792 results about "Charged particle" patented technology

An assessment method comprising: using an assessment apparatus to generate assessment signals representing a property of a surface of a sample; processing the assessment signals to identify candidate defects and outputting a candidate defect signal; monitoring the status of the assessment apparatus for error conditions and generating a status signal indicating any error conditions during functioning of the assessment apparatus; and analysing the candidate defect signal to determine if the candidate defects are real defects; wherein analysis of a candidate defect is not completed if the status signal indicates that the assessment signal(s) and / or the candidate defect signal corresponding to the candidate defect would have been affected by an error condition.

The invention provides a multi-component charged particle detection system, which comprises a low-energy ion analyzer and a low-energy electronic analyzer, and the two analyzers respectively adopt the same FPGA control program; component grouping measurement is added in the FPGA design and is used for realizing multi-component detection in unit measurement time; an instrument number interface is added in the interfaces and is used for reading the level of the instrument number interface; a number identification and control module is added and used for identifying the current instrument type and generating instrument identification parameters; the parameter acquisition module is used for acquiring engineering parameters of different paths when an instrument is a low-energy ion analyzer or a low-energy electronic analyzer; the control module is used for controlling and receiving an instruction conforming to equipment where a current FPGA configuration item is located; and the control module is also used for controlling to output a data packet conforming to the equipment where the current FPGA configuration item is located. According to the system provided by the invention, the same FPGA executable code is programmed on two different devices, namely the low-energy ion analyzer and the low-energy electronic analyzer, so that FPGA configuration item self-adaption is realized.

Systems, components, and methods for detecting characteristic signals are described. A detector includes a detector cell. The detector cell can be configured to generate an electrical signal in response to a particle incident on an active layer of the detector cell, The active layer can define an absorption surface. The detector can include a filter. The filter can include a membrane of carbon material. The filter can be disposed relative to the detector cell to shield the absorption surface from a subset of the incident particles. The subset of the incident particles can include electrons, ions, and photons. The photons can have an energy less than about 40 eV.

The invention discloses a non-uniform and conformal grid-oriented electromagnetic particle adaptive simulation method and system, and relates to the technical field of electromagnetic particle simulation. The method comprises the following steps: performing non-uniform right-angle mesh generation based on a charged particle average free path, and identifying conformal mesh units; carrying out initialization by adopting macro particles; executing electromagnetic field propulsion, field interpolation, particle propulsion, charge current backfilling and collision simulation in each time step; and accelerated calculation is realized through a CPU and GPU hybrid parallel architecture. Through the method, the numerical simulation precision can be improved, the adaptability of complex geometry is enhanced, the coupling stability of the electromagnetic field and the particles is ensured, the information interaction between the field and the particles is improved, and the large-scale calculation efficiency is improved.

The invention provides a motion simulation method and system for charged particles in a magnetic field, and the method comprises the steps: substituting the magnetic vector potential of an electromagnetic field where the charged particles are located into an established kinetic equation, solving the kinetic equation, and obtaining the motion trail of the charged particles; the kinetic equation is a Hamiltonian equation corrected by a narrow relativistic added with Lorentz force. The method has the advantages that a more comprehensive simulation method for the movement of the charged particles in the electromagnetic field is constructed, a simulation model based on energy conservation is considered, the divergence behavior of long-period prediction of a simulation system is improved, and long-period and high-precision simulation of the high-speed charged particles in the earth magnetic field is achieved.

A magnetic orbital angular momentum beam accelerator will accelerate charged particles, electrons or ions, from rest in zero or low magnetic field into a high magnetic field regions with high kinetic energies in the form of magnetic orbital angular momentum. For example, a beam injector that accelerates electrons or ions into 1T magnetic fields with tens of keV kinetic energies transverse to the magnetic fields can be used to heat magnetically confined plasmas, to inject an initial energetic plasma component with high magnetic orbital angular momentum and to produce highly transverse particle momenta to the magnetic field for electron or ion beam lithography.

