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173 results about "Aperture array" patented technology

An aperture array (an artist impression can be seen above) is a large number of small, fixed antenna elements coupled to appropriate receiver systems which can be arranged in a regular or random pattern on the ground.

Optical fiber hydrogen sensor based on silver film-nanowire hole array structure and preparation method thereof

The invention relates to an optical fiber hydrogen sensor based on a silver film-nanowire hole array structure and a preparation method thereof in the field of photochemical sensors. The optical fiber hydrogen sensor comprises a multimode optical fiber, and a sensing area is formed on the multimode optical fiber; the sensing area is formed by stripping a coating layer with a preset length from the multimode optical fiber, thinning the optical fiber in the area, plating a silver film on the surface of the thinned optical fiber, and adsorbing a nanowire hole array structure which is sequentially and vertically arranged on the surface of the silver film in a liquid level self-assembly manner; the nanowire hole array is of a metal-medium-metal (MIM) structure, a gold-palladium nanowire array is arranged at the bottom, an intermediate medium layer is made of aluminum oxide, and a silver film with a hole array in any shape is arranged at the top. When light is transmitted to a sensing area from a fiber core of the multimode optical fiber, the light and a metal silver film can excite a surface plasmon resonance (SPR) effect, meanwhile, an MIM structure formed by a gold-palladium nanowire, an aluminum oxide dielectric layer and a porous silver film serves as an optical coupling antenna through a local surface plasmon resonance (LSPR) effect at the edge of a top hole, and the optical coupling antenna is used for transmitting the light to the sensing area. Light energy is efficiently converged and excited in an extremely bound gap plasmon (Gap Plasmon) in an aluminum oxide dielectric layer, so that far-unconventional electromagnetic field enhancement is generated in a sensing core area, and the sensitivity of the sensor is greatly improved.
Owner:NANJING UNIV OF INFORMATION SCI & TECH

Rapid-deployment reflectarray architecture for mobile satellite communication (satcom) operations

A rapid-deployment satellite communications (satcom) terminal apparatus includes a base capable of rotation relative to a platform (e.g., a mobile platform or trailer to which the apparatus may be mounted or from which it may be detached), and a passive planar array panel comprising an array of antenna elements or apertures, the passive planar array panel pivotably and slidably attached to the base. The passive planar array panel includes a feed arm and feed antenna, the arm articulable relative to the panel and the antenna articulable relative to the arm. The feed antenna transmits and / or receives EM energy focused by the antenna elements in a beam direction adjustable by an array controller to a desired azimuth and elevation via electromechanical adjustment of, respectively, the rotational orientation of the base and the slant angle of the passive planar array panel relative to the platform.
Owner:ROCKWELL COLLINS INC

Large-aperture array robust adaptive waveform recovery method based on focusing covariance sparse reconstruction

The invention relates to the technical field of underwater acoustic signal processing in a sonar system, in particular to a large-aperture array robust adaptive waveform recovery method based on focusing covariance sparse reconstruction, and the method comprises the steps: carrying out the time-frequency transformation of all array element receiving time domain data, and obtaining array element domain-frequency domain data; constructing sampling covariance matrixes corresponding to different frequency points according to the array element domain-frequency domain data; constructing a multi-frequency-point focusing covariance matrix according to the sampling covariance matrix and the array manifold vector corresponding to each frequency point; constructing a sparse dictionary matrix adaptive to the focusing covariance matrix according to the linear relation between the focusing covariances of the frequency points, and obtaining a sparse expression of the focusing covariance matrix; according to the sparse representation form of the focusing covariance matrix, utilizing a sparse criterion to carry out iterative reconstruction on the focusing covariance matrix; and robust adaptive waveform recovery is carried out by using the focusing covariance matrix after sparse iteration reconstruction. According to the method, the short-time adaptive waveform recovery performance of the large-aperture array is remarkably improved.
Owner:THE 715TH RES INST OF CHINA SHIPBUILDING IND CORP

Double-frequency common-caliber high-isolation phased-array antenna in sparse array arrangement mode

