Electrical and thermal connection cable for charged particle microscope

Abstract

The systems, methods, and communication cables taught herein provide cryogenic cooling, high voltage connections, and other electrical connections to a sample on a stage within a vacuum environment while still enabling stage motion in at least five degrees of freedom with minimal stage vibration to achieve new or improved measurement applications in situ within a microscope, such as in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, in-situ microscopy, and in-situ microscopy. Such as atomic probe chromatography and testing of quantum computing components. The connection cables taught herein combine connections into a single connection cable within an outer spring suitable for use in ultra-high vacuum. These connection cables are also shaped and configured to maintain at least a minimum spacing distance from components in the surrounding environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical and thermal shortcuts.

Description

Background Technology

[0001] Atomic probe chromatography (APT) is performed by evaporating needle-shaped samples and deriving information about the sample's structure, composition, and / or morphology through progressive measurements of atoms removed from the sample surface. Information about changes in the sample's morphology, structure, and composition during the process is important for avoiding artifacts in APT data. Integrating APT tools into charged particle microscopy (such as electron microscopy) provides new information that enhances 3D reconstruction of the sample and improves overall APT performance. APT tools can be combined with scanning and / or transmission electron microscopy techniques.

[0002] Typically, charged particle microscopy information about the shape, structure, and composition of the needle is used as input for APT reconstruction at the start and end of experiments. This is at least due to the significant challenge of sample realignment when removing the sample from the APT instrument to the microscope during APT experiments to update the microscopic data. Therefore, systems, methods, and algorithms are needed for switching between APT operation and in-situ scanning or transmission charged particle (e.g., electron) microscopy (S / TEM) operation to improve the correlation between the two different information channels and reduce artifacts in the APT data. Summary of the Invention

[0003] Based on some examples taught herein, a connecting cable for electrical and thermal connectivity in ultra-high vacuum is provided. The connecting cable includes an outer spring comprising a lumen extending therethrough. The outer spring includes a vacuum conduction path to enable evacuation of the lumen in a vacuum environment. The connecting cable includes a braid at least partially located within the lumen of the outer spring and configured to conduct high voltage and heat. The connecting cable includes internal structural elements at least partially disposed within the braid to maintain the shape of the connecting cable.

[0004] Based on some examples taught herein, a method is provided for manufacturing a connecting cable that provides electrical and thermal connectivity. The method includes expanding an end of an outer spring. The outer spring includes a lumen extending therethrough. The method includes inserting an inner structural element into a braid. The method includes inserting the braid and the inner structural element into the lumen of the outer spring.

[0005] Based on some examples taught herein, a connecting cable for electrical and thermal connectivity in ultra-high vacuum is provided. The connecting cable includes a first segment configured to enable movement of a connecting stage in three translational dimensions and a first rotational dimension. The first segment includes an outer spring comprising a first cavity extending therethrough. The first segment includes a braid at least partially disposed within the first cavity of the outer spring and configured to conduct high voltage and heat. The first segment includes internal structural elements at least partially disposed within the braid to maintain the shape of the first segment. The connecting cable includes a second segment configured to enable movement of the connecting stage in a second rotational dimension. The second segment includes a braid. The connecting cable includes an intermediate fastener connecting the first and second segments. Attached Figure Description

[0006] To facilitate identification of any discussion of a particular element or action, one or more of the largest significant digits in the reference numerals refer to the drawing number in which the element is first introduced.

[0007] It should be understood that the accompanying drawings are not necessarily drawn to scale, nor are the relationships between objects in the drawings. The drawings are intended to clarify and illustrate various embodiments of the apparatuses, systems, and methods disclosed herein. Where possible, all drawings will use the same reference numerals to refer to the same or similar parts. Furthermore, it should be understood that the drawings are not intended to limit the scope of this teaching in any way.

[0008] Figure 1 Schematic diagrams of connection cables for operation in ultra-high vacuum environments, based on various examples of the teachings herein, are shown.

[0009] Figure 2 A cross-sectional view of the section passing through the connecting cable is shown.

[0010] Figure 3 A view of the interior of the intermediate fastener of a connecting cable, as shown in some examples of those taught in this article, is presented.

[0011] Figure 4 A cross-sectional view of the end of a connecting cable, as shown in some examples of those taught in this article, is presented.

[0012] Figure 5 A schematic diagram of the connecting cables, as taught herein, is shown within an example charged particle system.

[0013] Figure 6 A schematic diagram of the electrical and thermal systems of a charged particle system, including connecting cables attached to an example stage, is shown in accordance with the teachings of this article for various examples.

[0014] Figure 7A schematic diagram of a longitudinal section of a portion of the connecting cable is shown.

[0015] Figure 8A A perspective view of an example connecting cable to a stage in a neutral tilt position is shown.

[0016] Figure 8B It shows the relationship with Figure 8A The same connecting cable is shown in the view of connecting cable 100, which overlaps in three β-angle tilt states.

[0017] Figure 8C It shows the relationship with Figure 8A The same connecting cable is shown in the view of connecting cable 100, which overlaps in three α-angle tilt states.

[0018] Figure 8D A side view shows the connecting cables of the stage attached to the ultra-high vacuum environment.

[0019] Figure 9 Methods for manufacturing connecting cables are shown, based on some examples taught in this article. Detailed Implementation

[0020] The systems, methods, and communication cables taught in this paper provide cryogenic cooling, high-voltage connections, and other electrical connections to samples on a stage within a vacuum environment, while still enabling stage motion in at least five degrees of freedom with minimal stage vibration. In existing conventional systems, thermal connections, high-voltage connections, and electrical sensor connections must be provided separately. Providing separate connections with varying degrees of stiffness and / or slack introduces the risk of contact between the connections and the surrounding environment, leading to short circuits, cooling losses, or component damage. Similarly, separate connections provide separate sources of unwanted vibrational motion (leading to poor imaging) and can generate large payloads that limit stage travel or cause motion hysteresis. The connection cables taught in this paper overcome these problems by combining connections into a single connection cable within an external spring suitable for use in ultra-high vacuum. These connection cables enable new or improved in-situ measurement applications within microscopes, such as atomic probe chromatography and testing of quantum computing components, where cryogenic temperatures and proximity to the sensing and testing equipment are required at the stage while maintaining precise five-degree-of-freedom stage motion. These connecting cables are also shaped and configured to maintain at least a minimum distance from components in the nearby environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical, and thermal shortcuts.

[0021] Advances in electron microscopy, 3D reconstruction software, and computational power have made it possible to accurately image and reconstruct objects at sizes of 100 nm and below. Areas of particular interest include biology (including research related to viruses such as the novel coronavirus) and materials science, where nanotechnology continues to develop new structures and compositions. For high resolution, minimizing sample vibrations may be desirable. Simultaneously, as sample particle sizes increase, the number of images required also increases, thus increasing the time required to perform a study. In both cases, the sample stability required for accurate reconstruction becomes more stringent and can be addressed by cooling the sample to cryogenic temperatures to reduce atomic motion and minimize radiation damage that may occur in the sample after long imaging times for ultra-high resolution. Conventional techniques using liquid nitrogen or liquid helium reservoirs suffer from vibrations caused by boiling liquids. Therefore, there is a strong need to maintain stable cryogenic temperatures as low as 77 K, 35 K, 20 K, or even lower, free from external vibrations, for 6 hours, 12 hours, or longer. The connecting cables taught herein enable the delivery of cryogenic temperatures to a sample on a stage by mechanically separating the reservoir from the stage and by using a braid that suppresses the vibrational movement of the cable itself, without associated vibration or mechanical interference. For example, the connecting cables taught herein can form part of a cold chain for a solid thermal reservoir of the type described in U.S. Application Publication No. 2022 / 0404247, published December 22, 2022, the entire contents of which are incorporated herein by reference.

[0022] As used herein, “about” in relation to size includes measurements within 10% of the measured value.

