1959 results about "Particle beam" patented technology

The invention discloses an accelerator parameter optimization allocation method based on digital twinning, which relates to the technical field of accelerators, and comprises the following steps: installing at least one beam position detector with a strip-shaped structure along a linear accelerator, and measuring the orbit change of a particle beam along the accelerator; describing the motion state of the particles in a two-dimensional phase space by adopting a two-dimensional vector; analyzing an element off-axis of the linear accelerator and a beam off-axis caused by a stray magnetic field; calculating the amplitude and phase change caused by the cavity coupler on the transverse plane; judging whether the position of the output particle flow exceeds a preset threshold range or not; using a one-to-one correction method to optimize the syndrome to reduce the beam off-axis at the beam position detector with the maximum beam off-axis change; sequentially optimizing all correctors at the upstream by using an overall orbit correction method; the particle beams coming out of the accelerating tube are transmitted along a direction close to the central axis. The orbit of the beam in the accelerator is strictly controlled by optimizing the parameters of the corrector in the accelerator.

A method comprises: providing FIB and CPB columns with FIB and CPB optical axes coinciding at a wafer surface; in the coincidence arrangement, removing a cross section surface layer of a measurement site of a wafer using the FIB column to make a new cross section accessible for imaging; reducing a working distance between the CPB imaging column and the wafer surface in a direction along the axis of the CPB imaging column; imaging the new cross section at the measurement site of the wafer with the CPB imaging column at the reduced working distance and thus not in the coincidence arrangement; and increasing the working distance between the CPB imaging column and the wafer surface in the direction along the axis of the CPB imaging column until the coincidence arrangement is reached.

The invention discloses a high-gradient particle accelerator and a cancer treatment device, and the high-gradient particle accelerator comprises an ion source which is used for generating and leading out a particle beam for treatment; an inlet of the superconducting radio frequency quadrupole field accelerator is connected with the ion source through a low-energy transmission line, and the superconducting radio frequency quadrupole field accelerator is used for pre-accelerating the particle beam generated by the ion source to obtain a low-energy particle beam; an inlet of the superconducting linear acceleration section is connected with an outlet of the superconducting radio frequency quadrupole field accelerator through a first beam transport line, and the superconducting linear acceleration section is used for accelerating the low-energy particle beam led out by the superconducting radio frequency quadrupole field accelerator again to obtain an intermediate-energy particle beam; and an inlet of the annular accelerator is connected with an outlet of the superconducting linear acceleration section through a second beam transport line, and the annular accelerator is used for carrying out ultimate acceleration on the intermediate-energy particle beam led out by the superconducting linear acceleration section so as to obtain a high-energy particle beam with target energy. The scheme that the superconducting linear accelerator is combined with the annular accelerator is adopted, so that particle beam energy is accelerated to target energy meeting cancer treatment.

A multi-beam particle beam system 1 with improved resolution and higher acquisition speed is revealed. For this purpose, an electrostatic booster lens 112 is arranged in an upper focal plane of the objective lens 102 at the level of the crossing region of the primary particle beams. The electrostatic booster lens 112 selectively increases the kinetic energy of the primary beams 3 significantly in the crossing region 108, thereby reducing the Coulomb interaction between the charged particles.

The invention relates to a charged particle beam scanning aberration correction method and system. The method comprises the following steps: determining a reference deflector and a deflector to be calibrated; respectively acquiring a first scanning image of the reference deflector and a second scanning image of the deflector to be calibrated; determining a first scanning deflection angle of the reference deflector according to the first scanning image, determining a second scanning deflection angle of the to-be-calibrated deflector according to the second scanning image, and determining a scanning deflection angle difference according to a difference value between the first scanning deflection angle and the second scanning deflection angle; obtaining a design angle difference between the reference deflector and the deflector to be calibrated; determining a mechanical deviation angle according to a difference value between the scanning deflection angle difference and the design angle difference; determining an imaging compensation angle according to the mechanical deviation angle, and outputting a target scanning waveform based on imaging parameters of the pattern generator adjusted according to the imaging compensation angle; and correcting the scanning signal according to the target scanning waveform. According to the invention, the scanning aberration of the charged particle beam scanning imaging system can be corrected, so that the imaging quality is improved.

