246 results about "Beam expander" patented technology

The invention discloses a light spot adjustable optical system, a diffraction optical module and laser processing equipment, and relates to the technical field of precision processing. The optical system comprises a laser, a beam expander, a diffractive optical module and a focusing module which are sequentially arranged in the light path direction, the diffractive optical module comprises at least one diffractive optical element, and the diffractive optical element is manufactured based on a geometric phase liquid crystal polymer birefringent material. The diffractive optical module is used for regulating and controlling light spot characteristic parameters corresponding to a Gaussian beam, the Gaussian beam is emitted by the laser and enters the diffractive optical module after being expanded and collimated by the beam expander, and the light spot characteristic parameters comprise a light spot distribution position and light spot energy intensity. By the adoption of the optical system, laser energy distribution can be optimized, splashing is effectively restrained, and the welding quality and the processing efficiency are improved.

The invention discloses an optical axis calibration method and device applied to a projection illumination light path, and belongs to the technical field of optics, and the device comprises a laser which is used for transmitting an initial collimated light beam; the forward beam expander is arranged on a light emitting path of the laser and is used for expanding the initial collimated light beam to form large-aperture collimated light; the beam splitter is arranged on an emergent light path of the forward beam expander and is used for splitting the large-aperture collimated light into a reflected light beam and a transmitted light beam; the reflecting mirror is arranged in a transmission light path of the beam splitter and is used for reflecting the transmission light beam back to the beam splitter; and the reverse beam expander is arranged in a reflection light path of the beam splitter and is used for converging the reflection light beams into a point light source. According to the invention, the abstract'optical axis alignment 'problem is converted into visual'light spot superposition' judgment, the principle breakthrough from traditional indirect energy measurement to direct spatial position comparison is realized, and the calibration precision is improved.

The invention provides a measurement system, method, device and equipment, a medium and a product, and belongs to the technical field of optics. The system comprises a beam expander used for generating a first transmission light beam and a first reflection light beam when a light beam after beam expansion reaches a tested sample at a first preset position; a beam compressor; the receiver is positioned at a first position and is used for receiving the first transmission light beam to generate a first interferogram of the detected sample; the receiver is positioned at a second position and is used for receiving the first reflected light beam to generate a second interferogram of the detected sample; the first microscope objective is used for generating a second transmission light beam and a second reflection light beam by enabling the focused light beam to reach a detected sample at a second preset position; a second microscope objective; the receiver is positioned at a third position and is used for receiving the second transmission light beam to generate a third interference pattern of the detected sample; and the receiver at the second position is also used for receiving the second reflected light beam to generate a fourth interferogram of the tested sample.

The utility model provides a macro-energy laser energy measuring device, which comprises a beam expanding lens, a polarization beam splitter and two wedge-shaped mirrors which are arranged along a light beam propagation path, the polarization beam splitter is matched with the beam expanding lens to divide an expanded light beam into two polarized light beams, and the number of the wedge-shaped mirrors is two. And the two wedge-shaped mirrors are matched with the polarization beam splitter and are used for respectively splitting the two beams of polarized light in proportion and then enabling the two beams of polarized light to enter a light measurement area. According to the utility model, the PBS, namely the polarization beam splitter, is combined with the wedge-shaped mirror, so that the change of the light splitting proportion caused by the thermal depolarization effect of the high-power laser is avoided, and the influence of the polarization state change of the high-power laser under the change of the thermal effect on the measurement is reduced, thereby improving the precision of energy measurement; the light spot area is increased through the beam expanding lens, and the damage threshold is improved; according to the utility model, as the precision of energy measurement is improved, light beams can be prevented from directly hitting on the probe of the energy meter, and after the damage threshold is improved, the damage risk of an instrument is greatly reduced, the service life of the instrument is prolonged, and the measurement cost is reduced.

The invention belongs to the technical field of building tools, and discloses a grating type wall brick laser pay-off device which comprises a supporting mechanism, an adjusting mechanism is installed on the supporting mechanism, an optical mechanism is installed on the adjusting mechanism, and the supporting mechanism is used for providing stable support for the whole device and can adjust the height of the optical mechanism. The adjusting mechanism is used for achieving horizontal calibration, vertical calibration and distance calibration with a to-be-constructed wall face on the optical mechanism, and the optical mechanism is used for conducting projection on the to-be-constructed wall face to form clear and straight wall brick laying reference grid lines with the uniform distance. Through the coaxial optical design of the laser, the five-time Galileo beam expanding lens, the DOE grating and the plano-convex lens and the multi-dimensional accurate calibration of the adjusting mechanism, it is ensured that wall tiles, floor tiles and suspended ceilings are accurately crossed and jointed, internal and external corners are straight, and the pain point that traditional paying-off precision is insufficient is solved.