[0023] As used in this article, "ultra-high vacuum" refers to a vacuum of 1×10⁻⁶. -8 Environments with ambient pressures of millibars or lower. Maintaining ultra-high vacuum within a chamber is hampered by real or virtual leaks that prevent the pump from dropping below a threshold where the rate at which gas or contaminants are removed by the pump equals the rate at which gas or contaminants are introduced by the real or virtual leak. A virtual leak is a source of gas or contaminants that is physically trapped within a volume within the chamber, with only a low conduction path between the volume and the chamber itself. To achieve ultra-high vacuum conditions, components within the chamber should be free of contaminants (through thorough cleaning) and / or virtual leaks (by ensuring that any trapped volumes within components are accessible via a high conduction path, allowing them to be rapidly evacuated). The connecting cables taught in this document are suitable for use in ultra-high vacuum environments.

[0024] Figure 1A schematic diagram of a connection cable 100 for operation in an ultra-high vacuum environment, according to various examples of the teachings herein, is shown. The connection cable 100 includes a first section 102 and a second section 108 connected at an intermediate fixing member 106. The connection cable 100 conducts thermal and electrical energy from a sample interface connector 112 to an external interface connector 114. The sample interface connector 112 is mounted to a stage that holds a sample or a container including a sample (as shown below relative to...). Figure 6 (More detailed description and illustration). External interface connector 114 supplies cryogenic temperatures (e.g., via a heat sink) and power from outside the vacuum chamber to connection cable 100. Connection cable 100 provides a mechanical connection between external interface connector 114 and sample interface connector 112, while still allowing the stage to translate, tilt, and rotate in five dimensions. Connection cable 100 is configured such that virtual leakage within connection cable 100 is mitigated, as follows relative to... Figure 7 More detailed description.

[0025] In some examples, the first segment 102 of the connecting cable 100 forms a helical shape. The cylindrical component of the helix can be oriented in the yz plane (e.g., Figure 1 As shown), the longitudinal component is oriented in the x-axis direction. The first segment 102 is oriented to wire electrical and thermal connections from the outside of the vacuum chamber to the sample or stage without contacting other components within the vacuum chamber. In charged particle microscopy instruments, the volume inside the vacuum chamber, particularly near the stage, is limited because fairly large charged particle optics (such as electromagnetic coils) used to manipulate the charged particle beam should be placed close to the stage to improve image quality and reduce aberrations. Simultaneously, contact between thermal or electrical conductors and other components (such as coils or chamber walls) should be avoided to prevent electrical and thermal leakage, improve safety on the chamber walls and system components (e.g., avoidance of high voltage, short circuits, or low temperatures), and better isolate the stage from the environment. Arranging the first segment 102 in a rigid yet flexible shape (such as a helix) helps prevent contact between the connecting cable 100 and other system components, while also allowing movement in three translational directions and at least one rotational direction (e.g., rotation around an angle α about the x-axis). In some examples, the first segment 102 traverses an angular range of approximately 630 degrees in the xy-plane.

[0026] The second segment 108 of the connecting cable 100 may have a U-shaped or curved shape. In some examples, the second segment 108 may extend in the same direction (e.g., the x-direction) as the longitudinal component defined by the helix of the first segment 102. In some examples, the second segment 108 extends in a direction orthogonal to the shape of the first segment 102. The shape of the second segment 108 enables continuous electrical and thermal contact between the stage or sample and the external environment during stage movement (e.g., rotation about a β angle around the y-axis) along at least a second direction of rotation. Using the first segment 102 and the second segment 108, which are generally orthogonally oriented to each other, allows the connecting cable 100 to accommodate movement in multiple directions while maintaining an acceptable radius of curvature at all points within the connecting cable and without obstructing the charged particle beam.

[0027] Intermediate fixture 106 provides a stable mounting point for the second end 104b of the first segment 102 and the first end 110a of the second segment 108. In some examples, intermediate fixture 106 may include a housing 118, one or more cable mounts 122, and fasteners 120 to secure intermediate fixture 106 to mounting plate 116 or other components in the vacuum chamber of a charged particle microscope.

[0028] Mounting plate 116 can connect at least a portion of the connecting cable 100 to the base of the stage or another robust fixed point within the charged particle microscope to provide translational and rotational movement. In some examples, intermediate fixture 106 is attached to mounting plate 116.

[0029] Although Figure 1 The example connecting cable 100 includes separate first segments 102 and second segments 108 oriented generally orthogonally to each other, but the connecting cable 100 is not limited thereto as taught herein. For example, those skilled in the art will understand that the scope of this disclosure covers connecting cables 100 having a single continuous segment extending between connectors, or may include more than two segments connected to each other by connectors or intermediate fasteners 106.

[0030] In some examples, the connecting cable 100 taught herein may be supplied or manufactured simply as an elongated cable-like element (such as the first segment 102 and the second segment 108). In other words, elements such as the sample interface connector 112, the external interface connector 114, and the intermediate fastener 106 may be supplied separately or pre-installed in the charged particle microscope, such that the supplied or manufactured connecting cable 100 can be installed in the charged particle microscope by attaching it to pre-existing fasteners and connectors. In other examples, the connecting cable 100 taught herein may be supplied or manufactured such that one or more of the sample interface connector 112, the external interface connector 114, or the intermediate fastener 106 are pre-connected to the first segment 102 or the second segment 108. In such examples, the connecting cable 100, including connectors (sample interface connector 112, external interface connector 114) or fasteners (intermediate fastener 106), can be installed in existing charged particle microscopes.

[0031] In some examples, the total length of the first segment 102, the intermediate fixing member 106, and the second segment 108 of the connecting cable 100 is in the range of 200mm to 500mm, in the range of 300mm to 400mm, or about 360mm.

[0032] Figure 2 For example, in Figure 1 The image shows a cross-sectional view taken at the location shown, passing through a segment of the connecting cable 100. The connecting cable 100 includes an inner structural element 204, at least partially housed within an outer spring 202, one or more braids 206, and one or more electrical conductors 210. The braids 206 ensure a good thermal connection between the sample or stage at the sample interface connector 112 and the external interface connector 114. The electrical conductors 210 provide electrical contact between the stage or sample (via the sample interface connector 112) and external devices such as voltage sources or electrical test or probe circuitry (via the external interface connector 114). The inner structural element 204 is rigid enough to maintain the relevant segment of the connecting cable 100 in a substantially uniform shape, while the outer spring 202 surrounds and houses the components of the connecting cable 100 in a single bundle.

[0033] In the various examples taught herein, the connecting cable 100 may include one or more electrical conductors 210, such as two, three, four, or more electrical conductors 210. For example, using four electrical conductors 210 can enable four-point temperature measurements to read out a temperature sensor or determine the exact power dissipated by a heater inside a sample, without being sensitive to the resistance within the electrical conductor 210 itself. In other examples, a single electrical conductor can provide a potential at the sample if another component in the charged particle microscope (e.g., the stage) is grounded. In some examples, the electrical conductors 210 are surrounded by an insulator 208 to prevent contact between the conductive portions of the electrical conductors 210 and the braid 206. In examples with multiple electrical conductors 210, the electrical conductors 210 may be collectively wrapped and bundled together in one or more layers of insulator 208, each electrical conductor 210 may be individually wrapped in one or more layers of insulator 208, or separate and common layers of insulator 208 may be used. When using a single insulator 208, improved vacuum pumping capability and limited motion hysteresis can be achieved in cable 100. In some examples, insulator 208 may comprise one or more electrically insulating materials, such as a polyimide film (e.g., Kapton). TM (Membrane). The conductive portion of conductor 210 may include copper or other conductive materials. In some examples, the diameter of the conductive portion of conductor 210 may be in the range of 0.05 mm to 0.25 mm, in the range of 0.1 mm to 0.2 mm, or about 0.16 mm. In some examples, the size of the conductive portion of conductor 210 may be set to 34 American wire gauge (34AWG). In other examples, the conductive portion of conductor 210 may be of other diameters. In some examples, conductor 210 is rated to carry a 5V signal with a current of 200mA per conductor.

