The application discloses a cold outer cylinder vacuum
leak detection device and a detection method, relates to the technical field of vacuum
leak detection, and provides the following scheme, which comprises a cold outer cylinder
assembly, a vacuum air extraction
system, a
helium supply
system, a detection
system and a
control system. The cold outer cylinder
assembly comprises a cold outer cylinder body, a
refrigeration unit and a
temperature monitoring unit, is used for regulating the temperature in the inner cavity of the cold outer cylinder body to a preset low-temperature range and collecting the inner cavity temperature data in real time. The vacuum air extraction system comprises a mechanical forepump, a molecular pump, a low-temperature adsorption trap and a vacuum valve group which are connected in sequence and is used for extracting the inner cavity of the cold outer cylinder body and the inside of the detected part to a preset vacuum degree. The application can simulate low-temperature working conditions, accurately control the temperature and does not need
refrigerant, can detect low-
temperature induced micro-leakage, reflects the actual sealing performance of the detected part, the low-temperature adsorption trap and real-time calibration ensure the detection accuracy, can detect extremely tiny leakage, can flexibly adjust the air extraction rate, accurately supply
helium and locate the leakage, and improves the
leak detection efficiency of large equipment.