1012results about "Scanning probe microscopy" patented technology

The invention relates to the technical field of concrete detection, in particular to a dynamic detection and analysis method and system for early performance of ultra-high performance concrete. According to the technical scheme, the method comprises the steps of establishing a raw material characteristic spectrum library based on multi-physics field coupling, constructing a dynamic detection array based on a time sequence, developing a multi-modal data fusion algorithm, establishing a nonlinear coupling effect decomposition model and implementing dynamic parameter inversion. According to the method, a technical chain of four-dimensional monitoring network-multi-physics field coupling analysis-cross-scale prediction-adaptive regulation and control is constructed, so that dynamic accurate detection and intelligent regulation and control of the early performance of the ultra-high performance concrete are realized, and the technical bottlenecks of a traditional method in the aspects of parameter coupling, cross-scale association and real-time regulation and control are solved; the early performance prediction precision and the maintenance efficiency are remarkably improved, the cracking risk is reduced, and reliable technical support is provided for application of the ultra-high performance concrete in major engineering.

The invention relates to a charge accumulation characteristic analysis method for a polyimide material, and the method comprises the steps: applying a multi-stress synergistic effect to the polyimide material based on the multi-stress state of the polyimide material in the electric field, temperature, mechanical stress and irradiation in a deep space environment; a dynamic charge migration model of the polyimide material under the multi-stress synergistic effect is constructed, and the charge accumulation characteristic of the polyimide material is analyzed. According to the invention, based on the multi-stress state of electric field, temperature, mechanical stress and irradiation of the polyimide material in a deep space environment, a multi-stress synergistic effect is applied to the polyimide material, so that the problem of distortion of traditional single-stress or pairwise combined stress measurement is solved; through a dynamic charge migration model, charge accumulation characteristics of the polyimide material under the action of an electric field, temperature, mechanical stress and irradiation are analyzed, and accurate prediction, regulation and control for researching the electrical performance of the polyimide material are realized.

The invention discloses a scanning electrochemical microscope in-situ stress corrosion testing device and method, and belongs to the technical field of material stress corrosion testing, and the device comprises a base, a power transmission module, a clamping module, a corrosion module, a signal acquisition module and a scanning electrochemical microscope module. Slow strain rate stretching of a sample is achieved through a servo motor, a planetary gear speed reducer and a transmission mechanism, the clamping module is integrated with a force sensor to monitor loads in real time, the corrosion module provides a temperature-controllable corrosion environment, and the scanning electrochemical microscope module achieves electrochemical scanning of the surface of the sample. The device can synchronously obtain a load-deformation curve, corrosion morphology and microcell electrochemical information under stress-corrosion-temperature multi-field coupling, and provides an effective technical means for deeply researching a stress corrosion mechanism of a material. The method comprises the steps of sample installation, corrosion solution preparation, electrode arrangement, tensile test, electrochemical scanning and the like, and has the advantages of simplicity and convenience in operation, comprehensive data, high precision and the like.

The invention discloses a defect detection method, device and equipment and a storage medium. The method comprises the following steps: scanning a target sample through an atomic force microscope to determine a target defect; the depth-to-width ratio of the target defect is less than 0.01; and determining at least one level of mark point according to the target defect so as to position the target defect through the at least one level of mark point. By adopting the technical scheme, the target defects with the minimum depth-to-width ratio can be more accurately positioned in the target sample, missing detection or false detection possibly occurring in a traditional defect detection method is avoided, and the positioning accuracy of the defects with the minimum depth-to-width ratio is improved.