Systems or techniques are provided for facilitating improved digital twin calibration for scientific instruments. In various embodiments, a system can synchronize, via execution of a state-wide Bayesian filter, a parametric state of a digital twin with a physical state of a scientific instrument. In various instances, the state-wide Bayesian filter can comprise a set of calibration iterations, each of which can comprise a Bayesian update to an entirety of the parametric state based on an iteration-common observable that is exhibitable by the scientific instrument and simulatable by the digital twin. In various cases, the scientific instrument can be a charged-particle microscope, the parametric state of the digital twin can be an aberration coefficient vector of the charged-particle microscope, and the iteration-common observable can be a Fourier transform of a convergent beam electron diffraction pattern of an amorphous carbon specimen captured by the charged-particle microscope.

Embodiments of the present invention relate to a technology for easily adjusting a level of static electricity required for a substrate according to a semiconductor process by injecting static electricity into the substrate or removing static electricity already formed on the substrate. A static electricity control device for injecting static electricity into a substrate disposed in a vacuum chamber or removing static electricity formed on the substrate in a semiconductor processing system, according to an embodiment, comprises: a charged particle generation unit, disposed on an upper side inside the vacuum chamber, that generates charged particles including positive ions and electrons by generating a vacuum ultraviolet ray (VUV) and reacting the VUV with a process gas inside the vacuum chamber; a grid provided with a plurality of holes, disposed on a lower side of the charged particle generation unit, that selectively pass the type of charged particles downward according to an input voltage; a substrate support, disposed below the grid and having the substrate positioned thereon, that is made of a conductive material and guides the charged particles passing through the grid toward the substrate at a predetermined density according to an input bias voltage; and a static electricity control unit that controls the static electricity of the substrate by supplying a pulsed voltage to at least one of the grid and the substrate support, wherein the grid and the substrate support are arranged so as to have a separation distance that is within four times the mean free path of the process gas according to environmental conditions of the vacuum chamber.

The invention relates to the technical field of light sources, particularly discloses a method and a device for adjusting the central position of a plasma, and aims to realize accurate positioning and stable control of the plasma by accurately controlling output parameters of a magnetic field generator. According to the method, a magnetic field generator with a specific shape and distribution is utilized, a magnetic field with a closed magnetic line structure is generated in a plasma chamber, charged particles in plasma are guided to move along a preset path, and it can be ensured that the plasma reaches and is kept at an expected position by monitoring and adjusting magnetic field parameters in real time.

A method of simulating charged-particle transport in an external magnetic field B according to a model where Newton's second law for the unit direction vector of a charged particle, u′(t)=F(u(t), n(t)), comprises a force term F which depends on the unit direction vector u(t) and further depends nonlinearly on a motion variable n(t) of the particle. According to the method, Newton's second law is solved using an implicit finite-difference method in which, for the duration of a time step, the force term is approximated by its value for interpolated values of the unit direction vector and the motion variable, wherein the interpolated value of each quantity is a combination of that quantity's values at the endpoints t, t+Δt of the time step. The method is useful for calculating the dose when a treatment plan P is delivered to a patient 310 by a radiation delivery system 300.

Systems and methods for cooling in a charged particle system. Systems and methods may include a cooling platform mounted to a vacuum chamber, the cooling platform configured to hold and cool a plurality of modules; and a controller configured to monitor a temperature of the cooling platform; monitor a temperature of the vacuum chamber or a temperature of an ambient environment; and adjust the temperature of the cooling platform based on the temperature of the cooling platform, the temperature of the vacuum chamber, or the temperature of the ambient environment. Systems may include a heat transfer apparatus between a base plate of a wafer stage and an inner surface of a vacuum chamber, the heat transfer apparatus including deformation portions to be deformed by the base plate or the inner surface of the vacuum chamber; and a cooling platform outside of the vacuum chamber opposite to the base plate.