[0034] The braid 206 is configured to create a high thermal conductivity channel between the sample or stage and a thermal control element (e.g., a heat sink) or device located remotely from the sample or stage. The thermal control element is typically located outside the vacuum chamber. The braid 206 is also configured to connect (via external interface connector 114) to a high-voltage power source outside the vacuum chamber and (via sample interface connector 112) to deliver high voltage to the stage. In some examples, the braid 206 consists of a plurality of individual conductive elements 216 or smaller braids 206 bundled together and housed within an outer spring 202. The individual conductive elements 216 may comprise or be made of a material with high thermal conductivity, such as various types of copper (e.g., high-purity oxygen-free copper). In some examples, each individual conductive element 216 in the braid 206 may have a diameter ranging from 10 micrometers to 50 micrometers or approximately 25 micrometers. In some examples, the braid 206, as a unit, is formed from between 5,000 and 15,000 individual conductive elements, between 5,000 and 10,000 individual conductive elements, or more than 9,000 individual conductive elements together. The individual conductive elements may be secured to each other at the ends of the connecting cable 100 (e.g., by cable mounts as described below), but can move freely relative to each other throughout the cable body. By including the braid 206 formed from a large number of fine individual conductive elements (such as fine copper wires), the connecting cable 100 can be easily bent or manipulated into a desired shape and can move and bend during stage movement during imaging operations. In some examples, the braid 206 is adapted to be maintained at temperatures in the range of 10 Kelvin to 35 Kelvin, 25 Kelvin to 35 Kelvin, 50 Kelvin to 100 Kelvin, or 100 Kelvin to 300 Kelvin. In some examples, the braid 206 can keep the sample interface connector 112 (and therefore the sample or stage) at a temperature of 35 Kelvin or lower. In some examples, the use of multiple small-diameter individual conductive elements 216 improves the vibration damping of the cable relative to a single conductor of similar size, due to energy dissipation when the individual conductive elements move relative to each other.

[0035] In some examples, the outer diameter 212 of the connecting cable 100 (e.g., the outer diameter 212 of the first segment 102 or the second segment 108) may be in the range of 1 mm to 10 mm or in the range of 2 mm to 6 mm. In one example, the outer diameter 212 of the connecting cable 100 is preferably 4 mm.

[0036] In various examples, the inner structural element 204 may be formed of solid wire, hollow wire, or spring. While in some examples the inner structural element 204 may be included in both the first segment 102 and the second segment 108, other examples of the connecting cable 100 include the inner structural element 204 only in the first segment 102, and not in the second segment 108. The inner structural element 204 may be bent into a desired three-dimensional shape to provide spatial wiring for the first segment 102 or the second segment 108, or in some examples, to provide spatial wiring for a single segment constituting the entire connecting cable 100. The thickness of the inner structural element 204 may be selected to balance the competing factors of allowing the relevant segment of the connecting cable 100 to be easily bent to accommodate five degrees of freedom stage movement with ensuring that the overall shape of the relevant segment of the connecting cable remains sufficiently rigid to maintain its shape in space. The inner structural element 204, which maintains the rigidity and shape of the connecting cable 100, is located within a bundle of components at least partially housed within the outer spring 202. In some examples, the inner structural element 204 is at least partially housed within the braid 206. By placing the inner structural element 204 within the bundle, it helps maintain the correct shape of the connecting cable 100 and helps maintain the relative positions of components within the bundle (e.g., the electrical conductor 210 and the braid 206). The inner structural element 204 can maintain its shape in various ways, either when held under tension or naturally due to its internal structural characteristics.

[0037] In various examples, the inner structural element 204 has a diameter ranging from 0.5 mm to 2.0 mm, or approximately 1 mm. In some examples, the inner structural element 204 is formed of or comprises titanium or other non-magnetic materials. In some examples, the material, shape, or length of the inner structural element 204 is selected to critically dampen vibrational motion within the connecting cable 100. By critically damping the vibrational motion of the connecting cable 100, pulses from the external environment (such as mechanical vibrations) do not produce long-period oscillations in the motion of the stage or sample caused by the motion of the connecting cable 100.

[0038] Depending on the specific application, the outer spring 202 can be any suitable tension or expansion spring. The outer spring 202 encloses or houses other components in the connecting cable 100 in a single bundle, thus avoiding the danger of using separate wiring for each electrical and thermal connection. In some examples, the outer spring 202 can be a ring-shaped tension spring or a ring-shaped extension spring, wherein the spring has no termination elements at its ends, such as eyelets or rings. The outer spring 202 can be made of or include any suitable material having appropriate flexibility, conductivity, and non-magnetic or non-magnetizable properties. The conductivity in the outer spring 202 prevents charging effects due to the deposition of charged particles from the charged particle system, and the non-magnetic or non-magnetizable properties allow the outer spring 202 to avoid interfering with the movement of charged particles in the chamber. For example, the outer spring 202 can include titanium or phosphor bronze. The outer spring 202 can include an outer coating to increase the thermal reflectivity of the outer spring 202 (i.e., reduce emissivity). For example, in some examples, the outer spring 202 can be coated with gold.

[0039] In some examples, one or more of the inner structural element 204, electrical conductor 210, and braid 206 are housed within the outer spring 202 along substantially the entire length of the connecting cable 100. In other examples, the outer spring 202 encloses and houses components of the connecting cable 100 only in a segment of the cable 100 (e.g., only the first segment 102 or only the second segment 108).

[0040] The outer spring 202 includes an outer portion (such as a coil) having a lumen 218 or cavity extending therethrough. An electrical conductor 210, braid 206, and inner structural element 204 at least partially pass through this lumen or cavity 218 and are housed within the connecting cable 100. Specifically, while the electrical conductor 210, braid 206, and inner structural element 204 may pass through the lumen 218, portions of the electrical conductor 210, braid 206, and inner structural element 204 may extend beyond the outer spring 202 (such as within the intermediate retainer 106), as further described below.

[0041] The outer spring 202 stretches and bends to allow bending of the connecting cable 100. When the connecting cable 100 bends (such as the spiral bend of the first segment 102 or the U-bend of the second segment 108 described above), the segments of the coil in the outer spring 202 are separated from each other on the outer diameter 212 of the connecting cable 100 to create a gap, as follows relative to... Figure 7In more detail, the gap formed in the outer spring 202 allows gas trapped within the connecting cable 100 to be evacuated from the lumen 218 or cavity of the connecting cable 100 to the outside of the connecting cable 100, enabling the vacuum chamber to achieve ultra-high vacuum conditions. In some examples, the spring thickness 214 of the outer spring 202 can be in the range of 0.1 mm to 0.5 mm, in the range of 0.1 mm to 0.3 mm, or about 0.2 mm.

[0042] In some examples, the braid 206, the outer spring 202, or both the braid 206 and the outer spring 202 can magnetically shield the electrical conductor 210. By embedding the electrical conductor 210 within the braid 206 disposed within the outer spring 202, the electromagnetic field induced by the current in the electrical conductor 210 is shielded by the braid 206 or the outer spring 202, preventing the electromagnetic field from entering the vacuum chamber and disrupting the flow of charged particles in the charged particle system. Additionally, embedding the electrical conductor 210 within the braid 206 also prevents charge buildup on the insulator 208 surrounding the electrical conductor 210.

[0043] In some examples, a large portion of the cross-sectional area of ​​the connecting cable 100 is dedicated to the braid 206. In some examples, the available cross-sectional area of ​​the braid 206 is 4 mm². 2 Up to 8mm 2 Within the range. In some examples, the connecting cable 100 does not include magnetic material. Since magnetic material can deflect the flight path of charged particles, excluding magnetic material from the connecting cable 100 can help avoid interfering with the beam of charged particles used for imaging or other processes such as milling.