Systems and methods of forming images of a sample using a multi-beam apparatus are disclosed. The method may include generating a plurality of secondary electron beams from a plurality of probe spots on the sample upon interaction with a plurality of primary electron beams. The method may further include adjusting an orientation of the plurality of primary electron beams interacting with the sample, directing the plurality of secondary electron beams away from the plurality of primary electron beams, compensating astigmatism aberrations of the plurality of directed secondary electron beams, focusing the plurality of directed secondary electron beams onto a focus plane, detecting the plurality of focused secondary electron beams by a charged-particle detector, and positioning a detection plane of the charged-particle detector at or close to the focus plane.

The invention discloses a beam four-dimensional emittance measuring instrument and measuring method based on an orthogonal slit, and the method comprises the steps: enabling a charged particle beam to enter a slit assembly from one side, far away from a second slit plate, of a first slit plate, and enabling the charged particle beam to form a first beam cluster to the second slit plate after the charged particle beam is transmitted through the first slit; the first beam group is transmitted by the second slit to form a second beam group to the fluorescence acquisition assembly; the fluorescence acquisition assembly comprises a fluorescent screen and an image acquisition module, the fluorescent screen is used for receiving the second beam group and generating fluorescence, the image acquisition module is used for acquiring a fluorescence pattern emitted by the fluorescent screen bombarded by the second beam group, and the data processing assembly is used for calculating phase space distribution of beams according to the fluorescence image. And measuring the emittance of the charged particle beam according to the phase space distribution. According to the beam four-dimensional emittance measuring instrument provided by the invention, the beam is segmented through the slits in the orthogonal direction, so that more complete four-dimensional phase space distribution can be obtained, and the measurement integrity and precision of the beam emittance are improved.

Systems and methods of providing a probe spot in multiple modes of operation of a charged-particle beam apparatus are disclosed. The method may comprise activating a charged-particle source to generate a primary charged-particle beam and selecting between a first mode and a second mode of operation of the charged-particle beam apparatus. In the flooding mode, the condenser lens may focus at least a first portion of the primary charged-particle beam passing through an aperture of the aperture plate to form a second portion of the primary charged-particle beam, and substantially all of the second portion is used to flood a surface of a sample. In the inspection mode, the condenser lens may focus a first portion of the primary charged-particle beam such that the aperture of the aperture plate blocks off peripheral charged-particles to form the second portion of the primary charged-particle beam used to inspect the sample surface.

One ECR ion source generates a He < 2 + > ion beam, the other ECR ion source generates a H2 < + > ion beam, the He < 2 + > or H2 < + > ion beam is selected by a deflection magnet and then transmitted and focused by LEBT to enter an RFQ, the focusing factor of the RFQ is increased and then reduced, DTL is IH-DTL designed by adopting KONUS beam dynamics and comprises two KONUS periods, the working frequencies of the RFQ and the DTL are respectively 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, 425MHz, after He < 2 + > or H2 < + > ion beams are accelerated by RFQ and DTL, the MEBT distributes and transmits the ion beams to a downstream accelerator and an isotope production device. According to the proton helium ion implanter provided by the invention, the particle beam can meet the injection requirement of a subsequent synchrotron, the miniaturization of the proton helium ion implanter is realized, and the production of medical isotopes is considered.