The invention relates to a high-speed directional molecular flow generating device and application thereof. The device comprises an air supply system, an ion source, a grid electrode assembly, a neutral pore plate and a charged particle swallowing device, the gas supply system is communicated with the gas inlet end of the ion source through a pipeline and provides neutral gas for the ion source; the ion source is used for ionizing the neutral gas into plasma, and the gas outlet end of the ion source is sequentially connected with the grid electrode assembly, the neutral pore plate and the charged particle swallowing device in series; the grid electrode assembly is used for extracting ions, accelerating ions and focusing ions; the neutral pore plate is grounded and is used for enabling passing ion beams to be subjected to an Auger process and converting ions into neutral molecules; and the charged particle swallowing device is used for absorbing unconverted ions and drift electrons. According to the invention, the complexity is low, the generated high-speed oriented molecular flow has good collimation, and an important experimental basis is provided for development and ground calibration of a space vacuum measuring instrument.

A fine-adjustable electromagnetic lens for a charged-particle optical apparatus comprises a magnetic circuit assembly including one or more ring magnets, and a sleeve insert of generally rotational symmetry around a longitudinal axis. The sleeve insert surrounds a passage opening extending along the longitudinal axis, and comprises several electrically conductive electrode elements configured to generate an electrostatic field within the passage opening. The ring magnets are arranged circumferentially around an inner yoke shell and surrounded by an outer yoke shell; the inner yoke shell in turn surrounds a central portion of the sleeve insert. The ring magnets are magnetized such that the two magnetic poles are oriented towards the inner and outer yoke shell, respectively. The inner and outer yoke shell together with the ring magnets form a magnetic circuit having at least one gap, in order to generate a magnetic field reaching inwards into the passage opening and spatially overlapping with the electrostatic field generated by the sleeve insert.

The invention discloses a method for simulating partial discharge in a GIS (Gas Insulated Switchgear) under X-ray excitation. The method comprises the following steps: calculating initial electric field distribution in the GIS in simulation software; importing the initial electric field distribution into an MATLAB model, defining each simulation parameter, and obtaining an initial effective electron generation rate in the SF6 gas in the GIS and a photoelectron rate generated under the action of X-ray photoionization; whether partial discharge is generated or not is judged according to the internal electric field intensity of the GIS and the generated electron rate, conduction attenuation of charges in SF6 gas is simulated, and the numerical value change process of charged particles is described; after partial discharge is generated, the charge quantity of partial discharge and the discharge repetition rate are output; according to the method, the change of electrons in the partial discharge process is quantitatively described through a mathematical expression, the generation of partial discharge is judged according to two characteristic quantities, namely the electric field intensity and the number of electrons, and the obtained partial discharge quantity and the discharge repetition rate are close to those of actual discharge.

Segmented endpointing techniques for sample preparation are disclosed. A charged particle microscope system can be configured to remove a first layer of material from the sample by directing an ion beam toward a surface of the sample in a pattern. The pattern corresponding to a segment of the sample. After the first layer is removed, the system can remove a second layer of material from the segment such that a thickness of at least a portion of the segment is reduced. Removing the second layer can include directing the ion beam toward the portion of the sample in N patterns corresponding to N segments of the portion, obtaining an image of the surface of the sample, and stopping, based on the image, the directing of the ion beam toward a segment of the N segments.

A multi-beam charged particle system and a method of operating a multi-beam charged particle system can provide improved image contrast. The multi-beam charged particle system comprises a filter element or an active array element in a detection system, which can provide improved, anisotropic image contrast. The disclosure can be applied for applications of multi-beam charged particle system, where higher desired beam uniformity and throughput may be relevant.

A multi-aperture lens plate of a multi-beam generator for a charged particle multi-beam apparatus is described. The multi-aperture lens plate includes an aperture lens plate body, the aperture lens plate body comprising: an array of N beamlet openings, the array of N beamlet openings having beamlet openings, the array of N beamlet openings configured to generate N primary charged particle beamlets, wherein N is a number >=2; and a plurality of correction openings through the aperture lens plate body configured to locally influence a lens field of the beamlet openings, wherein the correction openings are different than the beamlet openings.

