The invention discloses a
semiconductor chip, a preparation method of a
metal interconnection layer and the
metal interconnection layer. The
semiconductor chip comprises a
semiconductor substrate, and a plurality of device structures are formed on the semiconductor substrate; the
metal interconnection layer is located above the semiconductor substrate and used for connecting a plurality of device structures, and the metal interconnection layer at least comprises a first
titanium layer located above the semiconductor substrate, a second
titanium layer located above the semiconductor substrate and a third
titanium layer located above the semiconductor substrate; a first
titanium nitride layer over the first titanium layer; a metal layer over the first
titanium nitride layer; the at least two groups of composite barrier
layers are positioned above the metal layer; each group of composite barrier
layers comprises a second titanium layer and a second
titanium nitride layer located above the second titanium layer; the thickness of the second titanium
nitride layer in each group of composite barrier
layers is smaller than a first preset thickness; and the sum of the thicknesses of the second titanium
nitride layers in each group of composite barrier layers is equal to or greater than a second preset thickness. According to the
semiconductor chip, the metal residue defect on the surface of the semiconductor substrate is reduced while the thickness requirement is met.