The invention discloses a multi-
wavelength dynamic interferometer measurement error
correction method, and relates to the technical field of interference measurement, and the method comprises the steps: collecting a multi-
wavelength interferogram; based on ideal interference
light intensity distribution,
background light intensity fitting, removal,
light intensity adjustment distribution fitting and amplitude normalization are completed through polynomial fitting, and the problem of uneven
light intensity distribution is corrected; carrying out Lissajous figure
phase correction; adopting an AIA iterative
algorithm to extract a single-
wavelength phase, and then calculating phase information corresponding to a synthetic wavelength through a multi-wavelength synthesis
algorithm; and carrying out dimension reduction on the
surface shape data by adopting a PCA method, calculating a
mahalanobis distance and removing abnormal signals, and averaging the original
surface shape of the reserved data to obtain a final
surface shape. According to the method, a polynomial fitting and Lissajous figure fitting double correction technology and a
principal component analysis and
mahalanobis distance anomaly
elimination technology are combined as the core, the problems of phase shift errors, uneven light intensity, multi-wavelength synthesis error amplification and the like are solved in a targeted mode, and full-automatic high-precision measurement error correction is achieved.