The invention relates to a shielded detector for charged particle microscopy. Systems, components, and methods for detecting a characteristic signal are described. The detector includes a detector unit. The detector cell may be configured to generate an electrical signal in response to particles incident on an active layer of the detector cell, which may define an absorbing surface. The detector may include a filter. The filter may include a film of carbon material. The filter may be disposed relative to the detector unit to shield the absorbing surface from a subset of incident particles. The subset of incident particles may include electrons, ions, and photons. The photons may have an energy of less than about 40 eV.

A neutron capture therapy system. The neutron capture therapy system includes: a charged particle generation device used for generating charged particles; an accelerator used for accelerating the charged particles; a neutron generation device including a particle transmission part and a neutron generation part provided in a first end part of the particle transmission part, wherein the charged particles can pass through the particle transmission part and interact with the neutron generation part to generate neutrons; a beam shaping body having an accommodating cavity, wherein the accommodating cavity includes a first surface and a second surface intersecting with the first surface, and the first end part is provided in the accommodating cavity; and a first fitting part provided between the first surface of the accommodating cavity and the outer surface of the particle transmission part. The first fitting part is configured to at least surround part of the particle transmission part.

The invention relates to a design method of an alternating current GIL insulator metal particle driving electrode, which comprises the following steps: laying a wedge-shaped grounding driving electrode on the inner surface of an insulator grounding shell, changing the direction of an electric field near a contact area of an insulator and a grounding electrode, and influencing the stress and motion characteristics of metal particle foreign matters in the area; therefore, the motion behavior of charged particles around the insulator can be regulated and controlled. Through multi-physics field simulation calculation and particle stress analysis, charge and motion behaviors near a metal particle insulator under alternating current voltage are simulated, spherical metal particles are released at different positions of the inner surface of a GIL grounding shell, and motion characteristics of free metal particles in an alternating current GIL with different wedge-shaped grounding driving electrode designs are compared, so that the grounding driving electrode design of the alternating current GIL is simulated. The angle parameter of the driving electrode is preferably selected.

The present disclosure relates to a charged particle-optical apparatus configured to direct charged particles toward a sample, the charged particle-optical apparatus comprising: a charged particle-optical device configured to direct a plurality of beams of charged particles along respective beam paths toward a sample; a support configured to support the sample and configured to position the sample relative to the beam paths; a detector array of detector elements configured to detect signal charged particles emitted from respective areas of a surface of the sample so as to generate respective detection signals; and a cross talk remover configured to correct the detection signals for cross talk by operating on the detection signals independently of position of the sample relative to the beam paths.

A system and method are provided for recovering charged particle measurement information in the operation of a charge detection mass spectrometer in which multiple ions are trapped and simultaneously measured. The recovered charged particle measurement information illustratively includes charged particle measurement information for at least some of the ions having oscillation frequencies that overlap with oscillation frequencies of others of the multiple trapped ions. One example charged particle recovery process operates on charged particle measurement information in which the overlapping oscillation frequencies are discernible from one another, and another operates on charged particle measurement information in which the overlapping oscillation frequencies are indiscernible from one another. The charge detection mass spectrometer may be operated using either or both of the charged particle recovery processes.

A charged particle system including a plasma source configured to generate an ion beam including a plurality of ion species and an ion beam optics chamber in fluid communication with the plasma source. The ion beam optics chamber includes an electromagnetic element configured to generate a first magnetic field to separate each of the ion species of the plurality of ion species and a conductive container configured to measure a first current corresponding to a first ion species of the plurality of ion species.

A glazing unit (101) is provided configured for reception of radio frequency signals, the glazing unit (101) has an optical layer (143) including electrophoretic charged particles and being arranged between a first substrate (141) and a second substrate (142), electrodes (122, 123) on the substrates (141, 142) cooperate in the electrophoretic modulation of the charged particles' position causing modulation of light passing through the glazing unit (101). The glazing unit (101) has at least one antenna (121) for reception of a radio frequency signal. The antenna (121) may be arranged on a side of a substrate (141, 142) or on a side of a pane (111, 112), e.g., glass pane.