The invention belongs to the technical field of antennas, discloses a double-frequency common-caliber high-isolation phased-array antenna in a sparse array distribution mode, and mainly solves the problems that an existing double-frequency common-caliber array antenna sparse distribution optimization algorithm is large in calculation amount and low in design efficiency. According to the invention, through the thirteen-sided Einstein pattern, aperiodic tiling of an infinite plane can be realized through a certain splicing rule. A Ka-band high-frequency antenna and a K-band low-frequency antenna are placed at the gravity center of the Einstein pattern, and the high-frequency antenna and the low-frequency antenna are distributed in a staggered mode in a translation mode. The antenna unit adopts a cross symmetric array antenna, and high isolation of the dual-frequency antenna unit is realized by loading a coaxial filter at the bottom of the antenna unit. The rear end of each antenna unit is connected with a T / R assembly, and array beam scanning is realized by controlling the amplitude and phase of an input signal. The method is low in arrangement cost and high in design efficiency, and can be used for radar, communication, navigation and information confrontation.
Owner:XIDIAN UNIV +1

Wind tolerant ball

The ball is a thin-walled hollow sphere that includes an array of apertures with dimples in a pattern that are concentric to the aperture array. Dimples are provided on the exterior surface of the ball between the apertures with the pattern and dimensions of the dimples varying based on proximity to the apertures. Internal protuberances are provided on the interior surface of the hollow ball such that the interior surface also manages aerodynamic airflow through the ball. Channels are also provided around each of the apertures within the ball which may intersect proximate dimples or be spaced therefrom. The ball also includes apertures having converging and diverging sidewalls that form a venturi shape to increase inflow air into the apertures and outflow air out of the apertures. Finally, the ball also maintains a weight:diameter ratio within a fixed range.
Owner:ZEPICKLEBALL CO LLC

Dual-band oblique polarization common-aperture array antenna based on tight coupling effect

The invention provides a dual-band oblique polarization common-caliber array antenna based on a tight coupling effect. The dual-band oblique polarization common-caliber array antenna comprises a dielectric substrate, a low-frequency antenna, a high-frequency antenna and a metal floor which are perpendicular to one another, the low-frequency antenna comprises a low-frequency modification dipole, a low-frequency feed balun and a low-frequency metal wide-angle impedance matching layer, and the high-frequency antenna comprises a high-frequency modification dipole, a high-frequency feed balun and a high-frequency metal wide-angle impedance matching layer. The design of the common-caliber array antenna is realized in a mode that the dual-band antenna is vertically inserted and the metal floor is shared. The antenna has the advantages of ultra wide band, beam scanning and oblique polarization, and can be used for broadband radar wireless communication.
Owner:XIDIAN UNIV

Deep-sea large-aperture array deconvolution near-field high-precision direction finding method based on sound velocity correction

The invention provides a deep-sea large-aperture array deconvolution near-field high-precision direction finding method based on sound velocity correction. According to the method, an equivalent sound velocity mapping table generated by a BELLHOP ray model is established, a sound ray bending effect is innovatively converted into a real-time table look-up correction mechanism, sound velocity correction time delay is injected in beam forming and deconvolution calculation, the problem of PSF distortion of a traditional linear model in a deep sea near field is thoroughly solved, high-precision direction finding and distance measuring are achieved, and the accuracy of direction finding and distance measuring is improved. And a subversive direction finding solution with physical accuracy, algorithm stability and engineering real-time performance is provided for the deep-sea large-aperture array.
Owner:HARBIN ENG UNIV

Use of multiple electron beams for high throughput inspection

A telecentric charged particle beam, which can be an electron beam, is directed through an array of apertures to divide the telecentric charged particle beam to a plurality of telecentric illumination beamlets. The telecentric illumination beamlets through an imaging lens, a field lens at an intermediate image plane, and a transfer lens. The telecentric illumination beamlets are scanned as the telecentric illumination beamlets are directed through an upper scan deflector and a lower scan deflector and directed onto a workpiece on a stage.
Owner:KLA CORP

Implicit nerve-guided super-network blind light field image quality evaluation method

The invention relates to the technical field of image processing, in particular to an implicit nerve-guided super-network blind light field image quality evaluation method, which comprises the following steps: acquiring a to-be-evaluated light field sub-aperture array image; extracting target Y channel information of the light field sub-aperture array image; the target Y channel information is input into a preset quality evaluation model, a perception quality evaluation result is output, and the quality evaluation model uses an implicit neural guidance network to extract high-dimensional features of the Y channel information and obtains a perception quality score according to the high-dimensional features. According to the method, through a representation form extracted from a light field sub-aperture image stack, high-dimensional feature representation is obtained by using an implicit neural guidance network. In addition, a multi-scale semantic feature extraction network is combined, a perception quality score is finally generated, visual characteristics of human eyes are fully considered, and the scoring accuracy and effect of non-reference light field image quality evaluation are remarkably improved.
Owner:ANQING NORMAL UNIV