In one embodiment, a charged particle beam writing method includes transferring a substrate to a writing chamber of a charged particle beam writing apparatus by use of a transfer mechanism while maintaining each of the writing chamber and the transfer mechanism at a predetermined temperature, calculating correction amounts for charged particle beams based on correction data for charged particle beam irradiation positions each associated with a previously obtained elapsed time from a predetermined starting point in time of transfer of the substrate and the elapsed time at a point in time of irradiation with each of the charged particle beams, and applying the charged particle beams to positions corrected based on the calculated correction amounts for the charged particle beams to write a pattern on the substrate.

The invention relates to a multi-beam particle beam system (1) having a better resolution and a faster recording speed. To this end, an electrostatic booster lens (112) is arranged in an upper focal plane of the objective lens (102) level with the crossover region of the primary particle beams. The electrostatic booster lens (112) is used to significantly increase the kinetic energy of the primary beams (3) in the crossover region (108) in a targeted manner, which is why the Coulomb interaction between the charged particles is reduced.

The invention relates to the technical field of radiation therapy, in particular to a boron neutron capture therapy beam shaping device and a boron neutron capture therapy system. The beam shaping device for boron neutron capture therapy is used for beam shaping of a DT neutron tube generator. The interior of the beam shaping device is provided with a particle beam channel, and the particle beam channel is used for generating an initial neutron source through an incident proton beam. The beam shaping device comprises a value-added layer, a moderator, a filter layer, a reflecting layer, a collimator and a shielding layer, wherein the value-added layer, the moderator, the filter layer and the collimator are sequentially arranged from a target material to an outlet. And the axes of the particle beam channel, the value-added layer, the moderator and the collimator coincide. According to the beam shaping device, 14Mev high-energy neutrons from the DT neutron tube generator are shaped into hot / slow neutron beams meeting the BNCT treatment requirements, and impurities of fast neutrons and gamma rays are reduced to the maximum extent, so that the dosage precision and biological selectivity of treatment are effectively improved.

Systems and methods for defect inspection including defect detection and defect classification associated with a sample are disclosed. The method for defect inspection includes acquiring a scanned inspection image of a region of a wafer using a charged-particle beam system, and training a deep learning model based on a scanned reference image of the region of the wafer. The trained deep learning model is configured to detect a defect in the acquired scanned inspection image, after detection, extract one or more features of the detected defect, and classify the detected defect based on the one or more extracted features.

Operating a particle beam apparatus for imaging, analyzing and / or processing an object includes guiding a particle beam using a first guiding device and a second guiding device in such a way that the particle beam is guided to first positions on a surface of the object. The first positions are arranged along a first geometrical shape on the object. The particle beam is also guided to second positions on the surface of the object using the first guiding device and the second guiding device. The second positions are arranged along a second geometrical shape on the object. Guiding the particle beam along the first geometrical shape and / or along the second geometrical shape is faster in time than guiding the particle beam from the first geometrical shape to the second geometrical shape.

The invention provides an adaptive weight multi-particle beam flow transmission simulation method and device, and the method belongs to the technical field of particle accelerators, and specifically comprises the steps: dividing a to-be-processed macro particle beam to form a plurality of groups of macro particles; configuring a relative weight for each group of macro particles according to the density distribution characteristics of the macro particle beams; sampling each group of macro particles in combination with the relative weight of each group of macro particles to obtain a corresponding sampling result; determining the weight of each macro particle in each sampling result in combination with the relative weight of each macro particle in each sampling result; determining similarities of a candidate beam bunch and a macro particle beam bunch in different dimensions, wherein the candidate beam bunch is formed by collecting sampling results configured with weights of macro particles; under the condition that the similarity meets a beam dynamics simulation condition, determining the candidate beam bunch as a new macro particle beam bunch; the new macro particle beam is used for replacing the macro particle beam to carry out multi-particle beam flow dynamic simulation, and the evolution process of beam transmission in the accelerator is described.

