1091 results about "Charged particle" patented technology

An assessment method comprising: using an assessment apparatus to generate assessment signals representing a property of a surface of a sample; processing the assessment signals to identify candidate defects and outputting a candidate defect signal; monitoring the status of the assessment apparatus for error conditions and generating a status signal indicating any error conditions during functioning of the assessment apparatus; and analysing the candidate defect signal to determine if the candidate defects are real defects; wherein analysis of a candidate defect is not completed if the status signal indicates that the assessment signal(s) and / or the candidate defect signal corresponding to the candidate defect would have been affected by an error condition.

The invention provides a multi-component charged particle detection system, which comprises a low-energy ion analyzer and a low-energy electronic analyzer, and the two analyzers respectively adopt the same FPGA control program; component grouping measurement is added in the FPGA design and is used for realizing multi-component detection in unit measurement time; an instrument number interface is added in the interfaces and is used for reading the level of the instrument number interface; a number identification and control module is added and used for identifying the current instrument type and generating instrument identification parameters; the parameter acquisition module is used for acquiring engineering parameters of different paths when an instrument is a low-energy ion analyzer or a low-energy electronic analyzer; the control module is used for controlling and receiving an instruction conforming to equipment where a current FPGA configuration item is located; and the control module is also used for controlling to output a data packet conforming to the equipment where the current FPGA configuration item is located. According to the system provided by the invention, the same FPGA executable code is programmed on two different devices, namely the low-energy ion analyzer and the low-energy electronic analyzer, so that FPGA configuration item self-adaption is realized.

Systems, components, and methods for detecting characteristic signals are described. A detector includes a detector cell. The detector cell can be configured to generate an electrical signal in response to a particle incident on an active layer of the detector cell, The active layer can define an absorption surface. The detector can include a filter. The filter can include a membrane of carbon material. The filter can be disposed relative to the detector cell to shield the absorption surface from a subset of the incident particles. The subset of the incident particles can include electrons, ions, and photons. The photons can have an energy less than about 40 eV.

The invention discloses a non-uniform and conformal grid-oriented electromagnetic particle adaptive simulation method and system, and relates to the technical field of electromagnetic particle simulation. The method comprises the following steps: performing non-uniform right-angle mesh generation based on a charged particle average free path, and identifying conformal mesh units; carrying out initialization by adopting macro particles; executing electromagnetic field propulsion, field interpolation, particle propulsion, charge current backfilling and collision simulation in each time step; and accelerated calculation is realized through a CPU and GPU hybrid parallel architecture. Through the method, the numerical simulation precision can be improved, the adaptability of complex geometry is enhanced, the coupling stability of the electromagnetic field and the particles is ensured, the information interaction between the field and the particles is improved, and the large-scale calculation efficiency is improved.

A multi-beam particle beam system 1 with improved resolution and higher acquisition speed is revealed. For this purpose, an electrostatic booster lens 112 is arranged in an upper focal plane of the objective lens 102 at the level of the crossing region of the primary particle beams. The electrostatic booster lens 112 selectively increases the kinetic energy of the primary beams 3 significantly in the crossing region 108, thereby reducing the Coulomb interaction between the charged particles.

The embodiment of the invention provides a high-energy charged particle environment model construction method and device based on machine learning, and the method comprises the steps: obtaining detection data, carrying out the baseline construction of a high-energy charged particle environment model based on the detection data, and determining an environment model baseline; performing geomagnetic coordinate conversion based on the environment model base line, and determining geomagnetic coordinates; performing model construction based on the geomagnetic coordinates, and determining an environment baseline model; performing data extraction based on the environment baseline model, determining environment fluctuation data, and performing correlation analysis based on the environment fluctuation data and the spatial environment factors to determine a directed graph; building a data model based on a directed graph and a machine learning model, and determining an environment fluctuation model; and determining a high-energy particle environment model based on the environment fluctuation model and the environment baseline model. The characterization of multiple environmental factors on the data causal relationship is constructed by utilizing machine learning, so that the speed is high, and the comparison consistency with real data is good.