Shared transmit and receive aperture linear array

Various arrangements of transmit and receive shared-aperture array antenna systems are presented herein. The arrangements can include an antenna that includes: a planar substrate; a first row of a first plurality of transmit patches arranged on the planar substrate; a second row of a plurality of receive patches arranged on the planar substrate; and a third row of a second plurality of transmit patches arranged on the planar substrate. The first row, second row, and third row can be parallel and the second row can be between the first row and the third row.
Owner:HUGHES NETWORK SYST

Orientation estimation method, device and system for leakage noise of water supply network

The embodiment of the invention discloses an orientation estimation method, device and system for leakage noise of a water supply network. The method comprises the following steps: acquiring an acoustic signal acquired by a positioning array, wherein the array element spacing of the positioning array is smaller than half-wavelength; the method comprises the following steps of: extracting a main frequency band of each channel signal in an acoustic signal by utilizing power spectral density based on the channel signal acquired by each array element in the acoustic signal; the method includes determining an adaptive dominant frequency band of an acoustic signal based on dominant frequency bands of all channel signals in the acoustic signal. Furthermore, the method includes estimating the orientation of the leakage noise by using a beamforming algorithm based on the acoustic signal and its adaptive dominant frequency band. In this way, according to the embodiment of the invention, the small-aperture array can be used for replacing a leakage listening rod to collect the sound signals of the pipe network, the frequency component with the high signal-to-noise ratio in the self-adaptive main frequency band is screened out from the sound signals, and then high-resolution orientation estimation is achieved through the beam forming algorithm.
Owner:ZHEJIANG HEDA TECH

Mobile dipole sound source positioning device and method of minimum aperture array

The invention relates to a mobile dipole sound source positioning device and method of a minimum aperture array, the device comprises a vector sound transmission array and a processor, the vector sound transmission array comprises at least three array elements, the distance between the array elements is 1 / 6 lambda, lambda is the wavelength, the vector sound transmission array is used for measuring sound pressure signals, the processor is used for processing the sound pressure signals, and the processor is used for processing the sound pressure signals. And a positioning result of the dipole source is solved through a nonlinear optimization algorithm. The method comprises the following steps: measuring a sound pressure signal within a preset time by using a vector sound transmission array, and converting a measured time domain sound pressure signal into a frequency domain sound pressure signal; calculating a vibration velocity signal according to the frequency domain sound pressure signal, and establishing a dipole sound source propagation model; and performing nonlinear optimization solution on the dipole sound source propagation model to obtain a positioning result of the dipole source. Compared with the prior art, high-precision and real-time positioning of the moving dipole source can be realized.
Owner:SHANGHAI JIAOTONG UNIV

High-resolution azimuth estimation algorithm for multiple targets in small aperture array based on phase difference

A phase-difference-based high-resolution azimuth estimation algorithm for a small-aperture array with multiple targets comprises the following steps: 1) according to various array structures, the coordinate vectors of the array elements are subtracted and then combined accordingly to obtain new vectors along each coordinate axis; 2) the phase of each array element is obtained by performing a fast Fourier transform on the array element sampling data, the phase difference between the array elements is obtained by subtracting the phase of each array element, and the phase differences are combined according to the combination of the array element coordinate vector differences to extract the component k of the incident direction along each coordinate axis. x , k y and k z 3) After obtaining the various components of the incident direction, the unambiguous incident angle across the entire spatial range is calculated using inverse trigonometric functions. This invention utilizes a combination of array element sampling data to achieve more accurate target direction estimation, enhances resistance to noise and other interference, and broadens the applicable frequency band, enabling flexible application to various arrays, as well as direction estimation using multi-line spectrum signals and broadband signals.
Owner:ZHEJIANG UNIV

Rapid-deployment reflectarray architecture for mobile satellite communication (satcom) operations

A rapid-deployment satellite communications (satcom) terminal apparatus includes a base capable of rotation relative to a platform (e.g., a mobile platform or trailer to which the apparatus may be mounted or from which it may be detached), and a passive planar array panel comprising an array of antenna elements or apertures, the passive planar array panel pivotably and slidably attached to the base. The passive planar array panel includes a feed arm and feed antenna, the arm articulable relative to the panel and the antenna articulable relative to the arm. The feed antenna transmits and / or receives EM energy focused by the antenna elements in a beam direction adjustable by an array controller to a desired azimuth and elevation via electromechanical adjustment of, respectively, the rotational orientation of the base and the slant angle of the passive planar array panel relative to the platform.
Owner:ROCKWELL COLLINS INC