Provided is a charged particle beam device capable of shortening the acquisition time of a feature image. In this charged particle beam device, an image acquisition unit acquires a plurality of feature images by repeating: a process for selecting one mode from a plurality of modes for acquiring the feature images on the basis of the proportion of a region of a feature object in an acquired sample image in the field of view; and a process for acquiring a feature image in the selected mode, the plurality of modes including: a first mode in which a sample image is captured by scanning the sample at a first scanning speed, and the captured sample image is cut to acquire the feature image; and a second mode in which a sample image is captured by scanning the sample at a second scanning speed faster than the first scanning speed, and a feature image is captured by scanning a region of the feature object in the captured sample image at a third scanning speed slower than the second scanning speed.

An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including a thermal conditioning station for preconditioning a temperature of a wafer is disclosed. The charged particle beam apparatus may scan the wafer to measure one or more characteristics of the structures on the wafer and analyze the one or more characteristics. The charged particle beam apparatus may further determine a temperature characteristic of the wafer based on the analysis of the one or more characteristics of the structure and adjust the thermal conditioning station based on the temperature characteristic.

The double-sided cooling capsule target chamber comprises a capsule target piece assembly, a bearing assembly, a target chamber head assembly and a target chamber tail assembly, and the capsule target piece assembly is circular; a groove part and a channel communicated with the groove part are formed in the bearing assembly, and a capsule target piece assembly is arranged in the groove part; a helium cooling channel and a water cooling channel are respectively arranged in the bearing component corresponding to the front surface and the back surface of the capsule target sheet component; the target chamber head assembly is fixed at one end of the bearing assembly, and the target chamber head assembly is provided with a leading-in part for leading an accelerator particle beam into the channel; the target chamber tail assembly is fixed to the other end of the bearing assembly. The double-face cooling effect of copper supporting face water cooling and aluminum supporting face gas cooling can be achieved on the capsule target piece assembly, and the use feasibility of target pieces made of different heat conduction performance materials is improved; the irradiation efficiency is improved, the manufacturing cost is reduced, and conveying and cooling are facilitated; and meanwhile, the treatment capacity of dissolution and separation of the irradiated target sheet can be reduced, and the post-treatment cost is reduced.

The invention discloses a particle accelerator multi-particle dynamics efficient simulation method, system and device and a medium. The method comprises the steps that a small number of macro particles are sampled from an initial macro particle beam to form a new macro particle beam; performing multi-particle beam flow dynamics simulation on the new macro particle beams by adopting a PIC algorithm, and projecting the new macro particle beams to four two-dimensional phase spaces in a distributed manner to generate low-resolution phase diagrams of the four two-dimensional phase spaces; obtaining beam physical parameters based on the new macro particle beam; and inputting the low-resolution phase diagram and the beam physical parameters into a beam halo super-resolution network, and outputting a high-resolution phase diagram of each phase space to realize multi-particle beam flow dynamics simulation. Therefore, by combining a traditional numerical calculation method and an artificial intelligence technology, the problem that an existing artificial intelligence algorithm is weak in generalization ability in the field of beam dynamics simulation is solved, rapid and high-precision simulation of the large-scale multi-particle beam flow dynamics process is achieved, and the method is applied to the field of particle accelerator beam dynamics simulation.

There is provided a circular accelerator that accelerates a beam of charged particles circulating in a magnetic field such that a closed orbit for each energy of the beam is eccentric. The circular accelerator includes a beam extraction port for extracting beams of different energies from the closed orbit, a first bending magnet and a second bending magnet that bend the beam extracted from the beam extraction port, and a control unit that controls magnetic field strengths of the first bending magnet and the second bending magnet in accordance with the energy of the extracted beam. When the energy of the extracted beam is a designed maximum energy of the circular accelerator, the control unit excites both the first bending magnet and the second bending magnet to bend the beam.

The subject invention is a device for mounting a cassette (4) with a lamellae holder (5) and a charged particle beam device comprising a cassette (4) mounting device with a lamellae holder (5). The device with the cassette (4) with a lamellae holder (5) uses an arm (3) pivotally connected to the body (1 ), the end of which, when the arm (3) is rotated away from the body (1 ) is adapted to hold the cassette (4) with the lamellae holder (5).