The invention relates to a near-to-eye display optical system based on a laser light source and an LCOS modulation module, and belongs to the technical field of near-to-eye display. The invention aims to solve the technical problems that the existing near-to-eye display scheme is difficult to overcome speckle noise, chromatic dispersion, low luminous efficiency, overlarge size and the like at the same time. The system sequentially comprises a multi-mode laser light source module used for emitting low-initial speckle contrast imaging laser beams; the optical preprocessing module comprises a collimating lens group, a beam expanding prism and a phase perturber; the LCOS modulation module is used for simultaneously carrying out amplitude modulation on the light beam according to the image signal so as to load an image and carry out phase modulation so as to adjust wavefront, and reflecting and outputting an image light beam; the coupling module is used for carrying out light path coupling on the image light beam; and the near-to-eye display module is used for transmitting and projecting an image to human eyes. The system is mainly suitable for augmented reality glasses and other head-mounted display devices, and can realize high-image-quality and miniaturized near-to-eye imaging.

The application discloses a vortex light interference device and method for measuring three-dimensional vibration and sound field rotation characteristics, wherein a helium-neon laser emits laser light, the laser light passes through a half-wave plate and a first polarization beam splitter prism, and is divided into object light and reference light; the object light passes through a first spiral phase plate and becomes vortex object light, the vortex object light passes through a second polarization beam splitter prism, a quarter-wave plate, and a beam expander lens, and is irradiated on a test sample surface, reflected light of the sample surface passes through the beam expander lens, the quarter-wave plate, the second polarization beam splitter prism, a beam splitter prism and a focusing lens, and is irradiated on a photodetector; the reference light passes through an acousto-optic modulator to generate frequency modulation, passes through a mirror and a second spiral phase plate to become frequency-modulated vortex light, and the vortex light passes through a beam splitter prism and a focusing lens and is irradiated on the photodetector; a computer calculates and demodulates frequency-modulated signals of the photodetector and modulation signals of the acousto-optic modulator, and finally obtains three-dimensional vibration information and sound field rotation characteristics of the sample.

The invention relates to a glass cutting laser light path structure which comprises a laser used for emitting laser, a first reflector, a second reflector and a third reflector which are used for reflecting the laser to a beam expander, and a fourth reflector and a fifth reflector which are used for reflecting the laser penetrating through the beam expander to a laser cutting head, each of the first reflector, the second reflector, the third reflector, the fourth reflector and the fifth reflector comprises a mounting plate, each mounting plate is connected with a right-angle base through a spring, a mounting hole for mounting a lens is formed in the center of each mounting plate, and an adjusting mechanism for adjusting the angle of the lens is arranged on each mounting plate. A worm and gear transmission structure is arranged on the basis of a traditional adjusting screw, the worm rotates by one circle, the adjusting screw rotates by one tooth, in this way, the rotating angle of the adjusting screw can be clearly known by controlling the number of turns of rotation of the worm, the moving distance of the adjusting screw can be accurately controlled, and therefore high-precision adjustment is achieved.

The application discloses a single-photon laser radar coaxial light path stray light suppression method, belongs to the technical field of laser radar detection, and is used for stray light suppression and comprising the following steps: a main control module triggers a laser to emit linearly polarized pulse light beams; the linearly polarized pulse light beams are projected to an underwater target through a beam expander, a 45-degree open hole reflector and a two-dimensional scanning galvanometer; echoes are reflected to the 45-degree open hole reflector through the galvanometer; after converging through a focusing lens group and a narrow-band optical filter, the echoes penetrate a small aperture diaphragm; closed-loop attenuation control is performed on the echoes after penetration; and a two-dimensional depth map of the underwater detection target is obtained. Through the collection of light intensity voltage changes and the cooperation of an extreme value optimization algorithm, the motor is dynamically tracked and controlled to orthogonally intercept random flares, the water surface flare and internal stray light are suppressed to a very low level, the detection capability of the system for effective echoes is improved, and the stability of target depth information extraction and two-dimensional distance reconstruction is effectively improved.

