The invention discloses a terahertz
resonant tunneling diode radiation source integrated with a cavity-backed
patch antenna, which belongs to the technical field of terahertz
wireless transceiving and comprises a substrate, and an RTD, the cavity-backed
patch antenna, a GSG direct-current bias line and two stable resistors which are positioned above the substrate, the back cavity
patch antenna comprises a back cavity bottom reference ground, a back cavity
metal side wall, a back cavity
passivation layer, a patch
feeder line, a
radiation patch and a back cavity top reference ground; the RTD and the GSG
direct current bias line are located above the back cavity patch antenna, the
radiation patch is connected to the
radio frequency side of the RTD through the patch
feeder line, and the GSG
direct current bias line is connected to the
direct current side of the RTD. Terahertz oscillation signals are excited through
resonance of the RTD and the cavity-backed patch antenna, after the terahertz oscillation signals are enhanced through integrated cavity-backed
resonance, high-
gain radiation on the air side is achieved through the radiation patch, and loss of terahertz
waves on the substrate side can be effectively reduced; compared with a traditional mode of loading a Si lens on the substrate side, the integrated back cavity structure has the advantages of
miniaturization and low profile, and can meet application requirements.