The application provides a novel
plasma detection and analysis device, which comprises an
ion extraction module, a transient sampling module, a focusing module, a
quadrupole rod area and a
signal collection module, the
ion extraction module is connected to an
ion source, the transient sampling module is connected to the ion extraction module, the focusing module is connected to the transient sampling module, the
quadrupole rod area is connected to the focusing module, the
quadrupole rod area comprises two groups of electrodes, and the
signal collection module is connected to the quadrupole rod area. By adopting the same
hardware structure, three kinds of ion analysis applications are realized through different
electric field operations and
signal collection
modes; meanwhile, when
mass spectrum
energy spectrum mixed analysis is carried out, an energy selection window is not used to filter out ions with different energies, but
time of flight is used to distinguish the energy of ions; for ions with different initial energies, only those passing through the pulse gate are measured and counted, so that the measured
ion energy spectrum truly represents the
energy spectrum of ions in the
plasma, thereby obtaining the ability of simultaneously analyzing ion
mass and energy.