The invention discloses a wind-resistant early warning method, device and equipment for a flexible photovoltaic support and a storage medium, and relates to the technical field of electrical digital data processing. According to the method, the tensile stress of an upper string cable and a lower string cable from wind power is simulated by simulating the physical and mechanical process and utilizing the Coulomb's law; meanwhile, the tensile stress under different wind forces can be further simulated by adjusting the charge quantity of the charged particles, then the tensile stress of the upper chord cable and the lower chord cable under the future wind force is predicted through the future wind speed probability distribution, and then a corresponding early warning signal is given according to the tensile stress under the future wind force, so that the hysteresis caused by manual inspection is eliminated.

Hydrogenation reactions are catalyzed by driving charged particles (e.g., an electric current or particle beam) into and / or through a catalytic material so as to deliver energy for hydrogenation of one or more compounds chemisorbed by the catalytic material. The energy provided by the charged particles may be adjusted (e.g., based on a measured temperature and / or pressure associated with the reaction) to maintain a desired reaction temperature and / or prevent overheating of the reaction. In one example, hydrogen loading of the catalytic material (e.g., via electrolysis) enhances reaction rates. A wide variety of organic and inorganic reactants are contemplated for applications in food, energy production and storage (e.g., fossil-fuels, bio-fuels, petrochemicals, fuel cells), pharmaceuticals and other chemicals, as well as environmental applications (e.g., wastewater treatment, emissions reduction, carbon capture and sequestration).

Systems and methods of forming images of a sample using a multi-beam apparatus are disclosed. The method may include generating a plurality of secondary electron beams from a plurality of probe spots on the sample upon interaction with a plurality of primary electron beams. The method may further include adjusting an orientation of the plurality of primary electron beams interacting with the sample, directing the plurality of secondary electron beams away from the plurality of primary electron beams, compensating astigmatism aberrations of the plurality of directed secondary electron beams, focusing the plurality of directed secondary electron beams onto a focus plane, detecting the plurality of focused secondary electron beams by a charged-particle detector, and positioning a detection plane of the charged-particle detector at or close to the focus plane.

The invention provides a motion simulation method and system for charged particles in a magnetic field, and the method comprises the steps: substituting the magnetic vector potential of an electromagnetic field where the charged particles are located into an established kinetic equation, solving the kinetic equation, and obtaining the motion trail of the charged particles; the kinetic equation is a Hamiltonian equation corrected by a narrow relativistic added with Lorentz force. The method has the advantages that a more comprehensive simulation method for the movement of the charged particles in the electromagnetic field is constructed, a simulation model based on energy conservation is considered, the divergence behavior of long-period prediction of a simulation system is improved, and long-period and high-precision simulation of the high-speed charged particles in the earth magnetic field is achieved.

A magnetic orbital angular momentum beam accelerator will accelerate charged particles, electrons or ions, from rest in zero or low magnetic field into a high magnetic field regions with high kinetic energies in the form of magnetic orbital angular momentum. For example, a beam injector that accelerates electrons or ions into 1T magnetic fields with tens of keV kinetic energies transverse to the magnetic fields can be used to heat magnetically confined plasmas, to inject an initial energetic plasma component with high magnetic orbital angular momentum and to produce highly transverse particle momenta to the magnetic field for electron or ion beam lithography.

Systems or techniques are provided for facilitating improved digital twin calibration for scientific instruments. In various embodiments, a system can synchronize, via execution of a state-wide Bayesian filter, a parametric state of a digital twin with a physical state of a scientific instrument. In various instances, the state-wide Bayesian filter can comprise a set of calibration iterations, each of which can comprise a Bayesian update to an entirety of the parametric state based on an iteration-common observable that is exhibitable by the scientific instrument and simulatable by the digital twin. In various cases, the scientific instrument can be a charged-particle microscope, the parametric state of the digital twin can be an aberration coefficient vector of the charged-particle microscope, and the iteration-common observable can be a Fourier transform of a convergent beam electron diffraction pattern of an amorphous carbon specimen captured by the charged-particle microscope.