The invention belongs to the technical field of micromachining, and discloses a flexible micro needle tip array electrode based on composite multi-layer metal and a preparation method of the flexible micro needle tip array electrode. The flexible micro needle tip array electrode comprises a flexible substrate and a silicon micro needle tip array structure arranged on the flexible substrate, each silicon micro needle tip in the silicon micro needle tip array structure is provided with composite multilayer metal capable of conducting electricity and conducting signals, and the composite multilayer metal sequentially comprises a seed layer, a structural layer, an adhesion layer and a contact layer from inside to outside; the material of the seed layer is Cr, Ti, Ni, Mo, Ta, W, Fe, Cu, Au, Ag or Pt, the material of the structural layer is Cu, Ag or Au, the material of the adhesion layer is Cr, Ni, Ti, Mo, Ta or W, and the material of the contact layer is Au, Ag or AgCl. According to the invention, the composite multi-layer metal is used as the conductive layer of the flexible micro-needle-point array electrode, so that the contact impedance of the flexible micro-needle-point array electrode is reduced.

A method is presented for locating charge traps in a crystal lattice. The method includes: arranging a local probe having an inversion-symmetric lattice defect, wherein energy levels of the lattice defect are non-linearly Stark-shiftable by means of charge traps in the crystal lattice; determining Stark-shifted photoluminescence emission spectra, wherein each of the photoluminescence emission spectra is determined in a respective scanning operation by means of photoluminescence excitation in the crystal lattice; determining an integrated spectrum by integrating the photoluminescence emission spectra; determining jump probabilities from consecutive ones of the photoluminescence emission spectra and determining a charge trap configuration from the jump probabilities; determining simulated spectra by means of Monte Carlo simulation based on the determined charge trap configuration and a resulting Stark shift; and determining an optimal spatial arrangement of the charge traps neighboring the local probe by comparing the integrated spectrum with the simulated spectra.

The invention discloses an atom manipulation construction method of an artificial quantum structure on a two-dimensional layered material substrate, which comprises the following steps of: under an ultrahigh vacuum condition, evaporating and depositing noble metal atoms and non-metal atoms on the surface of a two-dimensional layered material by a molecular beam epitaxy method, and applying a voltage pulse through a tip of a scanning tunneling microscope to construct the artificial quantum structure on the two-dimensional layered material substrate. The method comprises the following steps: accurately lifting and placing monodisperse noble metal atoms, applying a voltage pulse through a tip of a scanning tunneling microscope, accurately placing a single non-metal atom near the noble metal atoms, accurately lifting and placing the single noble metal atom and the non-metal atom for multiple times, and carrying out N-type and P-type doping. And construction of an atomic-scale precise artificial quantum structure is realized. According to the method, accurate positioning, lifting, carrying, placing and other operations of the monatomic on the surface of the two-dimensional layered material are carried out, the problems of controllable control and structure construction of the monatomic on the surface of the two-dimensional layered material are solved, preparation of the diatomic PN junction is achieved, and a feasible scheme is provided for accurate design of quantum devices with atomic scales.

The invention discloses a method for characterizing physical properties of a single-layer graphene / semiconductor heterojunction. The method comprises the following steps: providing a physical property model about a single-layer graphene-semiconductor heterojunction, wherein influence factors comprise the change of Fermi level of single-layer graphene after the heterojunction is formed and the influence of an interface state on a formation position of a contact potential difference; extracting heterojunction electrical characteristics by using a Kelvin probe force microscope; the interface layer spacing is obtained; and importing the heterojunction electrical characteristics and the interface interlayer spacing into a physical characteristic model, and analyzing to obtain physical characteristics. According to the new theoretical model and the method for realizing the nondestructive characterization of the physical characteristics of the heterojunction by using the Kelvin probe microscope based on the theoretical model, the influence of the change of the Fermi level of the single-layer graphene and the interface state on the formation position of the contact potential difference is fully considered; key interface physical properties, especially built-in potential and depletion region characteristics which are crucial to device performance, can be accurately analyzed.