The application relates to an exposure system for exposing a three-dimensional structure on a workpiece, the exposure system is sequentially provided with a laser for emitting a laser beam, a beam expander for zooming and expanding the spot of the laser beam, an aperture for limiting the laser beam, a galvanometer for deflecting the direction of the laser beam, and a field lens group for ensuring the vertical emission of the laser beam along the advancing direction of the laser beam, the galvanometer comprises a reflecting sheet for reflecting the laser beam, the reflecting sheet can be rotated to expand the range of the laser beam emission, the range of the laser beam emission is 3mm*3mm-15mm*15mm, the exposure system can form a three-dimensional structure on the workpiece under the action of the aperture, the reflecting sheet in the galvanometer can be rotated to expand the range of the laser beam emission, so that the workpiece and the exposure system can expose multiple units without relative movement, and the exposure rate and the workpiece processing efficiency are greatly improved.

This invention discloses a beam expander lens for laser scanning projection, relating to the field of laser projection display technology. It includes a first lens group, a second lens group, a third lens group, and a fourth lens group, arranged sequentially along the optical axis. These four lens groups together form the complete lens. The first, second, third, and fourth lens groups are arranged in a positive-negative-negative-negative optical power configuration. Through innovative optical architecture and optical power allocation, a large-angle beam expander function is achieved within a space of less than 35mm in total length, greatly saving internal space. By utilizing the chromatic aberration correction capability of the first lens group and the aberration correction capabilities of the second, third, and fourth lens groups, high-contrast imaging is achieved across the entire field of view and wavelength range, with concentrated dot matrix energy, meeting the requirements of high-resolution projection.

The invention relates to an experimental device for coupling optical acting force and suspension liquid optical nonlinear measurement, which comprises a laser control module and a microscopic imaging module, and the laser control module and the microscopic imaging module are respectively arranged in two orthogonal directions of a suspension liquid; the suspension liquid is placed in a transparent sample pool; the laser control module comprises a laser, a beam expander, a focusing lens, an imaging lens and a light beam analyzer which are arranged in sequence; the sample cell is positioned between the focusing lens and the imaging lens; the microscopic imaging module comprises a light source, a lighting lens, an imaging lens and an imaging camera which are arranged in sequence; the sample cell is located between the illumination lens and the imaging lens. Compared with the prior art, the device is provided with the laser control module, so that backward acting force for inducing particles in the suspension can be formed, and meanwhile, the focusing nonlinear effect in the suspension can be researched; and the microscopic imaging module can record moving images of particles in the suspension for subsequent analysis.

The utility model discloses a laser beam expander protective cover, which belongs to the technical field of laser beam expanders, and comprises a laser beam expander body, a cover body is sleeved outside the laser beam expander body, a pipe body is fixedly connected inside the cover body, a connecting rod is inserted inside the pipe body, one end of the connecting rod is fixedly connected with a circular plate, and the other end of the connecting rod is fixedly connected with a connecting rod. According to the utility model, the cover body is sleeved outside the laser beam expander body and is matched with the pluggable cover body, so that the lens can be effectively protected when the laser beam expander is not used, the lens is prevented from being damaged due to dust, sundries and contact with foreign matters, and the normal operation of a laser processing system is ensured; meanwhile, a circular plate with cleaning cotton is arranged in the cover body and is matched with a connecting rod and a rebound mechanism, so that the surface of the lens can be conveniently cleaned, a complicated structure does not need to be disassembled, the operation is simple, the cover body can be stably fixed on the beam expander body through a fastening bolt, the protection and cleaning functions are achieved, and the practicability is high. And the use safety and the maintenance convenience of the laser beam expander are improved.

This application discloses a carbon-free laser processing system and method for metal rings. The method comprises, arranged sequentially along the optical path: a laser for emitting a first femtosecond laser beam, the first femtosecond laser beam being linearly polarized light; a beam expander for expanding the first femtosecond laser beam; a polarization control element for adjusting the polarization state distribution of the expanded first femtosecond laser beam to form a second femtosecond laser beam; a beam adjustment module for changing the transmission direction of the second femtosecond laser beam and adjusting its angle to form a third femtosecond laser beam; and a focusing module for focusing the third femtosecond laser beam to obtain a focal spot, allowing the focal spot to directly act on the metal ring for processing. This improves the processing quality, efficiency, and product quality of the metal ring, while reducing the product loss rate during processing.