Apparatus and method for managing coherent detection from multiple apertures in a light detection and ranging system

The aperture array includes a plurality of apertures arranged in one or more dimensions. Each aperture is configured to receive a respective portion of the received light wavefront. Each aperture is coupled to a respective optical mixer that coherently interferes the respective portion of the received light wavefront with a respective local oscillator light wave. The processing module is configured to process the electrical signals detected from the outputs of the optical mixers, including: for each optical mixer, determining at least one phase or amplitude information based on at least one electrical signal detected from at least one output of the optical mixer; determining direction-based information associated with a subset of the field of view based on the phase or amplitude information from at least two of the plurality of optical mixers; and determining distance information based on the direction-based information.
Owner:MOURO LABS SL

X / Ku frequency band high-isolation heterogeneous common-caliber array antenna applied to satellite communication

The invention discloses an X / Ku frequency band high-isolation heterogeneous common-caliber array antenna applied to satellite communication, and belongs to the technical field of common-caliber antennas. The heterogeneous common-caliber antenna comprises a parasitic patch layer, a first heterogeneous dielectric layer, a radiation patch layer, a second heterogeneous dielectric layer, a first grounding plane, a first dielectric layer, a feed network layer, a second dielectric layer, a second grounding plane and a coaxial line which are tightly attached in sequence from top to bottom. According to the heterogeneous common-caliber antenna, the X-waveband antenna and the Ku-waveband antenna share the same caliber face, the X-waveband antenna and the Ku-waveband antenna are heterogeneous in a medium nesting mode, the isolation degree of the two kinds of antennas in the same caliber face is very high, receiving and sending work can be conducted at the same time, and the miniaturization effect is outstanding; the array formation based on the heterogeneous common-caliber antenna can realize the simultaneous work of the X / Ku frequency band antennas under the half-wavelength spacing of the Ku frequency band, and the radiation performance is hardly influenced.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Multi-aperture array for manipulating a multitude of charged first particle beams, as well as a multitude particle beam system with the multi-aperture array

A multi-aperture array for manipulating a plurality of charged first single-particle beams, comprising: a base body with a plurality of apertures, wherein, during operation of the multi-aperture array, one of the charged first single-particle beams passes through each aperture; at least a plurality of first electrodes, wherein one of the first electrodes is arranged at each of the apertures to individually influence the first single-particle beam passing through the aperture, and wherein each of the first electrodes is connected to a control unit; wherein the base body has a first depth TG in a z-direction along which the first apertures extend through the base body; wherein the first electrodes each have a depth TE in the z-direction that is less than the depth TG, i.e., TE < TG;wherein the first electrodes are each embedded in the base body such that they are exposed in an area adjacent to and forming the aperture, and are otherwise embedded directly in the base body and thus without an electrical insulating layer; and wherein the material of the base body is glass or consists of glass.
Owner:CARL ZEISS MULTISEM GMBH

Multimodal image fusion method and imaging system

The present application relates to the image processing method of optical remote sensing imaging detection, specifically relates to a multi-modal image fusion method and imaging system, in order to solve the existing technical image capture of target scene depends on time-sharing type imaging system or multi-device acquisition, resulting in different modal image registration difficulty, low registration accuracy, image edge details are inconsistent, the deficiency of poor fusion effect, the multi-modal image fusion method of the present application includes the original image and characteristic spectrum of target scene, multi-modal image preprocessing and multi-modal image fusion steps, based on the spectral radiation curve of target scene, spectral image and polarization image realizes multi-modal image fusion.Simultaneously, provide a kind of multi-modal image imaging system, including sub-aperture array compound eye unit, for obtaining the original image of target scene, realize the spectral image and polarization image of target scene are acquired simultaneously.
Owner:XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI

Aberration correction in charged particle system

A lens element of a charged particle system comprises an electrode having a central opening. The lens element is configured for functionally cooperating with an aperture array that is located directly adjacent said electrode, wherein the aperture array is configured for blocking 5 part of a charged particle beam passing through the central opening of said electrode. The electrode is configured to operate at a first electric potential and the aperture array is configured to operate at a second electric potential different from the first electric potential. The electrode and the aperture array together form an aberration correcting lens.
Owner:ASML NETHERLANDS BV

Inverse synthetic aperture, multiband radar detection of hidden objects with spatially structured tracking of object carrier