The invention discloses a salt cavern ammonia reservoir stability evaluation system based on multi-parameter fusion and intelligent perception, and aims to solve the problem of stability evaluation of a salt cavern ammonia reservoir. According to the system, the geological condition is determined through a three-dimensional seismic exploration system and a drilling exploration technology, and sonar measurement and a sensor are used for monitoring data such as the cavity internal pressure and the volume shrinkage condition of the ammonia storage library in real time. Multi-source parameters such as the internal pressure, the cavity volume shrinkage rate and the safety pillar width are fused, micromechanical parameters and macrogeological conditions are incorporated into a stability coefficient, and the judgment accuracy is improved. The Internet of Things based on a deep learning algorithm is used for collecting data through a sensor network and transmitting the data to a large platform for analysis, so that real-time judgment and intelligent perception of stability can be realized, an operation risk can be predicted, and a response mechanism can be made in time. Meanwhile, the method provides mature thoughts and references for stability evaluation of similar underground reservoirs.

The invention relates to the technical field of mineralogy, in particular to a complex iron mineral distinguishing and quantifying method and an iron mineral content analysis method, which innovatively combines chemical dissolution, automatic mineralogy analysis and a micro-area magnetic verification technology to realize distinguishing and quantifying of complex iron minerals. According to the analysis method, a closed and mutual verification analysis system is formed, acid treatment of carbonate, automatic mineralogy analysis of residual minerals, micro-area magnetic verification correction of misjudgment of maghemite, element surface scanning verification of mineralogy total quantification accuracy and a final calculation result, and closed verification of the total iron content of chemical analysis are combined, and therefore the comprehensive performance of the magnetic separation system is improved. The reliability of a final result is ensured and standardized popularization and application are facilitated.

The invention belongs to the technical field of semiconductor material surface engineering and defect analysis, and provides an ultrahigh vacuum surface defect detection method and system based on a scanning tunneling microscope, and the method comprises the following steps: carrying out mechanical stripping on a bulk single crystal gallium oxide sample based on the cleavage property of a crystal, and obtaining a gallium oxide single crystal wafer with a micron thickness; placing the stripped single crystal gallium oxide sample in an ultrahigh vacuum environment, and removing atmospheric adsorbates on the surface through vacuum high-temperature annealing treatment; performing sputtering annealing cycle treatment on the surface of the preliminary annealing sample in an ultrahigh vacuum environment to generate an oxygen vacancy defect on the surface so as to obtain a post-treatment sample; the oxygen vacancy concentration, the surface cleanliness and the surface atom orderliness are verified through auxiliary characterization means (XPS, LEED); performing scanning imaging on the surface of the post-treatment sample through a scanning tunneling microscope (STM), and performing oxygen vacancy defect identification by combining with an oxygen vacancy defect STM image simulated by DFT calculation; according to the method, the atomic-scale resolution of the surface of the single crystal gallium oxide sample is detected through the scanning tunneling microscope, the oxygen vacancy defect and other various surface defects are accurately recognized, and the surface state of the sample is comprehensively evaluated.

The embodiment of the invention discloses a scanning NV probe microscope which comprises an atomic force microscopy system used for detecting surface topography information of a sample and an optical detection magnetic resonance system used for detecting surface magnetic field distribution information of the sample, and the atomic force microscopy system comprises a vibration arm and a diamond probe. The optical detection magnetic resonance system comprises an NV color center, a transition excitation light path and a fluorescence detection light path; a sample to be scanned and the transition excitation light path are respectively positioned on two opposite sides of the diamond probe, and the transition excitation light path and the fluorescence detection light path are positioned on the same side of the diamond probe; a first metal coating film is arranged on one side, close to the sample, of the diamond probe and is used for blocking surface fluorescence of the sample. According to the scanning NV probe microscope provided by the embodiment of the invention, the metal coating is arranged at the bottom of the diamond probe to block stray fluorescence from the surface of the sample, so that the problems of low magnetic field imaging signal-to-noise ratio and limited measurement precision of the existing scanning NV probe microscope are solved.

The invention discloses a biological scaffold viscoelasticity evaluation method and related equipment, and aims to overcome the defects of an existing biological scaffold viscoelasticity test method and biological tissue suitability quantitative evaluation. The method comprises the following steps: determining a target implantation part, and acquiring force relaxation experimental data of a biological scaffold by using an atomic force microscope; judging a contact point of the probe and the bracket based on the data; determining the moment when the force signal is stable after the support is compressed to the preset deformation according to the contact point as a force relaxation starting point; calculating the characteristic time when the force value is attenuated to half by taking the starting point as a timing starting point as a microscopic viscoelasticity index; and finally, realizing quantitative evaluation of viscoelasticity suitability by comparing the characteristic time of the stent and the target tissue.

