The application provides an inverse-conducting
insulated gate bipolar transistor and a preparation method thereof, and belongs to the technical field of power
semiconductor devices, and comprises: a first groove is a gate groove, a second groove is an emitter groove, and a third groove is an ineffective gate groove; in the lateral direction parallel to the
cell surface, the first groove, the second groove and the third groove are sequentially and spacedly arranged, and the first groove and the second groove are connected through a fourth groove, and the fourth groove is a gate groove; in the longitudinal direction, the second groove is located between two adjacent fourth grooves. The beneficial effects are as follows: the gate groove and the ineffective gate groove are connected through the lateral gate groove, the forward conduction
voltage drop and the
conduction loss of the device are reduced; the
current channel is increased, the
current distribution is more uniform, the heat loss is reduced, the reliability and the
power density of the device are improved; the emitter groove is used for repeatedly arranging the
polysilicon gate and the
metal gate in the lateral and longitudinal directions, the regularly arranged diodes and Schottky diodes are formed, and the reverse
diode current distribution is more uniform.