The invention provides a particle dose determination method and device, electronic equipment and a storage medium, and relates to the field of physics and computers, in particular to application of physics and computer technologies in the field of radiation medical treatment. The particle dose determination method comprises the following steps: respectively guiding a particle beam to move through M groups of scanning parameters to obtain a plurality of transverse radiation field dose distribution data; wherein each group of scanning parameters corresponds to a plurality of transverse radiation field dose distribution data, and M is a positive integer; according to the plurality of transverse radiation field dose distribution data, calculating to obtain a plurality of first radiation field dose distribution data corresponding to each group of scanning parameters; wherein the dimension of the first radiation field dose distribution data is higher than that of the transverse radiation field dose distribution data; based on scanning parameters and the first radiation field dose distribution data, obtaining a target model used for determining radiation field center dose distribution; and inputting the target scanning parameter into the target model, and determining the delivery dose according to the target radiation field center dose distribution output by the target model.

The system includes a bed on which an irradiation target is mounted, an irradiation device that irradiates the irradiation target with a particle beam, and a magnetic resonance imaging apparatus that captures an image of an irradiation object and includes a magnet that generates a static magnetic field in an image capturing space in which the irradiation target is disposed, and a yoke disposed outside the image capturing space and through which a magnetic flux of the generated magnetic field passes. The irradiation device 21 is disposed on a back surface side of the yoke when viewed from the image capturing space, and irradiates the irradiation target with the particle beam from a through-hole or gap provided in the yoke. A direction in which the particle beam enters the image capturing space intersects with a direction of a static magnetic field applied to the image capturing space by the magnet.

The invention relates to the technical field of axial focusing enhancement of a cyclotron, and provides an axial focusing enhancement method and system for a medical cyclotron, and the method comprises the steps: collecting vibration data, a beam intensity value, temperature data, the positions of all particles in a particle beam, the average magnetic field intensity, the magnetic field intensity difference, and the current; the divergence angle and energy of the particle beam are measured; determining an axial focusing effect evaluation value at the current sampling moment; determining the particle beam stability at the current sampling moment, and determining the magnetic field uniformity at the current sampling moment by combining the average magnetic field intensity and the magnetic field intensity difference at the current sampling moment; and the axial focusing effect evaluation value, the average magnetic field intensity and the current at the current sampling moment are combined to realize the axial focusing enhancement of the medical cyclotron. According to the invention, the focusing precision of axial focusing enhancement of the medical cyclotron and the stability of the focusing effect can be improved.

A method for imaging of semiconductor samples with reduced charging effects and a multi-beam charged particle beam system configured for imaging of semiconductor samples with reduced charging effects comprises adjusting the kinetic energy of primary charged particles to a low energy transition energy, where charging of a material composition is minimized. The system and method include for example a monitoring system and optimization of the kinetic energy to minimize charging effects.

The present disclosure proposes a charged particle beam device, wherein, in order to reduce a field-of-view deviation amount when stage rotation is performed in each of θx, θy, and θz axial directions with respect to a discretionary stage rotation center: (i) the discretionary rotation center is controlled using motor thrust in a translation direction and a rotation direction of a stage device; (ii) a deviation amount from the center of the field of view in an observation image, or the trajectory of the deviation amount, is obtained on the basis of position information indicating the distance in at least one of an X-axis direction, a Y-axis direction, and a Z-axis direction between rotation center coordinates of the stage device and sample observation coordinates, and on the basis of the rotation angles of a θx axis, a θy axis, and a θz axis, during the rotation operation; and (iii) the deviation amount, or the trajectory of the deviation amount, is added to the position information pertaining to the stage when the stage device is moved, whereby the deviation amount from the center of the field of view in the observation image is corrected (see fig. 4).