The application provides a coaxial focusing system and mounting method and focusing method for laser precision machining, and the system comprises a projection imaging light path, a shooting taking light path and a laser focusing light path which are composed of a light source, a grating, a CCD, a half mirror, a lens, a full mirror, a half mirror, a laser system, a beam expander, a ceramic motor, an objective lens, a laser displacement sensor, a workpiece to be machined and a conjugate light path. The system is based on coaxial conjugate light path, combined with accurate measurement of the laser displacement sensor, overcomes the shortcomings of pure optical measurement and image comparison focusing method, realizes high-speed high-precision focusing and high-speed focus following function, and provides the best solution for laser machining of products with thickness deviation and surface deformation.

The invention discloses a geometric phase metasurface high-flux laser direct writing system and method, and the system comprises a femtosecond laser, a beam expander, a angular dispersion compensation module, a digital micromirror array, a second 4F system, a spatial light modulator, a fifth lens and an objective lens according to the light advancing direction. Wherein the spatial light modulator is used for performing phase modulation on each unit light spot from the digital micromirror array based on a loaded holographic phase diagram to form a rod-shaped light spot array, and the rod-shaped light spot array forms parallel light transmitted at different angles through the fifth lens and converges at an entrance pupil of the objective lens together. And finally, a parallel direct-writing light spot array is formed in the two-photon photoresist, and geometric phase metasurface unit structure array printing is completed. According to the system, high-flux and high-flexibility direct-writing manufacturing of the geometric phase type metasurface is finally realized.

The application relates to the technical field of spectral analysis, and discloses a fluorescence spectral analysis device and method based on a solid-state electron spin ensemble, wherein the spectral analysis device comprises a laser modulation unit, a confocal unit and a fluorescence processing unit; the laser modulation unit comprises a laser, a Griesinger-Taylor prism, an acousto-optic modulator, a beam expander, a collimating lens, a spatial light modulator, a spatial filter and a half-wave plate which are sequentially arranged; the confocal unit comprises a dichroic mirror, a focusing lens, a diamond and a microwave antenna which are sequentially arranged; the diamond has a solid-state electron spin NV color center; and the fluorescence processing unit comprises a filter group, a sleeve lens, a lens, a linear polarizer, a Bertin lens and a camera which are sequentially arranged. The application distinguishes the fluorescence generated by different axial NV color centers from the fluorescence level, and provides a thought and method for the miniaturization and bias magnetic field removal of a quantum detection device of the NV color center.

The application provides a laser hidden cutting device and a cutting method of a composite material. The laser hidden cutting device comprises a beam expander, a second reflector and a laser focusing system. A first laser beam and a second laser beam are incident into the beam expander in time. After collimation and shaping by the beam expander, the first laser beam and the second laser beam change the exit direction by the second reflector and then enter the laser focusing system. The laser focusing system forms laser focusing spots on different layers of the composite material. The first laser beam has a first wavelength, and the second laser beam has a second wavelength. The laser focusing system comprises a conical mirror and an objective lens. The objective lens is embedded in the center hollow area of the conical mirror. The objective lens is used to focus the first laser beam on one layer of the composite material, and the conical mirror is used to focus the second laser beam on another layer of the composite material. The application can meet the cutting demand of multi-layer composite materials by a single device.

The invention discloses a femtosecond laser manufacturing system and method capable of dynamically regulating and controlling a numerical aperture, and belongs to the technical field of femtosecond laser precision machining. The system comprises a femtosecond laser, a power adjusting unit, a beam expander, an aperture tunable diaphragm, a 4F imaging system, a scanning galvanometer and an objective lens which are sequentially arranged along a light path, by adjusting the clear aperture of the diaphragm, the beam diameter at the entrance pupil of the objective lens is changed in real time, so that the equivalent numerical aperture of the system is dynamically regulated and controlled. In the machining process, according to the feature size precision requirements of different areas in a three-dimensional model, the three-dimensional model is divided into high-precision machining areas, medium-precision machining areas and low-precision machining areas, different equivalent numerical aperture modes and laser parameters are matched, the diaphragm is adjusted in a linkage mode in the scanning process, and switching between the high-resolution finish machining mode and the long-focal-depth efficient machining mode is achieved. The contradiction between the machining efficiency and the resolution ratio is solved, the precision is ensured, meanwhile, the overall machining efficiency is improved by several times to dozens of times, and three-dimensional cross-scale rapid forming is achieved.

