The invention relates to a micro-channel type pressure vibration composite
optical fiber F-P sensor and a preparation method thereof.The sensor comprises a first structural layer, a second structural layer and a third structural layer, the third structural layer comprises a
silicon wafer, the
silicon wafer is provided with a micro-channel set, a water inlet hole and an
optical fiber channel hole, the water inlet hole penetrates through the
silicon wafer and is communicated with the micro-channel set, and the
optical fiber channel hole is communicated with the second structural layer; the second structural layer comprises a
glass sheet, a plurality of cavity holes and an optical
fiber channel groove are formed in the
peripheral edge of the
glass sheet, the optical
fiber channel groove is communicated with a part of the cavity holes, and one side of the
glass sheet is attached to one side of the silicon wafer so that one end of each cavity hole can be communicated with the periphery of the micro-channel group; one side of the silicon layer diaphragm is attached to the glass sheet, the other side of the silicon layer diaphragm is attached to the other side of the glass sheet to close the other end of the cavity hole, so that the cavity hole forms an F-P cavity, and a
mass block is attached to the interior of a part of the F-P cavity, the micro-channel group is communicated with the cavity, when water enters the micro-channel group through the water inlet hole, air in the cavity at one end of the micro-channel group is compressed, the pressure intensity is increased, and the
mass block is attached to the interior of the F-P cavity. And the internal and
external pressure difference of the cavity is reduced.