Embodiments of the present invention relate to a technology for easily adjusting a level of static electricity required for a substrate according to a semiconductor process by injecting static electricity into the substrate or removing static electricity already formed on the substrate. A static electricity control device for injecting static electricity into a substrate disposed in a vacuum chamber or removing static electricity formed on the substrate in a semiconductor processing system, according to an embodiment, comprises: a charged particle generation unit, disposed on an upper side inside the vacuum chamber, that generates charged particles including positive ions and electrons by generating a vacuum ultraviolet ray (VUV) and reacting the VUV with a process gas inside the vacuum chamber; a grid provided with a plurality of holes, disposed on a lower side of the charged particle generation unit, that selectively pass the type of charged particles downward according to an input voltage; a substrate support, disposed below the grid and having the substrate positioned thereon, that is made of a conductive material and guides the charged particles passing through the grid toward the substrate at a predetermined density according to an input bias voltage; and a static electricity control unit that controls the static electricity of the substrate by supplying a pulsed voltage to at least one of the grid and the substrate support, wherein the grid and the substrate support are arranged so as to have a separation distance that is within four times the mean free path of the process gas according to environmental conditions of the vacuum chamber.

The invention relates to a multi-beam particle beam system (1) having a better resolution and a faster recording speed. To this end, an electrostatic booster lens (112) is arranged in an upper focal plane of the objective lens (102) level with the crossover region of the primary particle beams. The electrostatic booster lens (112) is used to significantly increase the kinetic energy of the primary beams (3) in the crossover region (108) in a targeted manner, which is why the Coulomb interaction between the charged particles is reduced.

The invention relates to the technical field of light sources, particularly discloses a method and a device for adjusting the central position of a plasma, and aims to realize accurate positioning and stable control of the plasma by accurately controlling output parameters of a magnetic field generator. According to the method, a magnetic field generator with a specific shape and distribution is utilized, a magnetic field with a closed magnetic line structure is generated in a plasma chamber, charged particles in plasma are guided to move along a preset path, and it can be ensured that the plasma reaches and is kept at an expected position by monitoring and adjusting magnetic field parameters in real time.

The invention belongs to the technical field of plasma production equipment, and discloses a remote plasma source cavity which comprises an annular vacuum cavity, an air inlet, an air outlet, a magnetic core assembly and an ignition coil. The annular vacuum cavity comprises a plurality of linear cavity channels which are sequentially connected end to end to form a closed-loop flow channel, the magnetic core assembly is wound on at least one linear cavity channel, and the air inlet and the air outlet are connected to the two different linear cavity channels respectively; an adjusting electrode pair is arranged at the joint of any two adjacent linear cavity channels, and the adjusting electrode pair is used for generating a deflection electric field to drive charged particles in airflow to turn so as to prevent the charged particles from being in contact with the circumferential side wall of the annular vacuum cavity; the service life of the cavity can be prolonged, the plasma purity is improved, and the plasma uniformity and stability are improved.

A method of simulating charged-particle transport in an external magnetic field B according to a model where Newton's second law for the unit direction vector of a charged particle, u′(t)=F(u(t), n(t)), comprises a force term F which depends on the unit direction vector u(t) and further depends nonlinearly on a motion variable n(t) of the particle. According to the method, Newton's second law is solved using an implicit finite-difference method in which, for the duration of a time step, the force term is approximated by its value for interpolated values of the unit direction vector and the motion variable, wherein the interpolated value of each quantity is a combination of that quantity's values at the endpoints t, t+Δt of the time step. The method is useful for calculating the dose when a treatment plan P is delivered to a patient 310 by a radiation delivery system 300.

The invention relates to plasma etching equipment, an etching machine table, a focusing ring and a jacking structure thereof, the focusing ring comprises a plurality of stacked ring bodies, the ring bodies are mutually independently arranged, the axial size of the ring body located on the uppermost layer is larger than the maximum jacking height allowed by the focusing ring, and the jacking height of the focusing ring is larger than the maximum jacking height allowed by the focusing ring. According to the split type focusing ring provided by the invention, in the use process, each ring body can be jacked, so that a large space below the whole jacked original focusing ring is divided into a plurality of small spaces through each ring body, and the small spaces are connected only through small slits among structures; and the concentration and activity of charged particles of the plasma in the small space are limited, so that the purposes of preventing the arc discharge phenomenon and avoiding the generation of sparking traces or the fragmentation of the focusing ring are achieved.

