This invention discloses a
gallium oxide field-effect
transistor based on the tunneling effect and its fabrication method, relating to
semiconductor technology. It addresses the problem of insufficient electrical characteristics in existing short-channel
gallium oxide radio frequency devices by proposing this solution. A
silicon carbide substrate has an N-type doped region below the source and a P-type doped region below the gate; the N-type and P-type doped regions are arranged adjacently to form a tunneling
diode; and both the N-type and P-type doped regions are electrically contacted with the lower end face of the
gallium oxide epitaxial layer. The
advantage is that the tunneling effect provides a fast
discharge path for holes generated by
impact ionization, thereby reducing the hole concentration in the channel region, improving the
electric field distribution, and reducing the
electric field peaks near the gate and drain. By controlling the
doping concentration and thickness distribution of the tunneling layer, the
depletion region of the channel can be effectively expanded, reducing the gate-source
and gate-drain parasitic capacitances, thus improving the
transconductance,
cutoff frequency, and maximum oscillation frequency performance of the device.