The embodiment of the invention provides a particle source assembly and particle beam equipment, relates to the technical field of charged particle beam processing and detection equipment, and is used for improving the degree of freedom of beam state adjustment of charged particle beams. The particle source assembly comprises a particle source, an adjustable diaphragm and a collimating lens device which are arranged along a first direction. Wherein the particle source is used for generating a charged particle beam which is emitted towards the adjustable diaphragm along a first direction; the adjustable diaphragm is positioned in a transmission path of the charged particle beam, and the size of a diaphragm hole is adjustable, so that the beam size of the charged particle beam is adjusted; the collimating lens device is used for collimating the charged particle beam emitted from the adjustable diaphragm, and the position of the collimating main plane in the first direction is adjustable. The particle source assembly can be applied to particle beam equipment.

A cyclotron particle therapy center provided with a linear acceleration type range shifter of a switchable therapy system comprises a particle cyclotron (1), an energy selection system (2) and the linear acceleration type range shifter (3), wherein the energy selection system (2) and the linear acceleration type range shifter (3) are sequentially connected with the particle cyclotron (1) in series, and a multi-angle deflection magnet (4) receives a particle beam emitted by the linear acceleration type range shifter (3). The linear acceleration type measuring range shifter (3) is in butt joint with M beam transport sections (5) after deflection, M is larger than 1, the M beam transport sections (5) are in butt joint with a two-way scanning treatment system (6), the use of the linear acceleration type measuring range shifter (3) greatly improves the tumor depth scanning speed, the volume recoating scanning method is more efficient, the use method of the switchable treatment system achieves multiple purposes, and the application range of the linear acceleration type measuring range shifter (3) is wider than the application range of the linear acceleration type measuring range shifter (3), so that the application range of the linear acceleration type measuring range shifter (3) is wider than the application range of the linear acceleration type measuring range shifter (3). The path of a beam transport section is shortened, and the use number of electromagnetic components is reduced.

The invention relates to a particle beam device (100) for imaging, analyzing and / or processing an object (114). The particle beam device (100) comprises a first particle beam generator (300) for generating a first particle beam, wherein the first particle beam generator (300) has a first generator beam axis (301), wherein an optical axis (OA) of the particle beam device (100) and the first generator beam axis (301) are identical; a second particle beam generator (400) for generating a second particle beam, wherein the second particle beam generator (400) has a second generator beam axis (401), wherein the optical axis (OA) and the second generator beam axis (401) are arranged at an angle being different from 0° and 180°; a deflection unit (500) for deflecting the second particle beam from the second generator beam axis (401) to the optical axis (OA) and along the optical axis (OA), wherein the deflection unit (500) has a first opening (501) and a second opening (502) being different from the first opening (501), wherein the optical axis (OA) runs through the first opening (501), wherein the second generator beam axis (401) runs through the second opening (502); an objective lens (107) for focusing the first particle beam or the second particle beam onto the object (114), wherein the optical axis (OA) runs through the objective lens (107); and at least one detector (116, 121, 122) for detecting interaction particles and / or interaction radiation.

A charged particle beam system is disclosed, comprising:a charged particle beam generator for generating a beam of charged particles;a charged particle optical column arranged in a vacuum chamber, wherein the charged particle optical column is arranged for projecting the beam of charged particles onto a target, and wherein the charged particle optical column comprises a charged particle optical element for influencing the beam of charged particles;a source for providing a cleaning agent;a conduit connected to the source and arranged for introducing the cleaning agent towards the charged particle optical element;wherein the charged particle optical element comprises:a charged particle transmitting aperture for transmitting and / or influencing the beam of charged particles, andat least one vent hole for providing a flow path between a first side and a second side of the charged particle optical element,wherein the vent hole has a cross section which is larger than a cross section of the charged particle transmitting aperture.Further, a method for preventing or removing contamination in the charged particle transmitting apertures is disclosed, comprising the step of introducing the cleaning agent while the beam generator is active.