The present invention relates to a dimensionally stable adhesive compound which is formulated so as to be largely water- and solvent-free and can be brought into contact with the substrate to be bonded by being wiped on in the form of a thin adhesive film that is suitable in particular for bonding materials obtained from plant fibers. The organic constituent of the adhesive compound according to the invention consists predominantly of polyester polyurethanes, at least some of which are based on semi-crystalline polyester polyols. The invention also relates to a method for applying a tacky film to a planar substrate, preferably to paper, by wiping the adhesive compound onto the point of contact with the substrate.
Owner:HENKEL KGAA

Circular multipass cells and methods of manufacture thereof

A method of manufacturing a segmented circular multipass cell. Starting from a planar substrate (20) with upper and lower surfaces (22, 24) surface structure is applied by one or more of moulding, milling, etching, die-sinking, and machining. A first surface structure forms a plurality of parallel grooves (25) in the planar substrate (20) which subdivide the substrate into segments (12) and allow the substrate (20) to be rolled up into a closed polygonal form by hinging along the grooves (25). A second surface structure provides respective ones of the segments (12) with mirror-shaped surfaces (15) which face inwards when the substrate (20) is rolled up. The mirror-shaped surfaces (15) are processed into high-reflectivity mirrors (14) while the substrate is planar, i.e., before it is rolled up, thereby enabling convential mirror manufacturing processes to be applied, such as deposition of metal or dielectric coatings and polishing.
Owner:EIDGENISSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT EMPA

Sensor having contoured membrane

PendingUS20260202376A1Planar substrateSurface membrane
A sensor is provided and includes a substrate, a patterned electrode, and a membrane material. The patterned electrode is deposited on the substrate and has a conductive surface. The membrane material is deposited on the conductive surface of the patterned electrode and not on the planar substrate. The membrane material forms a three-dimensional membrane layer that covers the conductive surface of the patterned electrode.
Owner:PROTON INTELLIGENCE INC

Hybrid material pad

A hybrid material mat (110, 111) for use in the manufacture of fibre composite articles, particularly for use in parts of wind turbine blades (10), is described. The mat (110, 111) comprises a plurality of glass fibre rovings (112) provided on top of a relatively thin planar substrate of carbon fibres (114). The hybrid mat (110, 111) construction provides improvements in the structural properties of components manufactured using the mat (110, 111), and allows ease of handling and manufacture of both the mat (110, 111) itself and the components.
Owner:LM WP PATENT HLDG AS

Designs for improved antenna array element isolation

Techniques are provided for improving antenna isolation and angle-of-arrival (AoA) performance of an antenna array. An example antenna array includes a plurality of patch antenna elements disposed on a planar substrate, and one or more resonator elements disposed on the planar substrate and between each of the plurality of patch antenna elements, wherein each of the one or more resonator elements includes a first repeating S-shaped conductor in a first orientation, and a second repeating S-shaped conductor in a second orientation that is rotated 180 degrees relative to the first orientation.
Owner:QUALCOMM INC

Reusable shingle carry and storage container

A shingle carry and storage container is constructed of a single piece of flexible continuous and contiguous planar substrate having a pair of opposed long sides and a pair of opposed short sides to form a generally rectangular shape. A plurality of spaced parallel longitudinal creases are provided in the substrate that define a rear end panel, a top panel, a bottom panel, a bottom front panel, and a top front panel. Furthermore, a pair of opposed parallel side creases in the substrate spaced from the short sides normal to the longitudinal creases define a pair of opposed side panels having tabs on the ends for folding over and assembling the container.
Owner:HIHN DERICK E +1

Layered flexible barrier material and preparation method through interface assembly

The invention relates to the field of functional material preparation, and discloses a layered flexible barrier material and a preparation method thereof through interface assembly. The method comprises the following steps: placing a planar substrate in a polymer oil phase solution, then directly entering a nano clay water phase solution from the polymer oil phase solution, and forming a Janus composite film on the surface of the planar substrate; the polymer oil phase solution comprises a protonated functional polymer and a coating polymer; the above repeated operation is carried out on the plane base material with the Janus composite film formed on the surface, the Janus composite film formed firstly is annealed before each repeated operation, and then surface crosslinking is carried out on the Janus composite film. According to the invention, the Janus composite film is used as a construction element, and the polymer / nano-clay composite material is constructed layer by layer after annealing and surface crosslinking treatment, so that the flexibility of a polymer matrix is greatly retained, and the gas barrier property is improved.
Owner:HUAZHONG UNIV OF SCI & TECH