The invention relates to the technical field of industrial detection, and discloses a lithium niobate metasurface defect intelligent identification method based on reactive ion beam etching, which systematically solves the problem of scarcity of experimental data through physical driving simulation and a physics-based rendering algorithm, and provides large-scale field specific training data for a deep learning model. The bidirectional coupling simulation model generates defect morphology prediction data conforming to an etching dynamics law based on real process parameters and material parameters, the prediction data is converted into a synthetic image with real microscopic image statistical characteristics by a physical rendering algorithm, and the quality and consistency of the synthetic data are ensured by an automatic labeling and statistical verification process. According to the method, the number of samples of the ternary association database is multiplied, and extreme process conditions and rare defect modes which are difficult to obtain through experimental collection are covered.

The invention discloses a micro-nano structure machining and detecting integrated device for a micro-spherical surface and a centering method. The device comprises an AFM, a high-precision air floating main shaft, a centering mechanism, an XZ-direction two-dimensional manual displacement table and a Y-direction one-dimensional manual displacement table, and the centering mechanism comprises a clamp, a clamp adapter and an XY-direction two-dimensional manual displacement table; the clamp is fixed on the clamp adapter; the clamp adapter is fixed on the XY-direction two-dimensional manual displacement table; the XY-direction two-dimensional manual displacement table is fixed on the rotary table; the rotary table is fixed on the Y-direction one-dimensional manual displacement table; and the AFM is fixed on the XZ-direction two-dimensional manual displacement table. According to the invention, the AFM is combined with the high-precision air floating main shaft and other devices, so that the integration of processing and detection on the surface of the microsphere is realized, and high-precision aligning is realized. The center adjusting operation is simple, machining and detection of the spherical surface can be achieved, the machined structure is stable, the consistency is good, mass copying can be achieved, the detection performance is stable, and the data repeatability is high.

The invention discloses a method for judging whether seepage phase change and leakage occur in multi-scale static seal, which comprises the following steps of: 1, acquiring positive pressure sigma under the working condition of a static seal product by utilizing a force sensor or a finite element simulation method; step 2, obtaining height distribution of the contact surface of the static sealing product by using a high-precision microscope, and obtaining characteristic parameters; 3, according to the contact basic equation, solving the relation between the contact area and the positive pressure and the generalized diffusion variance; 4, for a certain specific analysis scale, giving a leakage critical characteristic line L of a corresponding critical contact area ratio; 5, in a characteristic state plane, namely a roughness hRMS-fractal index H plane, according to the relative position of the characteristic parameters and the leakage critical characteristic line L, whether leakage occurs or not is judged; the problem that a traditional sealing performance evaluation method depends on an empirical threshold and cannot quantitatively represent multi-scale contact characteristics and seepage phase change critical conditions is solved.

The invention provides a wafer-level cluster coplanar waveguide electrode array, a preparation method and a test system. The coplanar waveguide electrode array comprises an insulating substrate and a plurality of coplanar waveguide electrodes which are arranged in a periodic array; each coplanar waveguide electrode comprises a central transmission section, a probe pad and a gradual transition section; through the design of the central transmission section and the gradual transition section of the coplanar waveguide configuration, the whole-course impedance matching from an external probe to a nano gap is ensured, so that nanosecond and even picosecond-level ultrafast electric pulses can be transmitted to the cluster function unit with extremely low loss and distortion; through overlay and multi-step photoetching and in combination with a negative feedback electromigration technology, a nano gap is manufactured with high success rate, and a cluster function unit is integrated; besides, a test system integrating a coplanar waveguide electrode array and a high-end test instrument is used for exciting and capturing the ultrafast response of a cluster functional unit, and the single write-in time of a cluster device is directly pushed to a subnanosecond level (lt;