Systems and methods for cooling in a charged particle system. Systems and methods may include a cooling platform mounted to a vacuum chamber, the cooling platform configured to hold and cool a plurality of modules; and a controller configured to monitor a temperature of the cooling platform; monitor a temperature of the vacuum chamber or a temperature of an ambient environment; and adjust the temperature of the cooling platform based on the temperature of the cooling platform, the temperature of the vacuum chamber, or the temperature of the ambient environment. Systems may include a heat transfer apparatus between a base plate of a wafer stage and an inner surface of a vacuum chamber, the heat transfer apparatus including deformation portions to be deformed by the base plate or the inner surface of the vacuum chamber; and a cooling platform outside of the vacuum chamber opposite to the base plate.

The invention relates to a high-speed directional molecular flow generating device and application thereof. The device comprises an air supply system, an ion source, a grid electrode assembly, a neutral pore plate and a charged particle swallowing device, the gas supply system is communicated with the gas inlet end of the ion source through a pipeline and provides neutral gas for the ion source; the ion source is used for ionizing the neutral gas into plasma, and the gas outlet end of the ion source is sequentially connected with the grid electrode assembly, the neutral pore plate and the charged particle swallowing device in series; the grid electrode assembly is used for extracting ions, accelerating ions and focusing ions; the neutral pore plate is grounded and is used for enabling passing ion beams to be subjected to an Auger process and converting ions into neutral molecules; and the charged particle swallowing device is used for absorbing unconverted ions and drift electrons. According to the invention, the complexity is low, the generated high-speed oriented molecular flow has good collimation, and an important experimental basis is provided for development and ground calibration of a space vacuum measuring instrument.

A fine-adjustable electromagnetic lens for a charged-particle optical apparatus comprises a magnetic circuit assembly including one or more ring magnets, and a sleeve insert of generally rotational symmetry around a longitudinal axis. The sleeve insert surrounds a passage opening extending along the longitudinal axis, and comprises several electrically conductive electrode elements configured to generate an electrostatic field within the passage opening. The ring magnets are arranged circumferentially around an inner yoke shell and surrounded by an outer yoke shell; the inner yoke shell in turn surrounds a central portion of the sleeve insert. The ring magnets are magnetized such that the two magnetic poles are oriented towards the inner and outer yoke shell, respectively. The inner and outer yoke shell together with the ring magnets form a magnetic circuit having at least one gap, in order to generate a magnetic field reaching inwards into the passage opening and spatially overlapping with the electrostatic field generated by the sleeve insert.

The invention discloses a method for simulating partial discharge in a GIS (Gas Insulated Switchgear) under X-ray excitation. The method comprises the following steps: calculating initial electric field distribution in the GIS in simulation software; importing the initial electric field distribution into an MATLAB model, defining each simulation parameter, and obtaining an initial effective electron generation rate in the SF6 gas in the GIS and a photoelectron rate generated under the action of X-ray photoionization; whether partial discharge is generated or not is judged according to the internal electric field intensity of the GIS and the generated electron rate, conduction attenuation of charges in SF6 gas is simulated, and the numerical value change process of charged particles is described; after partial discharge is generated, the charge quantity of partial discharge and the discharge repetition rate are output; according to the method, the change of electrons in the partial discharge process is quantitatively described through a mathematical expression, the generation of partial discharge is judged according to two characteristic quantities, namely the electric field intensity and the number of electrons, and the obtained partial discharge quantity and the discharge repetition rate are close to those of actual discharge.

The invention belongs to the technical field of electrochemical batteries, and particularly relates to an aqueous electrolyte capable of being used for a high-rate tin metal negative electrode and a tin-manganese battery. The aqueous electrolyte comprises an acidic solvent, a tin salt and various high-valence metal salts / charged water-soluble polymers, and can also comprise a manganese salt. According to the method, high-valence metal salt / charged water-soluble polymer is added into the aqueous electrolyte, the repulsive force of double electric layers is adjusted by using introduced charged particles, and the distribution of an electric field and a concentration field at an interface is homogenized, so that efficient ion transmission and uniform and compact tin deposition behaviors are realized. Meanwhile, the charged particles can effectively inhibit related side reactions on the manganese positive electrode side, so that the tin metal negative electrode and the tin-manganese battery can have long cycle life and excellent rate capability at the same time. In addition, the water-based electrolyte is low in raw material price and small in dosage, the reaction process is simple and mild, and the water-based electrolyte has good application and development prospects.