[0044] In some examples, the stiffness of the first segment 102 of the connecting cable 100 is less than 1 × 10⁻⁶. -4 N / m. The inner structural element 204 contributes most of the cable stiffness, but other factors such as the filler factor of the braid 206 within the lumen 218 can also contribute. In some examples, the stiffness of the first segment 102 can determine the maximum deviation of the position of the first segment 102 from its nominal position due to gravity on the first segment 102. In these examples, the parameters of the inner structural element 204 can be selected to provide sufficient support to maintain the position of the first segment while avoiding increased stress on the inner structural element 204, which could lead to life degradation. For example, the maximum deviation of the position of the first segment 102 can be less than 1.5 mm, less than 1.0 mm, or in the range of 0.4 mm to 0.8 mm. Figure 3 A view of the connecting cable 100 mounted to clamp 302 according to some examples of the teachings herein is shown, and the interior of the intermediate retainer 106 of the connecting cable 100 is shown. Figure 3In the view, the housing 118 of the intermediate fastener 106 is removed. The braid 206 is passed from the first segment 102 to the cable mount 122, into the open area, and then into another cable mount 122 that routes the braid 206 to the second segment 108. The electrical conductor 210 is located outside the bundle of individual conductive elements in the braid 206 within the open segment, as follows relative to… Figure 4 In a more detailed description, it can also be seen that the electrical conductor 210 extends from the first end 104a of the first segment 102 (i.e., at the external interface connector 114) and extends from the second end 110b of the second segment 108 (i.e., at the sample interface connector 112).

[0045] As the inner structural element 204 exits the first segment 102, it lies outside the bundle of individual conductive elements in the braid 206. The inner structural element 204 is clamped at an inner structural element clamp 304 to create axial fixation and generate tension within it. Once clamped, the inner structural element 204 can more effectively maintain its shape. The inner structural element clamp 304 can be, for example, a vise or recess that can generate compressive forces from the movement of an associated screw or bolt. In other examples, the inner structural element clamp 304 may include a retaining screw that holds the inner structural element 204 against a flat or grooved surface. Using a retaining screw can generate a more consistent clamping force over the operating temperature range and can reduce issues with meeting manufacturing tolerances. In some examples, the inner structural element clamp 304 may include pre-loading the inner structural element 204 into a hole, either alone or in combination with a retaining screw or bolt, to mechanically secure the inner structural element 204.

[0046] Figure 4 Cable mounts 122 are shown in some examples for mounting the ends (e.g., first end 104a, second end 104b, first end 110a, second end 110b) of sections (e.g., first section 102 or second section 108) of the connecting cable 100. In the example connecting cable 100 setup, the cable mount 122 may be located at one or more of the intermediate retainer 106, the external interface connector 114, and the sample interface connector 112. Preferably, the cable mount 122 does not use chemical adhesives or glues to secure the components of the connecting cable 100, to avoid introducing scaling agents or virtual leaks that could damage the high vacuum level within the vacuum chamber.

[0047] Cable mounting 122 includes a braided clip 402 and an outer spring clip 410. The outer spring clip 410 includes a collar 404 and an insert 406. The insert 406 may have a wedge shape complementary to the inner surface 412 of the collar 404. When the outer spring is driven into the outer spring clip 410, the wedge shape of the insert 406 forces the outer spring 202 to expand radially outward at the collar, increasing the internal volume within the outer spring 202 at the outer spring clip 410. This larger volume allows for easy insertion of the braided fabric 206, the electrical conductor 210, and the inner structural element 204 during the manufacture of the connecting cable 100. The outer spring clip 410 maintains tension on the ends of the outer spring 202 to hold the ends in place and ensure that the outer spring 202 shields the braided fabric 206 along the entire length of the connecting cable 100.

[0048] The braid clip 402 tightly clamps the various conductive elements in the braid 206 to increase the contact between the braid clip 402 and the braid 206 and reduce resistance and thermal resistance at the interface. Thermal and / or high-voltage electrical connections can be made to the braid 206 via the braid clip 402. In some examples, the braid clip 402 may include a vise or an open-end ring, wherein compressive force is applied by an associated screw. In arrangements where the braid 206 does not terminate at the cable mount 122 (e.g., within the intermediate fastener 106), the braid clip 402 may not be present as part of the cable mount 122.

[0049] In some examples, a gap 408 is formed between the braided clip 402 and the outer spring clip 410. In the gap 408, the electrical conductor 210 can be led out from inside the braid 206 and can be wired to terminals or contacts for connection to a stage (e.g., at sample interface connector 112) or to external electrical devices, such as sources or sensors (e.g., at external interface connector 114). In other examples, the electrical conductor 210 is simply wired outside the braided clip 402 to avoid being crushed under the clamping pressure of the braided clip 402. For example, the electrical conductor 210 can be wired outside the braid 206 at the gap 408 in the first cable mount 122 of the intermediate retainer 106 (e.g., away from the first segment 102) and then wired back into the braid 206 at the gap 408 in the second cable mount 122 of the intermediate retainer 106 (e.g., into the second segment 108).

[0050] For sections of the connecting cable 100 that do not have the inner structural element 204, the cable mount 122 does not include the inner structural element clip 304. For sections of the connecting cable 100 that do not include the outer spring 202, the outer spring clip 410 may be omitted from the cable mount 122. At some joints (such as the location where the first end 110a of the second section 108 feeds into the intermediate fixing member 106), the cable mount 122 may allow the braid 206 and / or the electrical conductor 210 to pass through without securing it.

[0051] Figure 5 A schematic diagram of the connection cable 100, as taught herein, within an example charged particle system 600 is shown. In this example, the charged particle system 600 is configured to perform both atomic probe chromatography (APT) and transmission electron microscopy (TEM) on a sample 516. The example charged particle system 600, compatible with the connection cable 100 taught herein, can also perform alternative or additional imaging modes, including but not limited to X-ray energy-dispersive spectroscopy (EDS) or electron energy-loss spectroscopy (EELS). In some examples, the charged particle beam in the charged particle system 600 can be used for processing operations such as those in a focused ion beam (FIB) system.

[0052] The charged particle system 600 may include a vacuum chamber 606 connecting a charged particle source section 601, a stage 510, a connecting cable 100, an imaging section 602, an EELS spectrometer 603, a counter electrode 604, and a detector 608. The stage 510 may be connected to a sample support 612 (such as a silicon or metal pillar) supporting a sample 516. The charged particle source section 601 generates a beam of charged particles that interact with the sample 516. Charged particles scattered, reflected, attenuated, or emitted through the interaction of the beam with the sample 516 are focused, imaged, and / or received in the imaging section 602 to produce a typical signal from charged particle microscopy such as TEM. In a specific instance of EELS, the EELS spectrometer 603 may receive charged particles behind the sample to generate an EELS signal.

[0053] To perform the APT process, the charged particle system 600 applies a continuous or pulsed high voltage to the sample 516 via the connecting cable 100 (including braid 206, outer spring 202, and / or electrical conductor 210), such as relative to... Figure 5The electric field induced at sample 516 is sufficient to evaporate ions from the sample surface. These ions are then accelerated by counter electrode 604 until they finally collide with detector 608. In some examples, ion evaporation can be controlled by applying energy pulses from laser 610. In some cases, individual ions can evaporate and be accelerated to detector 608. The flight time of ions from sample 516 to detector 608 allows for the identification of ion species within a range of ion masses. Notably, the APT process is capable of identifying light elements, which is particularly meaningful for evaluating dopant distribution in semiconductor devices.