The invention relates to the field of atomic force microscope probe cleaning, and provides a method for cleaning an atomic force microscope probe and detecting the cleaning effect, and the method for cleaning the atomic force microscope probe comprises the steps: providing a cleaning object with a tip, and the diameter of the tip of the cleaning object is not greater than the diameter of the tip of the probe of an atomic force microscope; starting the atomic force microscope, enabling the probe and the cleaning object to move relatively, enabling the tip of the cleaning object to face the tip of the probe, and enabling the tip of the cleaning object and the tip of the probe to interact with each other so as to remove pollutants at the tip of the probe. The method can be used for efficiently and conveniently cleaning pollutants at the tip of the probe of the atomic force microscope, so that the service life of the probe can be prolonged, and various measurement performance indexes related to the probe can be improved; and the probe can be more conveniently and widely applied to scanning of various samples, and the application value is high.

The invention relates to the technical field of microcosmic measurement, and discloses a morphology construction method, device and equipment of a nanoporous material and a medium, and the method comprises the following steps: obtaining profile data of the nanoporous material; determining a baseline of the profile data based on the profile data; based on the profile data and the base line, pore parameters are obtained, and the pore parameters comprise the pore diameter, the pore depth and the porosity; and based on the pore parameters, constructing the morphology of the nano-pore material. According to the method, the limitation of a traditional measurement method is effectively overcome, the complete three-dimensional shape of the nano-porous material can be constructed, and the method is also suitable for various nano-porous materials including but not limited to porous media such as energy storage materials, catalytic materials, biomedical materials and shale.

A measurement system includes: a first laser device for outputting a pump light as a pulse laser in response to an input first signal; a second laser device for outputting a probe light as a pulse laser in response to an input second signal; a trigger generator and delay time controller for inputting the first signal and the second signal to the first laser and the second laser, repeatedly inputting the first signal and the second signal by switching a variable delay value which is a difference between a timing of inputting the first signal to the first laser and a timing of inputting the second signal to the second laser in a plurality of ways, and outputting a reference signal to a lock-in amplifier when switching the variable delay value; an auxiliary optical system for guiding the pump light and the probe light to sample; a cantilever having an probe tip disposed proximate to the sample; and a controller for applying a periodically varying voltage to the cantilever and outputting a change amount signal which is a voltage or a current corresponding to a change in the resonance frequency of the cantilever, wherein the lock-in amplifier measures the change amount signal based on reference signal.

The invention relates to a compatible microscopic surface scanning system, which comprises a microscopic imaging system used for observing and confirming the position of a detected sample; the plane coarse movement displacement table has an X movement direction and a Y movement direction and is used for realizing coarse positioning on the sample and moving the sample to the position below the probe; the Z-axis approaching displacement table and the bracket thereof are used for fixing a signal acquisition circuit and realizing approaching of the probe to the sample; the nanometer displacement table and the controller thereof have movement in the X axis direction, the Y axis direction and the Z axis direction and are used for completing plane scanning in the X direction and the Y direction, and meanwhile the Z axis is used for further controlling the distance between the probe and the surface of the sample within a range of several nanometers after the scanning probe passes through the coarse proximity; the two signal acquisition circuits are respectively used for acquiring AFM signals and STM signals and transmitting the AFM signals and the STM signals to the signal acquisition equipment and the upper computer; and the signal acquisition equipment and the upper computer software are used for reading, processing and storing the signals collected by the signal acquisition circuit. The design scheme of moving the probe in the Z axis and moving the sample in the XYZ two-stage three axes is adopted, two signal acquisition circuits are compatible, the functions of AFM and STM are achieved at the same time through one set of equipment, scanning information of the microscopic surface of the sample is detected in multiple ways, the equipment cost is saved, the detection efficiency is improved, and the detection cost is reduced. And the multi-angle analysis on the microstructure of the sample is enhanced.

