The invention is a method for avoiding or reducing V-type defect of blue-
green light emitting
diode material which has in turn
sapphire substrate, low-temperature grown GaN buffer layer, high-temperature grown n-GaN layer, InGa1-Yn / GaN multi-
quantum trap layer, and p-Alx Ga1-xN / p-GaN layer, characterized in that: there is a grown n-AlxGa1-xN / GaN
superlattice layer between the high-temperature grown n-GaN layer and InGa1-Yn / GaN multi-
quantum trap layer, where 0<x<1, the growth temperature is between 1100deg.C and 1200deg.C, the pressure is 30
Torr-100
Torr, the AlxGa1-xN layer is 1nm-5nm thick, the GaN layer is 1nm-5nm thick, the periodicity is 5-10, the
doping concentration is between 1*1016cm-3 and 1*1018cm-3; there is also a weak n-type doped GaN layer between the high-temperature grown n-GaN layer and InGa1-Yn / GaN multi-
quantum trap layer, where the growth temperature is 1150 deg.C-1200 deg.C, the
growth pressure is 30
Torr-80Torr, and the thickness is 1m-50nm, the
doping concentration is between 1*1016cm-3 and 5*1017cm-3. And it can avoid or reduce V-type defect and
reverse leakage current generated by this.