Electronic following type laser unit and detection device

The invention discloses an electronic following type laser unit which comprises a rotating disc, a transmitting / receiving end, a substrate, a transmitting / receiving control panel, a rack and a driver. The rotating disc is driven by an azimuth driver to rotate by 360 degrees, and a central hole is provided with a connecting device with a shaping unit; the transmitting / receiving end comprises a primary mirror, a reflecting mirror, a pitching driver and a substrate, and the pitching driver drives the primary mirror to deflect. The mm laser emission heads / detectors on the substrate are arranged in a circumferential array, the installation shaft of the concave spherical substrate device faces the center of the sphere, and the plane substrate is provided with the spherical lens. The transmitting / receiving control panel controls the device to be lightened / operated to form a dynamic array rotating around the axis of the shaping unit, the arrangement direction is matched with the deflection angle of the primary mirror, efficient scanning can be realized without mechanically rotating the array, the structure is reliable, and the device is suitable for airspace detection and other scenes.
Owner:南京瑞思光电技术有限公司 +2

A system and method for conversion of low-grade thermal energy into electrical energy

PCT designated stageWO2026047690A1Dynamo-electric machinesEpoxyPlanar substrate
The present invention provides a system / device and method thereof which uses electrical and magnetic fields for conversion of energy from one form to another and more particularly to a system and method thereof, for conversion of low-grade thermal energy into electrical energy independently or in connection with a multiple such units. The system / device and method thereof of the present invention comprising of a MHD cell comprising an epoxy casing, a first ring type permanent magnet and a second ring type permanent magnet, a liquid entry side planar substrate, a liquid exit side planar substrate, a liquid entry pathway and a liquid exit pathway and a plurality of separators.
Owner:MEHENDALE GIRISH VASANT

Flat spiral gas chromatography column

A flat spiral microfabricated gas chromatography column is formed by etching a spiral channel into a planar substrate and bonding additional substrates to each side thereof. Holes or vias in these substrates form an entrance and an exit to the spiral channel etched in the middle substrate. More than one spiral may be etched into a substrate and more than one entrance and exit may be etched into the top and bottom substrates to provide an entrance and an exit to the spiral channel. The spiral channel may have an etched width that is wider than the substrate is thick. In this fashion, a high aspect ratio column is formed with the channel width defining the long dimension of the high aspect ratio column and the thickness of the substrate defining the short dimension of the high aspect ratio column.
Owner:ASTROTECH TECHNOLOGIES INC

Flexible electrode and preparation method thereof

According to the flexible electrode provided by the invention, the hydrophobic layer is formed on the special-shaped substrate and the substrate with the contact angle range of 24.1-55 degrees with the silver nanowire dispersion liquid, then the silver nanowire dispersion liquid is uniformly dispersed, the flexible electrode with a honeycomb microstructure is formed, no cross point exists between the silver nanowires, and the flexible electrode has good electrochemical performance. The flexible electrode is prepared on the curved surface or non-centrosymmetric planar substrate by the silver nanowires, and the electrothermal stability of the flexible electrode is greatly improved.
Owner:SHANDONG UNIV

Structured substrate, method for manufacturing the structured substrate, and use of the structured substrate

The invention relates to a structured substrate, preferably for applications in micro systems technology, such as for micro optical systems, comprising: a planar substrate, preferably comprising glass material, and having two opposing planar surfaces, at least one through-hole extending through the material of the planar substrate forming an inner wall surface surrounding the through-hole and connecting the two opposing planar surfaces, and a light absorbing and / or reflecting coating covering at least some areas of the inner wall surface of the through-hole. The invention further relates to method of manufacturing said structured substrate and to use of said structured substrate.
Owner:SCHOTT AG +1

Liquid crystal metasurface composite variable blazed angle grating and spectrometer

This invention belongs to the field of spectral analysis technology and relates to a liquid crystal metasurface composite blazed angle grating and a spectrometer. The liquid crystal metasurface composite blazed angle grating includes a planar substrate, a photo-alignment layer, and a liquid crystal layer stacked sequentially from bottom to top. The photo-alignment layer uses a photosensitive alignment material, and when irradiated by polarized light, its surface forms a molecular alignment pattern matching a preset composite phase distribution. The liquid crystal layer uses a high birefringence nematic liquid crystal material, and its internal liquid crystal molecules are arranged under the control of the molecular alignment pattern of the photo-alignment layer to form a liquid crystal metasurface structure matching a preset composite phase distribution. When composite light passes through the planar substrate and irradiates the liquid crystal metasurface structure, the liquid crystal molecules generate differentiated phase modulation of incident light of different wavelengths according to the gradient of the preset composite phase distribution, so that incident light of different wavelengths is diffracted and deflected at different angles, simultaneously realizing the dispersion and focusing imaging of composite light, thereby forming a spectrum.
Owner:SUZHOU UNIV

