This invention discloses an N-type
silicon carbide-based reverse-blocking double-ended
solid-state
thyristor and its preparation method. The N-type
silicon carbide-based reverse-blocking double-ended
solid-state
thyristor comprises: N +
Silicon carbide substrate, and sequentially N +
Silicon carbide P epitaxially grown on a
silicon carbide substrate +
Anode emitter region,
silicon carbide N ‑ The drift region and the region composed of
silicon carbide P-based region and
silicon carbide N-based region + The
cathode emission region is composed of [a specific region / area]. The structure of the
cathode emission region is formed in the following manner: [the structure is formed in the silicon carbide N-type ... + Zone P + The injection window is then used for P-type
ion implantation to make the P +
Silicon carbide
cathode P is formed within the injection window. + The present invention, by limiting the specifications of the size and
doping concentration of the N-based region and through extensive testing and
verification, can, on the one hand, more easily achieve a high blocking
voltage, thereby effectively avoiding reliability problems caused by series connection; on the other hand, it helps to reduce the thickness of the device, thereby improving the on-state characteristics of the device.