[0054] The charged particle system 600 can be combined with other imaging processes (e.g., TEM, EDS, or EELS) to perform an APT process, thus determining structural data describing the sample, such as diffraction patterns, secondary electron emission data, sample thickness information, etc. The charged particle system 600 can be used to perform a method of generating transmission electron microscopy images at a range of tilt angles and / or positions, as a method of reconstructing three-dimensional information about the sample through atomic and electron tomography processes. Within a single platform of the charged particle system 600, imaging can be switched between APT and EM operating modes, and progressive 2D / 3D information about the sample can be provided during the APT procedure using electron microscopy. Between APT measurements, electron microscopy examinations can be performed to record the evolution of the sample shape, size, structure, and composition at multiple points in the APT procedure during sample evaporation. These translational and rotational movements occur near the electrode 614 associated with the charged particle source segment 601 and the imaging segment 602, which severely limits the available space. In some examples, the connection cable 100, as taught herein, advantageously provides electrical and thermal connection to the stage 510 to maintain the sample 516 at appropriate voltage and temperature for APT or atomic chromatography (TOMO) processes during translation and high-angle tilt rotation of the sample 516, while avoiding physical contact or interference with components close to the sample 516, such as electrode 614 or counter electrode 604, and providing imaging capability. In some examples, the connection cable 100 applies a high voltage only when the sample tilt is approximately zero degrees in both directions and the sample is near the focal point of the charged particle beam. Similarly, the connection cable 100 can only provide cooling when the sample is positioned at a large tilt angle (e.g., during APT or TOMO operation). In other examples, the connection cable 100 can apply a high voltage when the sample is positioned at a tilt angle greater than zero.

[0055] Figure 6 A schematic diagram of the electrical and thermal systems of an example charged particle system 600, including the connecting cable 100 taught herein, is shown. For simplicity, Figure 6The view shows only the portion of the vacuum chamber 606 near the electrode 614. The vacuum chamber 606 encloses the sample 516, the stage 510, and the connecting cable 100. The connecting cable 100 facilitates a thermal connection between the housing 515 (and thus the sample 516) and the external reservoir 704. The external reservoir may be a solid thermal reservoir of the type described in U.S. Application Publication No. 2022 / 0404247, published December 22, 2022, the entire contents of which are incorporated herein by reference. The connecting cable 100 facilitates electrical connections between the sample 516 and the high-voltage power supply 702, and between the sample 516 and electrical contacts 712 outside the vacuum chamber 606.

[0056] In some applications or examples, the reservoir 704 may be referred to as a heat sink. In some examples, the reservoir 704 may be a Dewar flask containing a cooling fluid (e.g., liquid nitrogen or liquid helium). In other examples, the reservoir 704 may be a solid thermal reservoir of the type described in more detail in U.S. Application Publication No. 2022 / 0404247, published December 22, 2022. In some examples, the reservoir 704 may provide the stage 510 with a cryogenic temperature in the range of 10K-50K, 10K-100K, or 35K-100K, or a temperature of about 77K or 35K. In some examples, the temperature stability of the reservoir 704 may be maintained to a tolerance in the range of 10mK to 3K. In some examples, the reservoir 704 may be a heat pump that raises the temperature of the sample 516. The reservoir 704 is connected to the cooler interface 502 via a vacuum feedthrough 706 in the wall of the vacuum chamber 606. In some examples, the cooler interface 502 may be a cold finger. The cooler interface 502 is connected to the external interface connector 114 via a high-voltage isolator 518 and a mounting interface, as further described below. The braid 206 of the connecting cable 100 is connected to the external interface connector 114 and carries heat between the external interface connector 114 and the sample interface connector 112.

[0057] In various examples, the high-voltage power supply 702 is configured to provide voltages up to 20 kV, such as voltages in the range of 5 kV to 20 kV. The high-voltage power supply 702 is connected via a separate switch to a single port 708 or multiple ports 708, such as two ports. Port 708 is connected to an electrical interface 504 via a vacuum feedthrough 706 in the wall of the vacuum chamber 606. The electrical interface 504 delivers the high voltage to the cable mount 122. Braid 206 in the connecting cable 100 carries the high voltage between the external interface connector 114 and the sample interface connector 112. In some examples, the high-voltage power supply 702 can provide a high voltage to induce the evaporation of atoms in the sample 516 to perform APT analysis as described above. The stage 510 is connected to a stage ground 710 outside the chamber. A high-voltage isolator keeps the grounded stage 510 isolated from the high voltage supplied by the connecting cable 100 at the stage 510.

[0058] Electrical contact 712 is configured to provide a static or varying voltage or current to sample 516 or stage 510. In some analytical workflows for sample 516, such as for semiconductor chip or quantum computing studies, an electrical signal is provided to sample 516 during or between analyses (i.e., in "before-and-after" studies). In some examples, conductor 210 may provide current to a heater (such as a microelectromechanical system or MEMS heater) located at or near stage 510 or sample 516 for localized heating of portions of sample 516. In some examples, conductor 210 may carry a signal from a sensor, such as a temperature sensor located at or near stage 510 or sample 516. Some use cases suitable for using connection cable 100 include applying a high voltage to the sample during a first analytical mode (e.g., APT imaging) and applying other electrical signals to the sample during a second analytical mode (e.g., readout of a temperature sensor or control of a heater near the sample). During the first analysis mode, the braid 206 and the electrical conductor 210 are all connected together to the same high voltage potential to prevent electrical breakdown (e.g., using port 708 and an associated switch), and this connection is made outside the vacuum chamber. During the second analysis mode, the braid 206 is disconnected from the high voltage and connected to ground potential to prevent charge buildup from the charged particle beam. Simultaneously, the electrical conductors 210 can each independently carry electrical signals, such as digital logic signals or sensor measurements.

[0059] As taught herein, the connecting cable 100 connects the stage 510 to the cooler interface 502 and the electrical interface 504. The stage 510 may include a main platform, a beta tilt platform, and a housing 515 for supporting a sample 516. In one example, the beta tilt platform and the housing 515 extend from a face of the main platform. The main platform can adjust the position of the housing 515 in real space in three translational directions (i.e., along the x-axis, y-axis, and z-axis) and adjust the tilt in the α-angular rotational direction (i.e., rotation about the x-axis). The beta tilt platform can adjust the tilt of the housing 515 in the beta-angular rotational direction (i.e., rotation about the y-axis). An example stage 510 suitable for use with the connecting cable 100 of this disclosure is described in U.S. Patent 11,244,805, published February 8, 2022, the entire contents of which are incorporated herein by reference.

[0060] In some embodiments, mounting plate 116 may be attached to the face of the main platform. In this arrangement, the orientation of the first segment 102 of the connecting cable 100 (e.g., the xy plane in which the helix of the connecting cable 100 rotates axially) is maintained relative to the housing 515. The first end 104a of the connecting cable 100 may remain stationary as the housing 515 translates and rotates in space. During the translational movement of the stage, the second end 104b of the first segment 102 of the connecting cable 100 does not translate relative to the housing 515. A β-tilt platform extends through the interior of the helix of the first segment 102.

[0061] The stage 510 can translate in three dimensions and tilt or rotate the sample 516 in at least two rotational directions. In some examples, the stage 510 can translate the sample 516 by a distance ranging from 0.5 mm to 4 mm in any of the x-axis, y-axis, or z-axis directions. This range can also be expressed relative to a center point (i.e., the nominal position), such that the stage 510 can translate the sample 516 relative to the center point by a distance ranging from ±0.25 mm to ±2 mm in any of the x-axis, y-axis, or z-axis directions. In one example, the stage 510 can translate the sample 516 by a distance of at least ±1 mm relative to the center point in any of the x-axis, y-axis, or z-axis directions. In some examples, the stage 510 can rotate the sample 516 relative to the nominal center position by an alpha (α) angle tilt of -90° to +90°. In some examples, stage 510 can rotate the sample relative to its nominal center position by an amount ranging from -10° to +10° in the beta (β) angle tilt direction. In some examples, stage 510 includes a high-voltage isolator supporting the β-tilted platform to isolate high voltages at stage 510 and prevent dangerous voltages from being applied to or through the main platform or other components of the charged particle system or vacuum chamber.