Display device

This invention provides a technology that reduces user discomfort with light emanating from pixels in a display device capable of displaying different images from multiple viewpoints. [Solution] The display device includes a quasi-planar substrate including a flat or curved surface; a group of pixels including a plurality of display pixels at different positions in a first direction parallel to the tangent plane of the substrate; a first lens element configured to refract light incident from a plurality of the display pixels of the pixel group in a third direction perpendicular to the tangent plane of the substrate in separate directions within a plane including the first and third directions; and a second lens element configured to refract light incident from the display pixels in the third direction within a plane including a second direction and a third direction that intersect the first direction at a specific angle within the tangent plane of the substrate.
Owner:DUAL MOVE CO LTD

ROBOT SYSTEM WITH DETERMINATION SYSTEM FOR ADDITIONAL MEASURING TECHNOLOGY POSITION COORDINATES

Robot system that includes the following an articulated robot arm (110) which includes a first arm section (120) which is mounted on a first rotary joint (125) at a near end (PE1) of the first arm section (120), wherein the first rotary joint (125) has an axis of rotation (RA1) that is aligned along a z-axis direction, such that the first arm section (120) moves about the first rotary joint (125) in an xy-plane that is perpendicular to the z-axis, wherein the first arm section (120) has a second pivot connection (135) located at a remote end (DE1) of the first arm section (120), wherein the axis of rotation (RA2) of the second rotary joint (135) is essentially aligned along the z-axis direction; a second arm section (130) which is mounted on the second pivot point (135) at a near end (PE2) of the second arm section (130), such that the second arm section (130) moves about the second pivot point in an xy-plane which is substantially perpendicular to the z-axis; and a motion control system (140) configured to control an end tool position (ETP) of an end tool (ETL) with an accuracy level defined as robot accuracy, based at least partially on sensing and controlling the angular positions of the first and second arm sections (130) to control the first and second rotary joints, respectively, using position sensors (SEN1, SEN2) incorporated in the articulated robot (110); and a determination system (150) for additional measurement position coordinates, which in turn comprises the following a first image acquisition configuration (160) comprising a first camera (CAM1), wherein the first image acquisition configuration (160) has an optical axis (OA1) that is substantially parallel to the z-axis and has a focus area along its optical axis (OA1); an XY scale (170) comprising a substantially planar substrate (SUB) oriented substantially perpendicular to the z-axis and several corresponding mapping features (IIF, AIF) distributed on the substrate (SUB), wherein the corresponding mapping features (IIF, AIF) are located at corresponding known XY scale coordinates on the XY scale (170); an image trigger section (181) configured to input at least one input signal belonging to the end tool position (ETP) and to determine the time of a first image acquisition trigger signal based on the at least one input signal and to output the first image acquisition trigger signal to the first image acquisition configuration (160), wherein the first image acquisition configuration (160) is configured to acquire a digital image of the XY scale (170) at an image acquisition time in response to receiving the first image acquisition trigger signal, and a metrology position coordinate processing section (190) configured to input the captured image and to identify at least one corresponding mapping feature (IIF, AIF) of the XY scale (170) contained in the captured image and the associated corresponding known XY scale coordinate location, wherein the determination system (150) for additional measurement position coordinates is configured such that one movable element from the XY scale (170) or the first image acquisition configuration (160) is coupled to the second arm section (130) near the remote end (DE2) of the second arm section (130) and the other is coupled to a stationary element (STE), wherein the location of the XY scale (170) along the z-axis is within the focus area of ​​the first image acquisition configuration (160) and the stationary from the XY scale (170) or the first image acquisition configuration (160) defines a first reference position (REF1); the determination system (150) for additional metrology position coordinates is configured such that the metrology position coordinate processing section (190) is configured to determine a relative position between the movable from the XY scale (170) or the first image acquisition configuration (160) and the first reference position (REF1) with an accuracy level better than the robot accuracy, based on determining an image position of the identified at least one corresponding imageable feature (IIF, AIF) in the acquired image; and the specific relative position specifies the metrology position coordinates of the end tool position (ETP) at the time of image acquisition with an accuracy level that is better than the robot accuracy, at least for x and y metrology position coordinates in an xy plane that is perpendicular to the z-axis.
Owner:MITUTOYO CORP