ActiveUS12571907B2Radio wave reradiation/reflectionMulti band3d tracking
Systems and methods are described, and one system includes a three-dimensional (3D) geometric tracker connected to a multiband (MB) inverse synthetic aperture array radar (ISAR), and a classification / alarm logic. The MB ISAR includes spatially distributed radar transmitters (TXs) and receivers (RXs), a TX / RX allocation logic, and a tomographic (TM) image logic. The TX / RX allocation logic is configured to receive 3D tracking data from the 3D geometric tracker, indicating subject 3D position and 3D orientation and, in response, dynamically allocate TXs and RXs to maintain MB illumination of and maintain MB reception of multiple scatter angles from subjects. The TM image processor is configured to construct TM images from the scatter angles, using 3D tracking data, for input to the classification and alarm logic. Optionally, the TX / RX resource allocation logic is configured to receive situation feedback data, for feedback adjusting of allocation of TXs and RXs.
Owner:THE TRUSTEES OF PRINCETON UNIV

Miniaturized medium-wave infrared curved surface bionic compound eye optical system

The invention relates to the field of infrared thermal imaging, in particular to a miniaturized medium-wave infrared curved surface bionic compound eye optical system which comprises a curved surface multi-aperture array, an optical relay image rotation unit and an infrared detection unit. The curved surface multi-aperture array is of a compound eye structure formed by a plurality of sub-eyes with the same parameters. And the number of the lenses contained in each sub-eye is not more than 3. The optical relay image rotation unit converts a focal curved surface image of the curved surface multi-aperture array into a focal plane image, and the focal plane image is collected to the infrared detection unit. The number of lenses contained in the optical relay image rotation unit is not more than 6, and the optical relay image rotation unit has an object curved surface with the same curvature radius as the curved surface multi-aperture array and is matched with a diaphragm of the infrared detection unit. The system has the advantages of multiple compound eye apertures, light weight, miniaturization, large relative aperture, large target surface size, large field of view, high spatial resolution, cold diaphragm matching and the like, can perform operations such as quick capture, positioning and distance measurement on a moving target, and is particularly suitable for application scenes such as high-altitude over-the-ground wide-area detection, quick moving target positioning and tracking and the like.
Owner:SHANGHAI INSTITUTE OF TECHNICAL PHYSICS CHINESE ACADEMY OF SCIENCES

Creation of electron beams using a micro-deflector array

PCT designated stageWO2026039242A1Electric discharge tubesOphthalmologyParticle beam
A gun lens receives an electron beam or other particle beam, which is then divided into beamlets by an aperture array. Each of the beamlets is telecentric. A global imaging lens receives the beamlets from the aperture array. A micro deflector array on a plane of the global imaging lens includes deflectors configured to be individually controlled.
Owner:KLA CORP

Multi charged particle beam lithography method and multi charged particle beam lithography apparatus

To stabilize a temperature of a molding aperture array substrate.SOLUTION: A multi charged particle beam lithography method includes the steps of: discharging a multi charged particle beam and using a plurality of blankers provided in a blanking aperture array substrate to switch ON / OFF of a predetermined beam in the multi charged particle beam; and transferring control data for controlling ON / OFF of each beam of the multi charged particle beam to a control circuit of the blanking aperture array substrate while moving a stage which is installed in a lithography chamber, and drawing a pattern by irradiating a lithography target substrate, which is mounted on the stage, with the multi charged particle beam based on the control data. The control circuit is operated during a beam non-irradiation time in which the lithography target substrate is not irradiated with the multi charged particle beam.SELECTED DRAWING: Figure 1
Owner:NUFLARE TECH INC

MEMS chip, MEMS system and electronic equipment

The embodiment of the invention provides an MEMS chip, an MEMS system and electronic equipment. The MEMS chip comprises a back polar plate, and the back polar plate is provided with a fixed supporting area which is used for being fixedly connected with a supporting structure; the acoustic action region is arranged opposite to the vibrating diaphragm to form an acoustic capacitance structure; wherein the acoustic action area is provided with acoustic through holes, and at least part of the acoustic through holes form a gradually-changed aperture array area; in the gradually-changed aperture array area, the characteristic apertures of the acoustic through holes are continuously and progressively decreased towards the edge direction along the radial direction of the gradually-changed aperture array area; the characteristic aperture is defined as the diameter of a minimum circumcircle determined by taking the geometrical shape of the acoustic through hole as a reference.
Owner:GOERTEK MICROELECTRONICS CO LTD