[0062] External interface connector 114 connects cooler interface 502 and electrical interface 504 to connection cable 100. External interface connector 114 may include a high-voltage isolator 518 between braid 206 and cooler interface 502. High-voltage isolator 518 prevents high voltage from reaching cooler interface 502 (which may be electrically grounded in some instances) and / or the walls of the vacuum chamber. High-voltage isolator 518 may be formed of a material with high thermal conductivity but poor electrical conductivity (such as sapphire). High-voltage isolator 518 can be connected to external interface connector 114 via the mounting interface of the external interface.

[0063] Cooler interface 502 can conduct heat between external interface connector 114 and sample interface connector 112 via connection cable 100. In some examples, cooler interface 502 can connect a cryogenic storage device 704 (such as a liquid helium Dewar) outside the vacuum chamber to external interface connector 114.

[0064] Electrical interface 504 may include an electrical connection plate, an external connector, and one or more wires, strips, or other electrical conductors that connect a power source, sensor, or other digital or analog electronic device outside the vacuum chamber to external interface connector 114. For example, electrical interface 504 may include pins from an electrical (vacuum) feedthrough, a flexible foil connected to external interface connector 114, and a plate or connector electrically connecting the pins to the flexible foil. Electrical interface 504 may spatially isolate individual wires to prevent discharge between them.

[0065] Figure 7 A schematic diagram showing a longitudinal cross-section of a portion of the connecting cable 100 is provided, illustrating the pumping out of the connecting cable 100. Figure 7 In this process, the connecting cable 100 undergoes partial bending, such as in the first section 102 (e.g., a helical bend) or the second section 108 (e.g., a U-bend) as described above. When the connecting cable 100 bends, the individual windings of the outer spring 202 are spaced apart from each other on the side surface of the outer spring 202 of the connecting cable 100 (e.g., at the outer diameter of the bend). The spacing of the individual windings introduces vacuum conduction paths 802 between the windings along the side surface. These vacuum conduction paths 802 advantageously enable pumping out of the interior of the connecting cable 100 (i.e., the inner volume or cavity 218 within the outer spring 202).

[0066] Placing vacuum conduction paths 802 along the side surface of the connecting cable 100 provides advantages over conventional cables that are sealed along the side surface. The interior of such conventional cables is pumped out from the cable ends, but conduction from the midpoint to the end of the cable (i.e., along the length of the cable) is very poor. Therefore, the interior of a conventional cable acts as a virtual leak. The connecting cable 100 of the present invention avoids these difficulties by providing a plurality of vacuum conduction paths 802 along the length of the cable across the side surface.

[0067] In ultra-high vacuum systems such as the charged particle system 600, the vacuum level of one or more parts of the system is maintained at 1 × 10⁻⁶. -8 mbar to 1×10 -11 Within the range of mbar. For example, the vacuum level can be maintained at 5 × 10 -10 mbar or below. At such high vacuum levels (i.e., low pressure), degassing of components within the chamber becomes a critical factor in determining how high the pressure can be achieved. In many conventional components, residual gas molecules within the component's housing may slowly leak through the housing or from small holes in the housing over extended periods. In other words, the time required to completely pump residual gas out of the component and thus out of the vacuum chamber 606 is significantly prolonged, as the residual gas will only slowly leave the interior of the component. The connecting cable 100, as taught herein, overcomes this problem by creating a vacuum conduction path 802 in the outer spring 202. The vacuum conduction path 802 is large enough to facilitate the escape of residual gas molecules from the internal volume of the outer spring 202 or the lumen 218 of the connecting cable 100.

[0068] In typical experiments, the connecting cable 100, including the outer spring 202 and braid 206, can be maintained at a high voltage, such as 15 kV. During movement of the stage 510, there is a risk of high-voltage discharge if the connecting cable 100 comes too close to the stage 510, the vacuum chamber 606, or the electrically grounded portion of the electrode 614. Similarly, contact between a portion of the outer spring 202 of the connecting cable 100 and other parts of the stage 510, the vacuum chamber 606, the electrode 614, or even the connecting cable 100 itself can cause heat leakage, which can damage the equipment and lead to a cryogenic temperature loss at the sample 516. The cables and methods described herein provide sufficient clearance for all possible combinations of stage tilting and translation to avoid high-voltage discharge and heat leakage between the outer spring 202 and the surrounding environment. In some examples, a high voltage is applied to the connecting cable 100 only when the sample tilt in both directions is approximately zero degrees and the sample is near the focal point of the charged particle beam. Similarly, the connecting cable 100 can only provide cooling when the sample is positioned at a large tilt angle (e.g., during APT or TOMO operation). In other examples, the connecting cable 100 can apply a high voltage when the sample is positioned at a tilt angle greater than zero.

[0069] Figure 8A A perspective view of the connecting cable 100 connected to a stage 510 in a neutral tilt position is shown. In the neutral position, the stage 510 has an α-angle tilt of approximately 0° and a β-angle tilt of approximately 0°. A first segment 102 of the connecting cable 100 is wound around the stage 510 and has nominal values ​​for the spacing distance 902 between all points on the connecting cable 100 (e.g., points on the outer spring 202 of the connecting cable 100) and the nearest point on the stage 510. In some examples, the minimum nearest spacing distance 902 between the connecting cable 100 and other components of the system (such as the stage 510) is greater than 0 mm, ranging from 0 mm to 10 mm, or from 2.5 mm to 10 mm. In some examples, the minimum nearest spacing distance 902 is approximately 2.5 mm when the connecting cable 100 is in the neutral position (i.e., close to 0 degrees of α and β tilt). In these examples, if no high voltage is applied, the spacing 902 between the connecting cable 100 and the stage 510 can be reduced to less than 2.5 mm during tilting operation, but still remains greater than 0 mm to prevent thermal contact between the cable and the stage (or other components within the cavity, such as electrodes). In some examples, half the diameter of the helix formed by the first segment 102 is not less than a distance greater than 0 mm, a distance in the range of 0 mm to 10 mm, or a distance in the range of 2.5 mm to 10 mm.

[0070] Figure 8B It shows the relationship with Figure 8A The same connecting cable 100 is connected to the stage 510, and the view of the connecting cable 100 overlaps in three tilt states: nominal β tilt 904, negative β tilt 906, and positive β tilt 908. In the negative β tilt 906 state, in this example, the stage 510 is tilted at a β angle of -10°. In the positive β tilt 908 state, in this example, the stage 510 is tilted at a β angle of +10°.

[0071] When the stage 510 tilts in the β-angle direction, a portion of the second segment 108 maintains a distance of 902 from the helical spatial path of the first segment 102. The shape of the second segment 108 (in some examples including a U-shaped bend) provides sufficient slack to allow the stage 510 to tilt β without tensioning the second segment 108. At the same time, the second segment 108 does not sag excessively, thus avoiding contact with the first segment 102 under large negative β-tilt values.

[0072] Figure 8C It shows the relationship with Figure 8A and Figure 8BThe same connecting cable 100 is connected to the stage 510, and the view of the connecting cable 100 overlaps in three tilt states: nominal α tilt 910, negative α tilt 912, and positive α tilt 914. In the negative α tilt 912 state, in this example, the stage 510 is tilted at an α angle of -90°. In the positive α tilt 914 state, in this example, the stage 510 is tilted at an α angle of +90°.

[0073] As the stage rotates, the second end 110b of the second segment 108 connects to the stage 510 (via the sample interface connector 112). Simultaneously, the other end of the connecting cable 100 (i.e., the first end 104a of the first segment 102) remains fixed in space and is attached to the external interface connector 114. Due to the movement of the second end 104b of the first segment 102 of the connecting cable 100 during rotation, the rotation of the stage has the effect of “winding” or “unwinding” the cable in a spiral shape (primarily provided by the internal structural element 204).