The invention relates to the technical field of processing, testing or inspection of aircraft parts, and provides a surface corrosion evaluation method for an aluminum alloy plate with an epoxy coating, which comprises the following steps: acquiring an aluminum alloy plate sample with an epoxy coating at different time after being exposed in a coastal atmospheric environment, collecting two-dimensional closed corrosion area image data of the surface of the sample, and calculating the surface corrosion of the aluminum alloy plate with the epoxy coating according to the two-dimensional closed corrosion area image data; processing the image to extract a closed boundary of the corrosion area; calculating the boundary length of the corrosion area and the included corrosion area, and calculating the fractal dimension of the corrosion area based on the length and the area; according to the method, the correlation model between the fractal dimension of the corrosion area and the exposure corrosion time is established, the interval distribution of the fractal dimension under different corrosion time is determined, the method is used for evaluating the corrosion state and the development trend of the corrosion state, the limitation of parameter evaluation modes such as subjective judgment and single corrosion depth is avoided, and the accuracy and objectivity of a corrosion evaluation result are effectively improved.

An apparatus and method directed to sample characterization with an AFM using a pulsed IR laser in force volume mode, i.e., force volume mode combined with AFM-IR, referred to herein as FV AFM-IR. In this way, lateral forces are suppressed during probe positioning, and precise force control allows adjusting the tip-sample interaction force, including keeping the tip-sample interaction force constant or exerting pulling forces. Nano-spectroscopic measurements with sub-20 nm, and even sub-10 nm resolution can be acquired together with nano-mechanical and other property measurements. Notably, probe resonance shifts can be compensated with frequency tracking methods, and signal normalization by the Q-factor can be used to ensure that the extracted light-induced surface pulse force is substantially independent of damping.

The invention provides a gas occurrence dynamic response modeling method based on coal matrix surface multi-parameter coupling, which mainly comprises the following steps: (1) collecting a coal sample, and then processing and preprocessing the coal sample; (2) carrying out micro-scale surface parameter detection on the processed and pretreated coal sample; (3) performing coupling model construction and parameter calibration on the detected coal sample; and (4) carrying out model verification and comparative analysis on the constructed coupling model. Quantitative correlation of microscopic surface property evolution and macroscopic adsorption behaviors in the gas occurrence process is achieved for the first time, the prediction error is improved by 2-3 times compared with the prediction precision of a traditional single-parameter model, and theoretical support can be provided for efficient development of coal bed gas.

The invention relates to the field of nano science and nano technology, in particular to a low-power particle capture and local thermal detection method and device based on tip-enhanced Raman optical tweezers, under laser irradiation, directional optical force is generated through an enhanced electric field between a nano tip and metal particles, and capture of the metal particles is achieved; raman scattering on the surface of the needle tip can be excited through focused laser, and the local temperature of the needle tip can be obtained by analyzing the change of a Raman characteristic peak. According to the method, directional optical force is generated through an enhanced electric field between the needle tip and the metal particles to capture the metal particles, the problem that the metal particles cannot be captured by single-beam 532 nm laser is solved, the power density of captured particles is reduced, and the adverse effect of the heat effect on capture is reduced. The method also can amplify the Raman signal of the needle tip to realize Raman detection of a local position, realizes temperature monitoring at the capture position, and lays a foundation for exploring the influence of the thermal effect on the capture process.

The invention relates to the technical field of scanning tunneling microscopes, and discloses a scanning probe measuring device and a control method for pinpoint-to-pinpoint imaging, two pinpoints are oppositely arranged, and the pinpoints are accurately controlled and movably positioned based on a basic working mode of a scanning probe microscope. A needle tip-tunnel junction-needle tip working structure is established, after bias voltage is applied externally, electron tunneling between needle tips only relates to a small number of atoms or single atoms at the tail ends of the needle tips, the tunneling effect that the small number of atoms contribute to electrons is achieved, and therefore small number or single atom imaging is achieved. The device can be rapidly transplanted to application scenes of low temperature, strong magnetic field, optical measurement and the like, the double-needle-point structure is regulated and controlled through piezoelectric displacement or an electric field, tunnel junction width and barrier height can be optimized in real time, and research on dynamic construction and dynamic electrical characteristics of nanoscale tunnel junctions is greatly facilitated.