Imaging thousands of electron beams during workpiece inspection

A beamlet is generated from an electron beam using an array of apertures downstream of a single global collimating lens. The beamlets are directed through an image lens array downstream of the aperture array in the path of the beamlets, the beamlets being individually focused onto an intermediate image plane using the image lens array. The beamlet is then directed at a workpiece on a stage using a transfer lens array downstream of the image lens array. The paths of the beamlets do not include intersections.
Owner:KLA CORP

Optical transmission element

Optical transmission element (1), with - a first planar microlens arrangement (2) and - a second planar microlens arrangement (3) arranged parallel to the first microlens arrangement (2), - wherein a planar aperture arrangement (4) with a plurality of aperture elements (5) each having at least one aperture (6) is arranged between the two microlens arrangements (2, 3) and parallel thereto, - wherein each aperture element (5) is assigned to a microlens (7, 8) of the first and second microlens arrays (2, 3) and is arranged in their focal plane (F), and - wherein the microlens arrays (2, 3) and the aperture array (4) are arranged such that light incident on the first microlens array (2) is, depending on its angle of incidence (W), either transmitted through the aperture array (4) and the second microlens array (3) or absorbed or reflected at the aperture array (4), characterized in that - the diaphragm elements (5) are each arranged within the focal plane (F) of the microlens arrays (2, 3) and at the same time offset from the optical axis (A) of the microlens arrays (2, 3), and that - the optical transmission element (1) is formed as a film into which the diaphragm arrangement (4) is completely embedded, and on one side of which the first microlens arrangement (2) and on the other side of which the second microlens arrangement (3) are arranged.
Owner:TEMICON GMBH

Multi-beamlet charged particle beam drawing apparatus

The present embodiment provides a multi-charged particle beam drawing apparatus that suppresses a beam position shift on a sample surface. The charged particle beam drawing apparatus of the present embodiment is a multi-charged particle beam drawing apparatus including: a blanking aperture array substrate provided with a plurality of blankers that perform blanking deflection of a plurality of charged particle beams that constitute a plurality of beams; and a first shielding member disposed on a downstream side of the blanking aperture array substrate in a traveling direction of the plurality of beams, having a cylindrical portion through which the plurality of beams pass inside, and being composed of a high magnetic permeability material.
Owner:NUFLARE TECH INC

Local optical flow activation method of multi-aperture array imaging system under sparse topological framework

The invention relates to a local optical flow activation method of a multi-aperture imaging system under a sparse topological framework, which is used for self-adaptive motion vector estimation of the multi-aperture imaging system in a complex motion scene, and compared with the traditional variational method, deep learning and other optical flow estimation methods, the local optical flow activation method can process visual motion data without complicated label labeling, and has the advantages of simple operation and high efficiency. And a high-precision array flow field is ensured, so that the flow field estimation error caused by pixel-level processing shielding and visual angle change is realized. Meanwhile, correlation motion characteristics among apertures are fully considered, self-adaptive estimation of the regional apertures is achieved, and the burden of computing resources is greatly reduced. The lightweight neural network is utilized to accelerate SIFT feature search, the accuracy of key point descriptors can be improved through a self-enhancement mechanism, the key point descriptors can be embedded into a multi-aperture array imaging system by occupying lower computing resources, morphological feature key point screening is achieved, and finally the purpose of flow field local robustness enhancement is achieved.
Owner:TONGJI UNIV

Multi-charged particle beam mapping method, multi-charged particle beam mapping device, and computer-readable recording medium

Provided are a multi-charged particle beam drawing method, a multi-charged particle beam drawing apparatus, and a computer-readable recording medium, which can improve the drawing accuracy of a multi-beam. The multi-charged particle beam drawing method of the present embodiment includes: a data path for inputting control data for controlling the on or off of each beam of a multi-beam to a unit array on a blanking aperture array substrate, dividing, according to each input-output circuit of a plurality of input-output circuits and at least any one of a plurality of wiring groups concentrated based on the inter-wiring distance of a plurality of wirings to the plurality of input-output circuits, into a plurality of first blocks, for each of the plurality of first blocks after the division, calculating a first shift amount of each of the plurality of first blocks of the multi-beam due to at least any one of an electric field and a magnetic field, and a process of correcting the irradiation position or the irradiation amount of the multi-beam based on the first shift amount and irradiating each beam of the multi-beam.
Owner:NUFLARE TECH INC