[0074] In the nominal α tilt state 910, the first segment 102 has a nominal spacing distance 916 from the stage 510. During tilting operation to a positive α angle, the first segment 102 begins to "wrap" from the nominal diameter 922 of the helix to a reduced diameter 924 of the helix, and the nominal spacing distance 916 decreases to a smaller reduced spacing distance 918. However, even at extreme α rotation values ​​(such as +90°), the reduced spacing distance 918 between the connecting cable 100 and any nearby objects (such as the stage 510, other portions of the connecting cable 100, the electrode 614, or the walls of the vacuum chamber 606) is large enough to avoid thermal or electrical leakage between the connecting cable 100 and these other objects. Simultaneously, the connecting cable 100 is configured to follow a spatial wiring path that prevents the connecting cable 100 from becoming entangled with itself or other objects. In some examples, the minimum reduced spacing distance 918 between the connecting cable 100 and other components of the system (such as the stage 510) is in the range of 2.5 mm to 10 mm. In some examples, half the diameter of the helix formed by the first segment 102 (e.g., nominal diameter 922, reduced diameter 924, or increased diameter 926) is not less than a distance greater than 0 mm, a distance in the range of 0 mm to 10 mm, or a distance in the range of 2.5 mm to 10 mm.

[0075] The internal structural element 204 of the connecting cable 100 has sufficient elasticity to restore the original shape of the connecting cable 100 when the stage 510 rotates from a positive α tilt 914 state to a nominal α tilt 910 state. When the stage 510 tilts towards a negative α angle, the first segment 102 begins to "unfold" from the nominal diameter 922 of the helix to an increased diameter 926 of the helix. Simultaneously, the nominal spacing distance 916 relative to the stage 510 increases to a larger increased spacing distance 920 relative to the stage 510. However, the closest spacing distance 902 does not increase to the extent that the connecting cable 100 threatens to connect with the wall or electrode 614 of the vacuum chamber 606. In some examples, the increased diameter 926 of the helical portion of the connecting cable 100 is in the range of 50 mm to 70 mm, or approximately 60 mm.

[0076] Figure 8D It was also shown Figure 8C The image shows a side view of the connecting cable 100 in a negative α tilt state 912, viewed from perspective. The connecting cable 100 has an increasing diameter 926 in its spiral portion (i.e., the first segment 102) within the stage, accompanied by an increasing spacing distance 920 from the stage 510. However, as the spacing distance from the cable to the stage increases during rotation at the negative α angle, the spacing distance 902 from the first segment 102 of the connecting cable 100 to the electrode 614 decreases. In a preferred example of the connecting cable 100 taught herein, the spatial routing (including, for example, shape and size) of the connecting cable 100 is selected (e.g., by appropriate tension or shape of the internal structural element 204) such that the connecting cable 100 will maintain a spacing distance 902 of at least 0 mm, at least 2.5 mm, or more preferably at least 5 mm between the cable and all surrounding environments (e.g., pole pieces, chambers, stage), while still being able to translate in three dimensions (e.g., at least 2 mm of total travel in each dimension), rotate at least a total of 180 degrees in one rotational dimension, and rotate at least a total of 20 degrees in a second rotational dimension. Thus, in some examples, the geometry of the connecting cable is selected to balance the spacing distance 902 maintained at one extreme of the α-angle tilt to the stage 510 with the spacing distance 902 maintained at the other extreme of the α-angle tilt to other elements (e.g., pole pieces 614).

[0077] Figure 9A method 1000 for manufacturing a connecting cable 100 according to examples taught herein is shown. According to various examples taught herein, the steps of method 1000 may be performed sequentially, or in some cases, more than one step may be performed simultaneously. Method 1000 includes expanding the end of an outer spring 202 (step 1002). The outer spring includes a lumen 218 extending therethrough. The end of the outer spring 202 may then be clamped to maintain the expanded opening during subsequent manufacturing steps. For example, the aforementioned outer spring clip 410 may be used to expand the end of the outer spring. The method includes inserting an inner structural element 204 into a braid 206 (step 1004). For example, the braid 206 may be attached to a thin but relatively rigid guide wire, such as, for example, a solid steel wire with a diameter of 0.2 mm. The guide wire may be fed into the expanded end of the outer spring 202, through the outer spring 202, and pulled out from the opposite end. The braid 206 is then abutted against the expanded end of the outer spring 202. When the braid 206 abuts the extended end of the outer spring 202, the inner structural element 204 is inserted or incorporated into the braid 206. Method 1000 also optionally includes inserting one or more electrical conductors 210 into the braid 206 (step 1006). For example, step 1006 may be performed before the braid abuts the outer spring or while the braid 206 abuts the outer spring 202. In some examples, the electrical conductors 210 may be inserted into the braid 206 simultaneously with the insertion of the inner structural element 204. Method 1000 includes inserting the braid 206 and the inner structural element 204 into the lumen 218 of the outer spring 202 (step 1008). For example, a guide wire may be pulled from the cable end opposite the extended end to push the braid and inner structural element into the cable. A combination of pulling the guide wire and pushing the braid from the extended end may be used. Method 1000 may also optionally include inserting the electrical conductor 210 into the lumen 218 of the outer spring 202 during the insertion of the braid 206 and the inner structural element 204 (step 1010). For example, the electrical conductor 210 may be incorporated into the braid 206 as in step 1006, and then may be pulled and / or pushed into the outer spring by the guide wire as described in step 1008.

[0078] While this teaching is described in conjunction with various implementation schemes, it is not intended to limit this teaching to such implementations. Rather, this teaching encompasses various alternatives, modifications, and equivalents, as will be understood by those skilled in the art.

[0079] The chapter titles used in this article are for organizational purposes only and should not be construed as limiting the subject matter in any way.

[0080] In the detailed descriptions of the various embodiments, numerous specific details have been set forth for illustrative purposes to provide a thorough understanding of the disclosed embodiments. However, in some examples, those skilled in the art will understand that these various embodiments can be practiced with or without these specific details. In other instances, structures and apparatus are shown in block diagram form. Furthermore, those skilled in the art will readily recognize that the particular order in which the methods are presented and performed is exemplary and is expected to vary (unless expressly indicated otherwise) while remaining within the substance and scope of the various embodiments disclosed herein.

[0081] All literature and similar materials cited in this application, including but not limited to patents, patent applications, articles, books, papers, and internet web pages, are expressly incorporated in their entirety by reference for any purpose. Unless otherwise described, all technical and scientific terms used herein have the meanings commonly understood by one of ordinary skill in the art to which the various embodiments described herein pertain.

[0082] It should be understood that the specific temperatures, concentrations, times, pressures, flow rates, cross-sectional areas, etc., discussed in this teaching are implicitly preceded by "about," resulting in slight and non-substantial deviations from the scope of this teaching. In this application, unless otherwise specifically stated, the use of the singular includes the plural. Furthermore, the use of "comprising," "including," and "containing" is not intended to be restrictive. It should be understood that both the foregoing general description and the following detailed description are exemplary and illustrative only, and not limiting of this teaching.

[0083] As used herein, in some cases, “a” or “one” may also mean “at least one” or “one or more”, unless otherwise expressly stated. Furthermore, the use of “or” is inclusive, such that the phrase “A or B” is true when “A” is true, “B” is true, or both “A” and “B” are true. Additionally, unless the context requires otherwise, singular terms should include plural forms and plural terms should include singular forms.

[0084] As used in this paper, “system” describes a set of real or abstract components, including the whole, in which each component interacts with or relates to at least one other component within the whole.

[0085] The advantages and features of this disclosure are further illustrated by the following examples:

[0086] Example 1. A connecting cable for electrical and thermal connectivity in ultra-high vacuum, the connecting cable comprising: an outer spring including a lumen extending therethrough, the outer spring including a vacuum conduction path to enable evacuation of the lumen in a vacuum environment; a braid located at least partially within the lumen of the outer spring and configured to conduct high voltage and heat; and an inner structural element disposed at least partially within the braid to maintain the shape of the connecting cable.

[0087] Example 2. The connecting cable according to Example 1 further includes: a first section configured to realize the movement of the connecting platform in three translational dimensions and a first rotational dimension, the first section including the outer spring, the braid and the inner structural element; and a second section configured to realize the movement of the connecting platform in a second rotational dimension, the second section including the braid.

