The invention discloses a Ka
wave band four-channel transceiving SiP module based on
silicon-based packaging and a manufacturing method thereof, the SiP module adopts a
silicon-based packaging material and comprises an upper layer sub-packaging and a lower layer sub-packaging, and the upper layer sub-packaging and the lower layer sub-packaging are vertically interconnected through a
ball grid array (BGA); the lower-layer sub-
package comprises three
layers of
silicon adapter plates with a first thickness, a cavity for mounting a three-port
transceiver chip is etched on the middle-layer silicon adapter plate, and a TSV with a first
diameter is manufactured on each layer of silicon adapter plate; the upper layer sub-
package comprises three
layers of silicon adapter plates, the upper layer silicon adapter plate and the lower layer silicon adapter plate have a first thickness and are provided with TSVs with a first
diameter, the middle layer silicon adapter plate is etched with a cavity used for mounting a silicon-based amplitude-phase multifunctional
chip and a power supply modulation
chip, the middle layer silicon adapter plate has a second thickness and is provided with TSVs with a second
diameter, and the middle layer silicon adapter plate is etched with a cavity used for mounting a silicon-based amplitude-phase multifunctional chip and a power supply modulation chip. Wherein the second thickness is greater than the first thickness and the second diameter is greater than the first diameter. According to the invention, the requirements of
miniaturization, integration and high performance of a
radar system can be met.