The invention discloses a charged particle identification method, a charged particle identification system based on a screen grid ionization chamber, computer equipment and a storage medium, and belongs to the technical field of radiation detection. The charged particle identification method comprises the following steps: acquiring signals generated by charged particles at a cathode and an anode of a detector and generating characteristic quantities; constructing particle identification parameters by using the obtained characteristic quantity; generating a two-dimensional spectrogram according to the identification parameters and observing distribution characteristics of different particle events; and identifying different particles according to the distribution characteristics of different particle events in the two-dimensional spectrogram. Particle energy is associated with an ionization range during identification, the problem of limitation of a traditional particle identification technology in a high event rate and complex particle product environment is solved, especially the capability of processing a tritium nuclear event superposition phenomenon in a resonance energy region is improved, and therefore the problem that due to the fact that the energy resolution is low, the probability of tritium nuclear event superposition is low can be solved. And the defect problem in the prior art that the detection range is limited due to the fact that complex particle types cannot be accurately identified is solved.

A processing system includes a processing chamber defining a processing region. A foreline is coupled with the processing chamber and defines a fluid conduit. A plasma trap is provided within an interior of the foreline to charge and trap at least some particles in the fluid conduit. The system further includes a particle detector to collect at least some of the charged particles and measure an electric charge produced by the particles.

A method for determining parameters of an imaging transfer function (point spread function) is presented. With regard to a model that describes the imaging transfer function including a number of model parameters, a test substrate is exposed and developed using a test pattern which comprises multiple sub-patterns that are based on the same sub-pattern template but with varying control width of a feature in the template, such as the width of a line or a distance between lines. On the test substrate, isofocal dose measurements are performed using the structures thus formed on a test substrate with varying control and imaging parameters. The isofocal dose thus determined are utilized to determine the model parameters of the imaging transfer function.

Segmented endpointing techniques for sample preparation are disclosed. A charged particle microscope system can be configured to remove a first layer of material from the sample by directing an ion beam toward a surface of the sample in a pattern. The pattern corresponding to a segment of the sample. After the first layer is removed, the system can remove a second layer of material from the segment such that a thickness of at least a portion of the segment is reduced. Removing the second layer can include directing the ion beam toward the portion of the sample in N patterns corresponding to N segments of the portion, obtaining an image of the surface of the sample, and stopping, based on the image, the directing of the ion beam toward a segment of the N segments.

A multi-beam charged particle system and a method of operating a multi-beam charged particle system can provide improved image contrast. The multi-beam charged particle system comprises a filter element or an active array element in a detection system, which can provide improved, anisotropic image contrast. The disclosure can be applied for applications of multi-beam charged particle system, where higher desired beam uniformity and throughput may be relevant.

A multi-aperture lens plate of a multi-beam generator for a charged particle multi-beam apparatus is described. The multi-aperture lens plate includes an aperture lens plate body, the aperture lens plate body comprising: an array of N beamlet openings, the array of N beamlet openings having beamlet openings, the array of N beamlet openings configured to generate N primary charged particle beamlets, wherein N is a number >=2; and a plurality of correction openings through the aperture lens plate body configured to locally influence a lens field of the beamlet openings, wherein the correction openings are different than the beamlet openings.

The invention relates to a shielded detector for charged particle microscopy. Systems, components, and methods for detecting a characteristic signal are described. The detector includes a detector unit. The detector cell may be configured to generate an electrical signal in response to particles incident on an active layer of the detector cell, which may define an absorbing surface. The detector may include a filter. The filter may include a film of carbon material. The filter may be disposed relative to the detector unit to shield the absorbing surface from a subset of incident particles. The subset of incident particles may include electrons, ions, and photons. The photons may have an energy of less than about 40 eV.