[0088] Example 3. The connecting cable according to Example 2, wherein the first segment is formed in a spiral shape and the second segment is formed in a U-shape.

[0089] Example 4. The connecting cable according to any one of Examples 2 to 3 further includes an intermediate fixing member, which connects the first segment to the second segment.

[0090] Example 5. The connecting cable according to any one of Examples 1 to 4 further includes: an external interface connector for connecting a first end of the connecting cable to a thermal storage device, a high-voltage power supply, and an electrical interface; and a sample interface connector for connecting a second end of the connecting cable to the stage of the charged particle system.

[0091] Example 6. The connecting cable according to any one of Examples 1 to 5 further includes one or more electrical conductors disposed within the outer spring and configured to carry electrical signals.

[0092] Example 7. The connecting cable according to Example 6, wherein the plurality of electrical conductors includes four electrical conductors.

[0093] Example 8. A connecting cable according to any one of Examples 1 to 7, wherein the length of the connecting cable is in the range of 300 mm to 500 mm.

[0094] Example 9. A connecting cable according to any one of Examples 1 to 8, wherein the connecting cable is configured to operate at a speed of less than 10 -9 Operated under mbar pressure.

[0095] Example 10. A connecting cable according to any one of Examples 1 to 9, wherein the connecting cable is configured to maintain a distance from the environmental component during the movement of the connecting stage within the charged particle system.

[0096] Example 11. A method of manufacturing a connecting cable that provides electrical and thermal connectivity in a high vacuum environment, the method comprising: expanding an end of an outer spring, the outer spring including a lumen extending therethrough; inserting an inner structural element into a braid; and inserting the braid and the inner structural element into the lumen of the outer spring.

[0097] Example 12. The method according to Example 11 further includes: inserting one or more electrical conductors into the braid; and inserting the electrical conductors into the lumen of the outer spring during the insertion of the braid and the inner structural element.

[0098] Example 13. The method according to any one of Examples 11 to 12 further includes bending the connecting cable into a spiral shape to create a vacuum conduction path through the side surface of the outer spring.

[0099] Example 14. The method according to any one of Examples 11 to 13, wherein expanding the end of the outer spring includes driving the end of the outer spring between a wedge insert and a collar having a complementary shape.

[0100] Example 15. The method according to any one of Examples 11 to 14, wherein the outer spring defines a first section of the connecting cable, the method further comprising passing the braid through a second section of the connecting cable.

[0101] Example 16. A connecting cable for electrical and thermal connectivity in ultra-high vacuum, the connecting cable comprising: a first segment configured to enable movement of a connecting stage in three translational dimensions and a first rotational dimension, the first segment comprising: an outer spring including a first lumen extending therethrough; a braid at least partially disposed within the first lumen of the outer spring and configured to conduct high voltage and heat; and an inner structural element at least partially disposed within the braid to maintain the shape of the first segment; a second segment configured to enable movement of the connecting stage in a second rotational dimension, the second segment including the braid; and an intermediate fixing member connecting the first segment and the second segment.

[0102] Example 17. The connecting cable according to Example 16, wherein the first segment is formed in a spiral shape and the second segment is formed in a U-shape.

[0103] Example 18. A connecting cable according to any one of Examples 16 to 17, wherein the connecting cable is configured to maintain a distance from the environmental component during the movement of the connecting stage within the charged particle system.

[0104] Example 19. The connecting cable according to any one of Examples 16 to 18 further includes one or more electrical conductors disposed within the first segment and the second segment and configured to carry electrical signals.

[0105] Example 20. The connecting cable according to any one of Examples 16 to 19 further includes: an external interface connector for connecting a first end of the connecting cable to a thermal storage device, a high-voltage power supply, and an electrical interface; and a sample interface connector for connecting a second end of the connecting cable to the stage of the charged particle system.

Claims

1. A connecting cable for electrical and thermal connectivity in ultra-high vacuum, the connecting cable comprising: An outer spring, the outer spring including a lumen extending therethrough, the outer spring including a vacuum conduction path to enable evacuation of the lumen in a vacuum environment; A braided fabric, which is at least partially located within the cavity of the outer spring and configured to conduct high voltage and heat energy; and An internal structural element, which is at least partially disposed within the braid to maintain the shape of the connecting cable.

2. The connecting cable according to claim 1 further includes: The first section is configured to enable movement of the connecting platform in three translational dimensions and a first rotational dimension, and the first section includes the outer spring, the woven fabric, and the inner structural element; and The second section, configured to enable movement of the connecting platform in a second rotational dimension, includes the woven fabric.

3. The connecting cable according to claim 2, wherein the first segment is formed in a spiral shape and the second segment is formed in a U-shape.

4. The connecting cable according to claim 2 further includes an intermediate fixing member, the intermediate fixing member connecting the first segment to the second segment.

5. The connecting cable according to claim 1, further comprising: An external interface connector is used to connect the first end of the connection cable to a thermal storage device, a high-voltage power supply, and an electrical interface. and A sample interface connector for connecting the second end of the connecting cable to the stage of the charged particle system.

6. The connecting cable of claim 1 further includes one or more electrical conductors disposed within the outer spring and configured to carry electrical signals.

7. The connecting cable according to claim 6, wherein the plurality of electrical conductors comprises four electrical conductors.

8. The connecting cable according to claim 1, wherein the length of the connecting cable is in the range of 300 mm to 500 mm.

9. The connecting cable of claim 1, wherein the connecting cable is configured to operate at a speed below 10 -8 Operated under mbar pressure.

10. The connecting cable of claim 1, wherein the connecting cable is configured to maintain a distance from the environmental component during movement of the connecting stage within the charged particle system.

11. A method for manufacturing a connecting cable that provides electrical and thermal connectivity in a high vacuum environment, the method comprising: The end of the outer spring is expanded, the outer spring including a lumen extending therethrough; Insert the internal structural elements into the woven fabric; as well as The braided fabric and the inner structural element are inserted into the cavity of the outer spring.

12. The method of claim 11, further comprising: Insert one or more electrical conductors into the braid; as well as The electrical conductor is inserted into the cavity of the outer spring during the insertion of the braid and the inner structural element.

13. The method of claim 11, further comprising bending the connecting cable to create a vacuum conduction path through the side surface of the outer spring.

14. The method of claim 11, wherein expanding the end of the outer spring comprises driving the end of the outer spring between a wedge-shaped insert and a collar having a complementary shape.

15. The method of claim 11, wherein the outer spring defines a first section of the connecting cable, the method further comprising passing the braid through a second section of the connecting cable.

16. A connecting cable for electrical and thermal connectivity in ultra-high vacuum, the connecting cable comprising: A first segment, configured to enable movement of the connecting stage in three translational dimensions and a first rotational dimension, comprises: An outer spring, the outer spring including a first lumen extending therethrough, A braided fabric, at least partially disposed within the first cavity of the outer spring and configured to conduct high voltage and heat; and An internal structural element, which is at least partially disposed within the woven fabric to maintain the shape of the first segment; A second section, configured to enable movement of the connecting stage in a second rotational dimension, the second section including the woven fabric; and An intermediate fixing member connects the first section and the second section.

17. The connecting cable of claim 16, wherein the first segment is formed in a spiral shape and the second segment is formed in a U-shape.

18. The connecting cable of claim 16, wherein the connecting cable is configured to maintain a distance from the environmental component during movement of the connecting stage within the charged particle system.

19. The connecting cable of claim 16, further comprising one or more electrical conductors disposed within the first segment and the second segment and configured to carry electrical signals.

20. The connecting cable according to claim 16, further comprising: An external interface connector is used to connect the first end of the connection cable to a thermal storage device, a high-voltage power supply, and an electrical interface. and A sample interface connector for connecting the second end of the connecting cable to the stage of the charged particle system.

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