The invention provides a terahertz
photoconductive antenna and a manufacturing method thereof. A
germanium-carbon functional layer and a first bonding layer are sequentially formed on a
semiconductor substrate,
a diamond substrate is provided, a second bonding layer is formed on the
diamond substrate, the
semiconductor substrate is turned to enable the first bonding layer to face the second bonding layer, and the
semiconductor substrate and the
diamond substrate are bonded. The semiconductor substrate is removed, an
electrode is formed on the
germanium-carbon functional layer, and therefore manufacturing of the terahertz
photoconductive antenna is achieved, the substrate of the formed terahertz
photoconductive antenna is the
diamond substrate, the overall temperature of a terahertz device is effectively reduced, the
thermal breakdown risk of the terahertz device is reduced, and the reliability of the terahertz device is improved. In addition, due to the
germanium-carbon functional layer, the terahertz device has the advantages of higher carrier mobility, wider
band gap, better heat
conductivity, higher
radiation resistance and the like, the germanium-carbon functional layer is initially formed on the semiconductor substrate and then transferred to the
diamond substrate, the germanium-carbon functional layer has
large size and extremely high film forming quality, and the performance of the terahertz device is improved.