According to the electrochemical gradient thickening-excitation micro-motion composite shape-preserving polishing ultra-precision manufacturing method, an electrochemical gradient thickening phase is used for inducing an electrochemical interface reaction to guide charged particles to move directionally and control the particle aggregation effect of suspension liquid, and then a flexible fluid grinding tool is used for generating excitation micro-power perpendicular to the axis for efficient shape-preserving removal. The invention further provides an electrochemical gradient thickening-excitation micro-motion composite shape-preserving polishing ultra-precision manufacturing device. The electrochemical gradient thickening-excitation micro-motion composite shape-preserving polishing ultra-precision manufacturing device comprises a box body, a shape-following polishing device, a power supply auxiliary device, an electrochemical gradient thickening polishing machining suspension liquid conveying device and a polishing auxiliary device. According to the method, the types of machined workpieces are rich, the profile precision can be greatly improved, and the near-atomic scale polishing precision of atoms can be achieved.

A particle acceleration and extraction system includes a cyclotron having a stripping assembly and a target. The cyclotron includes an acceleration chamber and is operable to generate a magnetic field and an electric field in the acceleration chamber such that charged particles in the acceleration chamber are accelerated along a spiral path extending outward and at increasing energies from an initial energy E1 to a final energy E2, E2 being greater than E1. The target defines a target location outside of the acceleration chamber. The stripping assembly is positioned in the acceleration chamber and is operable to extract a charge from the charged particles at an intermediate location of the outward spiral path whereby the post-stripping assembly particles are directed towards the target location. The charged particles have an intermediate energy E3 at the intermediate location that is between E1 and E2.

Some embodiments are related to a method of or apparatus for forming an image of a buried structure that includes: emitting primary charged particles from a source; receiving a plurality of secondary charged particles from a sample; and forming an image based on received secondary charged particles that have an energy within a first range.

The invention provides a plasma enhanced chemical vapor deposition device and method, and relates to the technical field of plasma surface treatment. The first electric field and the first magnetic field can be formed in the coating area, the coating gas can be ionized into the first charged particles and the first active particles under the action of the first electric field, and the first charged particles can spirally move under the dual action of the first electric field and the first magnetic field; therefore, the energy of the first charged particles is improved, the movement path of the first charged particles is prolonged, and the collision opportunity of the first charged particles and the coating gas molecules is greatly increased, so that the first charged particles can effectively transfer the energy to the coating gas molecules and promote chemical bond breakage of the coating gas molecules; in this way, more first charged particles and first active particles can be generated, when the number of the first active particles is increased, the chemical reaction speed of the first active particles on the surface of the substrate is correspondingly increased, and finally the coating efficiency of the substrate is remarkably improved.

A wearable device may include a biofluid generation unit, a microfluidic channel for transporting the biofluid, and a sensing module including one or more electrochemical aptamer-based sensors having attached reporters that are displaceable by a target analyte. A wearable device may include electrodes for producing a potential sufficient for exchanging charged particles with the displaced reporters. A wearable device may include a processor for executing computer readable instructions including causing activation of the electrodes to exchange the charged particles with the displaced reporters, receiving a measurement of the exchanged charged particles, determining a concentration of the target analyte in the biofluid based on the received measurement, detecting a circadian rhythm based on the determined concentration; and generating an individualized set of circadian entraining factors based on the detected circadian rhythm to guide a user towards an improved circadian rhythm.

There is provided a glass unit (101) configured for receiving a radio frequency signal, the glass unit (101) having an optical layer (143) comprising electrophoretic charged particles and arranged between a first substrate (141) and a second substrate (142), electrodes (122, 123) on the substrates (141, 142) cooperating in electrophoretic modulation of the position of the charged particles, thus, modulation of the light passing through the glass unit (101) is caused. The glass unit (101) has at least one antenna (121) to receive radio frequency signals. The antenna (121) may be disposed on one side of a substrate (141, 142) or on one side of a panel (111, 112) (e.g., a glass panel).