The utility model provides an alignment device for a linear polarization cylindrical mirror and a quarter-wave plate, and belongs to the technical field of optical auxiliary equipment. The alignment device comprises a laser collimating and beam expanding assembly and a laser beam expanding assembly, the AR glasses lens alignment assembly comprises a first detector and a lens group, and the lens group is located between the laser and the first detector; the image acquisition assembly comprises a second detector and a semi-reflecting and semi-transmitting reference plate, the semi-reflecting and semi-transmitting reference plate is located between the second detector and the lens group, and a quarter-wave plate and a linear polarization cylindrical mirror are sequentially placed between the lens group and the semi-reflecting and semi-transmitting reference plate; the baffle plate is arranged between the quarter-wave plate and the linear polarization cylindrical mirror; wherein the lens group is used for receiving laser emitted by the laser and transmitting the laser to the first detector and the semi-reflecting and semi-transmitting reference plate, and the first detector and the second detector are both used for receiving the laser and presenting light spots. According to the utility model, the alignment precision of the linear polarization cylindrical mirror and the quarter-wave plate can be effectively improved by using the laser and the lens.

The invention discloses a system and a method for lossless dynamic measurement of microstructure characteristics of a material surface, and relates to the technical field of optical measurement, and the method comprises the following steps: S1, placing an object to be measured on a two-dimensional stepping motor platform, and adjusting the platform to be horizontal; and starting the solid laser. According to the invention, an optical system composed of a solid laser, a beam expander, an aperture diaphragm and a spectroscope generates an accurate detection light beam, a spatial filter designed according to a confocal diffraction limit is matched to effectively suppress defocus stray light interference, and a multi-parameter fusion judgment mechanism is combined to synchronously extract a light intensity peak value and a light spot centroid offset, so that the detection accuracy is improved. The focus is judged only when the light intensity reaches the maximum value and the mass center offset is smaller than the threshold value, the positioning precision is greatly improved, Z-axis coordinate errors are dynamically corrected through real-time vibration compensation and thermal drift compensation, the problems of sample damage and optical method noise interference in traditional contact measurement are solved, and undistorted data support is provided for microstructure three-dimensional reconstruction.

The invention belongs to the technical field of optical material testing, and discloses a birefringence two-dimensional distribution testing system which comprises a laser, a polarizer, a beam expander, a 1 / 4 wave plate, a sample and a polarization camera which are sequentially and coaxially arranged from front to back in the light path direction. Light emitted by the laser generates linearly polarized light through the polarizer, the linearly polarized light is expanded to a required size through the beam expander, the 1 / 4 wave plate converts the linearly polarized light into circular polarized light, emergent light of the circular polarized light is elliptically polarized light after passing through a sample, the polarization camera measures the polarization state of the emergent light of the sample, the deflection angle reflects the refractive index principal axis direction, and the polarization degree reflects the birefringence. The optical path is simple in structure and easy to operate, and the testing efficiency can be greatly improved.

The invention discloses a method and device for modulating random polarized light through a liquid crystal spatial light modulator, and relates to the technical field of light field regulation and control. The device comprises a laser, a two-in-one optical fiber, a beam expander, a polarization beam splitter (PBS), a 1 / 2 wave plate, an optical fiber coupler, a polarization maintaining optical fiber, a liquid crystal spatial light modulator and other core components, wherein the liquid crystal spatial light modulator is reflective or transmissive. According to the method, random polarized light is divided into parallel and vertical polarized light components through a PBS, the vertical polarized light is converted by a 45-degree 1 / 2 wave plate and then is transmitted by a polarization maintaining optical fiber and is converged with the original parallel polarized light component, or the vertical polarized light is directly used for preheating a sample to be processed, and the converged single beam of parallel polarized light is modulated by a liquid crystal spatial light modulator. Single-beam modulation is achieved, high-power large light spot application is adapted, the hologram manufacturing difficulty is lowered, the light path structure is simplified, light energy loss is reduced, and the device is suitable for 3D metal printing, laser welding and other scenes.

The invention provides an SLM metal 3D printing liftable field lens adjusting device which comprises a box body, a linear guide rail sliding table is arranged on the box body, the linear guide rail sliding table is connected with a galvanometer support through a lifting adjusting assembly, a galvanometer is fixed to the galvanometer support, and a field lens is arranged at the bottom of the galvanometer. When the laser focus is adjusted, the first hand wheel part is rotated to drive the first lifting lead screw and the second sliding seat to be in engaged transmission, so that the second sliding seat and the first sliding seat slide in a lifting manner along the guide of the linear guide rail, the lifting of the galvanometer and the lifting of the field lens arranged at the bottom of the galvanometer are adjusted, and the laser focus is accurately and reliably adjusted; and finally, the first locking device is used for limiting, beam expanding devices are reduced, the cost is reduced, and the optical quality is stable and reliable.

