The invention discloses a minority
carrier lifetime detection method, and relates to the technical field of
semiconductor detection, and the method comprises the following steps: S1, preparing a
test sample; s2, modulating an obtained photoconductive
signal on a 10-10.5 GHz high-frequency carrier wave through
capacitive coupling between a sample and an
electrode; s3, taking out the photoconductive
signal; s4, loading two ends of the sample with a high-frequency power supply of 25-35MHz; s5, irradiating the sample with
laser with the
wavelength of 904 nm to modulate high-frequency signals at the two ends of the sample; s6, after 3-5 min, illumination is stopped; s7, increasing a photoconductive attenuation
signal; and S8, measuring the minority
carrier lifetime of the sample through the
attenuation curve. According to the method, in order to improve the test effect, a photoconduction signal is increased between a sample and an
electrode, so that the detection accuracy of the method is improved,
xenon lamps are used as light sources in optical systems of the method and a direct-current photoconduction recession method, but a
cold cathode thyratron is used for
gate control, and the detection accuracy of the method can be further improved.