The invention relates to an alkali metal gas chamber anti-relaxation self-assembly molecular coating adsorption energy quantification method, which finally realizes the physical quantification of the anti-relaxation coating adsorption energy by establishing a contact angle and surface topography collaborative characterization model and combining an adsorption-desorption dynamic formula, and is characterized by comprising the following steps: 1) establishing a contact angle and surface topography collaborative characterization model; depositing organosilane on a gas chamber glass substrate by adopting a liquid phase self-assembly method to form an anti-relaxation coating sample; step 2, selecting a plurality of measuring points on the anti-relaxation coating sample, dropping a 1 [mu] L ultrapure water liquid drop on each measuring point, determining a polarization retention angle of each measuring point according to the liquid drop height and the liquid drop substrate radius obtained by a contact angle measuring instrument, and scanning a local area of the corresponding measuring point by using an atomic force microscope (AFM), extracting an arithmetic mean value Ra of the surface roughness parameter and a root-mean-square value Rq of the surface roughness parameter as quantitative indexes of the polarization maintaining cross section; and step 3, taking free energy formed by the molecular layer of the coating as coating adsorption energy delta G.

The utility model discloses an in-situ illumination KPFM testing device. The in-situ illumination KPFM testing device comprises a KPFM tester body, the KPFM tester body comprises a laser detector, a reflective mirror, a spectroscope, a laser and a sample table; laser emitted by the laser device sequentially passes through the spectroscope, the sample table and the reflective mirror and enters the laser detector; an additional light source is arranged at a position close to the sample table, and the distance between a light outlet of the additional light source and the sample table is 3-5cm; and a light filtering assembly is arranged at an inlet of the laser detector. According to the testing device, interference factors in the testing process can be effectively reduced while the authenticity of the testing environment is kept, so that the testing efficiency and precision are improved, and the accuracy and reliability of in-situ illumination testing through the KPFM are remarkably improved.

The invention relates to a terahertz near-field imaging light path calibration device and a terahertz near-field imaging light path calibration method. The device comprises a first visible light source, a second visible light source, a first collimation visible light source, a second collimation visible light source, a first light path collimation system, a second light path collimation system, a light path adjusting system, a circular reflector, a terahertz quantum cascade laser, a thermal detection array, a terahertz quantum well detector and an atomic force microscope platform. The THz laser source and the detector are simulated through the divergent visible light source, the lifting position point of the light path is calculated, light beams can be accurately coupled to the position of the needle point after being focused, errors caused by improper light path adjustment are reduced, meanwhile, the overlapping effect of light spots at the needle point is calibrated through the circular reflector and the thermal detection array, and the detection accuracy is improved. And the thermal detection array is used for observing the convergence effect of THz reflection light spots at the position of the detector, so that the effective focusing and coupling efficiency of THz waves in a near-field region of a probe sample can be improved.

The invention discloses a processing defect detection method and system based on a semiconductor integrated circuit, and belongs to the technical field of semiconductor manufacturing data processing and defect detection, and the method comprises the steps: obtaining a high-resolution surface topography scanning matrix, an interlayer stress distribution matrix and a transient electrical response matrix of a specified process layer of a target wafer, and constructing an original feature tensor after correction; generating a multi-dimensional coupling feature matrix, and constructing a spatial adjacency topology network and a cross-layer coupling energy propagation graph model; performing energy iteration deduction on the basis of introducing a current density direction vector and a thermal diffusion coefficient parameter to obtain a potential energy gathering path; a microdefect risk coupling coefficient distribution diagram is generated through time sequence folding mapping and nonlinear coupling calculation, hidden defect characterization parameters are extracted through multi-scale feature compression and abnormal clustering analysis, and defect space positioning and process compensation parameter adjustment suggestion output are achieved; according to the invention, the subcritical microscale latent defect can be identified, and the detection sensitivity and reliability are improved.