The utility model relates to the technical field of optical fiber laser, concretely is a kind of main amplifier and high peak value double-pulse optical fiber laser, the main amplifier includes water-cooling mounting plate and the first active optical fiber, active pumping signal combiner, space isolator, beam expander lens group, reflector group, power meter that are sequentially arranged in the water-cooling mounting plate, there is quartz end cap on the output optical fiber of the active pumping signal combiner, long barrel diaphragm is provided between the reflector group, the main amplifier is located on the reflection output light path of reflector group still be provided with window piece.The utility model is through pumping signal combiner, active optical fiber, cladding light stripping area, quartz end cap height integration, greatly reduce nonlinear effect, space isolator, beam expander lens group are separated simultaneously greatly enhanced the use flexibility, and internal device can be replaced, and the scope of application is wide.

The application relates to a kind of laser beam shaping systems and methods based on optical waveguide, belong to beam shaping technology.It includes semiconductor laser from left to right sequentially arranged, fast axis collimating lens, slow axis collimating lens, beam expander system, focusing lens and optical waveguide;Fast axis collimating lens is plano-convex cylindrical lens, for collimating the fast axis direction of light beam;Slow axis collimating lens is plano-convex cylindrical lens, for collimating the slow axis direction of light beam;Beam expander system includes preceding plano-concave cylindrical lens and following plano-convex cylindrical lens, for expanding the light beam width of slow axis direction to be consistent with the light beam width of fast axis direction;Focusing lens is plano-convex lens, for focusing light beam to optical waveguide input end;The input end section of optical waveguide is rectangle, and the output end section is circular, for shaping rectangular light spot into circular light spot.In the application, light beam is transmitted in optical waveguide efficiently, and gradually shaped into circular light beam through transition structure.

A low power laser treatment device comprising at least two optical systems (20, 30), each optical system comprising a laser light source (10a or 10b), a beam expander (11 or 21) located in front of said light source, a grid arrangement of first light scattering elements (12) located on the front surface of the associated beam expander, and a housing (31, 32) surrounding the optical systems (10, 30), the housing has an opening covered by a closure member, in which second light scattering elements (13) are arranged in front of the optical system (20, 30, 40 or 50), which second light scattering elements fill the opening and comprise a grid arrangement of pyramids arranged in rows and columns, and the first light scattering elements (11) are made into pyramids, and the second light scattering elements (13) are arranged in front of the optical system (20, 30, 40 or 50). The beam expander (11, 21) and the first and second light scattering elements (12, 13) are made of a transparent material which does not affect the polarization of the light passing therethrough. The invention provides a low power laser treatment device with uniform intensity distribution.

The invention relates to the technical field of laser control methods, and discloses a laser power density self-adaptive regulation and control method and system based on target features and distances, S1, a pre-calibration stage: calibrating the sizes and forms of light spots of a variable-focus beam expander under different target distances and different target features, establishing a mapping relation graph of the target distance, the target feature and the laser power density; s2, performing power-on self-test, entering a self-test mode after starting, performing detailed calibration on the sizes and forms of light spots of the variable-focus beam expander under different target distances and different target features through a pre-calibration stage, and establishing a mapping relation graph of the target distances, the target features and the laser power density, so that the target distance and the target features can be accurately determined according to the distance and the features of the current target; the mapping relation graph is inquired, the laser output power is adjusted according to the principle that the laser power density reaching the target is basically kept unchanged, and proper laser power output can be achieved under different distances for targets made of different materials.

The invention discloses shaping laser annealing equipment and method for a silicon-based heterojunction cell, and the equipment comprises a laser, a light path and a quick connection assembly, the output end of the laser is fixedly connected with the light path, and the light path is fixedly connected with a beam expander. The diffraction optical element can be taken out during later maintenance, and maintenance is simple and convenient; during machining, the light path is adjusted, laser emitted by the laser can pass through the center of the diffraction optical element reflector, the diffraction optical element in the light path enables machining plane light spots to be distributed in a flat-topped light beam energy mode, the flat-topped light beam energy is concentrated, energy loss is reduced, ablation damage caused by too high local energy is avoided, and machining precision is improved. The resistivity is generally reduced after processing, optimal processing parameters exist, the resistivity is reduced by about 25% on the basis that the substrate and the transparent conductive film layer are not damaged by the shaping laser annealing process, and the processing efficiency and the annealing quality of the heterojunction cell are effectively improved.