The application discloses a
semiconductor dielectric layer structure and a manufacturing method. The
semiconductor dielectric layer structure comprises a
semiconductor substrate, an epitaxial layer arranged on the surface of the semiconductor substrate, a plurality of grooves arranged on the epitaxial layer, a first
thermal oxidation layer arranged on the surface of the epitaxial layer, in-situ doped polysilicon filled in the grooves, a
gate oxide layer formed between the in-situ doped polysilicon and the grooves, a
silicon nitride layer arranged on the surface of the first
thermal oxidation layer between the adjacent grooves, a second
thermal oxidation layer arranged on the surface of the
silicon nitride layer, a deposited
oxide layer arranged on the surface of the second thermal oxidation layer, a
contact hole formed by hollowing out the deposited
oxide layer, the second thermal oxidation layer, a part of the first thermal oxidation layer and the
silicon nitride layer at the bottom of the second thermal oxidation layer, and the bottom end of the
contact hole extending to the surface of the epitaxial layer in the middle part of the bottom end, so that the top of the epitaxial layer is exposed, and the bottom end edge of the bottom part of the
contact hole extends to the in-situ doped polysilicon to
expose the
gate oxide layer of the inner wall of the groove. The application can achieve the purpose of reducing
reverse leakage current.