This invention provides a bidirectional SCR
electrostatic discharge (ESD) protection device, comprising a P-type substrate, an N-type buried layer, a P-type epitaxial layer, a deep N-type well, a first P-type well, a second P-type well, an N-type well, a high-
voltage N-type well, heavily doped P-type material, a first
shallow trench isolation layer, heavily doped N-type material, a first field
oxygen isolation layer, and a floating field plate. The P-type substrate is located at the bottom layer, and the N-type buried layer is located above the P-type substrate, with their surfaces flush. The P-type epitaxial layer is located above the P-type substrate. The deep N-type well, the first P-type well, the second P-type well, the N-type well, the high-
voltage N-type well, the heavily doped P-type material, and the heavily doped N-type material are all formed within the P-type epitaxial layer via
ion implantation. This invention reduces the device's turn-on
voltage through the floating field plate, and achieves sequential or simultaneous turn-on of different current
discharge paths through two current
discharge paths and the length of the field
oxygen isolation layer, controlling the device's double
hysteresis characteristics to avoid latch-up effects. The centrosymmetric structure increases the longitudinal current, improving the overall current capability of the device.